An integrated pump rack system for semiconductor production

Abstract

The application provides an integrated pump frame system for semiconductor production, comprising a support and a support table, the support is formed by connecting C-shaped steel legs, top beams, upper cross beams and lower cross beams through connecting pieces, the upper cross beams and the lower cross beams are integrally installed with a gas supply metering valve group, a water supply valve group, a gas supply valve group A, a return water valve group and a gas supply valve group B through a clamp; the metering valve in the gas supply metering valve group adopts a ball bearing transmission structure, cooperates with double dials and locking screws to improve the flow control precision, the ball valve A connected with the metering valve is provided with symmetrical trunnions and an integral soluble polytetrafluoroethylene valve seat, thereby improving the sealing reliability; the one-way valve in the gas supply valve group B adopts an integrally formed poppet head, eliminates the movement gap, avoids the generation of particulate matters and airflow resonance howling, and the spring pre-tightening force is adjustable. The application adopts a factory prefabricated modular bolted structure, reduces the clean workshop site construction amount, reduces the leakage and human assembly failure risk, is convenient to disassemble, maintain and use, and can meet the use requirements of high-purity gas, high cleanliness and high sealing of the semiconductor process.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit process equipment technology, specifically an integrated pump rack system for semiconductor production. Background Technology

[0002] The semiconductor industry is developing rapidly, and the upgrading and replacement of precision semiconductor manufacturing equipment is happening at an increasingly faster pace, leading to a surge in the installation and modification of such equipment. For semiconductor factories, especially chip manufacturing plants, the construction cycle is a critical factor, often determining whether a product will succeed in the market.

[0003] Semiconductor vacuum pumps, as core supporting equipment for obtaining a high vacuum environment in chip manufacturing processes, require complex gas supply, water supply, water return, and vacuum piping systems. In existing solutions, vacuum pumps, various valves, pipelines, and testing instruments are mostly installed as individual components on-site. This results in a wide variety of parts, complex pipeline layouts, and the need for pipeline connections and valve assembly to be completed on-site within a cleanroom. This not only makes schedule planning difficult and installation and deployment time long, but also consumes a significant portion of the overall project time for on-site construction. Furthermore, on-site operations such as hot work and pipe connections within the cleanroom can introduce safety and quality hazards such as dust pollution, seal leaks, and inconsistencies in assembly. When production line processes are adjusted, requiring modifications to equipment layout and pipeline routing, the dismantling of pipelines and valve assemblies is time-consuming and labor-intensive, and the dismantling and reassembly process can easily cause secondary pollution to the cleanroom environment.

[0004] In addition, the metering valves used in its gas supply system mostly adopt a simple "ball + groove" structure for their valve stem transmission mechanism. During long-term use, problems such as unstable valve stem retraction, insufficient repeatability, and easy wear of the sealing surface occur, which affect the accuracy of gas flow control and the service life of the valve.

[0005] Furthermore, existing ball valves in gas supply valve assemblies also have shortcomings. Traditional ball valves rely on system pressure for seat sealing, and their split-type seat structure results in assembly gaps and insufficient sealing reliability. The valve stem uses a packing seal, which is prone to friction and wear during reciprocating rotation, causing gas leakage and contaminating high-purity gas with particulate matter. Simultaneously, the high torque required for opening and closing ball valves can cause valve core displacement, leading to packing seal deformation and increased leakage risk. These issues make it difficult to meet the stringent requirements of ultra-cleanliness and high sealing performance in semiconductor processes.

[0006] Furthermore, the check valves in the gas supply valve assembly often employ a split-type lifting head structure (e.g., the lifting head and the lifting head stop are separate designs). The gaps between their moving parts cause friction and wear during reciprocating motion, releasing metal particles and contaminating the high-purity gas. Simultaneously, the gaps and dead angles of the split structure easily trap impurities, becoming sources of contamination and severely impacting the yield of semiconductor products. In addition, check valves are prone to resonance; the split-type lifting head structure is susceptible to high-frequency vibration (resonance) under the action of airflow and springs, causing whistling, unstable airflow, and even overheating of the lifting head, posing safety hazards. Moreover, the sealing reliability is insufficient. The split structure increases potential leakage points, and the seals are prone to failure under high pressure or high back pressure conditions. Summary of the Invention

[0007] The purpose of this invention is to provide an integrated pump holder system for semiconductor manufacturing, in order to solve the problems existing in the background art.

