High-temperature ceramic heating plate wire outlet structure and connection method

Abstract

The invention discloses a high-temperature ceramic heating plate wire outlet structure and a connecting method, and aims to overcome the defect that the joint of an electric heating wire and a leading-out wire of a high-temperature ceramic heating plate is easy to break. The heating device comprises a mounting plate and a heat conducting plate, a heating assembly is mounted between the mounting plate and the heat conducting plate, a binding post is connected to the heat conducting plate in a fastened mode, a wiring end of the heating assembly is welded to the binding post, the binding post is sleeved with an insulating ceramic tube, the insulating ceramic tube is connected with the mounting plate, and the binding post is connected with a lead-out wire. The lead-out wire and the wiring end of the heating assembly are connected through the binding post, the connection is reliable, the connection strength of the lead-out wire and the wiring end of the heating assembly can be ensured in repeated thermal circulation, the binding post bears the pulling force transmitted by the lead-out wire, and the phenomenon of connection failure is avoided.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more specifically, to a high-temperature ceramic heating plate lead-out structure and connection method. Background Technology

[0002] Currently, in advanced semiconductor manufacturing processes, wafer uniformity is one of the key indicators. Multi-zone independently controlled ceramic heating plates are the core component for achieving precise and uniform temperature control on the wafer surface. These heating plates typically embed multiple independent zone heating wires (such as main heating zone, edge heating zone, and center heating zone) within an alumina (Al2O3) or aluminum nitride (AlN) ceramic substrate. Each zone's heating wire needs to be connected to an external power controller via electrode leads. Because the heating wires are usually quite thin, their strength is relatively low, and the connection between the heating wire and the lead wire is prone to breakage. Furthermore, the high operating temperature of the heating wire generates significant thermal stress during repeated thermal cycling, easily leading to lead wire breakage, ceramic cracking, or connection failure. Chinese patent application number 2023117554780 discloses a high-temperature electrostatic chuck heated by a coil. The heating coil unit includes a coil assembly and a lead-out assembly. The coil assembly is sintered within a ceramic substrate, and the lead-out assembly extends through a heat insulation plate and a water-cooled base. One end of the lead-out assembly is connected to the coil assembly, and the other end is connected to a heating power source under standard atmospheric pressure to power the coil assembly, thereby heating the high-temperature electrostatic chuck. However, the connection between the lead-out assembly and the coil assembly is prone to breakage, leading to connection failure. Summary of the Invention

[0003] To overcome the above shortcomings, the present invention provides a high-temperature ceramic heating plate wire outlet structure and connection method, which ensures reliable connection between the lead wire and the wiring terminal of the heating component, and maintains the connection strength between the lead wire and the wiring terminal of the heating component even in repeated thermal cycles, thus avoiding connection failure.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a high-temperature ceramic heating plate wire outlet structure, including a mounting plate and a heat-conducting plate, a heating component is installed between the mounting plate and the heat-conducting plate, a terminal block is fastened to the heat-conducting plate, the terminal of the heating component is welded to the terminal block, an insulating ceramic tube is sleeved on the terminal block, the insulating ceramic tube is connected to the mounting plate, and the terminal block is connected to the lead wire.

[0005] The heating element's terminals and lead wires are connected via terminals. These terminals bear the tensile force transmitted from the lead wires, preventing the heating element's terminals from disconnecting due to tension. The terminals are securely connected to the heat-conducting plate, preventing them from wobbling even under the tension of the lead wires, thus avoiding pulling on the heating element's terminals. An insulating ceramic tube surrounds the terminals, providing insulation and heat protection for the connection between the terminals and the lead wires. This terminal design strengthens the connection between the lead wires and the heating element's terminals, ensuring the reliability of the lead wire connection during actual use and preventing connection failure.

[0006] Preferably, the terminal block is made of nickel.

[0007] Nickel is resistant to high temperatures, has suitable conductivity, high strength, and is not easily oxidized, ensuring the strength and service life of the connecting post.

[0008] Preferably, a boss is provided at the lower end of the insulating ceramic tube, and a mounting hole is provided on the mounting plate. The insulating ceramic tube passes through the mounting hole, and the boss is limited between the mounting plate and the heat-conducting plate.

[0009] The protrusion provides axial positioning of the insulating ceramic tube, ensuring its reliable installation.

[0010] Preferably, a PIN pin is connected to the end of the lead wire, and a heat shrink tubing is fitted over the lead wire.

