Vacuum cavity hinge device for ALD (atomic layer deposition) semiconductor equipment

Abstract

The invention discloses a vacuum cavity hinge device for ALD semiconductor equipment, and relates to the technical field of semiconductor equipment. The hinge device comprises a cavity cover side hinge module, a cavity body side hinge module and an opening and closing driving assembly, the cavity cover side hinge module is installed on the outer side wall of an ALD equipment cavity cover, and the cavity cover side hinge module comprises a first hinge base, a second hinge base, a first hinge connecting assembly and a hinge plate; the cavity side hinge module is installed on the outer side wall of an ALD equipment cavity. The cavity side hinge module comprises a hinge base, a third hinge base and a second hinge connecting assembly. According to the hinge device provided by the invention, the whole hinge device adopts an out-of-cavity cantilever type structure and is divided into the upper part and the lower part of the cavity cover side and the cavity body side, the structure is simple, the problem of error accumulation of a plurality of kinematic pairs of a complex connecting rod mechanism is avoided, and the stability of opening and closing the cavity cover is improved; and under the condition that the strength, the rigidity and the driving force to the heavy cavity cover are met, the space occupancy rate is low, and the integrated design of equipment is facilitated.

Description

A vacuum cavity hinge device for ALD semiconductor devices Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more specifically, to a vacuum cavity hinge device for ALD semiconductor equipment. Background Technology

[0002] ALD (Advanced Laser Deposition) equipment cavities typically require frequent opening for wafer loading / unloading, maintenance, and cleaning. Therefore, a reliable and precise hinge system is needed to connect the cavity body and the cavity cover. The core function of this system is to support the weight of the cavity cover, which usually includes an observation window, heater, and sensors. It must also enable precise opening and closing movements, guiding the cavity cover to open and close smoothly and without wobbling along a predetermined trajectory. In the closed position, it is crucial to ensure that the sealing rings between the cavity cover and the cavity body are precisely aligned and that uniform pressure is applied to maintain a high-vacuum process environment.

[0003] Despite continuous optimization of the ALD cavity hinge design, its inherent working environment and functional requirements dictate some unavoidable objective drawbacks: The hinge's rotating pairs (bearings, shaft holes) inevitably experience wear during frequent opening and closing, leading to increased clearance and directly affecting the repeatability of the cavity door's positioning when closed. This prevents the cavity cover from accurately landing in the cavity sealing groove each time, resulting in uneven sealing pressure and increased leakage risk. The cavity, cavity cover, and hinge components undergo thermal expansion under high process temperatures. If the thermal expansion coefficients of different components do not match, or if the temperature distribution is uneven, it can cause minor deformation of the hinge structure, disrupting the original geometric accuracy and alignment, thus affecting the sealing effect. Wear on the hinge's moving parts (especially bearings and sliding surfaces) generates tiny particles. In the clean, low-particle environment required by ALD equipment, these particles may fall into the cavity or onto the wafer, becoming a fatal source of contamination. Although dust prevention is considered in the design (such as bellows seals and negative pressure protection), it is difficult to completely eliminate this contamination.

[0004] Heavy-duty cavity cover hinges are generally bulky, especially four-bar or parallelogram mechanisms, requiring significant installation space and limiting miniaturization and compact design. Complex linkage mechanisms (such as four-bar linkages) have multiple kinematic pairs. Manufacturing errors, assembly errors, and wear on each kinematic pair accumulate, ultimately causing the actual movement trajectory of the cavity cover to deviate from the theoretical trajectory, affecting the smoothness of opening / closing and the alignment accuracy when closing.

[0005] Hinges are typically located inside equipment or obscured by cavities / covers. Inspecting, cleaning, lubricating, or replacing worn parts (such as bearings) often requires disassembling the cavity cover or other components, which is complex, time-consuming, and increases equipment downtime. Furthermore, the materials inside the cavities need to maintain sufficient strength, rigidity, wear resistance, and dimensional stability at high temperatures, limiting material choices and increasing costs. Under high-temperature vacuum conditions, traditional lubricants will fail, evaporate, or contaminate the cavity. Specialized solid lubricants or self-lubricating materials must be used, which are typically expensive, and their lubrication life and performance remain challenging under harsh environments. Maintenance cycles may be much shorter than for equipment operating at room temperature. Summary of the Invention

[0006] In view of this, the purpose of the present invention is to provide a vacuum cavity hinge device for ALD semiconductor devices to solve the problems existing in the prior art.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows: a vacuum cavity hinge device for an ALD semiconductor device, comprising: a cavity cover-side hinge module, which is installed on the outer side wall of the ALD device cavity cover; the cavity cover-side hinge module includes a first hinge seat, a second hinge seat, a first hinge connecting assembly, and a hinge plate; both the first hinge seat and the second hinge seat are connected to the outer side wall of the ALD device cavity cover; the first hinge connecting assembly is connected between the first hinge seat and the second hinge seat, allowing the first hinge seat and the second hinge seat to rotate to form a certain angle; the hinge plate connects... On the outside of the first hinge seat and the second hinge seat; a cavity-side hinge module, which is installed on the outer wall of the ALD device cavity, the cavity-side hinge module includes a hinge base, a third hinge seat, and a second hinge connection assembly; one side of the hinge base is connected to the outer wall of the ALD device cavity, and the other side is connected to the third hinge seat, the upper part of the third hinge seat is connected to the hinge plate of the cavity cover-side hinge module through the second hinge connection assembly; an opening and closing drive assembly is used to drive the hinge plate to rotate relative to the third hinge seat, so as to realize the opening or closing of the ALD device cavity cover.

