Radio frequency power supply automatic calibration method and system

Abstract

The invention provides an automatic calibration method and system for a radio frequency power supply, and relates to the technical field of radio frequency power supplies. The method comprises the following steps: acquiring internal detection data and standard detection data of a radio frequency signal; obtaining internal detection data and standard detection data, and calculating a calibration compensation parameter according to the internal detection data and the standard detection data; and correcting the radio frequency power supply data acquired in real time by using the calibration compensation parameter. The method aims at solving the problems that an existing radio frequency power source calibration method is poor in real-time performance, limited in calibration precision, lack of data tracing and intelligentization, high in maintenance cost and the like, automatic calibration of the radio frequency power source can be achieved, limitation of traditional manual calibration is overcome, the real-time performance and precision of calibration are improved, the maintenance cost is reduced, and the calibration efficiency is improved. And a basis is provided for data tracing and intelligent management.

Description

Technical Field

[0001] This invention relates to the field of radio frequency power supply technology, and more specifically, to an automatic calibration method and system for radio frequency power supplies. Background Technology

[0002] As a key piece of equipment in advanced manufacturing processes such as plasma surface treatment, semiconductor etching, thin film deposition, and material modification, the stability and accuracy of the output power of radio frequency (RF) power supplies directly determine the uniformity of the process and the product yield. To ensure process stability, RF power supplies typically require calibration at the factory or in the field to ensure that their output frequency and power match the set values.

[0003] Currently, some high-end RF power supply products abroad have begun to integrate some automated calibration functions, but most rely on external instruments for assistance, such as using high-precision power meters or impedance analyzers for periodic calibration. While this method can improve calibration accuracy to some extent, it is costly, complex to operate, and difficult to achieve continuous online calibration.

[0004] Most domestic RF power supplies still rely on manual testing and periodic correction, with maintenance personnel comparing and adjusting power parameters during downtime or process breaks. However, this method has the following shortcomings: 1. Poor real-time performance: Most RF power supply calibrations can only be completed when the system is stopped or manually intervened, lacking online dynamic compensation capabilities.

[0005] 2. Limited calibration accuracy: Traditional manual methods rely on external measuring instruments and personnel experience, which can easily lead to error accumulation.

[0006] 3. Lack of data traceability and intelligence: Existing calibration methods usually do not record and manage calibration data, making it impossible to achieve long-term trend analysis or automatically recall historical compensation parameters according to different process conditions.

[0007] 4. High maintenance costs: Frequent downtime for inspection and manual maintenance reduces equipment uptime.

[0008] Therefore, how to provide a system that can monitor the output status of RF power supply in real time, automatically calibrate and compensate for output errors, support data traceability and process optimization, and at the same time maintain a simple system structure and controllable cost has become a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0009] The purpose of this invention is to provide an automatic calibration method and system for radio frequency power supplies, which aims to solve the problems existing in the existing radio frequency power supply calibration methods, realize the automatic calibration of radio frequency power supplies, overcome the limitations of traditional manual calibration, improve the real-time performance and accuracy of calibration, reduce maintenance costs, and provide a foundation for data traceability and intelligent management.

[0010] In a first aspect, the present invention provides an automatic calibration method for an RF power supply, applied to an automatic calibration system for an RF power supply, the RF power supply automatic calibration system comprising a host computer, an external standard measurement unit, and an RF power supply, the RF power supply comprising a control unit and an internal detection unit; the automatic calibration method for the RF power supply comprises the following steps: S1. The host computer controls the control unit to drive the radio frequency power supply to output radio frequency signals; S2. The internal detection unit is used to collect internal detection data of the radio frequency signal, and the external standard measurement unit is used to collect standard detection data of the radio frequency signal; S3. Obtain the internal detection data and the standard detection data through the host computer, and calculate the calibration compensation parameters based on the internal detection data and the standard detection data; S4. The calibration compensation parameters are sent to the control unit, and during the operation of the control unit, the calibration compensation parameters are used to correct the real-time acquired radio frequency power data.

[0011] The automatic calibration method for radio frequency power supplies provided by this invention can realize the automatic calibration of radio frequency power supplies, overcome the limitations of traditional manual calibration, improve the real-time performance and accuracy of calibration, reduce maintenance costs, and provide a foundation for data traceability and intelligent management.

[0012] Secondly, the present invention provides an automatic calibration system for an RF power supply, comprising a host computer, an external standard measurement unit, and an RF power supply, wherein the RF power supply includes a control unit and an internal detection unit; and further comprising: The control module is used to control the control unit via the host computer to drive the radio frequency power supply to output radio frequency signals; The acquisition module is used to acquire internal detection data of the radio frequency signal using the internal detection unit, and to acquire standard detection data of the radio frequency signal using the external standard measurement unit; The calculation module is used to acquire the internal detection data and the standard detection data through the host computer, and calculate the calibration compensation parameters based on the internal detection data and the standard detection data; The correction module is used to send the calibration compensation parameters to the control unit, and to correct the real-time acquired radio frequency power data using the calibration compensation parameters during the operation of the control unit.

[0013] As described above, the automatic RF power supply calibration method provided by this invention controls the RF power supply to output RF signals via a host computer, and simultaneously collects internal detection data and external standard detection data. Subsequently, the host computer calculates calibration compensation parameters based on these data and sends the parameters to the RF power supply's control unit, correcting the real-time collected RF power supply data during operation. This method effectively solves the problems of poor real-time performance, limited accuracy, lack of data traceability and intelligence, and high maintenance costs in existing RF power supply calibration technologies. Through an automated calibration process, this application can achieve stability and accuracy in the output power of the RF power supply, avoiding the accumulation of errors and downtime maintenance associated with manual calibration, significantly improving equipment uptime and process uniformity, and providing reliable RF power supply assurance for advanced manufacturing processes such as semiconductor etching and thin film deposition.

[0014] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing embodiments of the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. Attached Figure Description

[0015] Figure 1 This is a flowchart of an automatic radio frequency power supply calibration method provided in an embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram of an automatic radio frequency power supply calibration system provided in an embodiment of the present invention.

[0017] Label Explanation: 100. Control module; 200. Acquisition module; 300. Calculation module; 400. Correction module. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0019] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this invention, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0020] In traditional RF power supply calibration technologies, the calibration process typically cannot be performed dynamically during equipment operation. Poor real-time performance means calibration can only be performed during downtime or process breaks, resulting in the inability to promptly correct deviations in output parameters during the process. Furthermore, calibration accuracy is limited by the precision of external measuring instruments and the operator's experience, leading to the accumulation of measurement errors and increased deviations between output power and set values. In addition, calibration operations rely on manual intervention, lacking automation, and calibration data is not systematically recorded and managed, hindering data traceability and process optimization. These issues collectively impact process uniformity and product yield, reducing equipment uptime.

