An atomic layer deposition apparatus

Abstract

The application discloses an atomic layer deposition device, which comprises a reactor and a heating jacket inside a shell, the reactor is arranged inside the heating jacket, an inner cavity is formed between the reactor and the heating jacket, an outer cavity is formed between the heating jacket and the shell, heating wires are wound outside the heating jacket, and filter screens are arranged at both ends of the reactor; the reactor is clamped with the end of the rotating shaft which extends into the shell through a connecting seat, one end of the rotating shaft which extends out of the heating jacket is connected with a bearing seat, one end of the bearing seat which is close to the heating jacket is embedded into the shell, one end of the bearing seat which is far away from the heating jacket is connected with a motor, the motor drives the rotating shaft to rotate, and the rotating shaft is provided with an air inlet cavity in the axial direction, and the air inlet cavity is communicated with an air inlet channel of the bearing seat; the inner cavity and the outer cavity can be vacuumized. The application can improve the heating efficiency, plays a heat preservation and heat insulation role, and reduces the interference factors of the internal reaction.

Description

Technical Field

[0001] This invention relates to the field of deposition coating technology, and in particular to an atomic layer deposition apparatus. Background Technology

[0002] Atomic layer deposition (ALD) is a high-precision thin film deposition technique widely used in semiconductors, microelectronics, optical devices, and new energy fields. This technique involves alternating the introduction of different precursor gases to induce a self-limiting chemical reaction on the substrate surface, growing layer by layer nanoscale thin films with excellent uniformity, shape preservation, and precise thickness control.

[0003] Traditional ALD (Alternating Current Discharge) equipment typically employs a single-chamber structure for the reaction. However, this structure has several significant drawbacks in practical applications: First, because the heating device is directly located within a single reaction chamber, heat is easily dissipated to the external environment through the chamber walls, resulting in low heating efficiency and difficulty in maintaining the stable high-temperature environment required for the reaction. Second, the high-temperature area is close to other heat-sensitive components (such as sensors, seals, and electrical connections), which can easily cause these components to fail or even be damaged due to heat radiation or conduction, affecting the long-term reliability of the equipment. Furthermore, operators are prone to contact with the high-temperature chamber surface during sample loading or replacement, posing a risk of burns.

[0004] Therefore, developing a new atomic layer deposition device can not only help solve the thermal management problems and safety risks in traditional single-cavity designs, but also improve system sealing and process stability, and has important engineering application value. Summary of the Invention

[0005] This invention provides an atomic layer deposition apparatus that improves heating efficiency and provides heat preservation and insulation by setting a double-layer cavity structure. The outer cavity is equipped with a vacuum detection device, which can serve as a second sealing barrier to almost completely isolate the inner cavity from the material barrel and reduce interference factors in the internal reaction.

[0006] The technical solution is as follows: An atomic layer deposition apparatus, a housing, having an openable and closable door structure, a heating sleeve disposed between the first end inside the housing and the door structure when closed, dividing the housing into a columnar inner cavity and an annular outer cavity that are airtightly isolated from each other by the inner and outer sides of the heating sleeve, and the inner cavity and the outer cavity are respectively connected to an air extraction device and an air supply device through pipes. The motor is installed outside the housing. The motor and the housing are connected by a bearing housing. The rotating shaft of the motor can rotatably pass through the bearing in the bearing housing and the first end of the housing extends into the inner cavity. The rotating shaft has an air intake chamber and an annular groove in the axial and radial directions, respectively. One end of the air intake chamber is connected to the inner cavity and the other end is connected to the annular groove. A pair of air intake channels arranged radially on the bearing housing are aligned with the annular groove. The reactor, used to hold powder, is configured to be open at both ends. One end of the reactor is detachably connected to a rotating shaft in the inner cavity. Removable filter screens are installed near both ends inside the reactor to prevent the powder from leaving the reactor.

[0007] Furthermore, the heating jacket is wrapped with heating wires, one end of the reactor is detachably connected to the rotating shaft via a connecting seat, and the other end is detachably fitted with a sealing plate. A filter screen is centrally located on the sealing plate, and a second filter screen is fixed between the reactor and the connecting seat. A columnar groove is provided on the side of the connecting seat facing away from the reactor, and a through hole is centrally located on the connecting seat to connect the columnar groove and the reactor. The columnar groove is connected to the end of the rotating shaft via a keyway.