[0008] The technical solution of this invention is implemented as follows: An integrated pump rack system for semiconductor production includes a bracket and a support table. The bracket includes four legs, with a top beam bolted to the top of adjacent legs via right-angle connectors. An upper crossbeam and a lower crossbeam are bolted to the bottom of the top of the bracket and between adjacent legs via T-shaped connectors. The legs are fixed to the ground via T-shaped fixing feet. The support table includes a tabletop, with table legs vertically welded to the bottom of the four corners of the tabletop. The table legs are fixed to the ground via right-angle fixings. Vacuum pumps are installed on the top of the tabletop and on the ground below the tabletop. Vacuum pipes are installed on the top of the vacuum pumps, with a shut-off valve installed at the lower part of the vacuum pipes and a connecting valve installed on the top of the vacuum pipes. An air supply metering valve group, a water supply valve group, an air supply valve group A, a return water valve group, and an air supply valve group B are sequentially installed on the upper and lower crossbeams via clamps. The gas metering valve assembly includes a stainless steel pipe and a metering valve. One end of the stainless steel pipe is connected to an external threaded connector, which is connected to a quick-connect fitting. The other end of the stainless steel pipe is connected to the metering valve, which is also connected to a ball valve A. The metering valve includes an adjusting handle, a valve body A, a valve stem, and a housing. A small scale is installed at the bottom of the adjusting handle, and horizontal scale lines are engraved on the outer bottom of the small scale. The top of the valve body A has a slot, and the inside of the valve body A has a cavity. A vertical cavity is connected to the bottom of the cavity, and an oblique hole is connected to the left side of the vertical cavity. A straight hole is connected to one side of the bottom of the cavity. External threaded ports A are installed on both sides of the valve body A, and internal threaded connectors A are connected to the external threaded ports A. A connecting pipe A is provided inside the external threaded ports A and the internal threaded connectors A. The orifice and the straight hole are respectively connected to pipe A; the valve stem is installed inside the housing, the top of the housing can extend into the adjusting handle, the bottom of the housing is movably connected to the base plate, the top and bottom outer sides of the housing are respectively provided with internal threads and external threads B, the valve stem includes an insert A, the insert A is inserted into the adjusting handle and locked by a fixing screw A, the bottom of the insert A is connected to an external thread post, the external thread post is connected to the internal thread on the top of the housing, a large scale is fixedly installed on the top outer side of the housing by a fixing screw B, the large scale is engraved with vertical scale lines; a U-shaped groove is installed at the bottom of the external thread post, the U-shaped groove contains a ball, the bottom of the ball is contacted by an I-shaped fixing component, a bearing is installed on the I-shaped fixing component, and the bearing is connected and fixed to the inner wall of the U-shaped groove. The bottom of the I-shaped fastener is equipped with a support column, and a cover plate A is vertically connected to the bottom of the support column. A metal bellows is installed between the bottom of the cover plate A and the bottom plate. A piston is vertically installed in the middle of the bottom of the bottom plate, and a valve head is vertically bolted to the bottom of the piston. The bottom plate can move up and down in the slot. The piston is installed in the cavity, and the valve head is installed in the vertical cavity. Sealing gaskets are fitted at the bottom of the slot, below the bottom plate, and outside the piston. The valve body A is connected and fixed to the outer shell by a valve body nut. A locking screw is installed below the external threaded column and inside the outer shell to lock the valve stem after the flow rate is set. The water supply valve assembly includes a union A, which is connected to a water supply ball valve via a union nut A. The water supply ball valve is connected to a detection device, which is equipped with a pressure and temperature dual display. The detection device is connected to a pressure reducing valve via a union nut B, which is connected to the union B via a union nut C. The gas supply valve group A includes a pressure regulating valve. One end of the pressure regulating valve is connected to a quick connector, and the other end is connected to a sealing connector. The other end of the sealing connector is connected to a three-way valve A. A pressure gauge is connected to the middle channel of the three-way valve A. The other end of the three-way valve A is connected to a connecting pipe, and the connecting pipe is connected to a ball valve B. The return water valve assembly includes a horizontal connecting pipe, one end of which is connected to a