An electron beam power self-adaptive adjusting control method and system

Abstract

The present application relates to the field of industrial control technology, disclose a kind of electron beam power self-adapting regulation control method and system, the method includes: real-time acquisition electron beam processing workpiece beam amplitude, power output voltage, focusing coil current, according to fixed time window construction power timing adjustment sequence;Beam amplitude variation rate deviation is analyzed based on timing adjustment sequence, obtain amplitude deviation, closed-loop control output voltage, obtain power amplitude correction amount;According to beam amplitude drop rate analysis power output carrier phase characteristics, real-time calibration phase, obtain power phase correction amount;Phase correction amount is mapped as focusing coil current constraint adjustment coefficient, according to amplitude deviation variation gradient setting threshold, obtain focusing current constraint amount;According to beam amplitude drop rate dynamically weighted setting each correction amount, constraint amount, obtain power fusion driving control amount;Fusion driving control amount is input into power control terminal, complete electron beam power self-adapting regulation control.

Description

Technical Field

[0001] This invention relates to the field of industrial control technology, and in particular to an adaptive adjustment control method and system for electron beam power supply. Background Technology

[0002] Electron beam processing relies on high-energy-density electron beams to locally heat, melt, and even vaporize materials, enabling precision machining operations such as cutting, welding, and drilling. During processing, the beam current amplitude directly determines the energy density received by the workpiece and is a core indicator for controlling processing quality. The instantaneous value of the electron beam power supply output voltage is related to the generation and acceleration of the beam current, while the real-time value of the focusing coil current determines the focusing state and energy distribution of the electron beam. Therefore, the electron beam processing process requires monitoring and control of key parameters such as beam current amplitude, power supply voltage, and focusing current to ensure the stability and consistency of the processing.

[0003] Existing electron beam power supply control schemes have significant technical deficiencies in terms of collaborative utilization of time-series data and phase compensation under varying operating conditions. The three parameters—beam current, power supply voltage, and focusing current—are only independently acquired and single-parameter closed-loop adjusted, without being modeled and coupled based on a unified time sequence. For example, when the beam current amplitude experiences a momentary drop, the power supply voltage compensation and focusing coil constraint cannot respond synchronously, easily leading to problems such as voltage correction lag and mismatch between focusing constraints and phase shift. Furthermore, the power supply output carrier phase compensation only uses steady-state phase-locked correction and does not differentiate feedforward compensation based on the beam drop rate to distinguish typical transient conditions such as workpiece penetration and material interface switching. For instance, when the beam drops rapidly at the moment of penetration, fixed phase adjustment cannot suppress transient phase distortion, resulting in beam energy fluctuations and decreased focusing accuracy. Summary of the Invention

[0004] This invention provides an adaptive adjustment and control method and system for electron beam power supply to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides an adaptive adjustment and control method for an electron beam power supply, comprising: S1. Real-time acquisition of the real-time amplitude of the electron beam current, the instantaneous value of the output voltage of the electron beam power supply, and the real-time value of the focusing coil current during the electron beam processing of the workpiece. The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are then used to construct an electron beam power supply timing adjustment sequence according to a fixed time window. S2. Based on the timing adjustment sequence, the rate of change of the real-time amplitude of the beam is analyzed to obtain the amplitude deviation of the electron beam. Based on the amplitude deviation, the instantaneous value of the output voltage is controlled in a closed loop to obtain the amplitude correction of the electron beam power supply. S3. Based on the drop rate of the real-time amplitude of the beam, the phase characteristics of the output carrier of the electron beam power supply are analyzed, and the phase of the output carrier is calibrated in real time according to the analysis results to obtain the phase correction amount of the electron beam power supply. S4. Map the phase correction amount to the constraint adjustment coefficient of the focusing coil current, and dynamically scale it according to the gradient of the amplitude deviation, and perform threshold tuning on the constraint adjustment coefficient to obtain the focusing current constraint amount of the focusing coil current. S5. The amplitude correction, phase correction, and focusing current constraint are dynamically weighted and tuned according to the current beam amplitude drop rate to obtain the fusion drive control quantity of the electron beam power supply. S6. Input the fusion drive control quantity to the control terminal of the electron beam power supply to complete the adaptive adjustment control of the electron beam power supply.

[0006] In a preferred embodiment, the process of constructing the electron beam power supply timing adjustment sequence is as follows: The real-time amplitude of the electron beam current is obtained by acquiring and analyzing the beam current signal during the electron beam processing of the workpiece. Based on the acquisition time of the real-time amplitude of the beam, the output port voltage of the electron beam power supply is synchronously detected to obtain the instantaneous value of the output voltage of the electron beam power supply. The current of the focusing coil is synchronously tracked and acquired according to the acquisition period of the instantaneous value of the output voltage to obtain the real-time value of the focusing coil current; The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are arranged in a time sequence to obtain the timing adjustment sequence of the electron beam power supply.

[0007] In a preferred embodiment, the process of obtaining the amplitude correction amount of the electron beam power supply is as follows: Based on the timing adjustment sequence, the real-time amplitude of the beam is identified by time-domain difference resolution to obtain the instantaneous change slope of the electron beam; Based on the preset reference amplitude parameter, the deviation amplitude of the instantaneous change slope is calibrated to obtain the absolute value of the amplitude deviation of the electron beam; Using the absolute value of amplitude deviation as the input excitation quantity for closed-loop control, the instantaneous value of the output voltage of the electron beam power supply is dynamically compensated and tuned to obtain the voltage compensation increment of the electron beam power supply. The voltage compensation increment is synchronously connected to the current control node of the instantaneous output voltage value, and the instantaneous compensation evaluation of the instantaneous output voltage value is performed to obtain the amplitude correction amount of the electron beam power supply.

[0008] In a preferred embodiment, when the drop rate of the real-time beam amplitude does not exceed the workpiece penetration characteristic threshold and the workpiece material interface characteristic threshold within a preset time window, the process of obtaining the phase correction amount of the electron beam power supply is as follows: The original phase offset of the electron beam power supply is obtained by performing voltage-current phase difference phase-locked analysis on the output carrier of the electron beam power supply. The original phase offset is directly output as the phase correction value of the electron beam power supply.