[0021] For example, in semiconductor etching processes, radio frequency (RF) power supplies are used to generate plasma for material removal. When the plasma load fluctuates due to changes in process conditions, the output frequency and power of the RF power supply may deviate from the set values. However, existing calibration methods require equipment shutdown, with maintenance personnel using an external power meter for measurement and adjustment. During this process, inconsistencies arise due to the unstable calibration status of the external instrument and the operator's subjective judgment; furthermore, the calibration data is not stored, making it impossible to retrieve historical compensation parameters in subsequent processes, resulting in repeated calibration operations each time and impacting production continuity.

[0022] If the above problems are not addressed, untimely calibration will lead to continuous deviations in process parameters, causing product defects; insufficient calibration accuracy will cause output power fluctuations, affecting process stability; lack of data traceability makes fault diagnosis and process optimization lack a basis; frequent shutdowns for calibration increase maintenance burden and reduce production efficiency. These problems combined lead to decreased system reliability and difficulty in ensuring product consistency.

[0023] For reference, see the appendix. Figure 1 This invention provides an automatic calibration method for an RF power supply, applied to an automatic calibration system for an RF power supply. The automatic calibration system includes a host computer, an external standard measurement unit, and an RF power supply. The RF power supply includes a control unit and an internal detection unit. The automatic calibration method for the RF power supply includes the following steps: S1. The host computer controls the control unit to drive the RF power supply to output RF signals; S2. The internal detection unit is used to collect internal detection data of the radio frequency signal, and the external standard measurement unit is used to collect standard detection data of the radio frequency signal; S3. Obtain internal test data and standard test data through the host computer, and calculate calibration compensation parameters based on the internal test data and standard test data; S4. Send the calibration compensation parameters to the control unit, and use the calibration compensation parameters to correct the real-time acquired RF power data during the operation of the control unit.

[0024] For ease of understanding, the following explains some key terms in this embodiment: RF Power Supply Automatic Calibration System: This system is a comprehensive hardware and software platform whose main function is to automate and calibrate the output parameters of the RF power supply with high precision. Through preset programs and algorithms, the system can detect, compare, calculate, and correct key parameters of the RF power supply, such as voltage, current, and phase, without frequent manual intervention, thereby ensuring the stability and accuracy of the RF power supply under various operating conditions. The system typically consists of a host computer, an external standard measurement unit, and the RF power supply, which also includes a control unit and an internal detection unit.

[0025] Host computer: As the core control and interaction platform of the RF power supply automatic calibration system, the host computer is typically a computer running specific software. Its main function is to provide a user interface, allowing users to configure calibration parameters, initiate the calibration process, monitor the calibration status, record calibration data, and perform data analysis and result export. The host computer exchanges data and transmits commands with the RF power supply control unit and external standard measurement units through a communication interface, achieving centralized management and coordination of the entire calibration process.

[0026] External Standard Measurement Unit: This unit is a high-precision reference device in the RF power supply automatic calibration system, used to provide true and accurate measurement data of the RF signal. The external standard measurement unit typically employs high-precision voltage / current / phase sensors or power meters. Its measurement results are considered "standard detection data" and are compared with the "internal detection data" collected by the RF power supply's internal detection unit to calculate calibration compensation parameters. The accuracy of the external standard measurement unit directly affects the final calibration effect of the entire calibration system.

[0027] Radio Frequency (RF) Power Supply: An RF power supply is a device that generates and outputs radio frequency (RF) signals, widely used in plasma processing, semiconductor manufacturing, and other fields. In automatic calibration systems, the RF power supply is the object being calibrated; its output RF signal parameters (such as voltage, current, phase, and power) need to be precisely controlled and calibrated. The RF power supply integrates a control unit and an internal detection unit to monitor and regulate its own operating status.

[0028] Control Unit: As the "brain" of the RF power supply, the control unit is responsible for receiving instructions from the host computer and driving the RF power supply to output RF signals according to these instructions. Simultaneously, the control unit is also responsible for processing data collected by the internal detection unit and, upon receiving calibration compensation parameters, using these parameters to correct the real-time acquired RF power supply data to ensure that the RF power supply output meets the set requirements. The control unit is typically implemented using a high-performance processor such as a DSP (Digital Signal Processor) or FPGA (Field-Programmable Gate Array) and has EEPROM or other memory for storing calibration compensation parameters.

[0029] Internal Detection Unit: This unit is an internal module within the RF power supply used to monitor its own output RF signal parameters in real time. The internal detection unit typically includes voltage and current sampling circuits, capable of acquiring internal voltage and current detection values ​​of the RF signal and reporting this "internal detection data" to the control unit or host computer. While the measurement accuracy of the internal detection unit may be lower than that of external standard measurement units, its advantage lies in its ability to achieve continuous, real-time online monitoring.

[0030] Calibration compensation parameters: These are a set of correction values ​​calculated based on internal and standard test data. These parameters quantify the deviation between the internal testing unit and the external standard measurement unit of the RF power supply, and guide the control unit in adjusting the output data of the RF power supply. Calibration compensation parameters typically include voltage calibration coefficients, current calibration coefficients, and phase compensation coefficients, which accurately correct the output voltage, output current, and output phase of the RF power supply.

[0031] This application proposes an automatic calibration method for radio frequency (RF) power supplies. This method is applied to an automatic calibration system for RF power supplies, which includes a host computer, an external standard measurement unit, and an RF power supply. The RF power supply includes a control unit and an internal detection unit.

[0032] In one embodiment, the automatic radio frequency power supply calibration method includes the following steps: First, the host computer controls the control unit to drive the RF power supply to output RF signals. For example, the host computer can send a command to the control unit, instructing the RF power supply to output RF signals at a specific frequency and power. Upon receiving the command, the control unit will activate the RF output module of the RF power supply, enabling it to generate and output RF signals. In practical applications, the host computer can communicate with the control unit via a serial port, CAN interface, or Ethernet port, for example, using the Modbus protocol for data exchange. After receiving the command, the control unit will enter calibration mode and prepare for RF output.