hose connector, a pressure reducer is connected to the lower part of the horizontal connecting pipe, the other end of which is connected to a return water ball valve, and the return water ball valve is connected to a flow meter A through a conversion connector A, and the other end of the flow meter A is connected to a hose connector B through a conversion connector B. The gas supply valve assembly B includes stainless steel pipes A, B, C, and D. One end of stainless steel pipe A is connected to a reducing tee B, and the other end is connected to a reducing fitting. The other end of the reducing tee B is connected to a tee B. One end of tee B is connected to stainless steel pipe B, and the other end is vertically connected to stainless steel pipe D. A throttle valve and a flow meter B are connected to both ends of stainless steel pipe D, respectively. The other end of the reducing fitting is connected to a connecting fitting, and the other end of the connecting fitting is connected to a pagoda fitting. An external threaded nut A is installed on the other end of stainless steel pipe B. The other end of the external threaded nut A is connected to an internal threaded nut A. The other end of the internal threaded nut A is connected to a welded... Connector A, the bottom of the throttle valve is connected to a ferrule tee B connector, the bottom of the ferrule tee B connector is connected to a heater, the middle of the ferrule tee B connector is connected to a pressure sensor via an internal thread connection B, the top of the flow meter B is connected to a ball valve C via a ferrule connector, the other end of the ball valve C is connected to a stainless steel pipe elbow A, the other end of the stainless steel pipe elbow A is connected to a stainless steel elbow B via stainless steel pipe C, the other end of the heater is connected to a check valve, the other end of the check valve is connected to an external thread nut B via an internal thread connection A, the other end of the external thread nut B is connected to an internal thread nut B, and the other end of the internal thread nut B is connected to a welded joint B. The one-way valve includes a valve body C, with internal and external threads at the top and bottom. Locking screws A and B are threadedly connected to the inner sides of the top and bottom of the valve body C, respectively. A connector is installed below locking screw A, and a nitrile rubber sealing ring is installed between the bottom of the connector and the inner side of the valve body C. A lifting head is movably installed below the connector. The lifting head is an integral structure with a sealing plate at its top, and a pipe A is connected below the sealing plate. Air inlets are opened around the top of pipe A, and an annular support plate is installed inside pipe A. An adjusting screw is installed above locking screw B, with a U-shaped support at its top. A metal spring is installed between the annular support plate and the U-shaped support. A baffle is installed below the lifting head and inside the valve body C. The sealing plate of the lifting head and pipe A are integrally formed, with the outer diameter of the sealing plate smaller than the outer diameter of pipe A. The upper surface of the sealing plate forms a sealing surface for sealing with the connector. When gas pressure is applied, the lifting head moves downward as a whole, the upper surface of the sealing plate separates from the connector, and the gas enters the internal channel of pipe A through the air inlet; when the gas stops or reverses, the lifting head moves upward and resets under the action of spring force, and the upper surface of the sealing plate fits tightly with the connector to achieve a seal. Ball valves A, B, and C have identical structures, each including a handle, a top bolt, a spherical valve stem, and a valve body B. The top bolt is embedded in the handle and fixed by a fixing screw C. The spherical valve stem includes a main stem and an insert B, with the insert B passing through the top bolt and inserted into the handle. A ball is mounted at the bottom of the main stem, and identical trunnions are installed between the bottom and top of the ball and the main stem. A base is mounted at the bottom of the trunnions below the ball. A valve seat is installed inside the valve body B, with side holes on both sides and a bottom hole at the bottom. The valve body and trunnion are installed inside the valve seat. The base passes through the bottom hole and connects to the valve body B. A through hole is horizontally opened in the ball. A cover plate B is installed on the top of the valve seat. A leaf spring is installed between the cover plate B and the top bolt. A retaining ring is installed on the inner wall of the side hole of the valve seat. A sealing ring is installed on the inner wall of the retaining ring. External threaded ports B are installed on both sides of the valve body B. An internal threaded connector B is installed on the external threaded port B. A pipe B is provided between the external threaded port B and the valve body B. The through hole, side hole, and pipe B are on the same horizontal line and the side hole, pipe B and through hole are connected.