[0008] Furthermore, the opening and closing drive assembly includes a first bracket mounted on the side of the hinge plate and a second bracket mounted on the side of the third hinge seat. A gas spring is connected between the first bracket and the second bracket to drive the hinge plate to rotate relative to the third hinge seat.

[0009] Furthermore, a protrusion is formed in the middle of the outer side of the first hinge seat, and a first lug is formed at the lower end of the protrusion. A first connecting hole is provided on the first lug. A second lug is formed at the upper end of the second hinge seat. Two second lugs are provided. A second connecting hole is provided on the second lug. The first lug is connected between the two second lugs, and the center of the first connecting hole and the center of the second connecting hole are coaxial. The first hinge connection assembly includes a first screw, a first guide sleeve, a second guide sleeve, and a lock nut. The first guide sleeve is installed in the first connecting hole, the second guide sleeve is installed in the second connecting hole, and the first screw passes through the second guide sleeve and the first guide sleeve and is connected to the lock nut.

[0010] Furthermore, the hinge plate includes a left hinge plate and a right hinge plate, which are connected to each other on the left and right sides of the first hinge seat and the second hinge seat. The first hinge seat has spring support blocks on both sides of the protrusion, and a spring block is connected to both spring support blocks. A spring block pin is passed through the spring block from left to right, and one end of the spring block pin is connected to the left hinge plate, and the other end is connected to the right hinge plate. Multiple spring washers for adjusting the relative position of the spring block pins are connected to the four corners of the spring block by first fastening screws. A second screw connected to the second hinge seat passes through the lower side of the left hinge plate, and a third screw connected to the second hinge seat also passes through the lower side of the right hinge plate.

[0011] Furthermore, a left thrust washer bracket is provided on the inner side of the left hinge plate at the position corresponding to the spring block pin and the position corresponding to the second screw; a right thrust washer bracket is provided on the inner side of the right hinge plate at the position corresponding to the spring block pin and the position corresponding to the third screw; a shaft retaining ring is connected to the spring block pin after it passes through the right hinge plate.

[0012] Furthermore, the upper part of the third hinge seat protrudes upward to form a third lug, and the third lug forms a third connecting hole through the left and right sides; the lower end of the left hinge plate has a left connecting hole corresponding to the third connecting hole, and the lower end of the right hinge plate has a right connecting hole corresponding to the third connecting hole; the second hinge connection assembly includes a hinge pin, a bearing, a bearing hub, a flat washer, and a second fastening screw. The bearing hub is installed in both the left and right connecting holes. The hinge pin passes through the third connecting hole, and the bearings are respectively fitted at both ends. The bearings are installed in the bearing hubs and fixed by the flat washer and the second fastening screw. The left hinge plate is also connected to the left connecting hole for abutting against the internal bearing, and the right hinge plate is also connected to the right connecting hole for abutting against the internal bearing.

[0013] Furthermore, at least two shaft clamping members are provided on the third ear corresponding to the lower part of the hinge pin; the shaft clamping member includes a bolt and two clamping blocks connected to the bolt at intervals. Tightening the bolt can adjust the relative position between the two clamping blocks. The clamping blocks are supported at the bottom of the hinge pin, and the upper end of the clamping blocks is formed with an inclined surface.

[0014] Furthermore, a plurality of front ball screws for adjusting the front-to-back relative distance between the hinge base and the third hinge seat, and a plurality of side ball screws for adjusting the left-to-right relative distance between the two are provided between the hinge base and the third hinge seat; a shim plate is inserted into the upper part between the hinge base and the third hinge seat.

[0015] Furthermore, a pipeline shielding cover is connected to the outer side of the third hinge seat, and a bottom bracket is connected to the bottom of the third hinge seat; a pipeline support plate is connected to the upper part of the hinge plate; and multiple wire clamps and / or water pipe clamps are provided on the bottom bracket and the pipeline support plate.

[0016] Furthermore, a first positioning pin is provided on the inner side of the second hinge seat; a second positioning pin and a flat key are provided on the inner side of the third hinge seat; a position sensor is installed on the upper part of the third hinge seat near the cavity of the ALD device.

[0017] The beneficial effects of this invention are as follows: The vacuum cavity hinge device for ALD semiconductor equipment provided by this invention adopts an external cantilever structure, which is divided into two parts: the cavity cover side and the cavity body side. The structure is simple, avoiding the problem of error accumulation of multiple kinematic pairs in complex linkage mechanisms, and improving the smoothness of opening and closing the cavity cover. Moreover, it is installed on the outside of the cavity, and can be disassembled independently when replacing parts, making inspection, cleaning and operation convenient and saving equipment downtime. Furthermore, this structure does not require the use of high-precision rotating parts, and does not require frequent part lubrication and calibration. The parts processing cost is low, and the maintenance cost is low. While facilitating disassembly and maintenance, it also avoids the problem of materials not being resistant to high temperatures.

[0018] The hinge mechanism features a miniaturized and compact structure, achieving low space occupancy while meeting strength, rigidity, and driving force requirements for heavy-duty cavity covers, thus facilitating integrated equipment design. Utilizing an opening and closing drive assembly for auxiliary support ensures convenient operation, saving time and effort. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.