[0009] In a preferred embodiment, when the drop rate of the real-time beam amplitude exceeds the workpiece penetration characteristic threshold or the workpiece material interface characteristic threshold within a preset time window, the process of obtaining the phase correction amount of the electron beam power supply is as follows: By performing a difference analysis between the drop rate of the real-time beam amplitude and the corresponding characteristic threshold, the drop rate of the electron beam power supply exceeds the amplitude. By applying square-law dynamic gain adjustment to the drop rate exceedance amplitude, the transient overcompensated phase amplitude is obtained. The phase correction amount of the electron beam power supply is obtained by superimposing the transient overcompensated phase amplitude onto the phase adjustment path of the original phase offset.

[0010] In a preferred embodiment, the process of obtaining the focusing current constraint of the focusing coil current is as follows: The phase correction is inverted and reduced to obtain the basic constraint coefficient of the focusing coil current; Based on the time-series adjustment sequence, the amplitude deviation is analyzed by dynamic evolution of deviation to obtain the amplitude deviation evolution gradient. Based on the magnitude deviation evolution gradient, the basic constraint coefficients are positively scaled to obtain the intermediate constraint adjustment coefficients of the basic constraint coefficients. When the transient overcompensation phase amplitude is active, the upper limit of the dead zone of the focusing coil current is reverse-compressed to obtain the dead zone boundary limit of the focusing coil current. Under the dead zone boundary limit constraint, the amplitude limiting adjustment coefficient of the intermediate state constraint is adjusted to obtain the focusing current constraint amount of the focusing coil current.

[0011] In a preferred embodiment, the process of obtaining the dead zone boundary limit value of the focusing coil current is as follows: When the transient overcompensation phase amplitude is in effect, the upper limit of the dead zone of the focusing coil current is identified to obtain the original upper limit reference value of the dead zone of the focusing coil current. Based on the magnitude of the transient overcompensated phase amplitude, the original dead zone upper limit reference value is reverse-compressed to obtain the compression correction factor of the focusing coil current. The compression correction scaling factor is applied to the original dead zone upper limit reference value to obtain the dead zone boundary limit value of the focusing coil current.

[0012] In a preferred embodiment, the process of obtaining the fusion drive control quantity of the electron beam power supply is as follows: The rate characteristic of the drop rate of the real-time beam amplitude is fitted to obtain the conventional weighting factor of the electron beam power supply. The amplitude correction amount is adjusted by the amplitude weighting ratio to obtain the amplitude correction weighted component of the electron beam power supply; The phase correction amount is configured with carrier phase weights to obtain the phase correction weighted component of the electron beam power supply; By performing a focusing constraint weighted adaptation on the focusing current constraint, the constraint weighted component of the focusing coil current is obtained; The amplitude correction weighted component, phase correction weighted component, and constraint weighted component are reconstructed in a multi-component collaborative manner to obtain the fused drive control quantity of the electron beam power supply.

[0013] In a preferred embodiment, the process of adaptive adjustment and control of the electron beam power supply is as follows: The validity of the fused drive control quantity is verified to obtain the valid signal identifier of the fused drive control quantity. Based on the valid signal identification, the drive signal of the control terminal of the electron beam power supply is adapted and modulated to obtain the adapted execution command of the control terminal. The adaptive execution command is loaded into the power regulation port of the electron beam power supply to complete the adaptive adjustment and control of the electron beam power supply.

[0014] To address the above problems, the present invention also provides an electron beam power supply adaptive adjustment and control system, the system comprising: The timing sequence construction module is used to collect the real-time amplitude of the beam current, the instantaneous value of the output voltage of the electron beam power supply, and the real-time value of the focusing coil current during the electron beam processing of the workpiece. The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are arranged into a fixed time window to construct the timing adjustment sequence of the electron beam power supply. The amplitude correction control module is used to analyze the deviation rate of the real-time amplitude change of the beam based on the timing adjustment sequence, obtain the amplitude deviation of the electron beam, and perform closed-loop control on the instantaneous value of the output voltage based on the amplitude deviation to obtain the amplitude correction amount of the electron beam power supply. The phase calibration analysis module is used to perform phase characteristic analysis on the output carrier of the electron beam power supply based on the drop rate of the real-time amplitude of the beam, and to perform real-time phase calibration on the output carrier according to the analysis results, so as to obtain the phase correction amount of the electron beam power supply. The focusing constraint tuning module is used to map the phase correction amount to the constraint adjustment coefficient of the focusing coil current, and dynamically scale the constraint adjustment coefficient according to the gradient of the amplitude deviation to obtain the focusing current constraint amount of the focusing coil current. The fusion control tuning module is used to dynamically weight and tune the amplitude correction, phase correction, and focusing current constraint according to the current beam amplitude drop rate to obtain the fusion drive control quantity of the electron beam power supply. The adaptive adjustment execution module is used to input the fusion drive control quantity to the control terminal of the electron beam power supply to complete the adaptive adjustment control of the electron beam power supply.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. This solution simultaneously collects three core parameters: beam current amplitude, power supply output voltage, and focusing coil current. Then, it performs time-series normalization on the collected data according to a fixed time window to build an electron beam power supply timing adjustment sequence. This allows multiple source parameters to be modeled and coupled together in the same time dimension, solving the problems of correction lag and asynchronous response when adjusting single parameters individually in the traditional way. This greatly improves the coordination and real-time performance of electron beam processing parameter adjustment, allowing parameter adjustment to accurately adapt to real-time changes in processing conditions.

[0016] 2. Traditional power supply output carrier phase compensation can only perform steady-state correction and cannot adapt to transient processing conditions. This solution uses the beam amplitude drop rate as the basis for judging the operating conditions, clearly distinguishing between steady-state processing and transient scenarios such as workpiece penetration and material interface switching. Differentiated phase compensation methods are then adopted for different operating conditions. In steady state, phase-locked compensation is used to ensure phase stability, and in transient state, square-law feedforward overcompensation is used to quickly correct phase shift, achieving precise phase control under varying operating conditions, avoiding phase distortion caused by fixed phase adjustment, suppressing beam energy fluctuations, and ensuring the focusing accuracy of electron beam processing.