[0009] Furthermore, the outriggers, top beam, upper crossbeam, and lower crossbeam are all made of C-shaped steel.

[0010] Furthermore, a locking nut A is fitted on the outer side of the external thread B at the bottom of the housing for locking and fixing with the connecting panel.

[0011] Furthermore, the valve seat is made of soluble polytetrafluoroethylene in one piece.

[0012] Furthermore, both welded joint A and welded joint B are stainless steel external thread welded joints.

[0013] Furthermore, both locking screws A and B have internal hexagonal sockets on their inner sides and external threads on their outer sides that connect to the valve body A.

[0014] Furthermore, the number of air inlets is four, evenly distributed in the four directions of front, back, left and right of the lifting head.

[0015] The beneficial effects of this invention are as follows: This invention utilizes an integrated modular design to transfer the field valve system to a factory-fabricated integrated pump frame system. During field pipeline installation, connections are made directly between the valve assemblies on the pump frame, significantly reducing on-site construction work, making installation quick and convenient, and shortening the installation cycle considerably. It also avoids dust and welding fume pollution in the cleanroom environment caused by the aforementioned operations, effectively ensuring the cleanliness of the cleanroom environment. Because it's a factory assembly line operation, efficiency is improved and labor costs are reduced. Retaining only two interfaces reduces the number of on-site pipeline installation points, providing better error prevention and greatly reducing the rate of human installation errors and the risk of pipeline leaks. Furthermore, all modules are prefabricated in the factory, allowing for better space management and planning, and improving on-site space utilization. Each valve assembly is fixed to the bracket with clamps, and all pipeline joints are detachable standard joints, allowing for quick assembly and disassembly of individual valve modules without special tools. These modules can be combined arbitrarily to adapt to different equipment needs, and quick disassembly facilitates maintenance.

[0016] The transmission mechanism of the metering valve of this invention adopts a dual-structure design of "ball bearing + bearing". The ball bearing is responsible for converting rotational motion into linear motion, while the bearing constrains the radial displacement of the I-shaped fixed part, ensuring that it moves only along the axial direction. The ball bearing and the bearing work together to significantly improve the axial alignment and repeatability of the valve stem during retraction, ensuring the stable retraction of the spherical valve stem. At the same time, the dual structure ensures the vertical alignment of the valve head and the vertical cavity sealing surface, avoiding the uneven wear of the sealing surface caused by radial offset in a single ball bearing structure, effectively extending the sealing life. The valve head is bolted to the piston and can be replaced at any time, providing good versatility.

[0017] This invention features a dual flow indication structure consisting of a small dial with horizontal graduations and a large dial with vertical graduations. The horizontal graduations on the small dial indicate the rotation angle of the adjustment handle, while the vertical graduations on the large dial indicate the axial displacement of the valve stem. Together, they allow the operator to simultaneously read both the rotation and displacement, achieving precise dual flow control. A locking screw locks the valve stem after the flow rate is set, preventing setpoint drift and ensuring long-term stability of flow control. A metal bellows and sealing gasket provide a dynamic elastic seal during base plate movement, preventing media leakage.

[0018] The valve seat of the ball valve of this invention is made of soluble polytetrafluoroethylene in one piece, which does not require system pressure for sealing and reduces potential leakage points; the ball body is provided with symmetrical trunnions at the top and bottom, which reduces the possibility of packing extrusion, reduces the packing volume, and minimizes the thermal effect; the cooperation between the retaining ring and the sealing ring further improves the sealing reliability of the valve seat.

[0019] The lifting head of this invention's one-way valve is a one-piece molded structure, eliminating the sliding fit gaps found in split structures. This fundamentally avoids friction and wear of moving parts, prevents the generation of metal particles, and eliminates dead zones for contaminant accumulation in gaps, significantly improving gas cleanliness. It is suitable for supplying specialty gases in semiconductor front-end processes where particulate matter control is extremely stringent. Furthermore, the one-piece lifting head structure eliminates high-frequency vibrations caused by fit gaps in split designs, avoiding safety hazards such as whistling, unstable airflow, and overheating of the lifting head. The one-piece design also eliminates potential leakage points associated with split structures, greatly improving the overall sealing performance of the valve and reducing the risk of internal media leakage. Additionally, the preload of the metal spring can be precisely adjusted by the threaded engagement of the adjusting screw and locking screw B, adapting to different pressure conditions.