[0033] Next, internal detection data of the RF signal is acquired using an internal detection unit, while standard detection data of the RF signal is acquired using an external standard measurement unit. For example, when the RF power supply outputs an RF signal, its internal voltage and current sampling circuits monitor the voltage and current of the output signal in real time and report these internal detection data (such as internal voltage and current detection values). Simultaneously, an external standard measurement unit (such as a high-precision voltage / current / phase sensor) also synchronously acquires the voltage, current, and phase data of the RF signal as standard detection data. These two data acquisition methods can be performed in parallel to ensure that internal and external measurement results are obtained at the same time.

[0034] Subsequently, the host computer acquires internal and standard test data, and calculates calibration compensation parameters based on these data. For example, the host computer obtains internal test data from the control unit and standard test data from an external standard measurement unit. The host computer software compares these two sets of data and calculates calibration compensation parameters such as voltage calibration coefficient, current calibration coefficient, and phase compensation coefficient according to a preset algorithm (e.g., least squares method). These parameters reflect the deviation between the internal test data of the RF power supply and the external standard.

[0035] Finally, the calibration compensation parameters are sent to the control unit, and during the operation of the control unit, these parameters are used to correct the real-time acquired RF power supply data. For example, the host computer writes the calculated calibration compensation parameters (such as voltage and current fitting coefficients, and phase compensation coefficients) into the control unit's EEPROM via the communication interface. During normal operation of the RF power supply, the control unit acquires the RF power supply's output data (such as output voltage, output current, output voltage phase, and output current phase) in real time and uses the stored calibration compensation parameters to correct this real-time data, thereby ensuring the output accuracy of the RF power supply.

[0036] The following example will provide a more detailed explanation of the above technical solution: In a semiconductor etching process, an RF power supply is required to provide extremely stable and precise RF power. However, after prolonged operation, the internal detection unit of a conventional RF power supply may drift, causing a deviation between the displayed output power and the actual output power, thus affecting the uniformity and yield of the etching process. Manual calibration requires downtime, consuming significant time and manpower, and its accuracy is limited by manual operation and the precision of external instruments.

[0037] To address these issues, this application proposes an automatic calibration method for radio frequency (RF) power supplies. Specifically, this method is applied to an automatic calibration system for RF power supplies, which includes a host computer, an external standard measurement unit (e.g., a high-precision VI sensor), and an RF power supply. The RF power supply internally contains a control unit (e.g., a DSP) and an internal detection unit.

[0038] At the start of calibration, User A selects the serial port in the host computer software to establish Modbus communication with the RF power control unit, and simultaneously establishes a connection with the external standard measurement unit via USB or Ethernet. User A sets the VGA range, sampling interval, and maximum output power for calibration in the host computer interface, and then clicks the "Start Calibration" button.

[0039] After receiving the instruction, the host computer sends a calibration command to the control unit via the Modbus protocol. Upon receiving the command, the control unit enters calibration mode and drives the RF power supply to output RF signals. For example, the RF power supply will output RF signals sequentially according to a preset power level sequence (e.g., from low power to high power).

[0040] When the RF power supply outputs an RF signal, the internal detection unit collects internal detection data of the RF signal in real time, such as internal voltage and current detection values, and reports this data to the control unit. Simultaneously, the external standard measurement unit also collects standard detection data of the RF signal, such as standard voltage, standard current, and phase data. The host computer acquires these two sets of data in real time and records the frequency, voltage, current, phase, temperature, and power information of all sampling points.

[0041] Subsequently, the host computer calculates calibration compensation parameters based on the acquired internal detection data and standard detection data. For example, the host computer associates the internal voltage detection values ​​and standard voltage detection values ​​at the same power level as voltage data pairs, and associates the internal current detection values ​​and standard current detection values ​​as current data pairs. Then, it uses the least squares method to perform linear fitting calculations on the voltage and current data pairs at multiple power levels to determine the voltage calibration coefficients (including gain and bias coefficients) and current calibration coefficients (including gain and bias coefficients). Simultaneously, the host computer also calculates the average phase value based on the internal voltage and current detection values, and calculates the phase compensation coefficient based on the average phase value.

[0042] After calibration, the host computer writes the calculated voltage and current fitting coefficients and phase compensation coefficients into the control unit's EEPROM in single-precision floating-point format. During normal operation of the RF power supply, the control unit acquires raw voltage sampling data, raw current sampling data, raw voltage phase sampling data, and raw current phase sampling data in real time. The control unit uses the stored voltage and current calibration coefficients to correct the raw voltage and current sampling data, obtaining the corrected output voltage and output current values. Simultaneously, the control unit also corrects the output voltage or output current phase according to the phase compensation coefficient to ensure that the output voltage and output current phases are completely in phase. In this way, the output power of the RF power supply (…) ,in, For output power, For output current, For output voltage, (For phase) can be accurately calibrated and corrected to ensure that it is highly consistent with the set value.

[0043] As can be seen from the above examples, the automatic calibration method for RF power supplies in this application achieves automated and high-precision calibration of RF power supply output parameters through the close cooperation of the host computer, external standard measurement unit, RF power supply and its internal control and detection units. Compared with traditional manual calibration methods, this application requires no manual intervention, avoids downtime and complex operations, and significantly improves the real-time performance and efficiency of calibration. For example, in the aforementioned semiconductor etching process, the RF power supply can be calibrated online without interrupting the process, ensuring the continuity and stability of the process. In addition, by combining internal detection data and external standard detection data to calculate calibration compensation parameters, this application can effectively eliminate inherent system deviations, significantly improve calibration accuracy, and solve the problem of limited accuracy in traditional methods. The automatic calculation and storage of calibration compensation parameters also provides a foundation for subsequent data traceability and process optimization, realizing intelligent management. This overall technical concept not only solves the problems of poor real-time performance, low accuracy, and lack of intelligence in existing technologies, but also significantly improves the performance and reliability of RF power supplies and reduces maintenance costs through automated processes and data-driven correction mechanisms, making a significant technical contribution.

[0044] In some embodiments, the specific steps in step S1 include: S11. Control the host computer to send a sequence of test commands containing multiple preset power levels to the control unit; S12. Based on the test command sequence, the control unit controls the RF power supply to output RF signals corresponding to each preset power level in sequence; The specific steps in step S2 include: S21. When the RF power supply outputs RF signals at each preset power level, it triggers the internal detection unit and the external standard measurement unit to synchronously perform data acquisition operations to obtain multiple sets of internal detection data and standard detection data corresponding to different power levels.