[0017] 3. This scheme links the phase correction amount with the focusing coil current control. First, the phase correction amount is mapped to the constraint adjustment coefficient of the focusing coil current. Then, the coefficient is dynamically scaled in combination with the evolution gradient of the amplitude deviation. When encountering transient conditions, the upper limit of the response dead zone of the focusing coil current is compressed in reverse to optimize the constraint effect. On this basis, combined with the beam current amplitude drop rate, the amplitude correction amount, phase correction amount, and focusing current constraint amount are dynamically weighted and fused to generate a fused drive control amount. Through multi-parameter collaborative fusion adjustment, adaptive control of multiple control objectives is achieved, so that the electron beam power supply can always maintain stable output and accurate focusing state in complex and ever-changing processing conditions. Attached Figure Description

[0018] Figure 1 This is a flowchart illustrating an adaptive adjustment and control method for an electron beam power supply according to an embodiment of the present invention. Figure 2 This is a functional block diagram of an electron beam power supply adaptive adjustment and control system according to an embodiment of the present invention; The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0019] It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0020] This application provides an electron beam power adaptive adjustment control method. The execution subject of the electron beam power adaptive adjustment control method includes, but is not limited to, at least one of the electronic devices that can be configured to execute the method provided in this application, such as a server and a terminal. In other words, the electron beam power adaptive adjustment control method can be executed by software or hardware installed on a terminal device or a server device. The server includes, but is not limited to, a single server, a server cluster, a cloud server, or a cloud server cluster. The server can be an independent server or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDN), and big data and artificial intelligence platforms.

[0021] Reference Figure 1 The diagram shown is a flowchart of an adaptive adjustment and control method for an electron beam power supply according to an embodiment of the present invention. In this embodiment, the adaptive adjustment and control method for an electron beam power supply includes: S1, real-time acquisition of the real-time amplitude of the electron beam current, the instantaneous value of the output voltage of the electron beam power supply, and the real-time value of the focusing coil current during the electron beam processing of the workpiece, and constructing an electron beam power supply timing adjustment sequence according to a fixed time window based on the real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value. In this embodiment of the invention, the process of constructing the electron beam power supply timing adjustment sequence is as follows: The real-time amplitude of the electron beam current is obtained by acquiring and analyzing the beam current signal during the electron beam processing of the workpiece. A beam current sensor is fixedly installed in the electron beam processing cavity at an electromagnetic interference-free detection position between the electron beam transmission path and the workpiece processing area. The beam current sensor continuously receives the electron beam emitted during electron beam processing and converts it into a continuous analog electrical signal. The analog electrical signal is completely converted into a digital electrical signal through a signal conversion module. The signal strength value of the digital electrical signal at the current moment is extracted point by point according to the time dimension of the processing process. This value is directly used as the real-time beam current amplitude. The real-time beam current amplitude is a physical quantity that reflects the actual electron flow rate emitted by the electron beam at the current processing moment, and is the core basic data of the electron beam energy output state.

[0022] Based on the acquisition time of the real-time amplitude of the beam, the output port voltage of the electron beam power supply is synchronously detected to obtain the instantaneous value of the output voltage of the electron beam power supply. The acquisition time of the real-time beam amplitude is the precise time node at which the beam sensor completes a single beam signal acquisition and outputs the real-time beam amplitude. Using this precise time node as a synchronous trigger signal, the voltage detection unit at the output port of the electron beam power supply is immediately activated. The voltage detection unit directly acquires the analog voltage signal at the power output port of the power supply. The analog voltage signal is converted into a standard digital quantity through a signal conversion module. This standard digital quantity is directly used as the instantaneous output voltage value. The instantaneous output voltage value is a physical quantity that reflects the actual output voltage of the electron beam power supply at exactly the same moment as the beam acquisition, and it is the core basic data of the power supply output status.

[0023] The current of the focusing coil is synchronously tracked and acquired according to the acquisition period of the instantaneous value of the output voltage to obtain the real-time value of the focusing coil current; The acquisition period for the instantaneous output voltage value is the time interval between the acquisition of a single instantaneous output voltage value by the voltage detection unit and the acquisition restarted after a fixed time interval. This fixed time interval serves as the uniform acquisition interval. The current detection unit on the conductive circuit of the focusing coil is continuously triggered. The current detection unit is in close contact with the conductive circuit of the focusing coil to acquire the current analog signal without loss. The current analog signal is converted into a standard digital quantity through a signal conversion module. This standard digital quantity is directly used as the real-time value of the focusing coil current. The real-time value of the focusing coil current is a physical quantity that reflects the actual current magnitude passing through the focusing coil at the corresponding acquisition time and is the core basic data of the electron beam focusing state.

[0024] The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are arranged in a time sequence to obtain the timing adjustment sequence of the electron beam power supply. Let t be the continuous acquisition time after the electron beam processing starts. n is a positive integer representing the acquisition order; the real-time beam amplitude acquired at the corresponding acquisition time is A. The instantaneous value of the output voltage acquired at the corresponding acquisition time is V. The real-time value of the focusing coil current acquired at the corresponding acquisition time is I. ; at the same acquisition time t The corresponding real-time beam amplitude A Instantaneous output voltage V Real-time value of focusing coil current I Bind it as an independent processing status data unit; assemble all processing status data units according to the acquisition time t The data are arranged sequentially from morning to evening in ascending order; the complete data set formed by the orderly combination of all processing status data units is the electron beam power supply timing adjustment sequence; the standard expression of the electron beam power supply timing adjustment sequence is: S={(t1,A1,V1,I1),(t2,A2,V2,I2),…,(t A V ,I )}; This sequence is a time-series data set that fully records the synchronous changes in beam current state, power output state, and focusing coil operating state over time throughout the entire electron beam processing process. It is the sole fundamental data source for all subsequent control calculations and parameter corrections.

[0025] S2. Based on the timing adjustment sequence, the rate of change of the real-time amplitude of the beam is analyzed to obtain the amplitude deviation of the electron beam. Based on the amplitude deviation, the instantaneous value of the output voltage is controlled in a closed loop to obtain the amplitude correction of the electron beam power supply. In this embodiment of the invention, the process of obtaining the amplitude correction amount of the electron beam power supply is as follows: Based on the timing adjustment sequence, the real-time amplitude of the beam is identified by time-domain difference resolution to obtain the instantaneous change slope of the electron beam; The timing adjustment sequence is a complete data set formed by organizing the real-time amplitude of the electron beam processing current, the instantaneous value of the electron beam power supply output voltage, and the real-time value of the focusing coil current, which are continuously acquired within a fixed time window, in chronological order. Time-domain differential recognition is an operation that calculates the change in the continuously acquired data in the time dimension. First, the real-time amplitude of the beam current corresponding to two adjacent acquisition moments is extracted sequentially from the timing adjustment sequence. The real-time amplitude of the beam current acquired at the later acquisition moment is subtracted from the real-time amplitude of the beam current acquired at the previous acquisition moment to obtain the change in the real-time amplitude of the beam current between the two moments. This change is divided by the time length between the two adjacent acquisition moments to obtain the change in the real-time amplitude of the beam current per unit time. This result is the instantaneous change slope of the electron beam, which is a unique value that characterizes the rate and magnitude of change of the real-time amplitude of the beam current per unit time.