[0020] The support legs, top beam, upper crossbeam, and lower crossbeam of this invention are all bolted together from C-shaped steel using right-angle connectors and T-shaped connectors. All connections are detachable bolted connections, eliminating the need for welding. The layer height and width can be flexibly adjusted according to production line modification needs, or the number of crossbeam layers can be increased or decreased. The C-shaped steel channel can also serve as a concealed cable and pipe routing channel. The support legs are bolted to the ground via T-shaped fixing feet, providing a large contact area. The overall level can be finely adjusted by adding or removing shims under the fixing feet to accommodate slight unevenness in the cleanroom floor. The upper and lower crossbeams are arranged in layers, with each valve group installed on the upper and lower crossbeams according to its functional area. The vacuum pump can be installed simultaneously on the support table and the ground below, achieving a three-dimensional layered layout of equipment within the limited area of ​​the cleanroom. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the present invention.

[0022] Figure 2 This is a schematic diagram of the gas metering valve assembly of the present invention.

[0023] Figure 3 This is a schematic diagram of the water supply valve assembly of the present invention.

[0024] Figure 4 This is a schematic diagram of the structure of the air supply valve group A of the present invention.

[0025] Figure 5 This is a schematic diagram of the return water valve assembly of the present invention.

[0026] Figure 6 This is a schematic diagram of the structure of the air supply valve assembly B of the present invention.

[0027] Figure 7 This is a schematic diagram of the metering valve of the present invention.

[0028] Figure 8 This is a schematic diagram of the structure of ball valve A of the present invention.

[0029] Figure 9 This is a schematic diagram of the structure of valve body B of the present invention.

[0030] Figure 10 This is a schematic diagram of the one-way valve of the present invention.

[0031] In the diagram: 0-bracket, 01-leg, 02-top beam, 03-upper crossbeam, 04-lower crossbeam, 05-right-angle connector, 06-T-type connector, 07-T-type fixing foot, 1-support table, 101-table leg, 102-tabletop, 103-right-angle fixing piece, 3-vacuum pipe, 301-stop valve, 302-connecting valve, 4-gas supply metering valve assembly, 41-stainless steel pipe, 42-external threaded connector, 43-compression fitting quick connector, 44-metering valve, 4401-adjusting handle, 44011-small dial, 44012-horizontal scale line, 4402-valve body A, 44021-slotted, 44022-cavity, 44023-vertical cavity, 44024-oblique hole, 44025-straight hole, 4402 6-External thread port A, 44027-Pipe A, 44028-External thread A, 4403-Valve stem, 44031-Insertion A, 44032-External thread post, 44033-U-groove, 4404-Housing, 44041-Internal thread, 44042-External thread B, 4405-Large dial, 44051-Vertical scale line, 4406-Ball bearing, 4407-I-shaped fastener, 4408-Bearing, 4409-Support post, 4410-Cover plate A, 4411-Metal bellows, 4412-Base plate, 4413-Piston, 4414-Valve head, 4415-Sealing gasket, 4416-Internal thread connector A, 4417-Locking nut A, 4418-Valve body nut, 4419- 4420-Fixing Screw A, 4421-Locking Screw, 45-Ball Valve A, 4501-Handle, 4502-Top Bolt, 4503-Spherical Valve Stem, 45031-Main Stem, 45032-Insertion B, 45033-Ball, 45034-Ternary, 45035-Base, 45036-Through Hole, 4504-Valve Body B, 45041-Valve Seat, 450411-Side Hole, 450412-Bottom Hole, 45042-External Thread Port B, 45043-Pipe B, 4505-Cover Plate B, 4506-Leaf Spring, 4507-Snap Ring, 4508-Sealing Ring, 4509-Locking Nut B, 4510-Internal Thread Connector B, 4511-Fixing Screw C, 5- Water supply valve assembly, 51-Union A, 52-Connector Nut A, 53-Water supply ball valve, 54-Detection device, 55-Pressure and temperature dual display gauge, 56-Connector Nut B, 57-Pressure reducing valve, 58-Connector Nut C, 59-Union B, 6-Air supply valve assembly A, 61-Pressure regulator, 62-Quick coupling, 63-Sealing coupling, 64-Tee A, 65-Pressure gauge, 66-Connecting pipe, 67-Ball valve B, 7-Return water valve assembly, 71-Horizontal connecting pipe, 72-Hose connector A, 73-Pressure reducer, 74-Return water ball valve, 75-Converter A, 76-Flow meter A, 77-Converter B, 78-Hose connector B, 8-Air supply valve assembly B, 81-Stainless steel pipe A, 82-Tee B, 83-Throttle valve84-Reducing tee, 85-Check valve, 8501-Valve body C, 85011-External thread, 85012-Internal thread, 8502-Locking screw A, 8503-Connector, 8504-Lifting head, 85041-Sealing plate, 85042-Pipe A, 85043-Air inlet, 85044-Annular support plate, 8505-Nitrile rubber sealing ring, 8506-Metal spring, 8507-Adjusting screw, 85071-U-shaped support, 8508-Locking screw B, 8509-Baffle, 86-Compression sleeve tee fitting, 87-Internal thread connection A, 88 - Flowmeter B, 89- Compression fitting, 810- Stainless steel pipe B, 811- Internal threaded connection B, 812- Stainless steel pipe elbow A, 813- Ball valve C, 814- Stainless steel elbow B, 815- Reducing fitting, 816- Combined fitting, 817- Pagoda fitting, 818- Welded joint A, 819- External threaded nut A, 820- Internal threaded nut A, 821- Heater, 822- Welded joint B, 823- External threaded nut B, 824- Internal threaded nut B, 825- Stainless steel pipe C, 826- Pressure sensor, 827- Stainless steel pipe D, 9- Clamp. Detailed Implementation