[0008] Furthermore, the heating sleeve is connected to the first end inside the housing via a sealing base to form an end face seal. The rotating shaft can rotatably pass through the sealing base, and the connecting seat can also rotatably embed into the sealing base. The sealing base includes an annular heat insulation plate and a flange. The heat insulation plate is located between the heating sleeve and the flange, and the connecting seat is clearance-fitted with the inner circumference of the heat insulation plate.

[0009] Furthermore, the end of the rotating shaft extending into the housing is constructed as a second shaft and a first shaft with decreasing diameters from the side near the motor to the side near the inner cavity. The side of the second shaft is evenly provided with protrusions. The columnar groove of the connecting seat, away from the heating sleeve and cooperating with the rotating shaft, is provided with a groove channel for the protrusions to slide. The groove channel extends from one end near the protrusion to the other groove channel to form an inner concave surface. When the rotating shaft extends into the connecting seat, the protrusion slides along the groove channel. When the protrusion slides to the bottom of the groove channel, the rotating shaft rotates in the direction of the inner concave surface. At this time, the rotating shaft is engaged with the connecting seat.

[0010] Furthermore, the radial depth of the concave surface is not less than the radial thickness of the protrusion.

[0011] Furthermore, the flange and the heat insulation plate are provided with an air extraction port corresponding to the pipe connected to the air extraction device, and an inert gas inlet corresponding to the pipe connected to the gas transmission device.

[0012] Furthermore, the door structure includes a sealing base plate, a support plate, and a sliding plate. The sliding plate is embedded in a slide rail and can move along the end face of the slide rail relative to the housing. The sealing base plate has an annular groove at the end facing the heating sleeve, and a sealing ring is provided in the annular groove. The sealing base plate and the support plate are connected by an elastic structure. A cover plate is installed on the side of the support plate facing away from the sealing base plate, forming a disc-shaped cavity between the cover plate and the support plate. One end of a spiral rod rotatably passes through the cover plate and is fixedly connected to a disc-shaped object in the disc-shaped cavity. The spiral rod is threadedly engaged with the sliding plate. The other end of the spiral rod passes through the sliding plate and is connected to a rotating handle. Rotating the rotating handle controls the support plate to move in the direction of the spiral rod axis. When the support plate moves to contact the end face of the housing, the sealing base plate contacts the heating sleeve, and the elastic structure between the sealing base plate and the support plate is compressed, and the sealing ring in the annular groove is compressed.

[0013] Furthermore, the outer cavity sidewall of the housing is also connected to a gas pipe and a vacuum pipe.

[0014] Effective effects: The design of the inner and outer cavities of this invention can improve heating efficiency and provide heat preservation and insulation; the outer cavity is equipped with a vacuum detection device, which can serve as a second sealing barrier, almost completely isolating the inner cavity from the atmosphere and reducing interference factors in the internal reaction. Attached Figure Description

[0015] Figure 1 This is a cross-sectional view of the overall structure of the present invention; Figure 2 This is a cross-sectional view of the overall structure of the present invention and is relative to... Figure 3 The cross-sectional view is rotated 90° around the central axis; Figure 3 for Figure 2 Sectional view of the overall structure of AA; Figure 4 This is a schematic diagram of the rotating shaft structure of the present invention; Figure 5 This is a schematic diagram of the connector structure of the present invention. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] like Figure 1-4As shown, an atomic layer deposition apparatus includes a reactor 3 and a heating jacket 4 disposed inside a housing 1. A sealing base and a door structure 2 are respectively provided at the first and second opposite ends of the housing 1 to seal the two ends of the heating jacket 4. An outer cavity 6 is formed between the heating jacket 4 and the housing 1. The rotating shaft 14 of a motor 13 rotatably passes through the sealing base and is detachably pivotally connected to the reactor 3 inside the housing 1. The reactor 3 is disposed inside the heating jacket 4, and an inner cavity 5 is formed between the reactor 3 and the heating jacket 4. The bottom plate at the first end of the housing 1 is also provided with an exhaust port 26 and an inert gas inlet 27. The sealing base is provided with channels connecting the inner cavity 5 and the exhaust port 26, and connecting the inner cavity 5 and the inert gas inlet 27. The exhaust port 26 is connected to an exhaust pipe, and the inert gas inlet 27 is connected to an inlet pipe. The sealing base and the door structure 2 isolate the inner cavity 5 from the outer cavity 6. A heating wire 7 is wound around the outside of the heating jacket 4.