[0011] The heat shrink tubing protects the lead wires, while the pins facilitate electrical connections between the lead wires and other devices.

[0012] Preferably, the heating element includes a heating plate and two partition plates, with the heating plate positioned between the two partition plates.

[0013] The two partition plates protect the heating plate and help ensure temperature uniformity in all areas.

[0014] Preferably, a recessed groove is provided on the surface of the heat-conducting plate, and the heating element is placed in the recessed groove.

[0015] The recessed groove provides space for the installation of the heating element, and it also serves to position the heating element.

[0016] Preferably, the heat-conducting plate is provided with connection holes, and the terminal block is threadedly connected and fastened to the connection hole.

[0017] The terminal block and the connecting hole are threaded together, making the connection convenient and reliable.

[0018] Preferably, a protruding post is provided on the heat-conducting plate, and a positioning hole is provided on the mounting plate. The protruding post is inserted into the positioning hole, and a ceramic screw is connected to the protruding post. The nut end of the ceramic screw rests on the mounting plate.

[0019] The heat-conducting plate and the mounting plate are connected by protrusions, connecting holes, and ceramic screws, making the connection convenient and reliable.

[0020] A method for connecting the wiring structure of a high-temperature ceramic heating plate includes the following steps: S1, fastening the terminal block to the heat-conducting plate; S2, welding the wiring terminal of the heating element to the terminal block; S3, connecting the lead wire to the terminal block, thereby completing the connection of the insulating ceramic tube.

[0021] When connecting the lead wires, first securely attach the terminals to the heat-conducting plate to position them. Then, solder the heating element's terminals to the terminals, completing the electrical connection. Next, connect the lead wires to the terminals, connecting the insulating ceramic tube during this process. This completes the connection between the heating element's terminals and the lead wires, ensuring a convenient, reliable, and strong connection while avoiding the risk of the heating element's terminals breaking.

[0022] Preferably, S2 uses a welding disc to perform welding. The welding disc has several positioning slots that are adapted to the heat-conducting plate arranged circumferentially. A movable welding seat is set above the welding disc. A laser welding gun corresponding to the terminal is set on the welding seat. The heat-conducting plate is installed in the positioning slot. The welding disc rotates to align the terminal with the laser welding gun. The welding seat moves to push the laser welding gun to bring the terminal of the heating element close to the terminal to achieve laser welding.

[0023] When welding the terminals of the heating element to the terminals, the heat-conducting plate is first installed into the positioning slot for positioning. As the welding disc rotates, the terminals are aligned with the laser welding gun. The welding seat moves, causing the laser welding gun to push the heating element terminals towards the terminals, achieving laser welding. The movement of the welding seat not only pushes the heating element terminals towards the terminals but also enables laser welding between the terminals and terminals, making the welding operation convenient. After welding the terminals and terminals on one heat-conducting plate is completed, the welding disc is rotated to weld the next heat-conducting plate, resulting in high work efficiency.

[0024] Compared with the prior art, the beneficial effects of the present invention are: (1) The lead wire and the wiring terminal of the heating component are connected by the terminal block, which is reliable. The connection strength of the lead wire and the wiring terminal of the heating component can be guaranteed even in repeated heat cycles. The terminal block bears the tension transmitted by the lead wire, avoiding connection failure; (2) The high temperature ceramic heating plate wire outlet structure is easy to connect and has high working efficiency. Attached Figure Description

[0025] Figure 1 This is a structural diagram of the present invention.

[0026] Figure 2 This is a cross-sectional view of the present invention.

[0027] Figure 3 This is an exploded view of the present invention.

[0028] Figure 4 These are structural diagrams of the welding pads in embodiments 2 and 3 of the present invention.

[0029] Figure 5 This is a schematic diagram of the lead wire connection principle in Embodiment 3 of the present invention.

[0030] Figure 6 This is a connection diagram of the positioning clamp in Embodiment 3 of the present invention.

