Magnetic control deformation self-cleaning mechanism and thin film deposition equipment thereof
By utilizing an alternating magnetic field and a permanent magnet rotor vibration design, the magnetically controlled deformation self-cleaning mechanism solves the problem of difficult-to-clean deposits inside bellows, achieving more thorough cleaning and lower operating costs, and improving process quality and efficiency.
CN122099009APending Publication Date: 2026-05-29PIOTECH (SHANGHAI) CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- CN202610426276.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-04-01
- Publication Date
- 2026-05-29
AI Technical Summary
Technical Problem
In existing semiconductor thin film deposition equipment, the deposits on the inner wall of the bellows are difficult to clean, resulting in particulate matter contamination and high operating costs.
Method used
It adopts a magnetically controlled deformation self-cleaning mechanism, which uses an alternating magnetic field to act on the ferromagnetic shape memory alloy parts, causing them to undergo slight deformation to remove adhering substances. Combined with the design of permanent magnet rotor vibration and air extraction holes, it thoroughly removes particulate matter.
Benefits of technology
It reduces the frequency of bellows replacement, reduces particulate matter residue, improves process quality and efficiency, and reduces operating costs.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN122099009A_ABST
Abstract
The application discloses a magnetic control deformation self-cleaning mechanism and a thin film deposition device thereof. The magnetic control deformation self-cleaning mechanism comprises a telescopic pipe, an alternating magnetic field generating module and a ferromagnetic shape memory alloy piece. The ferromagnetic shape memory alloy piece is attached to the inner wall of the lumen of the telescopic pipe. The alternating magnetic field generating module generates an alternating magnetic field to produce a magnetic force on the ferromagnetic shape memory alloy piece, so that the ferromagnetic shape memory alloy piece is deformed due to phase change, and the particles deposited on the surface of the ferromagnetic shape memory alloy piece are removed. The magnetic control deformation self-cleaning mechanism does not need to frequently replace the bellows, reduces the use cost, can obviously reduce the process particle adhesion, can more thoroughly perform internal air extraction and purging, and finally improves the process quality and efficiency.
Need to check novelty before this filing date? Find Prior Art