[0018] The reactor 3 is open at both ends. The end of the reactor 3 away from the rotating shaft 14 is connected to the sealing plate 10. The sealing plate 10 has a central hole and a filter screen 9 recessed into the reactor 3. The side of the sealing plate 10 facing away from the reactor 3 has a handle. The end of the reactor 3 near the rotating shaft 14 is detachably connected to the connecting seat 11. The filter screen 28 is fixed between the connecting seat 11 and the reactor 3. The side of the connecting seat 11 facing away from the reactor 3 has a columnar groove. The connecting seat 11 also has a through hole in the center connecting the columnar groove and the reactor 3. The columnar groove and the end of the rotating shaft 14 that passes through the sealing base and extends into the shell 1 are connected by a keyway. The outer periphery of the connecting seat 11 is rotatably connected to the sealing base. The end of the rotating shaft 14 outside the shell 1 is... The bearing housing 12 is rotatably connected to the heating sleeve 4. One end of the bearing housing 12 is embedded into the first end of the housing 1 and sealed with sealant. The end of the bearing housing 12 away from the heating sleeve 4 is connected to the housing of the motor 13. The motor 13 drives the rotating shaft 14 to rotate. The rotating shaft 14 is axially provided with an air inlet chamber 141 extending to the end of the rotating shaft 14 away from the motor 13. The side of the air inlet chamber 141 near the motor 13 communicates with the annular groove 145 on the outer periphery of the rotating shaft 14 inside the bearing housing 12. A pair of air inlet channels 121 arranged radially on the bearing housing 12 are aligned with the annular groove 145. Inert gas carrying the precursor reaction gas can be input into the reactor 3 along the air inlet channels 121 and the air inlet chamber 141. The sealing base, door structure 2 and connecting seat 11 isolate the inner cavity 5 / outer cavity 6 from the air outside the housing 1.

[0019] Furthermore, the end of the rotating shaft 14 extending into the housing 1 is constructed as a second shaft 142 and a first shaft 144 with a diameter decreasing stepwise from bottom to top. The side of the second shaft 142 is provided with protrusions 143 evenly distributed. The columnar groove of the connecting seat 11, which is away from the reactor 3 and cooperates with the rotating shaft 14, is provided with a groove channel 111 for the protrusion to slide. The groove channel 111 extends from one end near the protrusion 143 toward the other groove channel 111 to form an inner concave surface 112. When the rotating shaft 14 extends into the connecting seat 11, the protrusion 143 slides along the groove channel 111. When the protrusion 143 slides to the bottom of the groove channel 111, the rotating shaft 14 rotates toward the inner concave surface 112. At this time, the rotating shaft 14 is engaged with the connecting seat 11. The radial depth of the inner concave surface 112 is not less than the radial thickness of the protrusion.

[0020] The sealing base includes an annular heat insulation plate 16 and a flange 15. The heat insulation plate 16 is located between the heating sleeve 4 and the flange 15. The end face of the flange 15 away from the heating sleeve 4 is connected to the first end of the housing 1 by fasteners, thus isolating the inner cavity 5 from the outer cavity 6.

[0021] Furthermore, the housing 1 is also provided with a through hole through which the heating wire 7 can pass.

[0022] The door structure 2 includes a sealing base plate 18, a support plate 19, and a sliding plate 22. The sliding plate 22 is embedded in a slide rail and can move along the second end plane of the slide rail relative to the housing 1. The sealing base plate 18 has an annular groove 181 on the end facing the heating sleeve 4, and a sealing ring is provided in the annular groove 181. The sealing base plate 18 and the support plate 19 are connected by an elastic structure. A cover plate 20 is installed on the side of the support plate 19 facing away from the sealing base plate 18, and a disc-shaped cavity is formed between the cover plate 20 and the support plate 19. One end of the spiral rod 21 is rotatable. The spiral rod 21 passes through the cover plate 20 and is fixedly connected to the disc-shaped object 17 inside the disc-shaped cavity. The other end of the spiral rod 21 passes through the sliding plate 22 and is connected to the rotating handle 25. The spiral rod 21 and the sliding plate 22 are threaded together. When the rotating handle 25 is rotated, the support plate 19 can be controlled to move in the axial direction of the spiral rod 21. When the support plate 19 moves to contact the second end face of the housing 1, the sealing bottom plate 18 contacts the heating sleeve 4, and the elastic structure of the sealing bottom plate 18 and the support plate 19 is compressed, and the sealing ring provided in the annular groove 181 is compressed.