[0020] Figure 1 is a schematic diagram of the overall structure of the vacuum cavity hinge device for ALD semiconductor devices in this invention.

[0021] Figure 2 is a schematic diagram of the upper part of the vacuum cavity hinge device in this invention.

[0022] Figure 3 is a schematic diagram of the cavity cover side hinge module in this invention.

[0023] Figure 4 is an exploded structural diagram of the cavity cover side hinge module in this invention.

[0024] Figure 5 is a schematic diagram of the cavity cover side hinge module of the present invention.

[0025] Figure 6 is a schematic diagram of the structure of the left hinge plate in this invention.

[0026] Figure 7 is a schematic diagram of the structure of the right hinge plate in this invention.

[0027] Figure 8 is a schematic diagram of the cavity-side hinge module in this invention.

[0028] Figure 9 is a schematic diagram of the cavity-side hinge module in this invention.

[0029] Figure 10 is a schematic diagram of the structure of the third hinge seat in this invention.

[0030] Figure 11 is a cross-sectional view of the second hinge connection component in this invention.

[0031] Figure 12 is a schematic diagram of the structure of the shaft clamping component of the present invention.

[0032] Explanation of reference numerals in the attached drawings: 1. Cavity cover side hinge module; 1-1. First hinge seat; 1-1a. Protrusion; 1-1b. First support lug; 1-1c. First connecting hole; 1-2. Second hinge seat; 1-2a. Second support lug; 1-2b. Second connecting hole; 1-3. First hinge connection assembly; 1-3a. First screw; 1-3b. First guide bushing; 1-3c. Second guide bushing; 1-3d. Locking nut; 1- 4. Hinge plate; 1-4a. Left hinge plate; 1-4b. Right hinge plate; 1-4c. Left connecting hole; 1-4d. Right connecting hole; 1-5. Spring support block; 1-6. Spring block; 1-7. Spring block pin; 1-8. Second screw; 1-9. Third screw; 1-10. Left thrust washer bracket; 1-11. Right thrust washer bracket; 1-12. First locating pin; 1-13. Spring washer; 1-14. First fastening screw 2. Cavity-side hinge module; 2-1. Hinge base; 2-2. Third hinge seat; 2-2a. Third support ear; 2-2b. Third connecting hole; 2-3. Second hinge connection assembly; 2-3a. Hinge pin; 2-3b. Bearing; 2-3c. Bearing hub; 2-3d. Flat washer; 2-3e. Second fastening screw; 2-3f. Left bearing axial support; 2-3g. Right bearing axial support; 2-4. Shaft clamping component; -4a, Bolt; 2-4b, Clamping block; 2-4c, Inclined surface; 2-5, Front ball bearing set screw; 2-6, Side ball bearing set screw; 2-7, Washer plate; 2-8, Second locating pin; 2-9, Flat key; 3, Opening and closing drive assembly; 3-1, First bracket; 3-2, Second bracket; 3-3, Gas spring; 4, Pipeline shielding cover; 5, Bottom bracket; 6, Pipeline support plate; 7, Wire clamp; 8, Water pipe clamp; 9, Position sensor. Detailed Implementation

[0033] The structure provided by the present invention will be explained and described in detail below with reference to the accompanying drawings.

[0034] Referring to Figures 1 to 12, this embodiment specifically discloses a vacuum cavity hinge device for an ALD semiconductor device, comprising: a cavity cover-side hinge module 1, which can be detachably installed on the outer wall of the ALD device cavity cover using multiple screws. The cavity cover-side hinge module 1 includes a first hinge seat 1-1, a second hinge seat 1-2, a first hinge connecting assembly 1-3, and a hinge plate 1-4. Both the first hinge seat 1-1 and the second hinge seat 1-2 are detachably connected and fixed to the outer wall of the ALD device cavity cover. The first hinge connecting assembly 1-3 is connected between the first hinge seat 1-1 and the second hinge seat 1-2, allowing the first hinge seat 1-1 and the second hinge seat 1-2 to rotate to form a certain angle for easy fitting with the ALD device cavity cover. The hinge plate 1-4 is connected to the outer side of the first hinge seat 1-1 and the second hinge seat 1-2. A first positioning pin 1-12 is provided on the inner side of the second hinge seat 1-2. During installation, the first positioning pin 1-12 can be used for center positioning and connection with the ALD. The positioning holes of the equipment cavity cover are quickly connected; the cavity-side hinge module 2, which can also be detachably installed on the outer wall of the ALD equipment cavity by multiple screws, includes a hinge base 2-1, a third hinge seat 2-2, and a second hinge connection assembly 2-3; one side of the hinge base 2-1 is detachably connected and fixed to the outer wall of the ALD equipment cavity, and the other side is detachably connected and fixed to the third hinge seat 2-2 by screws and other connecting parts. The upper part of the third hinge seat 2-2 is connected to the hinge plate 1-4 of the cavity cover-side hinge module 1 through the second hinge connection assembly 2-3; the inner side of the hinge base 2-1 is provided with a second positioning pin 2-8 and a flat key 2-9. When installing the cavity-side hinge module 2, the second positioning pin 2-8 is used to quickly connect with the positioning holes on the ALD equipment cavity, and the flat key 2-9 plays a major supporting role; the opening and closing drive assembly 3 is used to drive the hinge plate 1-4 to rotate relative to the third hinge seat 2-2 to realize the opening or closing of the ALD equipment cavity cover.