[0031] In the diagram: 1. Mounting plate, 2. Heat-conducting plate, 3. Heating element, 4. Recessed groove, 5. Heating plate, 6. Divider plate, 7. Terminal block, 8. Connecting hole, 9. Insulating ceramic tube, 10. Welding post, 11. Lead wire, 12. Boss, 13. Mounting hole, 14. Receiving groove, 15. Protruding ring, 16. Pin, 17. Heat shrink tubing, 18. Protruding post, 19. Positioning hole, 20. Ceramic screw, 21. Welding plate, 22. Welding seat, 23. Base, 24. Piston cylinder, 25. Buffer spring, 26. Laser welding gun, 27. Support platform, 28. Clamp, 29. Sliding column, 30. Clamp body, 31. Connecting rod, 32. Tension spring, 33. Clamping groove, 34. Support column, 35. Support plate. Detailed Implementation

[0032] The technical solution of the present invention will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: A high-temperature ceramic heating plate cable outlet structure (see...) Figure 1 , Figure 2 , Figure 3 The device includes a mounting plate 1 and a heat-conducting plate 2. A heating element 3 is installed between the mounting plate 1 and the heat-conducting plate 2. The heat-conducting plate 2 serves as the working panel, while the mounting plate 1 is a non-working panel. A recessed groove 4 is provided on the surface of the heat-conducting plate 2. The recessed groove 4 is adapted to the heating element 3, and the heating element 3 is placed in the recessed groove 4. The recessed groove 4 provides space for the installation of the heating element 3 and also serves to position the heating element 3. The heating element 3 includes a heating plate 5 and two partition plates 6. The heating plate 5 is placed between the two partition plates 6. The heating plate is made of mica sheet and resistance wire. The two ends of the resistance wire are connected to terminals to form the wiring terminals of the heating element 3.

[0033] Two terminals 7 are fastened to the heat-conducting plate 2, and two connection holes 8 are provided on the heat-conducting plate 2. The two terminals 7 are threadedly connected to the two connection holes 8 respectively. The terminals of the heating element 3 are welded to the terminals 7 and welded to the side wall of the terminals 7. An insulating ceramic tube 9 is fitted over the terminals 7. The insulating ceramic tube 9 is connected to the mounting plate 1. The terminals 7 are connected to lead wires 11, and the lead wires 11 pass through the insulating ceramic tube 9.

[0034] The terminal 7 is made of nickel. The lower part of the terminal 7 is a threaded section, and the upper part is a connecting section. The diameter of the threaded section is smaller than the diameter of the connecting section. The threaded section is threadedly connected and secured to the connecting hole 8 on the heat-conducting plate 2. The lower end of the connecting section abuts against the surface of the heat-conducting plate 2. The terminal of the heating element 3 is welded to the outer wall of the connecting section. A welding post 10 is provided at the upper end of the connecting section, and the lead wire 11 is welded to the welding post 10. The terminal 7 is made of nickel, which is resistant to high temperatures, has suitable conductivity, high strength, and is not easily oxidized, ensuring the strength and service life of the connecting post.

[0035] A boss 12 is provided at the lower end of the insulating ceramic tube 9, and a mounting hole 13 is provided on the mounting plate 1. The insulating ceramic tube 9 passes through the mounting hole 13. The outer diameter of the boss 12 is larger than the outer diameter of the insulating ceramic tube 9, and the boss 12 is limited between the mounting plate 1 and the heat-conducting plate 2. A receiving groove 14 is provided on the lower surface of the mounting plate 1, and the mounting hole 13 is located at the bottom of the receiving groove 14. The boss 12 is placed in the receiving groove 14, and the connecting section of the terminal 7 is placed inside the insulating ceramic tube 9. The boss 12 provides axial limitation for the insulating ceramic tube 9, ensuring reliable installation of the insulating ceramic tube 9. A raised ring 15 is provided inside the insulating ceramic tube 9, and the lead wire 11 passes through the raised ring 15. The raised ring 15 plays a certain positioning role for the lead wire 11.

[0036] A pin 16 is connected to the end of the lead wire 11, and a heat shrink tubing 17 is fitted over the lead wire 11. The heat shrink tubing 17 protects the lead wire 11, and the pin 16 facilitates the electrical connection of the lead wire 11 to other devices. A protrusion 18 is provided on the heat-conducting plate 2, and a positioning hole 19 is provided on the mounting plate 1. The protrusion 18 is inserted into the positioning hole 19, and a ceramic screw 20 is connected to the protrusion 18. The nut end of the ceramic screw 20 rests on the mounting plate 1.

[0037] The wiring terminal of the heating element 3 and the lead wire 11 are connected via a terminal block 7. The terminal block 7 bears the tension transmitted from the lead wire 11, preventing the wiring terminal of the heating element 3 from disconnecting due to the tension of the lead wire 11. The terminal block 7 is firmly connected to the heat-conducting plate 2, and will not wobble even under the tension of the lead wire 11, thus preventing the wiring terminal of the heating element 3 from being pulled. The terminal block 7 is encased in an insulating ceramic tube 9, which provides insulation and heat insulation, protecting the connection point between the terminal block 7 and the lead wire 11. The terminal block 7 strengthens the connection between the lead wire 11 and the wiring terminal of the heating element 3, ensuring the reliability of the lead wire 11 during actual use of the ceramic heating plate and preventing connection failure.