[0023] Furthermore, the outer cavity 6 sidewall of the housing 1 is also connected to a gas pipe 24 and a vacuum pipe 23.

[0024] When using the above atomic layer deposition apparatus, opening the door structure 2 and rotating the reactor 3 and connecting seat 11 allows the reactor 3 to be removed from the rotating shaft 14. Removing the sealing plate 10 from the reactor 3 allows for the loading of powder to be coated. Therefore, a reactor 3 of appropriate capacity can be replaced according to the amount of powder loaded. Rotating the reactor 3 and connecting seat 11 allows the reactor 3 to be fixed on the rotating shaft 14. Moving the door structure 2 and rotating the rotating handle 25 allows the support plate 19 of the door structure to close the second end plane of the shell 1, while simultaneously allowing the sealing bottom plate 18 to close the heating jacket 4.

[0025] Before the atomic layer coating powder, the air in the inner cavity 5 is replaced with inert gas through the air extraction port 26 and the inert gas inlet 27, and the outer cavity 6 is evacuated through the vacuum pipe 23.

[0026] Then, the heating jacket 4 is heated to heat the reactor 3.

[0027] Then, the rotating shaft 14 is driven by the motor 13 to rotate, so that the reactor 3 rotates synchronously. At the same time, inert gas is introduced through the air inlet channel 121 and the air inlet chamber 141 to centrifugally disperse the powder in the reactor 3.

[0028] Repeat the following steps to complete multiple atomic layer deposition cycles: Then, an inert gas carrying different precursor reactive gases is alternately introduced in a pulsed manner through a pair of air inlet channels 121, so that the precursor reactive gases react with the powder to be coated to undergo a self-limiting surface reaction, forming an atomic layer deposition layer.

[0029] Finally, the air in the inner cavity 5 is replaced with inert gas through the exhaust port 26 and the inert gas inlet 27, completing one atomic layer deposition cycle.

[0030] After the covering is completed, air is introduced into the outer cavity 6 through the gas pipe 24, and gas is delivered into the inner cavity 5 through the inert gas inlet 27, which can eliminate the vacuum in the inner and outer cavities and facilitate the opening of the door structure 2. The filter screen 9 of the sealing plate 10 can filter powder and prevent powder from leaving the reactor 3.

[0031] The sealing base and door structure 2, along with the heating jacket 4, isolate the inner cavity 5 from the outer cavity 6. The sealing base, door structure 2, and connecting seat 11 also isolate the inner cavity 5 / outer cavity 6 from the air outside the shell 1. The outer cavity is equipped with a vacuum detection device, which acts as a second sealing barrier, almost completely isolating the inner cavity from the atmosphere and reducing interference factors in the internal reaction. This prevents toxic and corrosive precursor reaction gases from escaping outside the shell 1. The inner and outer cavity design allows the outer cavity 6 to maintain a vacuum during atomic layer deposition, preventing heat transfer through the gaseous medium, improving the heating efficiency of the heating jacket, and providing insulation.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An atomic layer deposition apparatus, characterized in that, Includes a housing (1) and has an openable and closable door structure (2). A heating sleeve (4) is disposed between the first end inside the housing (1) and the door structure (2) when closed, dividing the housing (1) into a columnar inner cavity (5) and an annular outer cavity (6) that are airtightly isolated from each other inside and outside the heating sleeve (4). The inner cavity (5) and the outer cavity (6) are respectively connected to an air extraction device and an air delivery device through pipes. The motor (13) is installed outside the housing (1). The motor (13) and the housing (1) are connected by a bearing seat (12). The rotating shaft (14) of the motor (13) can rotatably pass through the bearing in the bearing seat (12) and the first end of the housing (1) extends into the inner cavity (5). The rotating shaft (14) has an air inlet chamber (141) and an annular groove (145) in the axial and radial directions, respectively. One end of the air inlet chamber (141) is connected to the inner cavity (5), and the other end is connected to the annular groove (145). A pair of air inlet channels (121) arranged radially on the bearing seat (12) are aligned with the annular groove (145). The reactor (3), used to hold powder, is configured to be open at both ends. One end of the reactor (3) is detachably connected to the rotating shaft (14) in the inner cavity (5). Detachable filter screens are installed in the reactor (3) near both ends to prevent powder from leaving the reactor (3).

