A heat energy recovery device for condensing electronic-grade hydrofluoric acid

Abstract

The application discloses a kind of electronic-grade hydrofluoric acid condensation heat energy recovery device, it is related to heat exchange equipment technical field.The present application includes tank body, the inside of the tank body is equipped with condenser pipe by sealing plate, the condenser pipe is "U" shape and two ends are upwards, the condenser pipe is distributed in the tank body inside and is deflected upside down, the condenser pipe is composed of outer tube and inner tube, the inner tube is fixedly installed at the central place in the inside of outer tube by the fixed seat of outer tube top opening, the inner tube one end opening, the other end is closed, the outer periphery of the inner tube opening side is equipped with round hole, the round hole is located at the inboard of outer tube opening, one side of the outer tube opening is fixedly connected with drain port.The present application can improve the efficiency of heat exchange while ensuring the condensation effect, thereby improving the effect of heat energy recovery, and different temperature heated cooling medium can be obtained to be suitable for different temperature requirements of use scene, thereby improving the utilization degree of heat energy recovery.

Description

Technical Field

[0001] This invention relates to the field of heat exchange equipment technology, and specifically to a heat recovery device for electronic-grade hydrofluoric acid condensation. Background Technology

[0002] Electronic-grade hydrofluoric acid is one of the most critical electronic chemicals used for cleaning and etching in semiconductor manufacturing. Its purity directly affects the yield, electrical performance, and reliability of integrated circuits. Therefore, in the production process of electronic-grade hydrofluoric acid, a heat exchange condensation method is used to purify and liquefy the electronic-grade hydrofluoric acid. In order to save energy and protect the environment, heat energy is also recovered from the cooling medium that is heated after heat exchange.

[0003] For example, Chinese utility model patent CN221036954U discloses a heat recovery device for hydrofluoric acid condensation, wherein the hydrofluoric acid vapor inlet pipe, hydrofluoric acid outlet pipe, first branch pipe, second branch pipe and condenser pipe are detachably connected, which facilitates individual replacement and reduces the cost of use.

[0004] Based on the aforementioned patents and existing technologies, the current heat recovery devices for electronic-grade hydrofluoric acid condensation still have the following shortcomings during use: Existing heat recovery devices for condensation have low heat exchange efficiency, which reduces the effectiveness of heat recovery. At the same time, the heat recovery method is singular, and can only obtain the heated cooling medium at a single temperature. Therefore, the application scenarios of heat recovery are limited to the specific temperature requirements, which reduces the utilization of heat recovery. Furthermore, electronic-grade hydrofluoric acid has high purity requirements, and if the cooling medium in the heat recovery loop leaks, it may contaminate the hydrofluoric acid product, posing a significant safety hazard. Summary of the Invention

[0005] The purpose of this invention is to address the problems of low heat exchange efficiency, which reduces the effectiveness of heat recovery, the limited application scenarios of heat recovery due to the single heat recovery method, the reduced utilization of heat recovery, and the potential safety hazard of leakage of cooling medium in the heat recovery circuit that could contaminate hydrofluoric acid products. This invention provides a heat recovery device for electronic-grade hydrofluoric acid condensation.

[0006] To achieve the above objectives, the present invention specifically adopts the following technical solution: A heat recovery device for electronic-grade hydrofluoric acid condensation includes a tank. A condenser tube is installed inside the tank through a sealing plate. The condenser tube is U-shaped with both ends facing upwards and is distributed vertically and staggered inside the tank.

[0007] The condenser tube consists of an outer tube and an inner tube. The inner tube is fixedly installed in the center of the outer tube through a fixing seat at the top opening of the outer tube. One end of the inner tube is open and the other end is closed. A circular hole is provided on the outer periphery of the side with the opening of the inner tube. The circular hole is located inside the opening of the outer tube. A drain outlet is fixedly connected to one side of the opening of the outer tube. The drain outlet is located on the closed side of the inner tube.

[0008] Furthermore, an inwardly extending mounting platform is provided at the opening at the top of the tank body, and the sealing plate is fixedly installed on the top of the mounting platform by bolts, with a sealing ring placed between the top of the mounting platform and the bottom of the sealing plate.

[0009] Furthermore, an installation sleeve is fixedly installed at the top of the sealing plate, and both ends of the condenser tube extend upward through the sealing plate and the installation sleeve. The installation sleeve fixes both ends of the condenser tube, and a sealing ring is placed between the inner wall of the sealing plate and the outer walls of both ends of the condenser tube for limiting the movement.