[0035] The hinge base 2-1 and the third hinge base 2-2 have an inner and outer two-layer structure, with the third hinge base 2-2 similarly covering the outside of the hinge base 2-1.

[0036] In this embodiment, the vacuum chamber hinge device adopts an external cantilever structure, divided into upper and lower parts on the chamber cover side and the chamber body side. The structure is simple, avoiding the problem of accumulated errors from multiple kinematic pairs in complex linkage mechanisms, and improving the smoothness of opening and closing the chamber cover. Moreover, it is installed on the outside of the chamber, allowing for independent disassembly when replacing parts, making inspection, cleaning, and operation convenient and saving equipment downtime. Furthermore, this structure does not require the use of high-precision rotating parts, eliminating the need for frequent part lubrication and calibration, resulting in low parts processing costs and low maintenance costs. While facilitating disassembly and maintenance, it also avoids the problem of materials being unable to withstand high temperatures.

[0037] The hinge mechanism features a miniaturized and compact structure, achieving low space occupancy while meeting strength, rigidity, and driving force requirements for heavy-duty cavity covers, thus facilitating integrated equipment design. Utilizing an opening and closing drive assembly for auxiliary support ensures convenient operation, saving time and effort.

[0038] Referring to Figure 1, in this embodiment, the opening and closing drive assembly 3 includes a first bracket 3-1 mounted on the side of the hinge plate 1-4 and a second bracket 3-2 mounted on the side of the third hinge seat 2-2. A gas spring 3-3 is connected between the first bracket 3-1 and the second bracket 3-2 to drive the hinge plate 1-4 to rotate relative to the third hinge seat 2-2.

[0039] In the illustrated embodiment, to ensure driving stability, opening and closing drive components 3 are provided on both the left and right sides of the hinge plate 1-4; the gas spring 3-3 can be a nitrogen gas spring, and the torque generated by the gas spring 3-3 can largely offset the torque generated by the gravity of the cavity cover during the entire stroke of opening and closing the cavity cover, making it easy and effortless to open and close the heavy cavity cover, reducing labor intensity and reducing the operational risks such as impact caused by excessive force.

[0040] Referring again to Figures 1 and 8, multiple front ball screws 2-5 and multiple side ball screws 2-6 are provided between the hinge base 2-1 and the third hinge seat 2-2 to adjust their relative front-to-back distance and to adjust their relative left-to-right distance. The front ball screws 2-5 and the side ball screws 2-6 allow for adjustment of the third hinge seat 2-2 in all directions, ensuring that the cover can more accurately land on the cavity sealing ring and that the sealing pressure is uniform when the cover is closed, resulting in a cavity vacuum leakage rate ≤1×10⁻⁶. -10 Pa·m³ / s.

[0041] Optionally, during the adjustment of the hinge base 2-1 and the third hinge base 2-2, if the gap between the tops of the two is too large, a shim plate 2-7 can be inserted into the gap. The shim plate 2-7 can also be locked with screws; this can prevent the hinge device from shaking due to the gap during movement.

[0042] Referring again to Figures 1 to 5, a protrusion 1-1a is formed on the outer center of the first hinge seat 1-1. The lower end of the protrusion 1-1a extends downward to form a first lug 1-1b, which has a first connecting hole 1-1c. A second lug 1-2a is formed on the upper end of the second hinge seat 1-2. Two second lugs 1-2a are symmetrically spaced, forming a ring-shaped clamping structure around the first lug 1-1b. A second connecting hole 1-2b is provided on the second lug. The first lug 1-1b connects between the two second lugs 1-2a, and the first connecting hole 1-1c... -1c is coaxial with the center of the second connecting hole 1-2b; this enables the first hinge connection assembly 1-3 to obtain bidirectional constraint in the plane of rotation, improving anti-tilt capability; the first hinge connection assembly 1-3 includes a first screw 1-3a, a first guide sleeve 1-3b, a second guide sleeve 1-3c, and a lock nut 1-3d. The first guide sleeve 1-3b is installed in the first connecting hole 1-1c, the second guide sleeve 1-3c is installed in the second connecting hole 1-2b, and the first screw 1-3a passes through the second guide sleeve 1-3c and the first guide sleeve 1-3b and is connected to the lock nut 1-3d.

[0043] The first guide bushing 1-3b and the second guide bushing 1-3c are precisely fitted with the walls of the corresponding connecting holes, which can reduce the friction between the first screw 1-3a and the first connecting hole 1-1c and the second connecting hole 1-2b. After loosening the anti-loosening nut 1-3d and the first screw 1-3a, the angle between the first hinge seat 1-1 and the second hinge seat 1-2 can be adjusted. The specific angle should be adapted to the outer wall of the cavity cover of the ALD equipment to be installed. After adjusting to the required angle, tighten the first screw 1-3a and lock it with the anti-loosening nut 1-3d.