[0045] The host computer is a computing device used for human-computer interaction and system control. It can be a personal computer (PC), an industrial control computer (IPC), or a dedicated test console. The host computer is typically equipped with a graphical user interface (GUI) to allow users to configure parameters, control calibration processes, record data, and display results. The control unit is the core processing module inside the RF power supply, responsible for receiving instructions from the host computer, managing the RF power supply's output, and processing internal test data. This control unit can be implemented using a digital signal processor (DSP), a field-programmable gate array (FPGA), or a high-performance microcontroller (MCU), capable of precisely controlling the RF power supply's operating state based on received instructions. The test instruction sequence is a set of instructions sent from the host computer to the control unit, its core being the inclusion of multiple preset power level information. This sequence can be a data packet encapsulating a list of power values ​​to be tested, such as multiple discrete points from low to high power; or a configuration file defining the power range and step interval. The process of the host computer sending the test instruction sequence to the control unit can be achieved through various communication interfaces. For example, serial communication interfaces (such as RS-232, RS-485), Ethernet interfaces, or CAN bus interfaces can be used. These interfaces ensure accurate transmission of commands and correct reception by the control unit. The RF power supply is a device that generates and outputs RF signals; its output power and frequency are adjustable. During calibration, the RF power supply adjusts its internal power amplifier and matching network according to the control unit's instructions to output RF signals at specific power levels. The RF power supply outputs RF signals of corresponding power levels sequentially according to the preset power levels in the test command sequence. This ordered output method ensures the systematic and repeatable nature of the calibration process, avoiding the confusion of calibration data that might result from random output. The internal detection unit is a module integrated within the RF power supply for real-time monitoring of its own output parameters. It may include built-in voltage and current sampling circuits, converting analog signals to digital signals via an analog-to-digital converter (ADC) to obtain internal voltage and current detection values ​​for the RF signal; or it may be an integrated power detection module. The external standard measurement unit is a high-precision measurement device independent of the RF power supply, used to provide reference standard values ​​for the RF signal. It can be a high-precision RF power meter, a VISensor integrating voltage, current, and phase measurement functions, or a vector network analyzer. Synchronous data acquisition refers to the internal detection unit and the external standard measurement unit simultaneously acquiring data at the same point in time or within a very short time window when the RF power supply outputs an RF signal of a specific power level.This synchronization mechanism can be implemented through hardware trigger signals, such as a synchronization pulse issued by the control unit simultaneously triggering both measurement units; or it can be coordinated through software, such as the host computer immediately sending acquisition commands to the two measurement units after issuing a power setting command, and using timestamps for data alignment. By synchronously acquiring data at multiple preset power levels, a series of paired internal test data and standard test data can be obtained. These data sets cover the performance of the RF power supply under different operating conditions, providing a comprehensive and reliable data foundation for subsequent calculation of calibration compensation parameters.

[0046] This method effectively solves the aforementioned problems by refining the output and data acquisition process of RF signals. Specifically, in the automatic calibration method for RF power supplies, the host computer first sends a sequence of test commands containing multiple preset power levels to the control unit. This sequence specifies in detail the power points that the RF power supply needs to output sequentially during the calibration process. After receiving this command sequence, the control unit precisely controls the RF power supply to output RF signals corresponding to each preset power level one by one, according to the order defined in the sequence. When the RF power supply outputs an RF signal at each specific power level, the system synchronously triggers the internal detection unit and the external standard measurement unit to perform data acquisition operations. This means that at each operating point of the RF power supply, the internal detection unit will collect the internal detection data of the RF signal in real time, while the external standard measurement unit will simultaneously collect the standard detection data of the RF signal. In this way, the system can obtain multiple sets of internal detection data and standard detection data corresponding to different power levels, and these data are strictly aligned in time. This working mechanism makes the calibration process no longer limited to a single power point, but can cover the entire operating range of the RF power supply, thereby ensuring the comprehensiveness of the calibration. Meanwhile, the synchronous acquisition mechanism between the internal detection unit and the external standard measurement unit effectively avoids measurement errors caused by time asynchrony, greatly improving the accuracy and consistency of data acquisition. In this way, this method provides a more reliable and comprehensive data foundation for subsequent accurate calculation of calibration compensation parameters, thereby enabling the automatic calibration of RF power supplies to achieve higher accuracy and wider applicability.

[0047] As a specific implementation method, the above-mentioned technical means can be implemented with reference to the following example. At the start of calibration, the user can set a series of power levels to be calibrated through the host computer software interface, for example, setting a power level list from 10W to 1000W in 100W increments. The host computer encapsulates this power level information into a test command sequence and sends it to the DSP control unit inside the RF power supply via the Modbus protocol through the serial port. After receiving the command sequence, the DSP control unit will adjust the gain control module (VGA) of the RF power supply sequentially according to the power values ​​in the sequence, so that it outputs the RF signal of the corresponding power level. For example, first output a 10W RF signal, and after stabilization, output a 110W RF signal, and so on. After the RF power supply outputs the RF signal of each power level and stabilizes, the DSP control unit will immediately issue a synchronous trigger signal. This trigger signal, on the one hand, activates the voltage / current sampling circuit (i.e., the internal detection unit) inside the RF power supply to collect data, and on the other hand, synchronously triggers the externally connected high-precision VISensor (i.e., the external standard measurement unit) to collect data via the USB or Ethernet interface. In this way, when the RF power supply outputs various power levels such as 10W and 110W, both the internal detection unit and the external standard measurement unit can simultaneously acquire the corresponding voltage, current, and other detection data. These paired data are then transmitted to the host computer for subsequent calibration and compensation parameter calculations.

[0048] Through the above technical solution, this method effectively solves the problems of insufficient calibration range and asynchronous data acquisition in traditional calibration methods. By performing RF signal output and data acquisition at multiple preset power levels, the calibration process can cover the actual operating range of the RF power supply, thereby ensuring the comprehensiveness and accuracy of the calibration and enabling the RF power supply to maintain high-precision output under different loads and power settings. Furthermore, the synchronous data acquisition mechanism of the internal detection unit and the external standard measurement unit eliminates measurement errors caused by time differences, significantly improving the reliability and consistency of the acquired data, and providing a solid data foundation for the accurate calculation of subsequent calibration compensation parameters. This not only improves the overall calibration accuracy of the RF power supply but also enhances its stability and reliability in complex industrial applications, thereby improving process uniformity and product yield.