[0038] A connection method for the high-temperature ceramic heating plate wire outlet structure, which realizes the connection of the high-temperature ceramic heating plate wire outlet structure, includes the following steps: S1, fastening the terminal 7 to the heat-conducting plate 2; the two terminal 7 are respectively threadedly connected and fastened to the two connection holes 8 on the heat-conducting plate 2.

[0039] S2, install the heating element 3 into the recessed groove 4 on the heat-conducting plate 2, and weld the wiring terminal of the heating element 3 to the terminal 7 using laser spot welding to connect and fix the wiring terminal of the heating element 3 to the side wall of the terminal 7.

[0040] S3, connect the lead wire 11 to the terminal 7, and complete the connection of the insulating ceramic tube 9 in the process. In specific operation, first weld the end of the lead wire 11 to the welding post 10 on the terminal 7 by argon arc welding, then insert the insulating ceramic tube 9 into the mounting hole 13 on the mounting plate 1, pass the lead wire 11 through the insulating ceramic tube 9, and fasten the mounting plate 1 and the heat-conducting plate 2 together, then put the heat shrink tubing 17 on the lead wire 11, and finally connect the PIN pin 16 to the other end of the lead wire 11.

[0041] When connecting the lead wire 11, first securely connect the terminal 7 to the heat-conducting plate 2 to achieve the positioning of the terminal 7. Then, solder the terminal of the heating element 3 to the terminal 7, at which point the terminal of the heating element 3 is electrically connected. Next, connect the lead wire 11 to the terminal 7, completing the connection of the insulating ceramic tube 9 during this process. This completes the connection between the terminal of the heating element 3 and the lead wire 11. The connection is convenient, reliable, and has good strength, avoiding the risk of the heating element 3 terminal disconnecting.

[0042] Example 2: A high-temperature ceramic heating plate cable outlet structure (see...) Figure 1 , Figure 2 , Figure 3The device includes a mounting plate 1 and a heat-conducting plate 2. A heating element 3 is installed between the mounting plate 1 and the heat-conducting plate 2. The heat-conducting plate 2 serves as the working panel, while the mounting plate 1 is a non-working panel. A recessed groove 4 is provided on the surface of the heat-conducting plate 2. The recessed groove 4 is adapted to the heating element 3, and the heating element 3 is placed in the recessed groove 4. The recessed groove 4 provides space for the installation of the heating element 3 and also serves to position the heating element 3. The heating element 3 includes a heating plate 5 and two partition plates 6. The heating plate 5 is placed between the two partition plates 6. The heating plate is made of mica sheet and resistance wire. The two ends of the resistance wire are connected to terminals to form the wiring terminals of the heating element 3.

[0043] Two terminals 7 are fastened to the heat-conducting plate 2, and two connection holes 8 are provided on the heat-conducting plate 2. The two terminals 7 are threadedly connected to the two connection holes 8 respectively. The terminals of the heating element 3 are welded to the terminals 7 and welded to the side wall of the terminals 7. An insulating ceramic tube 9 is fitted over the terminals 7. The insulating ceramic tube 9 is connected to the mounting plate 1. The terminals 7 are connected to lead wires 11, and the lead wires 11 pass through the insulating ceramic tube 9.

[0044] The terminal 7 is made of nickel. The lower part of the terminal 7 is a threaded section, and the upper part is a connecting section. The diameter of the threaded section is smaller than the diameter of the connecting section. The threaded section is threadedly connected and secured to the connecting hole 8 on the heat-conducting plate 2. The lower end of the connecting section abuts against the surface of the heat-conducting plate 2. The terminal of the heating element 3 is welded to the outer wall of the connecting section. A welding post 10 is provided at the upper end of the connecting section, and the lead wire 11 is welded to the welding post 10. The terminal 7 is made of nickel, which is resistant to high temperatures, has suitable conductivity, high strength, and is not easily oxidized, ensuring the strength and service life of the connecting post.