[0044] Referring to Figures 1 to 7, the hinge plate 1-4 includes a left hinge plate 1-4a and a right hinge plate 1-4b, which are connected to the left and right sides of the first hinge seat 1-1 and the second hinge seat 1-2 respectively. The first hinge seat 1-1 has spring support blocks 1-5 on both sides of the protrusion 1-1a. A spring block 1-6 is connected to both spring support blocks 1-5, forming a symmetrical support platform that provides a precise installation reference for the spring block 1-6. A spring block pin 1-7 is connected through the spring block 1-6 from left to right. One end of the spring block pin 1-7 is connected to the left hinge plate 1-4a, and the other end is connected to the right hinge plate 1-4b. At each of the four corners of the spring block 1-6, multiple spring washers 1-13 for adjusting the relative position of the spring block pin 1-7 are connected by the first fastening screw 1-14. The first fastening screw 1-14 can be designed with countersunk holes to facilitate screwing. The lower side of the left hinge plate 1-4a is provided with a second screw 1-8 connected to the second hinge seat 1-2, and the lower side of the right hinge plate 1-4b is also provided with a corresponding third screw 1-9 connected to the second hinge seat 1-2.

[0045] In this embodiment, the left hinge plate 1-4a, the right hinge plate 1-4b and the middle first hinge seat 1-1 and second hinge seat 1-2 are connected as a whole by components such as spring block pin 1-7, spring block 1-6, second screw 1-8 and third screw 1-9. This allows the first hinge seat 1-1 and the second hinge seat 1-2 to rotate synchronously when the hinge plate is driven to rotate, thereby realizing the opening and closing of the ALD device cavity cover.

[0046] As shown in Figure 4, four sets of four spring washers 1-13 (the spring washers are tapered arched washers) are installed above and below each of the first fastening screws 1-14 at the four corners of the spring blocks 1-6. By adjusting the corresponding first fastening screws 1-14, tightening the spring washers 1-13 will cause the spring block pin 1-7 to be finely adjusted towards the side closer to the spring support block 1-5. Loosening the first fastening screws 1-14, i.e., not tightening the spring washers 1-13, will allow the spring block pin 1-7 to be finely adjusted in the opposite direction. This is mainly used to adjust the relative position of the spring block pins 1-7, thereby achieving fine adjustment of the position of the hinge plates on the left and right sides.

[0047] In some embodiments, a flat washer may also be placed on the spring washer 1-13 to ensure that the first fastening screw 1-14 can be evenly stressed to fasten the spring block 1-6 to the spring support blocks 1-5 on both sides.

[0048] Referring again to Figures 6 and 7, a left thrust washer bracket 1-10 is provided on the inner side of the left hinge plate 1-4a, corresponding to the spring block pin 1-7 and the position corresponding to the second screw 1-8; a right thrust washer bracket 1-11 is provided on the inner side of the right hinge plate 1-4b, corresponding to the spring block pin 1-7 and the position corresponding to the third screw 1-9; after the spring block pin 1-7 passes through the right hinge plate 1-4b, it is connected to a shaft retaining ring (not shown in the figure). The main function of the spring block pin 1-7 is to connect the left hinge plate 1-4a and the right hinge plate 1-4b to the spring block 1-6, and then to the spring support block 1-5 as a whole. The end of the spring block pin 1-7 is locked with a shaft retaining ring to prevent the spring block pin 1-7 from slipping out.

[0049] Referring to Figures 6 to 12, the upper part of the third hinge seat 2-2 protrudes upward to form a third lug 2-2a, which can be integrally formed with the third hinge seat 2-2. The third lug 2-2a forms a third connecting hole 2-2b extending through the left and right sides. The lower end of the left hinge plate 1-4a has a left connecting hole 1-4c corresponding to the third connecting hole 2-2b, and the lower end of the right hinge plate 1-4b has a right connecting hole 1-4d corresponding to the third connecting hole 2-2b. The second hinge connecting assembly 2-3 includes a hinge pin 2-3a, a bearing 2-3b, a bearing hub 2-3c, a flat washer 2-3d, and a second fastening screw 2-3. e. Bearing hubs 2-3c are installed in both the left connecting hole 1-4c and the right connecting hole 1-4d. The hinge pin 2-3a passes through the third connecting hole 2-2b, and bearings 2-3b are respectively fitted at both ends. The bearings 2-3b are installed in the bearing hubs 2-3c and fixed by the flat washer 2-3d and the second fastening screw 2-3e. A left bearing axial support 2-3f is also connected on the left hinge plate 1-4a at the left connecting hole 1-4c for abutting against the internal bearing 2-3b. A right bearing axial support 2-3g is also connected on the right hinge plate 1-4b at the right connecting hole 1-4d for abutting against the internal bearing 2-3b.

[0050] The third connecting hole 2-2b is configured to provide a precise installation position for the hinge pin 2-3a. The left connecting hole 1-4c, the right connecting hole 1-4d, and the third connecting hole 2-2b are coaxially aligned to ensure symmetrical installation on both sides. The bearing hub 2-3c can be a deep groove ball bearing. The outer ring of the bearing 2-3b is fitted with the inner wall of the bearing hub 2-3c. The outer wall of the bearing hub 2-3c is also fitted with the left and right connecting holes to ensure that the outer ring of the bearing moves synchronously when the hinge plate rotates.

[0051] The flat washer 2-3d, the second fastening screw 2-3e, the left bearing axial support 2-3f, and the right bearing axial support 2-3g are used to connect and fix with the outer end face of the corresponding bearing to form a bidirectional axial constraint, which can limit the axial displacement of the bearing and also eliminate the installation gap between the components; the second fastening screw 2-3e can also adopt a countersunk hole design.