[0049] In some embodiments, the internal detection data includes internal voltage detection values ​​and internal current detection values; the standard detection data includes standard voltage detection values ​​and standard current detection values; and the calibration compensation parameters include voltage calibration coefficients, current calibration coefficients, and phase compensation coefficients. The specific steps in step S3 include: S31. Associate the internal voltage detection value and the standard voltage detection value under the same power level as a voltage data pair, and associate the internal current detection value and the standard current detection value under the same power level as a current data pair; S32. Use the least squares method to perform linear fitting calculations on voltage and current data pairs at multiple power levels respectively; S33. Based on the results of the linear fitting calculation, determine the voltage calibration coefficient and the current calibration coefficient; both the voltage calibration coefficient and the current calibration coefficient include the gain coefficient and the bias coefficient. S34. Determine the phase compensation coefficient based on the internal voltage detection value and the internal current detection value.

[0050] Internal voltage and current detection values ​​refer to the digital representations of voltage and current signals acquired in real time by the integrated data acquisition module within the RF power supply. These values ​​reflect the output characteristics of the RF power supply under operating conditions, but may contain certain systematic errors or nonlinearities. Their function is to provide the RF power supply with its own perception data of the output signal, serving as the basis for calibration. Standard voltage and current detection values ​​refer to the results of measurements taken on the RF signal output by the RF power supply using external, high-precision, traceable calibrated measuring equipment. These values ​​are considered true or reference values ​​and are used to evaluate the accuracy of the internal detection data. Their function is to provide a reliable benchmark for comparison with the internal detection data, thereby quantifying the error of the internal detection.

[0051] The voltage calibration coefficient in the calibration compensation parameters is used to correct the deviation between the voltage value detected internally by the RF power supply and the actual voltage value. This coefficient typically includes two parts: gain (proportion) and bias (offset) to handle linearity errors. For example, it can be a multiplication factor and an additive constant, making the corrected internal voltage value closer to the standard voltage value. The current calibration coefficient is used to correct the deviation between the current value detected internally by the RF power supply and the actual current value. Similar to the voltage calibration coefficient, it also typically includes two parts: gain and bias to handle linearity errors. For example, it can be a multiplication factor and an additive constant, making the corrected internal current value closer to the standard current value. The phase compensation coefficient is used to correct the phase difference between the voltage and current signals detected internally by the RF power supply. In RF power measurement, the phase relationship between voltage and current is crucial; inaccurate phase can lead to power calculation errors. This coefficient aims to adjust or compensate for this phase deviation, ensuring that the voltage and current signals are in phase or reach an ideal state. For example, it can be a correction amount for adjusting the phase angle or a factor for correcting the power factor.

[0052] Sub-step S31 establishes the correspondence between internal detection data and external standard data. Correlation within the same power level ensures the effectiveness and accuracy of the comparison, as the output characteristics of RF power supplies may differ at different power levels. This correlation can be direct data pairing, such as using the internal voltage value as the independent variable and the standard voltage value as the dependent variable; or it can be stored in the same data structure for subsequent batch processing. Sub-step S32 identifies the best-fitting linear relationship between the internal and standard detection values. Least squares is a commonly used mathematical optimization technique that finds the best-fit curve by minimizing the sum of squared errors. For voltage data pairs, it uses the internal voltage detection value as input and the standard voltage detection value as output to fit a straight line; the same fitting is performed for current data pairs. This method effectively eliminates the influence of random errors and quantifies the systematic linear deviation of internal detection. Besides least squares, other regression analysis methods, such as weighted least squares or robust regression, can be used to adapt to different data characteristics and error distributions. Sub-step S33 transforms the linear fitting results obtained in sub-step S32 into specific calibration parameters. Linear fitting typically yields a straight line with a slope (gain coefficient) and an intercept (bias coefficient). The gain coefficient reflects the proportional relationship between the internal detected value and the standard value, while the bias coefficient reflects a fixed offset between the two. By determining these two coefficients, a linear model can be constructed to correct the internal detected data, making it closer to the true value. For example, if the fitted equation is y=kx+b, then k is the gain coefficient and b is the bias coefficient. Substep S34 calculates the parameters used to correct the phase difference between voltage and current. Phase difference is a key factor in RF power measurement, directly affecting the accuracy of power calculation. By analyzing the internal voltage and current detected values, the actual phase relationship between them can be calculated, and a compensation coefficient can be determined to eliminate or reduce this phase error. For example, the power factor can be calculated based on the instantaneous or effective values ​​of voltage and current and their phase angle, and the phase compensation coefficient can be determined accordingly. Alternatively, the phase spectrum of the voltage and current signals can be analyzed using signal processing methods such as Fourier transform to determine the phase compensation amount.

[0053] The automatic calibration method for RF power supplies in this application, based on the principle of a host computer controlling the RF power supply to output RF signals and simultaneously acquiring internal and standard detection data of the RF signals using an internal detection unit and an external standard measurement unit, further refines the calculation process of calibration compensation parameters. This method first clarifies that the internal and standard detection data respectively include internal voltage detection values, internal current detection values, and standard voltage and current detection values, and defines the calibration compensation parameters as consisting of voltage calibration coefficients, current calibration coefficients, and phase compensation coefficients. This refinement of data and parameters makes the calibration process more targeted. During the data acquisition phase, when the RF power supply outputs RF signals at multiple preset power levels, the internal detection unit and the external standard measurement unit simultaneously acquire data, ensuring consistency between internal and standard data at different operating points. Subsequently, when calculating the calibration compensation parameters, this method associates the internal voltage detection values ​​and standard voltage detection values ​​at the same power level as voltage data pairs, and associates the internal current detection values ​​and standard current detection values ​​as current data pairs. This precise data association method lays the foundation for subsequent error analysis. Next, the least squares method is used to perform linear fitting calculations on voltage and current data pairs at multiple power levels. The least squares method can extract the best-fitting linear relationship between internal detection and standard detection from multiple sets of data, effectively filtering out random noise and thus accurately quantifying the gain and bias errors of the internal detection. Based on the linear fitting results, voltage and current calibration coefficients, including gain and bias coefficients, can be determined. These coefficients directly reflect the linear deviation of the internal voltage and current detection. Furthermore, this method also determines phase compensation coefficients based on the internal voltage and current detection values, specifically to address the phase mismatch problem between voltage and current signals, which is crucial for accurate RF power calculation. Through these steps, this method can comprehensively and accurately calculate the compensation parameters for voltage, current, and phase errors of the RF power supply's internal detection. These parameters are used by the control unit in real-time to correct the internally acquired RF power supply data during subsequent operation of the RF power supply, thereby significantly improving the stability and accuracy of the RF power supply's output power.