[0045] A boss 12 is provided at the lower end of the insulating ceramic tube 9, and a mounting hole 13 is provided on the mounting plate 1. The insulating ceramic tube 9 passes through the mounting hole 13. The outer diameter of the boss 12 is larger than the outer diameter of the insulating ceramic tube 9, and the boss 12 is limited between the mounting plate 1 and the heat-conducting plate 2. A receiving groove 14 is provided on the lower surface of the mounting plate 1, and the mounting hole 13 is located at the bottom of the receiving groove 14. The boss 12 is placed in the receiving groove 14, and the connecting section of the terminal 7 is placed inside the insulating ceramic tube 9. The boss 12 provides axial limitation for the insulating ceramic tube 9, ensuring reliable installation of the insulating ceramic tube 9. A raised ring 15 is provided inside the insulating ceramic tube 9, and the lead wire 11 passes through the raised ring 15. The raised ring 15 plays a certain positioning role for the lead wire 11.

[0046] A pin 16 is connected to the end of the lead wire 11, and a heat shrink tubing 17 is fitted over the lead wire 11. The heat shrink tubing 17 protects the lead wire 11, and the pin 16 facilitates the electrical connection of the lead wire 11 to other devices. A protrusion 18 is provided on the heat-conducting plate 2, and a positioning hole 19 is provided on the mounting plate 1. The protrusion 18 is inserted into the positioning hole 19, and a ceramic screw 20 is connected to the protrusion 18. The nut end of the ceramic screw 20 rests on the mounting plate 1.

[0047] The wiring terminal of the heating element 3 and the lead wire 11 are connected via a terminal block 7. The terminal block 7 bears the tension transmitted from the lead wire 11, preventing the wiring terminal of the heating element 3 from disconnecting due to the tension of the lead wire 11. The terminal block 7 is firmly connected to the heat-conducting plate 2, and will not wobble even under the tension of the lead wire 11, thus preventing the wiring terminal of the heating element 3 from being pulled. The terminal block 7 is encased in an insulating ceramic tube 9, which provides insulation and heat insulation, protecting the connection point between the terminal block 7 and the lead wire 11. The terminal block 7 strengthens the connection between the lead wire 11 and the wiring terminal of the heating element 3, ensuring the reliability of the lead wire 11 during actual use of the ceramic heating plate and preventing connection failure.

[0048] A connection method for the high-temperature ceramic heating plate wire outlet structure, which realizes the connection of the high-temperature ceramic heating plate wire outlet structure, includes the following steps: S1, fastening the terminal 7 to the heat-conducting plate 2; the two terminal 7 are respectively threadedly connected and fastened to the two connection holes 8 on the heat-conducting plate 2.

[0049] S2, install the heating element 3 into the recessed groove 4 on the heat-conducting plate 2, and weld the wiring terminals of the heating element 3 to the terminal blocks 7 using laser spot welding to connect and fix the wiring terminals of the heating element 3 to the side wall of the terminal blocks 7. Welding is achieved using welding pads 21, such as... Figure 4As shown, the welding plate 21 has several circumferentially spaced positioning grooves that fit the heat-conducting plate 2. A movable welding seat 22 is positioned above the welding plate 21, and a base 23 is correspondingly positioned on the welding seat 22. The welding seat 22 is slidably mounted on the base 23, which has a sliding groove. The welding seat 22 is slidably connected to the sliding groove. A piston cylinder 24 is mounted on the base 23, and the extension rod of the piston cylinder 24 is connected to the welding seat 22 by a buffer spring 25. Two laser welding guns 26 corresponding to the terminals 7 are mounted on the welding seat 22. The heat-conducting plate 2 is installed in the positioning grooves. The rotation of the welding plate 21 aligns the terminals 7 with the laser welding guns 26. The piston cylinder 24 pushes the welding seat 22 to move, causing the laser welding guns 26 to push the terminals of the heating element 3 closer to the terminals 7, thus achieving laser welding. The buffer springs 25 prevent excessive pressure on the terminals of the heating element 3 from causing damage. The movement of the welding seat 22 not only pushes the terminals of the heating element 3 towards the terminals 7 but also achieves laser welding between the terminals and the terminals 7, making the welding operation convenient. After the terminals on one heat-conducting plate 2 are welded to the terminal 7, the welding disc 21 is rotated to weld the next heat-conducting plate 2, resulting in high work efficiency.

[0050] S3, connect the lead wire 11 to the terminal 7, and complete the connection of the insulating ceramic tube 9 in the process. In specific operation, first weld the end of the lead wire 11 to the welding post 10 on the terminal 7 by argon arc welding, then insert the insulating ceramic tube 9 into the mounting hole 13 on the mounting plate 1, pass the lead wire 11 through the insulating ceramic tube 9, and fasten the mounting plate 1 and the heat-conducting plate 2 together, then put the heat shrink tubing 17 on the lead wire 11, and finally connect the PIN pin 16 to the other end of the lead wire 11.