[0026] Based on the preset reference amplitude parameter, the deviation amplitude of the instantaneous change slope is calibrated to obtain the absolute value of the amplitude deviation of the electron beam; The reference amplitude parameter is the instantaneous slope value of the beam amplitude, determined through process verification and on-site debugging, when the electron beam completes a stable standard processing operation. Deviation amplitude calibration is an operation that compares the real-time calculated change value with the standard value and extracts the magnitude of the deviation. The obtained instantaneous slope of the electron beam is directly subtracted from the preset reference amplitude parameter to obtain the deviation value of the instantaneous slope relative to the reference amplitude parameter. This deviation value is then converted to an absolute value to eliminate the directional influence caused by the positive and negative directions of the value, retaining only the magnitude of the deviation. The processed value is the absolute value of the electron beam amplitude deviation; the absolute value of the amplitude deviation is the only value that quantifies the magnitude of the deviation between the instantaneous slope and the standard slope.

[0027] Using the absolute value of amplitude deviation as the input excitation quantity for closed-loop control, the instantaneous value of the output voltage of the electron beam power supply is dynamically compensated and tuned to obtain the voltage compensation increment of the electron beam power supply. The input excitation quantity of the closed-loop control is the core driving value that directly triggers the closed-loop control unit to perform voltage adjustment operation. Dynamic compensation tuning is the operation of matching the corresponding voltage adjustment amplitude according to the magnitude of the deviation value. The absolute value of the amplitude deviation is directly input to the closed-loop control unit of the electron beam power supply. The closed-loop control unit determines the specific value that the output voltage needs to be supplemented according to the magnitude of the absolute value of the amplitude deviation, following the rule that the voltage compensation amplitude is positively correlated with the magnitude of the absolute value of the amplitude deviation. This specific value is the voltage compensation increment of the electron beam power supply. The voltage compensation increment is a dedicated compensation value used to superimpose and correct the current output voltage.

[0028] The voltage compensation increment is synchronously connected to the current control node of the instantaneous output voltage value, and the instantaneous compensation evaluation of the instantaneous output voltage value is performed to obtain the amplitude correction amount of the electron beam power supply.

[0029] The current control node for the instantaneous output voltage value is the hardware execution port in the electron beam power supply control terminal responsible for receiving and executing voltage adjustment signals in real time. Synchronous connection is the operation of transmitting the compensation value to the execution port without delay or loss. Instantaneous compensation evaluation is the operation of checking the stability and compliance of the superimposed voltage value. The voltage compensation increment is synchronously transmitted to the current control node for the instantaneous output voltage value through a dedicated signal transmission channel. At the current control node, the voltage compensation increment is directly superimposed with the current instantaneous output voltage value. The superimposed voltage value is subjected to real-time continuous detection and safety range verification to ensure that the value does not change abruptly and meets the power supply output requirements. The stable value after verification is the amplitude correction amount of the electron beam power supply. The amplitude correction amount is the final precise adjustment value that the electron beam power supply output voltage needs to perform.

[0030] S3. Based on the drop rate of the real-time amplitude of the beam, the phase characteristics of the output carrier of the electron beam power supply are analyzed, and the phase of the output carrier is calibrated in real time according to the analysis results to obtain the phase correction amount of the electron beam power supply. In this embodiment of the invention, when the drop rate of the real-time beam amplitude does not exceed the workpiece penetration characteristic threshold and the workpiece material interface characteristic threshold within a preset time window, the process of obtaining the phase correction amount of the electron beam power supply is as follows: The original phase offset of the electron beam power supply is obtained by performing voltage-current phase difference phase-locked analysis on the output carrier of the electron beam power supply. A voltage detection unit and a current detection unit are installed on the power transmission line of the electron beam power supply output carrier. The voltage detection unit acquires the voltage waveform of the power supply output carrier in real time and extracts a stable voltage phase. The current detection unit acquires the current waveform of the power supply output carrier in real time and extracts a stable current phase. The original phase offset of the electron beam power supply is obtained by subtracting the current phase from the extracted voltage phase. The formula for calculating the original phase offset is φ0 = φ -φ ;φ The phase of the output carrier voltage; φ The output carrier current phase is φ0; the original phase offset φ0 is a physical quantity that characterizes the degree of phase asynchrony between the output carrier voltage and current of the electron beam power supply; it is the only basic data for phase calibration under steady-state processing conditions.

[0031] The original phase offset is directly output as the phase correction value of the electron beam power supply; The original phase offset is directly used as the phase correction value of the electron beam power supply; the phase correction value is the target execution value used to calibrate the output carrier phase of the power supply under steady-state processing conditions; it can directly drive the power supply to complete phase stabilization adjustment.

[0032] When the drop rate of the real-time beam amplitude exceeds the workpiece penetration characteristic threshold or the workpiece material interface characteristic threshold within a preset time window, the process of obtaining the phase correction amount of the electron beam power supply is as follows: By performing a difference analysis between the drop rate of the real-time beam amplitude and the corresponding characteristic threshold, the drop rate of the electron beam power supply exceeds the amplitude. Extract two adjacent acquisition moments from the electron beam power supply timing sequence, and simultaneously extract the real-time beam amplitude corresponding to each of these two adjacent acquisition moments. Subtract the real-time beam amplitude of the previous acquisition moment from the real-time beam amplitude of the later acquisition moment to obtain the amplitude drop difference. Subtract the previous acquisition moment from the later acquisition moment to obtain the time interval difference. Divide the amplitude drop difference by the time interval difference to obtain the drop rate of the real-time beam amplitude. Calculate the difference between the drop rate and the workpiece penetration characteristic threshold and the workpiece material interface characteristic threshold, respectively. Select the larger of the two difference calculation results as the drop rate exceedance amplitude of the electron beam power supply. The formula for calculating the drop rate exceedance amplitude is Δv. d =max(v d -v t1 ,v d -v t2 );v d v is the rate of drop in the real-time amplitude of the beam. t1 The workpiece penetration feature threshold; v t2 The drop rate exceeds the amplitude, which is the threshold value of the workpiece material interface. It is a physical quantity that characterizes the degree to which the drop rate of the beam amplitude exceeds the standard limit and is the core input data for transient phase overcompensation.