[0054] Specifically, the specific steps in step S32 include: Linear fitting calculations are performed using the following formula: ; ; in, This is the result of a linear fit of the voltage data pairs. Indicates about and The sum of squared residuals reaches its minimum value. For the total number of voltage data pairs, This represents the standard voltage detection value in the voltage data pair corresponding to the i-th sampling point. This refers to the gain coefficient in the voltage calibration coefficient. This represents the internal voltage detection value in the voltage data pair corresponding to the i-th sampling point. This is the bias coefficient in the voltage calibration coefficient. This represents the linear fitting result for the current data pairs. Indicates about and The sum of squared residuals reaches its minimum value. For the total number of current data pairs, This represents the standard current detection value in the current data pair corresponding to the i-th sampling point. This refers to the gain coefficient in the current calibration coefficient. This represents the internal current detection value in the current data pair corresponding to the i-th sampling point. This is the bias coefficient in the current calibration coefficient.

[0055] Specifically, the specific steps in step S33 include: The voltage calibration factor is determined using the following formula: ; ; The current calibration factor is determined using the following formula: ; .

[0056] In some embodiments, the specific steps in step S34 further include: S341. Calculate the average phase value based on the internal voltage detection value and the internal current detection value; S342. Calculate the phase compensation coefficient based on the average phase value.

[0057] The calculation of the average phase value based on internal voltage and current detection values ​​involves extracting phase-related information from multiple sets of voltage and current data collected by the internal detection unit of the RF power supply, and performing statistical processing to obtain a representative phase value. The internal voltage and current detection values ​​are real-time voltage and current data of the RF signal collected by the internal detection unit of the RF power supply. These data can be instantaneous sampled values ​​or effective values ​​after root mean square (RMS) processing. The average phase value can be calculated in various ways, such as by performing arithmetic averaging, weighted averaging, or median filtering on a series of instantaneous phase values, aiming to eliminate the influence of random noise and instantaneous fluctuations on the phase calculation, thereby obtaining a more stable and representative phase reference. The calculation of the phase compensation coefficient based on the average phase value refers to determining a parameter used to correct the output phase of the RF power supply based on the stable average phase value obtained above. This compensation coefficient can be a direct phase difference or a correction factor transformed by a specific function. For example, it can be a compensation factor that has a linear or non-linear relationship with the average phase value, used to adjust the phase of the output signal in subsequent operation to make it closer to the ideal state (e.g., voltage and current are completely in phase).

[0058] The operating principle of this scheme is as follows: the RF power supply control unit drives the RF power supply to output RF signals under the instructions of the host computer, while the internal detection unit and the external standard measurement unit synchronously acquire the internal detection data and standard detection data of the RF signal. When calculating calibration compensation parameters, for phase compensation, this scheme no longer relies on the internal voltage and current detection values ​​at a single moment or a single sampling point to directly determine the phase compensation coefficient. Instead, this scheme processes multiple internal voltage and current detection values ​​to calculate an average phase value. This average phase value integrates data from multiple sampling points or multiple measurement cycles, effectively smoothing the effects of instantaneous noise and sampling fluctuations, making the obtained phase information more representative and stable. Subsequently, based on this more stable and accurate average phase value, the corresponding phase compensation coefficient is calculated. This phase compensation coefficient can more accurately reflect the overall deviation between the RF power supply output phase and the ideal phase. In this way, this scheme avoids calibration errors caused by instantaneous data fluctuations, ensuring the accuracy and reliability of the phase compensation coefficient. This calculation method based on the average phase value enables the RF power supply to achieve more stable and accurate phase calibration when using the compensation coefficient to correct the real-time RF power supply data during subsequent operation, thereby improving the overall stability and accuracy of the RF power supply output.

[0059] Specifically, the specific steps in step S341 include: The average phase value is calculated using the following formula: ; ; in, The average phase value, The total number of sampling points. Let i be the phase relative value of the i-th sampling point. Let be the vector sum of the current and voltage at the i-th sampling point.

[0060] Specifically, the steps in step S342 include: The phase compensation coefficient is calculated using the following formula: ; in, This is the phase compensation coefficient.

[0061] In some embodiments, the radio frequency power data includes the output voltage, output current, output voltage phase, and output current phase of the radio frequency power supply; The specific steps in step S4 include: S41. Acquire real-time raw voltage sampling data, raw current sampling data, raw voltage phase sampling data, and raw current phase sampling data; S42. Based on the original voltage sampling data, the output voltage is corrected according to the gain coefficient and bias coefficient in the voltage calibration coefficient to obtain the corrected output voltage value (that is, the current output voltage is adjusted to the corrected output voltage value). Specifically, the corrected output voltage value is calculated according to the following formula: ; in, This is the corrected output voltage value. This refers to the original voltage sample value in the original voltage sampling data; S43. Based on the original current sampling data, the output current is corrected according to the gain coefficient and bias coefficient in the current calibration coefficient to obtain the corrected output current value (i.e., the current output current is adjusted to the corrected output current value). Specifically, the corrected output current value is calculated according to the following formula: ; in, The corrected output current value. This refers to the original current sample value in the original current sampling data; S44. Based on the phase compensation coefficient, correct the output voltage phase to obtain the corrected output voltage phase value (i.e., adjust the current output voltage phase to the corrected output voltage phase value), or correct the output current phase to obtain the corrected output current phase value (i.e., adjust the current output current phase to the corrected output current phase value), so that the output voltage phase and the output current phase are completely in phase. Specifically, calculate the corrected output voltage phase value according to the following formula: ; in, The corrected output voltage phase value. These are the original voltage phase sample values ​​from the original voltage phase sample data. This represents the phase relative value of the nth sampling point; The corrected output current phase value is calculated using the following formula: ; in, This is the corrected output current phase value. This refers to the original current phase sample value in the original current phase sample data.