[0051] When connecting the lead wire 11, first securely connect the terminal 7 to the heat-conducting plate 2 to achieve the positioning of the terminal 7. Then, solder the terminal of the heating element 3 to the terminal 7, at which point the terminal of the heating element 3 is electrically connected. Next, connect the lead wire 11 to the terminal 7, completing the connection of the insulating ceramic tube 9 during this process. This completes the connection between the terminal of the heating element 3 and the lead wire 11. The connection is convenient, reliable, and has good strength, avoiding the risk of the heating element 3 terminal disconnecting.

[0052] Example 3: A high-temperature ceramic heating plate cable outlet structure (see...) Figure 1 , Figure 2 , Figure 3The device includes a mounting plate 1 and a heat-conducting plate 2. A heating element 3 is installed between the mounting plate 1 and the heat-conducting plate 2. The heat-conducting plate 2 serves as the working panel, while the mounting plate 1 is a non-working panel. A recessed groove 4 is provided on the surface of the heat-conducting plate 2. The recessed groove 4 is adapted to the heating element 3, and the heating element 3 is placed in the recessed groove 4. The recessed groove 4 provides space for the installation of the heating element 3 and also serves to position the heating element 3. The heating element 3 includes a heating plate 5 and two partition plates 6. The heating plate 5 is placed between the two partition plates 6. The heating plate is made of mica sheet and resistance wire. The two ends of the resistance wire are connected to terminals to form the wiring terminals of the heating element 3.

[0053] Two terminals 7 are fastened to the heat-conducting plate 2, and two connection holes 8 are provided on the heat-conducting plate 2. The two terminals 7 are threadedly connected to the two connection holes 8 respectively. The terminals of the heating element 3 are welded to the terminals 7 and welded to the side wall of the terminals 7. An insulating ceramic tube 9 is fitted over the terminals 7. The insulating ceramic tube 9 is connected to the mounting plate 1. The terminals 7 are connected to lead wires 11, and the lead wires 11 pass through the insulating ceramic tube 9.

[0054] The terminal 7 is made of nickel. The lower part of the terminal 7 is a threaded section, and the upper part is a connecting section. The diameter of the threaded section is smaller than the diameter of the connecting section. The threaded section is threadedly connected and secured to the connecting hole 8 on the heat-conducting plate 2. The lower end of the connecting section abuts against the surface of the heat-conducting plate 2. The terminal of the heating element 3 is welded to the outer wall of the connecting section. A welding post 10 is provided at the upper end of the connecting section, and the lead wire 11 is welded to the welding post 10. The terminal 7 is made of nickel, which is resistant to high temperatures, has suitable conductivity, high strength, and is not easily oxidized, ensuring the strength and service life of the connecting post.

[0055] A boss 12 is provided at the lower end of the insulating ceramic tube 9, and a mounting hole 13 is provided on the mounting plate 1. The insulating ceramic tube 9 passes through the mounting hole 13. The outer diameter of the boss 12 is larger than the outer diameter of the insulating ceramic tube 9, and the boss 12 is limited between the mounting plate 1 and the heat-conducting plate 2. A receiving groove 14 is provided on the lower surface of the mounting plate 1, and the mounting hole 13 is located at the bottom of the receiving groove 14. The boss 12 is placed in the receiving groove 14, and the connecting section of the terminal 7 is placed inside the insulating ceramic tube 9. The boss 12 provides axial limitation for the insulating ceramic tube 9, ensuring reliable installation of the insulating ceramic tube 9. A raised ring 15 is provided inside the insulating ceramic tube 9, and the lead wire 11 passes through the raised ring 15. The raised ring 15 plays a certain positioning role for the lead wire 11.

[0056] A pin 16 is connected to the end of the lead wire 11, and a heat shrink tubing 17 is fitted over the lead wire 11. The heat shrink tubing 17 protects the lead wire 11, and the pin 16 facilitates the electrical connection of the lead wire 11 to other devices. A protrusion 18 is provided on the heat-conducting plate 2, and a positioning hole 19 is provided on the mounting plate 1. The protrusion 18 is inserted into the positioning hole 19, and a ceramic screw 20 is connected to the protrusion 18. The nut end of the ceramic screw 20 rests on the mounting plate 1.