[0052] In some preferred embodiments, as shown in Figures 8, 11 and 12, at least two shaft clamping members 2-4 are provided on the third ear 2-2a below the hinge pin 2-3a. The shaft clamping member 2-4 includes a bolt 2-4a and two clamping blocks 2-4b spaced apart on the bolt 2-4a. Tightening the bolt 2-4a can adjust the relative position between the two clamping blocks 2-4b. The clamping blocks 2-4b are supported on the bottom of the hinge pin 2-3a, and the upper end of the clamping blocks 2-4b forms an inclined surface 2-4c.

[0053] In this embodiment, the hinge pin 2-3a is fixed by the shaft clamping member 2-4, which can prevent the hinge pin 2-3a from shaking during the rotation of the bearings at both ends, making the hinge device more stable and safe during operation.

[0054] Specifically, the third ear 2-2a has a corresponding shaft clamping mounting hole, and the shaft clamping member 2-4 is installed in the shaft clamping member mounting hole; a return spring (not shown in the figure) is sleeved on the bolt 2-4a of the shaft clamping member 2-4, and two clamping blocks 2-4b are sleeved on the bolt 2-4a at intervals. The clamping block 2-4b away from the bolt screwing end has an internal thread and is threadedly connected to the bolt 2-4a, while the clamping block 2-4b near the bolt screwing end slides with the bolt 2-4a, and both clamping blocks 2-4b are restricted from circumferential rotation (the inclined surface of the clamping block 2-4b itself will contact the hinge pin 2-3a, and the two clamping blocks 2-4b will not rotate with the bolt 2-4a when the bolt 2-4a is tightened); the return spring is connected between the two clamping blocks 2-4b. In the absence of preload, the return spring is in the extended state, and the distance between the two clamping blocks 2-4b is relatively large.

[0055] When bolt 2-4a is tightened, the threaded section of bolt 2-4a engages with the clamping block 2-4b away from the tightening end, pushing bolt 2-4a along its own axis into the mounting hole of the shaft clamping component. This, in turn, causes the clamping block 2-4b near the tightening end to move synchronously towards the other clamping block 2-4b. The inclined surface 2-4c pushes the hinge pin 2-3a upward, thus clamping and fixing the hinge pin 2-3a. When bolt 2-4a is loosened in the opposite direction, the return spring restores its deformation, pushing the clamping block 2-4b near the tightening end back to its original position along the bolt axis, causing the two clamping blocks 2-4b to move away from each other and releasing the clamping of the hinge pin 2-3a.

[0056] In addition, the initial distance between the two clamping blocks 2-4b can be manually adjusted in advance according to the size of the hinge pin 2-3a. When in use, only a slight tightening of the bolt 2-4a is needed to complete the clamping operation.

[0057] Referring to Figures 1, 8, and 9, a pipe cover 4 is also connected to the outer side of the third hinge seat 2-2. This cover is used to conceal the water pipes and electrical wiring in the ALD equipment cavity, providing protection while also enhancing the overall aesthetics of the device. A bottom bracket 5 is connected to the bottom of the third hinge seat 2-2. A pipe support plate 6 is connected to the upper part of the hinge plate 1-4. Multiple wire clamps 7 and / or water pipe clamps 8 are installed on the bottom bracket 5 and the pipe support plate 6. These are also used to plan and fix the routing of cables and water pipes.

[0058] The quantity and location of the wire clamps 7 and water pipe clamps 8 can be selected and installed according to actual needs; the wire clamps 7 and water pipe clamps 8 can be detachably installed in the required location through clamp fastening washers and clamp fastening screws, and can also be set on the left or right hinge plates if necessary; thus achieving the fixation of water pipes and lines.

[0059] As shown in Figure 1, a position sensor 9 is installed on the upper part of the third hinge seat 2-2 near the ALD equipment cavity. Optionally, the sensing element of the position sensor 9 can be installed on the corresponding cavity cover side hinge module. The position sensor 9 is connected to the host computer (such as a controller) and can monitor the movement status of the ALD equipment cavity cover in real time. When an abnormal state is detected (such as the cavity cover not being closed), the host computer automatically triggers the safety interlock, prohibits the introduction of process gas, heating start-up, vacuum pump operation, and issues an alarm.

[0060] In this invention, the left hinge plate 1-4a and the right hinge plate 1-4b play a major supporting role during the opening of the ALD device cavity cover. The second screw 1-8, the third screw 1-9, the spring block pin 1-7, and the spring block 1-6 fasten the left hinge plate 1-4a and the right hinge plate 1-4b to the intermediate first hinge seat 1-1 and second hinge seat 1-2. The cavity cover side hinge module 1 rotates around the hinge pin 2-3a through the bearing hub 2-3c and the bearing 2-3b to ensure the axial stability of the left hinge plate 1-4a and the right hinge plate 1-4b. The hinge is encapsulated on both sides using left bearing axial supports 2-3f and right bearing axial supports 2-3g, respectively. Both supports 2-3f and 2-3g can be detachably connected to their corresponding hinge plates using screws. To reduce labor intensity when opening and closing the ALD equipment cavity cover, the hinge device uses a gas spring structure for auxiliary support. The gas spring 3-3 can be fixed to the first bracket 3-1 and the second bracket 3-2 on both sides of the hinge device using pins, and the pins can be locked with screws to prevent them from falling off. The position sensor 9 can also be fixed using screws. When the ALD equipment cavity cover is opened or closed, the position sensor 9 outputs an alarm signal due to the change in distance, which is fed back to the host computer to issue process-related stop commands, increasing operational safety.