[0033] By applying square-law dynamic gain adjustment to the drop rate exceedance amplitude, the transient overcompensated phase amplitude is obtained. The drop rate is multiplied by itself to obtain the squared result; the squared result is multiplied by a pre-set fixed gain coefficient to obtain the transient overcompensated phase amplitude; the transient overcompensated phase amplitude is an additional phase compensation value added for abnormal operating conditions where the beam amplitude drops rapidly; this value is used to quickly compensate for the power output carrier phase offset problem caused by the sudden change in beam amplitude.

[0034] The phase correction amount of the electron beam power supply is obtained by superimposing the transient overcompensated phase amplitude feedforward onto the phase adjustment path of the original phase offset. The transient overcompensated phase amplitude is directly transmitted through the phase adjustment feedforward channel of the electron beam power supply and superimposed on the original phase offset. The final value obtained after superposition is determined as the phase correction amount of the electron beam power supply. This phase correction amount integrates the basic phase deviation compensation and transient abnormal drop compensation. It can directly drive the power supply phase control unit to adapt to the processing conditions of sudden changes in beam amplitude.

[0035] S4. Map the phase correction amount to the constraint adjustment coefficient of the focusing coil current, and dynamically scale it according to the gradient of the amplitude deviation, and perform threshold tuning on the constraint adjustment coefficient to obtain the focusing current constraint amount of the focusing coil current. In this embodiment of the invention, the process of obtaining the focusing current constraint of the focusing coil current is as follows: The phase correction is inverted and reduced to obtain the basic constraint coefficient of the focusing coil current; The determined phase correction amount is converted in reverse according to the corresponding relationship between electron beam focusing control and power supply phase adjustment; the value of the phase adjustment dimension is completely converted into the value of the focusing coil current control dimension. The value obtained after conversion is the basic constraint coefficient of the focusing coil current. The basic constraint coefficient is a physical quantity that characterizes the initial constraint strength of the phase correction amount on the focusing coil current and is the initial reference data for focusing current constraint adjustment.

[0036] Based on the time-series adjustment sequence, the amplitude deviation is analyzed by dynamic evolution of deviation to obtain the amplitude deviation evolution gradient. The amplitude deviation is extracted from the electron beam power supply timing adjustment sequence at multiple consecutive acquisition times. The consecutive amplitude deviations are compared point by point according to the order of acquisition times. The difference in deviation change is obtained by subtracting the amplitude deviation of the previous moment from the amplitude deviation of the later moment. The difference in deviation change is continuously calculated along the time dimension. The resulting value of the continuous change trend is the amplitude deviation evolution gradient. The amplitude deviation evolution gradient is a physical quantity that characterizes the speed and trend of the amplitude deviation change with the processing process. It is the core basis for adjusting the focusing constraint strength.

[0037] Based on the magnitude deviation evolution gradient, the basic constraint coefficients are positively scaled to obtain the intermediate constraint adjustment coefficients of the basic constraint coefficients. The basic constraint coefficients are adjusted by amplifying their values ​​in the same direction based on the magnitude of the amplitude deviation evolution gradient. The larger the amplitude deviation evolution gradient, the higher the amplification ratio of the basic constraint coefficients. The smaller the amplitude deviation evolution gradient, the lower the amplification ratio of the basic constraint coefficients. The adjusted value is the intermediate constraint adjustment coefficient of the basic constraint coefficients. The intermediate constraint adjustment coefficient is the value of the focused current transition constraint that integrates the phase constraint and the amplitude deviation change. It is the intermediate core data for generating the final constraint quantity.

[0038] When the transient overcompensation phase amplitude is active, the process of reverse compression tuning of the upper limit of the dead zone of the focusing coil current to obtain the dead zone boundary limit of the focusing coil current is as follows: When the transient overcompensation phase amplitude is in effect, the upper limit of the dead zone of the focusing coil current is identified to obtain the original upper limit reference value of the dead zone of the focusing coil current. After determining that the transient overcompensation phase amplitude is in effect, a dead zone upper limit value reading command is sent to the focusing coil current control module. Upon receiving the command, the focusing coil current control module immediately outputs the internally pre-stored fixed value of the dead zone upper limit of the focusing coil current response. This fixed value is the original dead zone upper limit reference value of the focusing coil current. The original dead zone upper limit reference value is the maximum allowable response upper limit value of the focusing coil current without transient phase compensation; it is the initial reference data for dead zone boundary adjustment.

[0039] Based on the magnitude of the transient overcompensated phase amplitude, the original dead zone upper limit reference value is reverse-compressed to obtain the compression correction factor of the focusing coil current. Based on the overall magnitude of the transient overcompensated phase amplitude, a proportional value used to reduce the upper limit of the dead zone is obtained through a fixed conversion relationship; this proportional value is the compression correction factor for the focusing coil current; the formula for calculating the compression correction factor is k. c= 1 / (1+Δφ ov );Δφ ov The transient overcompensated phase amplitude is represented by the compression correction scaling factor, which is a dead-zone compression adjustment coefficient that adapts to the transient phase compensation intensity. Its value is negatively correlated with the transient overcompensated phase amplitude.

[0040] The compression correction scaling factor is applied to the original dead zone upper limit reference value to obtain the dead zone boundary limit value of the focusing coil current; The compression correction factor is multiplied by the original dead zone upper limit reference value, and the resulting value is the dead zone boundary limit value of the focusing coil current; the formula for calculating the dead zone boundary limit value is L. d =L0×k c L0 is the baseline value of the original dead zone upper limit, k c To compress the correction scaling factor, the dead zone boundary limit is the maximum constraint boundary value of the focusing coil current when transient phase compensation is effective, and it is the only boundary standard for focusing current limiting setting.

[0041] Under the dead zone boundary limit constraint, the amplitude limiting adjustment coefficient of the intermediate state constraint is set to obtain the focusing current constraint amount of the focusing coil current; The intermediate state constraint adjustment coefficient is directly compared with the dead zone boundary limit. If the intermediate state constraint adjustment coefficient is less than or equal to the dead zone boundary limit, the original value of the intermediate state constraint adjustment coefficient is directly retained as the value after tuning. If the intermediate state constraint adjustment coefficient is greater than the dead zone boundary limit, the intermediate state constraint adjustment coefficient is forcibly adjusted to the value of the dead zone boundary limit. The final value after the tuning operation is completed is the focusing current constraint value of the focusing coil current. The focusing current constraint value is directly input into the focusing coil control unit to execute the constraint value, which can stably constrain the focusing coil current to operate continuously within a safe range.