[0057] The wiring terminal of the heating element 3 and the lead wire 11 are connected via a terminal block 7. The terminal block 7 bears the tension transmitted from the lead wire 11, preventing the wiring terminal of the heating element 3 from disconnecting due to the tension of the lead wire 11. The terminal block 7 is firmly connected to the heat-conducting plate 2, and will not wobble even under the tension of the lead wire 11, thus preventing the wiring terminal of the heating element 3 from being pulled. The terminal block 7 is encased in an insulating ceramic tube 9, which provides insulation and heat insulation, protecting the connection point between the terminal block 7 and the lead wire 11. The terminal block 7 strengthens the connection between the lead wire 11 and the wiring terminal of the heating element 3, ensuring the reliability of the lead wire 11 during actual use of the ceramic heating plate and preventing connection failure.

[0058] A connection method for the high-temperature ceramic heating plate wire outlet structure, which realizes the connection of the high-temperature ceramic heating plate wire outlet structure, includes the following steps: S1, fastening the terminal 7 to the heat-conducting plate 2; the two terminal 7 are respectively threadedly connected and fastened to the two connection holes 8 on the heat-conducting plate 2.

[0059] S2, install the heating element 3 into the recessed groove 4 on the heat-conducting plate 2, and weld the wiring terminals of the heating element 3 to the terminal blocks 7 using laser spot welding to connect and fix the wiring terminals of the heating element 3 to the side wall of the terminal blocks 7. Welding is achieved using welding pads 21, such as... Figure 4As shown, the welding plate 21 has several circumferentially spaced positioning grooves that fit the heat-conducting plate 2. A movable welding seat 22 is positioned above the welding plate 21, and a base 23 is correspondingly positioned on the welding seat 22. The welding seat 22 is slidably mounted on the base 23, which has a sliding groove. The welding seat 22 is slidably connected to the sliding groove. A piston cylinder 24 is mounted on the base 23, and the extension rod of the piston cylinder 24 is connected to the welding seat 22 by a buffer spring 25. Two laser welding guns 26 corresponding to the terminals 7 are mounted on the welding seat 22. The heat-conducting plate 2 is installed in the positioning grooves. The rotation of the welding plate 21 aligns the terminals 7 with the laser welding guns 26. The piston cylinder 24 pushes the welding seat 22 to move, causing the laser welding guns 26 to push the terminals of the heating element 3 closer to the terminals 7, thus achieving laser welding. The buffer springs 25 prevent excessive pressure on the terminals of the heating element 3 from causing damage. The movement of the welding seat 22 not only pushes the terminals of the heating element 3 towards the terminals 7 but also achieves laser welding between the terminals and the terminals 7, making the welding operation convenient. After the terminals on one heat-conducting plate 2 are welded to the terminal 7, the welding disc 21 is rotated to weld the next heat-conducting plate 2, resulting in high work efficiency.

[0060] S3, connect the lead wire 11 to the terminal 7, completing the connection of the insulating ceramic tube 9 in this process. In specific operation, as follows: Figure 5 , Figure 6 As shown, first, insert the insulating ceramic tube 9 into the mounting hole 13 on the mounting plate 1. Then, clamp the insulating ceramic tube 9 with the clip 28 to prevent it from slipping off the mounting hole 13. Next, pass the lead wire 11 through the insulating ceramic tube 9, bending the upper and lower parts of the lead wire 11 so that the two bends are at the upper and lower ends of the insulating ceramic tube 9, thus preventing the lead wire 11 from slipping off the insulating ceramic tube 9. Then, place the mounting plate 1 on the rotating support platform 27 and rotate the support platform 27 to position the mounting plate 1 above the heat-conducting plate 2. Weld the end of the lead wire 11 to the welding post 10 on the terminal 7 using argon arc welding. After straightening the lead wire 11, rotate and remove the support platform 27 to secure the mounting plate 1 and the heat-conducting plate 2 together. Remove the clip 28, then put the heat shrink tubing 17 onto the lead wire 11. Finally, connect the PIN pin 16 to the other end of the lead wire 11.