[0010] Furthermore, a protective cover is fixedly installed on the top of the tank by bolts, and a water inlet pipe is fixedly installed on the side wall of the protective cover. One end of the water inlet pipe inside the protective cover is fixedly connected to a connecting pipe, and the connecting pipe is fixedly connected to the open end of one end of all the inner pipes.

[0011] Furthermore, a water outlet pipe is fixedly installed on the side wall of the protective cover, and the water outlet pipe is fixedly connected to the drain outlet.

[0012] Furthermore, a circular opening is provided at the center of the top of the protective cover, and a cover plate is fixedly installed at the top of the circular opening of the protective cover by bolts.

[0013] Furthermore, an air inlet pipe is fixedly installed on the side wall at the bottom of the tank. One end of the air inlet pipe, located inside the tank, is fixedly connected to a circular pipe. The circular pipe is located at the center inside the tank, and exhaust holes are evenly distributed at the bottom of the circular pipe.

[0014] Furthermore, guide rods are placed between the bottom of the condenser tubes, a discharge port is fixedly connected to the center of the bottom of the tank, a guide column is placed between the bottom end of the lowest condenser tube and the discharge port, and a discharge pipe is fixedly connected to the bottom of the discharge port.

[0015] Furthermore, the discharge port adopts a converging funnel design, the bottom of the guide column is umbrella-shaped and sinks into the interior of the top of the discharge port, and the outer periphery of the umbrella shape at the bottom of the guide column is evenly provided with a material drop groove.

[0016] Furthermore, a support platform is fixedly connected to the bottom end of the tank, and the support platform is used to place and fix the tank.

[0017] The beneficial effects of this invention are as follows:

[0018] This invention utilizes an outer and inner tube design for the condenser tubes, along with the flow of the cooling medium between them. This design ensures effective condensation while improving heat exchange efficiency, thereby enhancing heat recovery. Furthermore, the staggered, deflected distribution of the condenser tubes allows for the distribution of heating and cooling media at different temperatures. Individual delivery of these media caters to various temperature requirements, further increasing the utilization rate of heat recovery. The sealing plate isolates the cooling medium's input and output ports from the hydrofluoric acid gas entering the tank, effectively preventing leakage in the heat recovery circuit, ensuring the purity of the hydrofluoric acid, and improving safety. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 1 ;

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 2 ;

[0021] Figure 3 This is a cross-sectional three-dimensional structural diagram of the present invention. Figure 1 ;

[0022] Figure 4 This is a cross-sectional three-dimensional structural diagram of the present invention. Figure 2 ;

[0023] Figure 5 This is an exploded view of the three-dimensional structure of the present invention;

[0024] Figure 6 This is a partial cross-sectional three-dimensional structural schematic diagram of the present invention;

[0025] Figure 7 This is a partially sectional exploded view of the three-dimensional structure of the present invention;

[0026] Figure 8 This is a schematic diagram of the three-dimensional structure of the sealing plate and condenser tube installation of the present invention. Figure 1 ;

[0027] Figure 9 This is a schematic diagram of the three-dimensional structure of the sealing plate and condenser tube installation of the present invention. Figure 2 ;

[0028] Figure 10 This is an exploded three-dimensional view of the sealing plate and condenser tube installation structure of the present invention;

[0029] Figure 11 This is an exploded three-dimensional view of the mounting structure of the sealing plate and mounting sleeve of the present invention;

[0030] Figure 12This is a schematic diagram of the three-dimensional structure of the condenser tube of the present invention;

[0031] Figure 13 This is a cross-sectional three-dimensional structural diagram of a single condenser tube of the present invention;

[0032] Figure 14 This is an exploded view of the three-dimensional structure of a single condenser tube of the present invention;

[0033] Figure 15 This is a three-dimensional cross-sectional view of the bottom of the tank body of the present invention;

[0034] Figure 16 This is a schematic diagram of the three-dimensional structure of the water outlet pipe in another embodiment of the present invention.