[0062] First, real-time raw voltage sampling data, raw current sampling data, raw voltage phase sampling data, and raw current phase sampling data are acquired. RF power supply data refers to the set of electrical characteristic parameters exhibited at the output of the RF power supply during actual operation. These data are key indicators for evaluating the operating status and performance of the RF power supply. Output voltage and output current are the fundamental quantities of energy provided by the RF power supply, usually expressed in RMS form, reflecting the power output capability of the power supply. Output voltage phase and output current phase describe the relative time relationship between the voltage and current waveforms, which is crucial for RF power transmission and load matching. These data can be acquired in real-time through sensors inside the RF power supply or external measuring devices and serve as the basis for subsequent calibration and correction. Acquiring real-time raw voltage sampling data, raw current sampling data, raw voltage phase sampling data, and raw current phase sampling data aims to obtain the uncorrected raw output data of the RF power supply under its current operating state. Real-time acquisition means that data acquisition is continuous or performed at a high frequency to reflect instantaneous changes in the RF power supply output. Raw voltage and current sampling data are typically obtained by converting analog signals into digital signals using an analog-to-digital converter (ADC) in the internal sensing unit, representing the instantaneous or RMS values ​​of voltage and current. Raw voltage and current phase sampling data reflect the phase information of the voltage and current waveforms, which can be extracted from the raw waveforms using zero-point detection, phase comparators, or digital signal processing (DSP) techniques. This step forms the basis for subsequent corrections, ensuring that the correction process is based on the latest and most accurate power supply output state.

[0063] Secondly, based on the original voltage sampling data, the output voltage is corrected according to the gain coefficient and bias coefficient in the voltage calibration coefficient, resulting in a corrected output voltage value. This step is used to linearly correct the output voltage of the RF power supply to eliminate systematic errors in voltage measurement by the internal detection unit. The gain coefficient and bias coefficient in the voltage calibration coefficient are pre-calculated through the calibration process; they characterize the linear relationship between the measured value and the true value of the internal detection unit. By multiplying the original voltage sampling value by the gain coefficient and adding the bias coefficient, a corrected output voltage value closer to the true value can be obtained. This linear correction method can effectively compensate for measurement deviations caused by factors such as sensor nonlinearity and amplifier drift, improving the accuracy of voltage measurement.

[0064] Next, based on the original current sampling data, the output current is corrected according to the gain and bias coefficients in the current calibration coefficients to obtain the corrected output current value. Similar to voltage correction, this step is used to linearly correct the output current of the RF power supply. The gain and bias coefficients in the current calibration coefficients are also pre-calculated through the calibration process and are used to describe the linear model of the current measurement error of the internal detection unit. By multiplying the original current sampling value by the gain coefficient and adding the bias coefficient, the corrected output current value can be obtained. This correction method can compensate for system errors introduced by the current sensor, sampling circuit, and other components, ensuring the accuracy of current measurement, thereby providing reliable data for subsequent power calculation and control.

[0065] Finally, based on the phase compensation coefficient, the output voltage phase is corrected to obtain the corrected output voltage phase value, or the output current phase is corrected to obtain the corrected output current phase value, so that the output voltage phase and output current phase are completely in phase. This step is crucial for achieving complete in-phase output voltage and current of the RF power supply. The phase compensation coefficient is calculated in advance through the calibration process, reflecting the inherent phase deviation between the voltage and current sensing channels inside the RF power supply. By combining the original voltage phase sample value or the original current phase sample value with the phase compensation coefficient and the phase relative value of the nth sampling point, the phase value can be dynamically adjusted. The correction logic here is to introduce a term related to the phase compensation coefficient to make the corrected voltage phase and current phase tend to be consistent, ideally achieving complete in-phase (i.e., ...). This correction effectively eliminates voltage and current phase differences caused by circuit delays, sensor response variations, etc., ensuring that the RF power supply can achieve the optimal power factor when transmitting power to the load, thereby improving power transmission efficiency and stability.

[0066] The above technical solution, closely integrated with the previous steps of calculating calibration compensation parameters, forms a complete closed-loop calibration and correction system. The calibration compensation parameters (including voltage calibration coefficient, current calibration coefficient, and phase compensation coefficient) are calculated using methods such as least squares, by synchronously acquiring data from internal detection units and external standard measurement units when the RF power supply outputs RF signals at multiple preset power levels. These parameters accurately characterize the deviation between the internal detection and the actual output of the RF power supply. This solution, during normal operation of the RF power supply, applies these pre-calculated calibration compensation parameters to the real-time acquired RF power supply data, dynamically correcting the output voltage, output current, and phase. This real-time correction mechanism enables the RF power supply output to continuously maintain high accuracy and stability, effectively solving the problems of poor real-time performance and limited accuracy in traditional calibration methods. Especially in ensuring voltage and current in-phase operation, it significantly improves the overall performance and reliability of the RF power supply.

[0067] In practical applications, after calibration, it is necessary to verify whether the calibrated parameters can meet the accuracy requirements of the device's power output. For example, the impedance matching and system efficiency can be evaluated by calculating the forward power and reflected power, and the calibration accuracy can be verified by calculating the power error.

[0068] Specifically, the forward power is calculated using the following formula. : ; Calculate the reflected power using the following formula. : ; Calculate the power error using the following formula. : ; in, Measure power for VI SENSOR, To set the power.

[0069] In addition, after power verification, users can export and save the data. The calibration process is fully automated; users only need to configure parameters and click start. Comparison of external high-precision sensor measurements with internal detection calculations ensures calibration accuracy. VGA gain adjustment guarantees the dynamic range and measurement accuracy of the sampled data. EEPROM storage ensures parameter persistence, saving calibration results even after power failure. Upon device startup, the controller DSP automatically reads calibration coefficients from the EEPROM and compensates the sampled data in real time.

[0070] Reference Appendix Figure 2 This invention provides an automatic RF power supply calibration system (the automatic RF power supply calibration system adopts the automatic RF power supply calibration method of the above embodiments, and the specific process is described in the corresponding steps above), including a host computer, an external standard measurement unit, and an RF power supply, the RF power supply including a control unit and an internal detection unit; it also includes: Control module 100 is used to control the control unit via a host computer to drive the RF power supply to output RF signals; The acquisition module 200 is used to acquire internal detection data of radio frequency signals using an internal detection unit and to acquire standard detection data of radio frequency signals using an external standard measurement unit. The calculation module 300 is used to acquire internal test data and standard test data through the host computer, and calculate calibration compensation parameters based on the internal test data and standard test data. The correction module 400 is used to send calibration compensation parameters to the control unit and, during the operation of the control unit, use the calibration compensation parameters to correct the real-time acquired RF power data.

[0071] This invention enables real-time monitoring and dynamic compensation, ensuring stable output of the RF power supply during operation; improves calibration accuracy by establishing compensation curves through piecewise fitting or interpolation algorithms to automatically correct output deviations; enhances safety by automatically triggering protection mechanisms when voltage, current, or reflected power exceeds limits, preventing damage to the power amplifier and load; supports data storage and traceability, allowing all calibration data and compensation parameters to be stored long-term for easy process optimization and historical comparison; and enables one-click calibration, simplifying operation, reducing maintenance costs, and improving the uptime of production equipment and process consistency. Therefore, this invention significantly improves the calibration efficiency and reliability of RF power supplies, meeting the requirements of advanced manufacturing processes for precise and controllable RF power.