[0061] The clamp 28 includes a sliding post 29 and two clamping bodies 30, both of which are slidably connected to the sliding post 29. The sliding post 29 has a non-circular cross-section; in this embodiment, the cross-section is square to prevent the clamping bodies 30 from rotating relative to the sliding post 29. Each clamping body 30 has a clamping groove 33 on its opposite surface that fits the outer wall of the insulating ceramic tube 9. A tension spring 32 connects the two clamping bodies 30. A connecting rod 31 is hinged to each clamping body 30, with the ends of the two connecting rods 31 hinged together to form a V-shaped structure. Pressing the two connecting rods 31 causes the two clamping bodies 30 to unfold; releasing the connecting rods 31 causes the two clamping bodies 30 to move closer together under the action of the tension spring 32. A support platform 27 is rotatably mounted on a support column 34, and a support plate 35 is provided on the support column 34. The support platform 27 is supported on the support plate 35. When one end of the lead wire 11 is already connected to other components and cannot pass through the insulating ceramic tube 9, the unused end of the lead wire 11 can be passed through the insulating ceramic tube 9 first before welding. During this process, the clamp 28 clamps the insulating ceramic tube 9 to achieve axial positioning of the insulating ceramic tube 9, which facilitates the connection operation.

[0062] When connecting the lead wire 11, first securely connect the terminal 7 to the heat-conducting plate 2 to achieve the positioning of the terminal 7. Then, solder the terminal of the heating element 3 to the terminal 7, at which point the terminal of the heating element 3 is electrically connected. Next, connect the lead wire 11 to the terminal 7, completing the connection of the insulating ceramic tube 9 during this process. This completes the connection between the terminal of the heating element 3 and the lead wire 11. The connection is convenient, reliable, and has good strength, avoiding the risk of the heating element 3 terminal disconnecting.

[0063] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Other variations and modifications may be made without departing from the technical solutions described in the claims.

Claims

1. A high-temperature ceramic heating plate cable outlet structure, characterized in that, It includes a mounting plate and a heat-conducting plate. A heating element is installed between the mounting plate and the heat-conducting plate. A terminal block is fastened to the heat-conducting plate. The terminal block of the heating element is welded to the terminal block. An insulating ceramic tube is fitted over the terminal block. The insulating ceramic tube is connected to the mounting plate. The terminal block is connected to lead wires.

2. The high-temperature ceramic heating plate cable outlet structure according to claim 1, characterized in that, The terminal block is made of nickel.

3. The high-temperature ceramic heating plate cable outlet structure according to claim 1, characterized in that, A boss is provided at the lower end of the insulating ceramic tube, and a mounting hole is provided on the mounting plate. The insulating ceramic tube passes through the mounting hole, and the boss is limited between the mounting plate and the heat-conducting plate.

4. The high-temperature ceramic heating plate cable outlet structure according to claim 1, characterized in that, Connect the lead wire to the PIN pin, and then cover the lead wire with heat shrink tubing.

5. The high-temperature ceramic heating plate cable outlet structure according to claim 1, characterized in that, The heating element includes a heating plate and two partition plates, with the heating plate positioned between the two partition plates.

6. The high-temperature ceramic heating plate cable outlet structure according to claim 1, characterized in that, A recessed groove is provided on the surface of the heat-conducting plate, and the heating element is placed in the recessed groove.

7. The high-temperature ceramic heating plate cable outlet structure according to claim 1, characterized in that, Connection holes are provided on the heat-conducting plate, and the terminal block is threadedly connected to the connection hole for secure fastening.

8. A high-temperature ceramic heating plate cable outlet structure according to any one of claims 1 to 7, characterized in that, A protruding post is provided on the heat-conducting plate, and a positioning hole is provided on the mounting plate. The protruding post is inserted into the positioning hole and connected to the protruding post. A ceramic screw is connected to the protruding post, and the nut end of the ceramic screw rests on the mounting plate.

9. A method for connecting the high-temperature ceramic heating plate cable outlet structure, thereby achieving the connection of the high-temperature ceramic heating plate cable outlet structure according to any one of claims 1 to 8, characterized in that, Includes the following steps: S1, Secure the terminal block to the heat-conducting plate; S2, Solder the terminal block of the heating element to the terminal block; S3, Connect the lead wire to the terminal block, completing the connection of the insulating ceramic tube in the process.

10. The connection method of the high-temperature ceramic heating plate cable outlet structure according to claim 9, characterized in that, S2 uses a welding disc for welding. The welding disc has several positioning slots spaced around its circumference to fit the heat-conducting plate. A movable welding seat is set above the welding disc, and a laser welding gun corresponding to the terminal block is set on the welding seat. The heat-conducting plate is installed in the positioning slot. The welding disc rotates to align the terminal block with the laser welding gun. The welding seat moves to push the laser welding gun to bring the heating element terminal block closer to the terminal block to achieve laser welding.

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