[0035] Reference numerals in the attached drawings: 1. Tank body; 101. Mounting platform; 2. Sealing plate; 3. Condensate pipe; 301. Outer pipe; 3011. Drain outlet; 302. Inner pipe; 3021. Round hole; 4. Fixing base; 5. Sealing ring one; 6. Mounting sleeve; 7. Sealing ring two; 8. Protective cover; 9. Water inlet pipe; 10. Connecting pipe; 11. Water outlet pipe; 12. Cover plate; 13. Air inlet pipe; 14. Circular ring pipe; 1401. Exhaust hole; 15. Guide rod; 16. Discharge port; 17. Guide column; 1701. Material drop chute; 18. Discharge pipe; 19. Support platform; 20. Confluence pipe. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0037] A heat recovery device for electronic-grade hydrofluoric acid condensation according to a preferred embodiment of the present invention will be described in detail below: Example 1

[0038] like Figures 1-6 As shown, a heat recovery device for electronic-grade hydrofluoric acid condensation includes a tank 1. A condenser tube 3 is installed inside the tank 1 via a sealing plate 2. The condenser tube 3 is U-shaped with both ends pointing upwards, and is distributed vertically and staggeredly within the tank 1. This staggered distribution of the condenser tubes 3 within the tank 1 makes them more dispersed, facilitating contact between the hydrofluoric acid gas inside the tank 1 and the surface of the condenser tubes 3. Simultaneously, by introducing the hydrofluoric acid gas from the bottom of the tank 1, and considering the varying lengths of the condenser tubes 3 distributed vertically within the tank 1, the lower condenser tubes 3 contact the hydrofluoric acid gas first, resulting in a longer heat exchange time. Therefore, during the condensation process, the temperature of the internal cooling medium gradually decreases through heat exchange, thus obtaining different temperatures of heated cooling media.

[0039] A support platform 19 is fixedly connected to the bottom of the tank body 1. The support platform 19 is used to place and fix the tank body 1.

[0040] like Figures 7-10 , Figures 12-14 As shown, the condenser tube 3 consists of an outer tube 301 and an inner tube 302. The inner tube 302 is fixedly installed in the center of the outer tube 301 through a fixing seat 4 at the top opening of the outer tube 301. One end of the inner tube 302 is open, and the other end is closed. A circular hole 3021 is formed on the outer periphery of the open side of the inner tube 302, located inside the opening of the outer tube 301. A drain outlet 3011 is fixedly connected to one side of the open side of the outer tube 301, located on the closed side of the inner tube 302. Therefore, after the cooling medium is added into the inner tube 302 through the opening, the cooling medium first fills the inner tube 302, and then enters the space between the outer tube 301 and the inner tube 302 through the circular hole 3021. The cooling medium inside the inner tube 302 ensures the condensation effect, while the small amount of cooling medium between the outer tube 301 and the inner tube 302 can absorb heat more quickly to reach a higher temperature, improving the efficiency of heat exchange. The cooling medium heated between the outer tube 301 and the inner tube 302 can be discharged from the drain port 3011 on the other side and transported to the corresponding application scenario to complete the recovery and utilization of heat energy after condensation.

[0041] like Figures 6-8 As shown, an inwardly extending mounting platform 101 is provided at the opening at the top of the tank body 1. The sealing plate 2 is fixedly installed on the top of the mounting platform 101 by bolts, and a sealing ring 5 is placed between the top of the mounting platform 101 and the bottom of the sealing plate 2. This achieves the fixed installation of the sealing plate 2 at the opening at the top of the tank body 1, while the sealing ring 5 improves the sealing performance between the sealing plate 2 and the inside of the tank body 1 after installation. (It should be noted that the bolts used to install the sealing plate 2 do not penetrate downwards through the mounting platform 101, thus avoiding leakage at the bolt connection and also preventing corrosion of the bolts by hydrofluoric acid.)

[0042] like Figures 10-11 As shown, an installation sleeve 6 is fixedly installed at the top of the sealing plate 2. The two ends of the condenser tube 3 extend upward through the sealing plate 2 and the installation sleeve 6, and the installation sleeve 6 fixes the two ends of the condenser tube 3. A sealing ring 7 is placed between the inner wall of the sealing plate 2 and the outer walls of both ends of the condenser tube 3 for limiting the movement. This achieves the fixed installation of the condenser tube 3 with the sealing plate 2 using the installation sleeve 6, while the sealing ring 7 improves the sealing performance at the connection between the condenser tube 3 and the sealing plate 2.

[0043] like Figures 3-10As shown, a protective cover 8 is bolted to the top of the tank 1. A water inlet pipe 9 is fixedly installed on the side wall of the protective cover 8. One end of the water inlet pipe 9, located inside the protective cover 8, is fixedly connected to a connecting pipe 10. The connecting pipe 10 is fixedly connected to the open end of all the inner pipes 302. Therefore, through the cooperation of the water inlet pipe 9 and the connecting pipe 10, the cooling medium can be transported through the opening of the inner pipe 302 to the inside of all the inner pipes 302.