[0042] S5. The amplitude correction, phase correction, and focusing current constraint are dynamically weighted and tuned according to the current beam amplitude drop rate to obtain the fusion drive control quantity of the electron beam power supply. In this embodiment of the invention, the process of obtaining the fusion drive control quantity of the electron beam power supply is as follows: The rate characteristic of the drop rate of the real-time beam amplitude is fitted to obtain the conventional weighting factor of the electron beam power supply. The timing adjustment sequence is a continuous data sequence obtained by real-time acquisition of the real-time beam current amplitude, the instantaneous value of the electron beam power supply output voltage, and the real-time value of the focusing coil current during electron beam machining of the workpiece, and then arranging them according to a fixed time window. The rate of drop in the real-time beam current amplitude is calculated by subtracting the real-time beam current amplitude at the current acquisition moment from the real-time beam current amplitude at the previous acquisition moment to obtain the beam current amplitude drop value. Then, the beam current amplitude drop value is converted to the duration of the fixed time window to obtain the beam current amplitude drop value per unit time. This refers to the drop rate of the real-time beam amplitude. The drop rates of the real-time beam amplitude obtained within multiple consecutive fixed time windows are arranged sequentially according to the acquisition time. All the drop rate values ​​after arrangement are smoothed point by point. During the smoothing process, the median value of two adjacent drop rate values ​​is used to replace the fluctuating values, so that all drop rate values ​​form a continuous and stable trend without sudden changes. Based on this stable trend, a fixed value is determined to define the basic allocation ratio of amplitude correction, phase correction, and focusing current constraint in the fusion control. This fixed value is the conventional weighting allocation factor of the electron beam power supply.

[0043] The amplitude correction amount is adjusted by the amplitude weighting ratio to obtain the amplitude correction weighted component of the electron beam power supply; The amplitude correction is a voltage compensation value obtained by performing closed-loop control on the instantaneous output voltage of the electron beam power supply after analyzing the deviation of the real-time amplitude change rate of the beam current based on the timing adjustment sequence. This value is used to correct the output voltage of the electron beam power supply so that the real-time amplitude of the beam current returns to the standard state. The conventional weighted allocation factor is used as the sole basis for the allocation. The value of the amplitude correction is multiplied by the value of the conventional weighted allocation factor. The value obtained after multiplication is the electron beam power supply amplitude correction weighted component that adapts to the fusion control allocation requirements.

[0044] The phase correction amount is configured with carrier phase weights to obtain the phase correction weighted component of the electron beam power supply; The phase correction amount is a phase compensation value obtained by performing real-time phase calibration on the output carrier after analyzing the phase characteristics of the electron beam power supply output carrier based on the real-time amplitude drop rate of the beam. This value is used to correct the phase of the electron beam power supply output carrier to ensure stable beam output. The conventional weighted allocation factor is used as the sole configuration basis. The value of the phase correction amount is multiplied by the value of the conventional weighted allocation factor. The value obtained after multiplication is the electron beam power supply phase correction weighted component that conforms to the fusion control phase weight allocation standard.

[0045] By performing a focusing constraint weighted adaptation on the focusing current constraint, the constraint weighted component of the focusing coil current is obtained; The focusing current constraint is a value obtained by mapping the phase correction to the focusing coil current constraint adjustment coefficient and then setting the threshold based on the gradient of the amplitude deviation. This value is used to constrain the focusing coil current output range to ensure the electron beam focusing accuracy. The conventional weighted allocation factor is used as the only matching basis. The value of the focusing current constraint is multiplied by the value of the conventional weighted allocation factor. The value obtained after multiplication is the weighted component of the focusing coil current constraint that matches the constraint allocation requirements of the fusion control.

[0046] The amplitude correction weighted component, phase correction weighted component, and constraint weighted component are reconstructed in a multi-component collaborative manner to obtain the fused drive control quantity of the electron beam power supply.

[0047] The values ​​of the amplitude correction weighted component, phase correction weighted component, and constraint weighted component are added sequentially according to the control logic corresponding to the acquisition timing. During the addition process, the numerical attributes and control effects of each component are retained. The unified total value obtained after addition is the electron beam power fusion drive control quantity that can be directly input into the power control terminal.

[0048] S6. Input the fusion drive control quantity to the control terminal of the electron beam power supply to complete the adaptive adjustment control of the electron beam power supply. In this embodiment of the invention, the process of achieving adaptive adjustment and control of the electron beam power supply is as follows: The validity of the fused drive control quantity is verified to obtain the valid signal identifier of the fused drive control quantity. The fusion drive control quantity is a unified control value obtained by multi-component collaborative reconstruction of the amplitude correction weighted component, phase correction weighted component, and constraint weighted component. First, the continuous output value of the fusion drive control quantity is collected point by point within a fixed time window. Then, it is checked whether the output values ​​at adjacent collection times are smoothly connected without numerical jumps or missing data. Next, the output value is compared item by item with the control value range required for stable operation of the electron beam power supply to determine whether the value is within the range. At the same time, it is checked whether the generation time of the output value corresponds completely with the collection time of the electron beam power supply timing adjustment sequence, without time offset or timing misalignment. When the continuity of the value, the rationality of the value, and the timing synchronization all meet the requirements, a status flag is generated to uniquely mark that the fusion drive control quantity can be executed normally. This status flag is the signal validity identifier of the fusion drive control quantity.

[0049] Based on the valid signal identification, the drive signal of the control terminal of the electron beam power supply is adapted and modulated to obtain the adapted execution command of the control terminal. The signal validity identifier is a unique status marker indicating that the fusion drive control quantity has the conditions for normal execution. The control terminal of the electron beam power supply is the core execution unit that receives control signals and regulates the power supply's operating state. It first reads the signal validity identifier and confirms that the fusion drive control quantity is in a valid state. Then, it extracts the complete output value of the fusion drive control quantity and converts the value into a corresponding level form of drive signal according to the input specification of the control terminal's hardware interface. Subsequently, it adjusts the transmission timing of the drive signal to be completely synchronized with the internal working clock cycle of the control terminal. At the same time, it matches the transmission amplitude of the drive signal to conform to the input amplitude standard of the control terminal. The converted level signal, the synchronized transmission timing, and the matched transmission amplitude are integrated to form a dedicated instruction that the control terminal can directly parse and execute. This dedicated instruction is the adaptive execution instruction of the control terminal.