2. The atomic layer deposition apparatus according to claim 1, characterized in that, Heating wire (7) is wound around the outside of the heating jacket (4). One end of the reactor (3) is detachably connected to the rotating shaft (14) through the connecting seat (11), and the other end is detachably installed with a sealing plate (10). A filter screen (9) is centrally arranged on the sealing plate (10). A filter screen (28) is fixed between the reactor (3) and the connecting seat (11). A columnar groove is provided on the side of the connecting seat (11) facing away from the reactor (3). A through hole is also centrally arranged on the connecting seat (11) to connect the columnar groove and the reactor (3). The end of the columnar groove is connected to the rotating shaft (14) through a keyway.

3. The atomic layer deposition apparatus according to claim 1, characterized in that, The heating sleeve (4) is connected to the first end of the housing (1) through a sealing base to form an end face seal. The rotating shaft (14) can rotatably pass through the sealing base, and the connecting seat (11) can also rotatably embed into the sealing base. The sealing base includes an annular heat insulation plate (16) and a flange (15). The heat insulation plate (16) is located between the heating sleeve (4) and the flange (15), and the connecting seat (11) is in clearance fit with the inner circumference of the heat insulation plate (16).

4. The atomic layer deposition apparatus according to claim 2, characterized in that, The rotating shaft (14) extends into the housing (1) from the side near the motor (13) to the side near the inner cavity (5) and is constructed as a second shaft (142) and a first shaft (144) with a diameter decreasing stepwise. The side of the second shaft (142) is evenly provided with protrusions (143). The columnar groove of the connecting seat (11) away from the heating sleeve (4) and cooperating with the rotating shaft (14) is provided with a groove channel (111) for the protrusions (143) to slide. The groove channel (111) extends from one end near the protrusions (143) to the other groove channel (111) to form an inner concave surface (112). When the rotating shaft (14) extends into the connecting seat (11), the protrusions (143) slide along the groove channel (111). When the protrusions (143) slide to the bottom of the groove channel (111), the rotating shaft (14) rotates towards the inner concave surface (112). At this time, the rotating shaft (14) is engaged with the connecting seat (11).

5. The atomic layer deposition apparatus according to claim 1, characterized in that, The radial depth of the concave surface (112) is not less than the radial thickness of the protrusion (143).

6. The atomic layer deposition apparatus according to claim 3, characterized in that, The flange (15) and the heat insulation plate (16) are provided with an air extraction port (26) corresponding to the pipe connected to the air extraction device, and an inert gas inlet (27) corresponding to the pipe connected to the gas transmission device.

7. The atomic layer deposition apparatus according to claim 1, characterized in that, The door structure (2) includes a sealing base plate (18), a support plate (19), and a sliding plate (22). The sliding plate (22) is embedded in a slide rail and can move along the end face of the slide rail relative to the housing (1). The sealing base plate (18) has an annular groove (181) facing the heating sleeve (4), and a sealing ring is provided in the annular groove (181). The sealing base plate (18) and the support plate (19) are connected by an elastic structure. A cover plate (20) is installed on the side of the support plate (19) facing away from the sealing base plate (18). A disc-shaped cavity is formed between the cover plate (20) and the support plate (19). One end of a spiral rod (21) can rotatably pass through the cover plate (20) and is fixedly connected to a disc-shaped object (17) in the disc-shaped cavity. The spiral rod (21) and the sliding plate (22) are threadedly engaged. The other end of the spiral rod (21) passes through the sliding plate (22) and is connected to the rotating handle (25). When the rotating handle (25) is rotated, the support plate (19) can be controlled to move in the axial direction of the spiral rod (21). When the support plate (19) moves to the end face of the contact housing (1), the sealing base plate (18) contacts the heating sleeve (4), and the elastic structure of the sealing base plate (18) and the support plate (19) is compressed, and the sealing ring in the annular groove (181) is compressed.

8. The atomic layer deposition apparatus according to claim 1, characterized in that, The outer cavity (6) sidewall of the housing (1) is also connected to a gas pipe (24) and a vacuum pipe (23).

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