[0044] A water outlet pipe 11 is fixedly installed on the side wall of the protective cover 8, and the water outlet pipe 11 is fixedly connected to the drain outlet 3011. The cooling medium heated in each condenser pipe 3 is individually transported through the water outlet pipe 11.

[0045] like Figure 1 , Figure 5 As shown, a circular opening is provided at the center of the top of the protective cover 8, and a cover plate 12 is fixedly installed at the top of the circular opening of the protective cover 8 by bolts. The cover plate 12 provides sealing protection, and opening the cover plate 12 facilitates installation and maintenance.

[0046] like Figures 3-4 , Figures 6-7 As shown, an inlet pipe 13 is fixedly installed on the side wall at the bottom of the tank 1. One end of the inlet pipe 13, located inside the tank 1, is fixedly connected to a circular annular pipe 14. The circular annular pipe 14 is located in the center inside the tank 1, and exhaust holes 1401 are evenly distributed at the bottom of the circular annular pipe 14. Therefore, hydrofluoric acid gas can enter the interior of the circular annular pipe 14 through the inlet pipe 13, and then enter the interior of the tank 1 through the exhaust holes 1401 at the bottom of the circular annular pipe 14. (It should be noted that the design of the exhaust holes 1401 at the bottom of the circular annular pipe 14 allows the circular annular pipe 14 to divert the hydrofluoric acid gas as it flows downwards and upwards through the exhaust holes 1401, allowing the hydrofluoric acid gas to better contact the condenser 3. At the same time, the hydrofluoric acid gas that has been prematurely liquefied due to impact or pressure can be directly discharged and collected downwards through the exhaust holes 1401 at the bottom, avoiding backflow after premature liquefaction of the hydrofluoric acid gas.)

[0047] like Figures 6-7 , Figure 15 As shown, guide rods 15 are placed between the bottom of the condenser tubes 3, and a discharge port 16 is fixedly connected to the center of the bottom of the tank body 1. A guide column 17 is placed between the bottom end of the lowest condenser tube 3 and the discharge port 16, and a discharge pipe 18 is fixedly connected to the bottom of the discharge port 16.

[0048] The discharge port 16 adopts a converging funnel design, and the bottom of the guide column 17 is umbrella-shaped, sinking into the interior of the top of the discharge port 16. The outer periphery of the umbrella-shaped bottom of the guide column 17 has evenly distributed drop grooves 1701. Through the design of the guide rod 15, combined with the "U" structure of the condenser tube 3, the liquefied hydrofluoric acid on the surface of the condenser tube 3 can flow downwards and through the guide rod 15 to the next condenser tube 3. The hydrofluoric acid flowing to the lowest condenser tube 3 then flows downwards through the guide column 17 to the discharge port 16, and through the drop grooves 1701 at the bottom of the guide column 17, flows downwards along the inner wall of the discharge port 16, finally being transported and collected through the discharge pipe 18. Therefore, dripping of hydrofluoric acid during the liquefaction process is avoided, which helps to alleviate corrosion and scaling.

[0049] Working principle:

[0050] During use, the cooling medium for condensation enters the interior of all inner tubes 302 through the water inlet pipe 9 and the connecting pipe 10. After the cooling medium fills the inner tubes 302, it enters the interior of the outer tube 301 and the inner tube 302 through the round hole 3021.

[0051] Hydrofluoric acid gas is introduced into the interior of tank 1 from the bottom through inlet pipe 13 and annular pipe 14. The hydrofluoric acid gas inside tank 1 comes into contact with the outer wall of outer pipe 301, thereby completing liquefaction. The liquefied hydrofluoric acid flows downward along condenser pipe 3 and guide rod 15 until it enters discharge port 16 through guide column 17, and is transported and collected through discharge pipe 18.

[0052] After the cooling medium between the outer tube 301 and the inner tube 302 completes heat exchange during the condensation process, it can be discharged from the outlet pipe 11 on the other side. The heated cooling medium in each condenser tube 3 is then individually transported to the corresponding application scenario through the outlet pipe 11 to complete the recovery and utilization of heat energy after condensation.