[0061] It should be noted that in the above description, the side closer to the ALD semiconductor device is the inner side, and the side farther away from the ALD semiconductor device is the outer side; the side of the left hinge plate 1-4a in Figure 1 is the left side, and the side of the right hinge plate 1-4b is the right side.

[0062] In summary, the vacuum cavity hinge device for ALD semiconductor equipment provided by this invention has two modules, the upper and lower, installed on the cavity cover and the outside of the cavity, respectively, avoiding problems of thermal deformation and particulate contamination sources, and will not affect the process. The two parts of the hinge can be adjusted in relative position by multiple set screws on the front and side, ensuring the repeatability of the cavity cover when it is closed, so that the cavity cover falls precisely in the center of the cavity sealing ring each time, and the sealing pressure is uniform.

[0063] The hinge device has an overall structure consisting of two cantilevered parts, which avoids the problem of accumulated errors from multiple kinematic pairs in complex linkage mechanisms and improves the smoothness of opening and closing the cavity cover.

[0064] The hinge device is located outside the vacuum chamber of the ALD semiconductor equipment. Replacement parts (such as bearings) can be disassembled independently, making inspection, cleaning, and operation convenient and saving equipment downtime. In addition, this structure does not require frequent component lubrication and calibration, resulting in low maintenance costs.

[0065] The hinge device adopts a miniaturized and compact structure, which has a low space occupancy rate while meeting the requirements of strength, rigidity and driving force for heavy cavity cover, which is conducive to the integrated design of the equipment.

[0066] The hinge device integrates a position sensor. The sensing end of the position sensor can be set on the hinge module on the cavity cover side to monitor the movement status of the cavity cover in real time. When an abnormal state is detected (such as the cavity cover not being closed), the system automatically triggers the safety interlock, prohibits the introduction of process gas, heating start-up, vacuum pump operation, and issues an alarm.

[0067] For necessary exposed parts that cannot be fully embedded (such as vacuum chamber cooling water pipes, sensor connection lines, etc.), which may interfere with other equipment components, this invention uses pipe shielding covers, bottom brackets and other outer cover components to wrap and plan the pipe path, and fix it to the hinge moving parts, which can improve the simplicity and integrity of the equipment appearance.

[0068] Gas springs are integrated on both sides of the hinge device for auxiliary drive. The torque generated by the gas springs largely offsets the torque generated by the gravity of the cavity cover throughout the entire stroke of the opening and closing of the cavity cover. This makes opening and closing the heavy cavity cover easy and effortless, reduces labor intensity, and lowers the operational risks such as impact caused by excessive force.

[0069] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0070] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0071] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0072] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0073] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and simple improvements made on the substantive content of the present invention should be included within the protection scope of the present invention.

Claims

1. A vacuum cavity hinge device for ALD semiconductor devices, characterized in that, include: A cavity cover side hinge module (1) is installed on the outer wall of the ALD device cavity cover. The cavity cover side hinge module (1) includes a first hinge seat (1-1), a second hinge seat (1-2), a first hinge connecting assembly (1-3), and a hinge plate (1-4). The first hinge seat (1-1) and the second hinge seat (1-2) are both connected to the outer wall of the ALD device cavity cover. The first hinge connecting assembly (1-3) is connected between the first hinge seat (1-1) and the second hinge seat (1-2), allowing the first hinge seat (1-1) and the second hinge seat (1-2) to rotate to form a certain angle. The hinge plate (1-4) is connected between the first hinge seat (1-1) and the second hinge seat (1-2). 2) The outer side; cavity side hinge module (2), which is installed on the outer side wall of the ALD device cavity, the cavity side hinge module (2) includes a hinge base (2-1), a third hinge seat (2-2), and a second hinge connection assembly (2-3); one side of the hinge base (2-1) is connected to the outer side wall of the ALD device cavity, and the other side is connected to the third hinge seat (2-2), the upper part of the third hinge seat (2-2) is connected to the hinge plate (1-4) of the cavity cover side hinge module (1) through the second hinge connection assembly (2-3); opening and closing drive assembly (3), used to drive the hinge plate (1-4) to rotate relative to the third hinge seat (2-2) to realize the opening or closing of the ALD device cavity cover.

2. The vacuum cavity hinge device according to claim 1, characterized in that, The opening and closing drive assembly (3) includes a first bracket (3-1) mounted on the side of the hinge plate (1-4) and a second bracket (3-2) mounted on the side of the third hinge seat (2-2). A gas spring (3-3) is connected between the first bracket (3-1) and the second bracket (3-2) for driving the hinge plate (1-4) to rotate relative to the third hinge seat (2-2).

3. The vacuum cavity hinge device according to claim 1, characterized in that, A protrusion (1-1a) is formed in the middle of the outer side of the first hinge seat (1-1). The lower end of the protrusion (1-1a) extends downward to form a first lug (1-1b). A first connecting hole (1-1c) is provided on the first lug (1-1b). A second lug (1-2a) is formed at the upper end of the second hinge seat (1-2). Two second lugs (1-2a) are provided. A second connecting hole (1-2b) is provided on the second lug (1-2a). The first lug (1-1b) is connected between the two second lugs (1-2a), and the first connecting hole (1-1c) is provided on the first lug (1-1b). -1c) is coaxial with the center of the second connecting hole (1-2b); the first hinge connection assembly (1-3) includes a first screw (1-3a), a first guide sleeve (1-3b), a second guide sleeve (1-3c) and a lock nut (1-3d). The first guide sleeve (1-3b) is installed in the first connecting hole (1-1c), the second guide sleeve (1-3c) is installed in the second connecting hole (1-2b), and the first screw (1-3a) passes through the second guide sleeve (1-3c) and the first guide sleeve (1-3b) and is connected to the lock nut (1-3d).