[0050] The adaptation execution command is loaded into the power regulation port of the electron beam power supply to complete the adaptive adjustment and control of the electron beam power supply. The adaptation execution command is a dedicated command that the control terminal can directly parse and drive the power unit. The power control port of the electron beam power supply is a hardware interface for receiving the execution command and adjusting the power output parameters. The adaptation execution command is transmitted to the power control port without loss through a dedicated signal transmission link. After receiving the command, the power control port parses the control value in the command and adjusts the output voltage amplitude, output carrier phase, and focusing coil current constraint range of the electron beam power supply in sync with the control value obtained by parsing. During the adjustment process, it conforms to the standard requirements of beam current amplitude for electron beam processing in real time, so that the beam current amplitude remains stable and without deviation, and finally completes the adaptive adjustment and control of the electron beam power supply.

[0051] like Figure 2The diagram shown is a functional block diagram of an electron beam power supply adaptive adjustment and control system provided in an embodiment of the present invention.

[0052] The electron beam power supply adaptive adjustment and control system 100 described in this invention can be installed in an electronic device. Depending on the functions implemented, the electron beam power supply adaptive adjustment and control system 100 may include a timing sequence construction module 101, an amplitude correction and control module 102, a phase calibration and analysis module 103, a focus constraint tuning module 104, a fusion control tuning module 105, and an adaptive adjustment execution module 106. The module described in this invention can also be called a unit, which refers to a series of computer program segments that can be executed by the processor of an electronic device and can perform a fixed function, and are stored in the memory of the electronic device.

[0053] In this embodiment, the functions of each module / unit are as follows: The timing sequence construction module 101 is used to collect the real-time amplitude of the beam current, the instantaneous value of the output voltage of the electron beam power supply, and the real-time value of the focusing coil current during the electron beam processing of the workpiece. The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are arranged according to a fixed time window to construct an electron beam power supply timing adjustment sequence. The amplitude correction control module 102 is used to analyze the deviation rate of the real-time amplitude of the beam based on the timing adjustment sequence, obtain the amplitude deviation of the electron beam, and perform closed-loop control on the instantaneous value of the output voltage based on the amplitude deviation to obtain the amplitude correction of the electron beam power supply. The phase calibration analysis module 103 is used to perform phase characteristic analysis on the output carrier of the electron beam power supply based on the drop rate of the real-time amplitude of the beam, and to perform real-time phase calibration on the output carrier according to the analysis results, so as to obtain the phase correction amount of the electron beam power supply. The focusing constraint tuning module 104 is used to map the phase correction amount to the constraint adjustment coefficient of the focusing coil current, and dynamically scale the constraint adjustment coefficient according to the gradient of the amplitude deviation to obtain the focusing current constraint amount of the focusing coil current. The fusion control tuning module 105 is used to dynamically weight and tune the amplitude correction, phase correction, and focusing current constraint according to the current beam amplitude drop rate to obtain the fusion drive control quantity of the electron beam power supply. The adaptive adjustment execution module 106 is used to input the fusion drive control quantity to the control terminal of the electron beam power supply to complete the adaptive adjustment control of the electron beam power supply.

[0054] In the several embodiments provided by this invention, it should be understood that the disclosed methods and systems can be implemented in other ways. For example, the system embodiments described above are merely illustrative; for instance, the division of modules is only a logical functional division, and other division methods may be used in actual implementation. The modules described as separate components may or may not be physically separate. The components shown as modules may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of the modules may be selected to achieve the purpose of this embodiment according to actual needs.

[0055] In addition, the functional modules in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or in the form of hardware plus software functional modules.

[0056] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention.

[0057] This application embodiment can acquire and process relevant data based on artificial intelligence technology. Artificial intelligence is the theory, method, technology, and application system that uses digital computers or machines controlled by digital computers to simulate, extend, and expand human intelligence, perceive the environment, acquire knowledge, and use that knowledge to obtain optimal results.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. An adaptive adjustment and control method for an electron beam power supply, characterized in that, The method includes: S1. Real-time acquisition of the real-time amplitude of the electron beam current, the instantaneous value of the output voltage of the electron beam power supply, and the real-time value of the focusing coil current during the electron beam processing of the workpiece. The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are then used to construct an electron beam power supply timing adjustment sequence according to a fixed time window. S2. Based on the timing adjustment sequence, the rate of change of the real-time amplitude of the beam is analyzed to obtain the amplitude deviation of the electron beam. Based on the amplitude deviation, the instantaneous value of the output voltage is controlled in a closed loop to obtain the amplitude correction of the electron beam power supply. S3. Based on the drop rate of the real-time amplitude of the beam, the phase characteristics of the output carrier of the electron beam power supply are analyzed, and the phase of the output carrier is calibrated in real time according to the analysis results to obtain the phase correction amount of the electron beam power supply. S4. Map the phase correction amount to the constraint adjustment coefficient of the focusing coil current, and dynamically scale it according to the gradient of the amplitude deviation, and perform threshold tuning on the constraint adjustment coefficient to obtain the focusing current constraint amount of the focusing coil current. S5. The amplitude correction, phase correction, and focusing current constraint are dynamically weighted and tuned according to the current beam amplitude drop rate to obtain the fusion drive control quantity of the electron beam power supply. S6. Input the fusion drive control quantity to the control terminal of the electron beam power supply to complete the adaptive adjustment control of the electron beam power supply.

2. The electron beam power supply adaptive adjustment and control method as described in claim 1, characterized in that, The process of constructing the electron beam power supply timing adjustment sequence is as follows: The real-time amplitude of the electron beam current is obtained by acquiring and analyzing the beam current signal during the electron beam processing of the workpiece. Based on the acquisition time of the real-time amplitude of the beam, the output port voltage of the electron beam power supply is synchronously detected to obtain the instantaneous value of the output voltage of the electron beam power supply. The current of the focusing coil is synchronously tracked and acquired according to the acquisition period of the instantaneous value of the output voltage to obtain the real-time value of the focusing coil current; The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are arranged in a time sequence to obtain the timing adjustment sequence of the electron beam power supply.