[0053] The condenser tube 3 employs an outer tube 301 and an inner tube 302 design, with the cooling medium flowing between the inner tube 302 and the outer tube 301. This design ensures condensation efficiency while improving heat exchange efficiency, thereby enhancing heat recovery. Furthermore, the staggered, vertically offset design of the condenser tube 3 allows for the distribution of heating and cooling media at different temperatures. Individual delivery of these media caters to various temperature requirements, further improving heat recovery utilization. The sealing plate 2 isolates the cooling medium input and output interfaces from the hydrofluoric acid gas entering the tank 1, effectively preventing leakage of the cooling medium in the heat recovery circuit, ensuring the purity of the hydrofluoric acid, and improving safety. Example 2

[0054] The difference from Example 1 is: like Figure 16 As shown, the outer side of the outlet pipe 11 can also be connected to the confluence pipe 20 to combine and transport the output heated and cooled media. By mixing heated and cooled media of different temperatures, heated and cooled media of different temperatures can be obtained, thereby further improving the diversity of application scenarios. Therefore, depending on the temperature requirements of the heat energy recovery and utilization application scenario and the limitation of the number of application scenarios, different combinations of heated and cooled media of different temperatures can be combined and processed.

[0055] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A heat recovery device for electronic-grade hydrofluoric acid condensation, comprising a tank (1), characterized in that, The tank (1) is equipped with a condenser tube (3) inside through a sealing plate (2). The condenser tube (3) is U-shaped with both ends facing upwards. The condenser tube (3) is distributed in a staggered manner inside the tank (1). The condenser tube (3) consists of an outer tube (301) and an inner tube (302). The inner tube (302) is fixedly installed in the center of the outer tube (301) through a fixing seat (4) at the top opening of the outer tube (301). One end of the inner tube (302) is open and the other end is closed. A circular hole (3021) is provided on the outer periphery of the open side of the inner tube (302). The circular hole (3021) is located inside the opening of the outer tube (301). A drain outlet (3011) is fixedly connected to one side of the opening of the outer tube (301). The drain outlet (3011) is located on the closed side of the inner tube (302).

2. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 1, characterized in that, The tank body (1) has an inwardly extending mounting platform (101) at the top opening. The sealing plate (2) is fixedly installed on the top of the mounting platform (101) by bolts, and a sealing ring (5) is placed between the top of the mounting platform (101) and the bottom of the sealing plate (2).

3. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 2, characterized in that, The top of the sealing plate (2) is fixedly installed with an installation sleeve (6), and the two ends of the condenser tube (3) pass through the sealing plate (2) and the installation sleeve (6) upward. The installation sleeve (6) fixes the two ends of the condenser tube (3). A sealing ring (7) is placed between the inner wall of the sealing plate (2) and the outer walls of the two ends of the condenser tube (3).

4. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 1, characterized in that, The top of the tank (1) is fixedly installed with a protective cover (8) by bolts. A water inlet pipe (9) is fixedly installed on the side wall of the protective cover (8). One end of the water inlet pipe (9) inside the protective cover (8) is fixedly connected to a connecting pipe (10). The connecting pipe (10) is fixedly connected to the open end of one end of all the inner pipes (302).

5. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 4, characterized in that, The protective cover (8) is fixedly installed with a water outlet pipe (11), which is fixedly connected to the drain outlet (3011).

6. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 4, characterized in that, The protective cover (8) has a round opening at the center of its top, and a cover plate (12) is fixedly installed at the top of the round opening of the protective cover (8) by bolts.

7. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 1, characterized in that, An air inlet pipe (13) is fixedly installed on the side wall at the bottom of the tank (1). One end of the air inlet pipe (13) located inside the tank (1) is fixedly connected to a circular pipe (14). The circular pipe (14) is located in the center inside the tank (1). Exhaust holes (1401) are evenly opened at the bottom of the circular pipe (14).

8. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 1, characterized in that, A guide rod (15) is placed between the bottom of each of the condenser tubes (3). A discharge port (16) is fixedly connected to the center of the bottom of the tank (1). A guide column (17) is placed between the bottom end of the condenser tube (3) and the discharge port (16). A discharge pipe (18) is fixedly connected to the bottom of the discharge port (16).

9. The heat recovery device for electronic-grade hydrofluoric acid condensation according to claim 8, characterized in that, The discharge port (16) adopts a contracting funnel design. The bottom of the guide column (17) is umbrella-shaped and sinks into the interior of the top of the discharge port (16). The outer periphery of the umbrella shape at the bottom of the guide column (17) is uniformly provided with a material drop groove (1701).

10. The heat recovery device for electronic-grade hydrofluoric acid condensation according to any one of claims 1-9, characterized in that, The bottom end of the tank (1) is fixedly connected to a support platform (19), which is used to place and fix the tank (1).

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