4. The vacuum cavity hinge device according to claim 3, characterized in that, The hinge plate (1-4) includes a left hinge plate (1-4a) and a right hinge plate (1-4b). The left hinge plate (1-4a) and the right hinge plate (1-4b) are connected to each other on the left and right sides of the first hinge seat (1-1) and the second hinge seat (1-2). The first hinge seat (1-1) is provided with spring support blocks (1-5) on both sides of the protrusion (1-1a). A spring block (1-6) is connected to both spring support blocks (1-5). A spring block pin (1-7) is connected through the spring block (1-6) from left to right. (1-7) has two ends, one end connected to the left hinge plate (1-4a) and the other end connected to the right hinge plate (1-4b); at the four corners of the spring block (1-6), multiple spring washers (1-13) for adjusting the relative position of the spring block pin (1-7) are connected by the first fastening screw (1-14); the lower side of the left hinge plate (1-4a) is provided with a second screw (1-8) connected to the second hinge seat (1-2), and the lower side of the right hinge plate (1-4b) is also provided with a third screw (1-9) connected to the second hinge seat (1-2).

5. The vacuum cavity hinge device according to claim 4, characterized in that, On the inner side of the left hinge plate (1-4a), a left thrust washer bracket (1-10) is provided at the position corresponding to the spring block pin (1-7) and at the position corresponding to the second screw (1-8); on the inner side of the right hinge plate (1-4b), a right thrust washer bracket (1-11) is provided at the position corresponding to the spring block pin (1-7) and at the position corresponding to the third screw (1-9); after the spring block pin (1-7) passes through the right hinge plate (1-4b), a shaft retaining ring is connected.

6. The vacuum cavity hinge device according to claim 4, characterized in that, The upper part of the third hinge seat (2-2) protrudes upward to form a third lug (2-2a), and the third lug (2-2a) forms a third connecting hole (2-2b) extending through the left and right sides; the lower end of the left hinge plate (1-4a) has a left connecting hole (1-4c) corresponding to the third connecting hole (2-2b), and the lower end of the right hinge plate (1-4b) has a right connecting hole (1-4d) corresponding to the third connecting hole (2-2b); the second hinge connecting assembly (2-3) includes a hinge pin (2-3a), a bearing (2-3b), a bearing hub (2-3c), a flat washer (2-3d), and a second fastening screw (2-3e), and the left connecting hole (1-4c) and the right connecting hole (1-4d) are also present. The bearing hubs (2-3c) are installed in both the bearing and bearing plate. The hinge pin (2-3a) passes through the third connecting hole (2-2b) and the bearings (2-3b) are respectively fitted at both ends. The bearings (2-3b) are installed in the bearing hubs (2-3c) and fixed by the flat washer (2-3d) and the second fastening screw (2-3e). The left hinge plate (1-4a) is also connected to the left connecting hole (1-4c) with a left bearing axial support (2-3f) for abutting against the internal bearing (2-3b). The right hinge plate (1-4b) is also connected to the right connecting hole (1-4d) with a right bearing axial support (2-3g) for abutting against the internal bearing (2-3b).

7. The vacuum cavity hinge device according to claim 6, characterized in that, At least two shaft clamping members (2-4) are provided on the third ear (2-2a) below the hinge pin (2-3a); the shaft clamping member (2-4) includes a bolt (2-4a) and two clamping blocks (2-4b) spaced apart on the bolt (2-4a). Tightening the bolt (2-4a) can adjust the relative position between the two clamping blocks (2-4b). The clamping blocks (2-4b) are supported at the bottom of the hinge pin (2-3a), and the upper end of the clamping block (2-4b) forms an inclined surface (2-4c).

8. The vacuum cavity hinge device according to claim 1, characterized in that, A plurality of front ball screws (2-5) for adjusting the front-to-back relative distance between the hinge base (2-1) and the third hinge seat (2-2) and a plurality of side ball screws (2-6) for adjusting the left-to-right relative distance between the two are provided; a shim plate (2-7) is inserted in the upper part between the hinge base (2-1) and the third hinge seat (2-2).

9. The vacuum cavity hinge device according to claim 1, characterized in that, A pipeline shielding cover (4) is also connected to the outer side of the third hinge seat (2-2), and a bottom bracket (5) is connected to the bottom of the third hinge seat (2-2); a pipeline support plate (6) is connected to the upper part of the hinge plate (1-4); and multiple wire clamps (7) and / or water pipe clamps (8) are provided on the bottom bracket (5) and the pipeline support plate (6).

10. The vacuum cavity hinge device according to claim 1, characterized in that, The inner side of the second hinge seat (1-2) is provided with a first positioning pin (1-12); the inner side of the third hinge seat (2-2) is provided with a second positioning pin (2-8) and a flat key (2-9); a position sensor (9) is installed on the upper part of the third hinge seat (2-2) near the ALD device cavity.

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