3. The electron beam power supply adaptive adjustment and control method as described in claim 1, characterized in that, The process of obtaining the amplitude correction value of the electron beam power supply is as follows: Based on the timing adjustment sequence, the real-time amplitude of the beam is identified by time-domain difference resolution to obtain the instantaneous change slope of the electron beam; Based on the preset reference amplitude parameter, the deviation amplitude of the instantaneous change slope is calibrated to obtain the absolute value of the amplitude deviation of the electron beam; Using the absolute value of amplitude deviation as the input excitation quantity for closed-loop control, the instantaneous value of the output voltage of the electron beam power supply is dynamically compensated and tuned to obtain the voltage compensation increment of the electron beam power supply. The voltage compensation increment is synchronously connected to the current control node of the instantaneous output voltage value, and the instantaneous compensation evaluation of the instantaneous output voltage value is performed to obtain the amplitude correction amount of the electron beam power supply.

4. The electron beam power supply adaptive adjustment and control method as described in claim 1, characterized in that, When the drop rate of the real-time beam amplitude does not exceed the workpiece penetration characteristic threshold and the workpiece material interface characteristic threshold within the preset time window, the process of obtaining the phase correction amount of the electron beam power supply is as follows: The original phase offset of the electron beam power supply is obtained by performing voltage-current phase difference phase-locked analysis on the output carrier of the electron beam power supply. The original phase offset is directly output as the phase correction value of the electron beam power supply.

5. The electron beam power supply adaptive adjustment and control method as described in claim 4, characterized in that, When the drop rate of the real-time beam amplitude exceeds the workpiece penetration characteristic threshold or the workpiece material interface characteristic threshold within a preset time window, the process of obtaining the phase correction amount of the electron beam power supply is as follows: By performing a difference analysis between the drop rate of the real-time beam amplitude and the corresponding characteristic threshold, the drop rate of the electron beam power supply exceeds the amplitude. By applying square-law dynamic gain adjustment to the drop rate exceedance amplitude, the transient overcompensated phase amplitude is obtained. The phase correction amount of the electron beam power supply is obtained by superimposing the transient overcompensated phase amplitude onto the phase adjustment path of the original phase offset.

6. The electron beam power supply adaptive adjustment and control method as described in claim 1, characterized in that, The process of obtaining the focusing current constraint of the focusing coil current is as follows: The phase correction is inverted and reduced to obtain the basic constraint coefficient of the focusing coil current; Based on the time-series adjustment sequence, the amplitude deviation is analyzed by dynamic evolution of deviation to obtain the amplitude deviation evolution gradient. Based on the magnitude deviation evolution gradient, the basic constraint coefficients are positively scaled to obtain the intermediate constraint adjustment coefficients of the basic constraint coefficients. When the transient overcompensation phase amplitude is active, the upper limit of the dead zone of the focusing coil current is reverse-compressed to obtain the dead zone boundary limit of the focusing coil current. Under the dead zone boundary limit constraint, the amplitude limiting adjustment coefficient of the intermediate state constraint is adjusted to obtain the focusing current constraint amount of the focusing coil current.

7. The electron beam power supply adaptive adjustment and control method as described in claim 6, characterized in that, The process of obtaining the dead zone boundary limit value of the focusing coil current is as follows: When the transient overcompensation phase amplitude is in effect, the upper limit of the dead zone of the focusing coil current is identified to obtain the original upper limit reference value of the dead zone of the focusing coil current. Based on the magnitude of the transient overcompensated phase amplitude, the original dead zone upper limit reference value is reverse-compressed to obtain the compression correction factor of the focusing coil current. The compression correction scaling factor is applied to the original dead zone upper limit reference value to obtain the dead zone boundary limit value of the focusing coil current.

8. The electron beam power supply adaptive adjustment and control method as described in claim 1, characterized in that, The process of obtaining the fusion drive control quantity of the electron beam power supply is as follows: The rate characteristic of the drop rate of the real-time beam amplitude is fitted to obtain the conventional weighting factor of the electron beam power supply. The amplitude correction amount is adjusted by the amplitude weighting ratio to obtain the amplitude correction weighted component of the electron beam power supply; The phase correction amount is configured with carrier phase weights to obtain the phase correction weighted component of the electron beam power supply; By performing a focusing constraint weighted adaptation on the focusing current constraint, the constraint weighted component of the focusing coil current is obtained; The amplitude correction weighted component, phase correction weighted component, and constraint weighted component are reconstructed in a multi-component collaborative manner to obtain the fused drive control quantity of the electron beam power supply.

9. The electron beam power supply adaptive adjustment and control method as described in claim 1, characterized in that, The process of achieving adaptive adjustment and control of the electron beam power supply is as follows: The validity of the fused drive control quantity is verified to obtain the valid signal identifier of the fused drive control quantity. Based on the valid signal identification, the drive signal of the control terminal of the electron beam power supply is adapted and modulated to obtain the adapted execution command of the control terminal. The adaptive execution command is loaded into the power regulation port of the electron beam power supply to complete the adaptive adjustment and control of the electron beam power supply.

10. An adaptive adjustment and control system for electron beam power supply, characterized in that, For implementing the adaptive adjustment and control method for an electron beam power supply according to any one of claims 1-9, the system comprises: The timing sequence construction module is used to collect the real-time amplitude of the beam current, the instantaneous value of the output voltage of the electron beam power supply, and the real-time value of the focusing coil current during the electron beam processing of the workpiece. The real-time amplitude of the beam current, the instantaneous value of the output voltage, and the real-time value are arranged into a fixed time window to construct the timing adjustment sequence of the electron beam power supply. The amplitude correction control module is used to analyze the deviation rate of the real-time amplitude change of the beam based on the timing adjustment sequence, obtain the amplitude deviation of the electron beam, and perform closed-loop control on the instantaneous value of the output voltage based on the amplitude deviation to obtain the amplitude correction amount of the electron beam power supply. The phase calibration analysis module is used to perform phase characteristic analysis on the output carrier of the electron beam power supply based on the drop rate of the real-time amplitude of the beam, and to perform real-time phase calibration on the output carrier according to the analysis results, so as to obtain the phase correction amount of the electron beam power supply. The focusing constraint tuning module is used to map the phase correction amount to the constraint adjustment coefficient of the focusing coil current, and dynamically scale the constraint adjustment coefficient according to the gradient of the amplitude deviation to obtain the focusing current constraint amount of the focusing coil current. The fusion control tuning module is used to dynamically weight and tune the amplitude correction, phase correction, and focusing current constraint according to the current beam amplitude drop rate to obtain the fusion drive control quantity of the electron beam power supply. The adaptive adjustment execution module is used to input the fusion drive control quantity to the control terminal of the electron beam power supply to complete the adaptive adjustment control of the electron beam power supply.

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