[0072] In this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying any such actual relationship or order between these entities or operations.

[0073] The above description is merely an embodiment of the present invention and is not intended to limit the scope of protection of the present invention. For those skilled in the art, the present invention can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An automatic calibration method for an RF power supply, applied to an automatic calibration system for an RF power supply, the automatic calibration system comprising a host computer, an external standard measurement unit, and an RF power supply, the RF power supply comprising a control unit and an internal detection unit; characterized in that, The automatic calibration method for radio frequency power supplies includes the following steps: S1. The host computer controls the control unit to drive the radio frequency power supply to output radio frequency signals; S2. The internal detection unit is used to collect internal detection data of the radio frequency signal, and the external standard measurement unit is used to collect standard detection data of the radio frequency signal; S3. Obtain the internal detection data and the standard detection data through the host computer, and calculate the calibration compensation parameters based on the internal detection data and the standard detection data; S4. The calibration compensation parameters are sent to the control unit, and during the operation of the control unit, the calibration compensation parameters are used to correct the real-time acquired radio frequency power data.

2. The automatic calibration method for radio frequency power supplies according to claim 1, characterized in that, The specific steps in step S1 include: S11. Control the host computer to send a test command sequence containing multiple preset power levels to the control unit; S12. Based on the test command sequence, the control unit controls the radio frequency power supply to sequentially output radio frequency signals corresponding to each of the preset power levels; The specific steps in step S2 include: S21. When the RF power supply outputs RF signals for each preset power level, the internal detection unit and the external standard measurement unit are triggered to synchronously perform data acquisition operations to obtain multiple sets of internal detection data and standard detection data corresponding to different power levels.

3. The automatic calibration method for radio frequency power supplies according to claim 2, characterized in that, The internal detection data includes internal voltage detection values ​​and internal current detection values; the standard detection data includes standard voltage detection values ​​and standard current detection values; the calibration compensation parameters include voltage calibration coefficient, current calibration coefficient, and phase compensation coefficient. The specific steps in step S3 include: S31. Associate the internal voltage detection value and the standard voltage detection value under the same power level as a voltage data pair, and associate the internal current detection value and the standard current detection value under the same power level as a current data pair; S32. The least squares method is used to perform linear fitting calculations on the voltage data pairs and current data pairs under multiple power levels respectively; S33. Based on the results of the linear fitting calculation, determine the voltage calibration coefficient and the current calibration coefficient; both the voltage calibration coefficient and the current calibration coefficient include a gain coefficient and a bias coefficient; S34. Determine the phase compensation coefficient based on the internal voltage detection value and the internal current detection value.

4. The automatic calibration method for radio frequency power supply according to claim 3, characterized in that, The specific steps in step S32 include: Linear fitting calculations are performed using the following formula: ； ； in, This represents the linear fitting result of the voltage data pairs. Indicates about and The sum of squared residuals reaches its minimum value. The total number of voltage data pairs. This represents the standard voltage detection value in the voltage data pair corresponding to the i-th sampling point. This refers to the gain coefficient in the voltage calibration coefficient. This represents the internal voltage detection value in the voltage data pair corresponding to the i-th sampling point. This is the bias coefficient in the voltage calibration coefficient. This represents the linear fitting result of the current data pairs. Indicates about and The sum of squared residuals reaches its minimum value. This represents the total number of current data pairs. This represents the standard current detection value in the current data pair corresponding to the i-th sampling point. This refers to the gain coefficient in the current calibration coefficient. This represents the internal current detection value in the current data pair corresponding to the i-th sampling point. This is the bias coefficient in the current calibration coefficient.

5. The automatic calibration method for radio frequency power supply according to claim 4, characterized in that, The specific steps in step S33 include: The voltage calibration coefficient is determined using the following formula: ； ； The current calibration factor is determined using the following formula: ； 。 6. The automatic RF power supply calibration method according to claim 5, characterized in that, The specific steps in step S34 also include: S341. Calculate the average phase value based on the internal voltage detection value and the internal current detection value; S342. Calculate the phase compensation coefficient based on the average phase value.

7. The automatic calibration method for radio frequency power supplies according to claim 6, characterized in that, The specific steps in step S341 include: The average phase value is calculated using the following formula: ； ； in, The average phase value, The total number of sampling points. Let i be the phase relative value of the i-th sampling point. Let be the vector sum of the current and voltage at the i-th sampling point.

8. The automatic calibration method for radio frequency power supply according to claim 7, characterized in that, The specific steps in step S342 include: The phase compensation coefficient is calculated using the following formula: ； in, The phase compensation coefficient is given.

9. The automatic calibration method for radio frequency power supply according to claim 8, characterized in that, The radio frequency power supply data includes the output voltage, output current, output voltage phase, and output current phase of the radio frequency power supply; The specific steps in step S4 include: S41. Acquire real-time raw voltage sampling data, raw current sampling data, raw voltage phase sampling data, and raw current phase sampling data; S42. Based on the original voltage sampling data, the output voltage is corrected according to the gain coefficient and bias coefficient in the voltage calibration coefficient; S43. Based on the original current sampling data, the output current is corrected according to the gain coefficient and bias coefficient in the current calibration coefficient; S44. Based on the original voltage phase sampling data, the output voltage phase is corrected according to the phase compensation coefficient; or, based on the original current phase sampling data, the output current phase is corrected according to the phase compensation coefficient, so that the output voltage phase and the output current phase are completely in phase.

10. An automatic calibration system for an RF power supply, comprising a host computer, an external standard measurement unit, and an RF power supply, wherein the RF power supply includes a control unit and an internal detection unit; characterized in that, Also includes: The control module is used to control the control unit via the host computer to drive the radio frequency power supply to output radio frequency signals; The acquisition module is used to acquire internal detection data of the radio frequency signal using the internal detection unit, and to acquire standard detection data of the radio frequency signal using the external standard measurement unit; The calculation module is used to acquire the internal detection data and the standard detection data through the host computer, and calculate the calibration compensation parameters based on the internal detection data and the standard detection data; The correction module is used to send the calibration compensation parameters to the control unit, and to correct the real-time acquired radio frequency power data using the calibration compensation parameters during the operation of the control unit.

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