[0032] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0033] like Figure 1-10 As shown, an integrated pump rack system for semiconductor production includes a bracket 0 and a support table 1. The bracket 0 includes four legs 01. The tops of adjacent legs 01 are bolted to a top beam 02 via right-angle connectors 05. Below the top and between adjacent legs 01, an upper crossbeam 03 and a lower crossbeam 04 are bolted to each other via T-shaped connectors 06. The legs 01 are bolted to the ground via T-shaped fixing feet 07. The support table 1 includes a tabletop 102, and table legs 101 are vertically welded to the bottom of the four corners of the tabletop 102. The table legs 101 are bolted to the ground by right-angle fasteners 103. Vacuum pumps are installed on the top of the tabletop 102 and on the ground below the tabletop 102. Vacuum pipes 3 are installed on the top of the vacuum pumps. A shut-off valve 301 is installed on the lower part of the vacuum pipes 3. A connecting valve 302 is installed on the top of the vacuum pipes 3. Gas supply metering valve group 4, water supply valve group 5, gas supply valve group A6, return water valve group 7 and gas supply valve group B8 are installed on the upper crossbeam 03 and lower crossbeam 04 in sequence by clamps 9. The gas metering valve assembly 4 includes a stainless steel pipe 41 and a metering valve 44. One end of the stainless steel pipe 41 is connected to an external threaded connector 42, which is connected to a quick-connect fitting 43. The other end of the stainless steel pipe 41 is connected to the metering valve 44, which is also connected to a ball valve A45. The metering valve 44 includes an adjusting handle 4401, a valve body A4402, a valve stem 4403, and a housing 4404. A small scale 44011 is installed at the bottom of the adjusting handle 4401, and a horizontal scale line 44012 is engraved on the outer bottom of the small scale 44011. The valve body A44... The valve body A4402 has a slot 44021 at the top and a cavity 44022 inside. A vertical cavity 44023 is connected to the bottom of the cavity 44022. An oblique hole 44024 is connected to the left side of the vertical cavity 44023, and a straight hole 44025 is connected to one side of the bottom of the cavity 44022. External threaded ports A44026 are installed on both sides of the valve body A4402, and internal threaded connectors A4416 are connected to the external threaded ports A44026 and A4416. A communicating pipe A44027 is provided inside the external threaded ports A44026 and the internal threaded connectors A4416. The oblique hole 44024 and the straight hole 44025... 5. Connected to pipe A44027 respectively; the valve stem 4403 is installed inside the housing 4404, the top of the housing 4404 can extend into the adjusting handle 4401, the bottom of the housing 4404 is movably connected to the base plate 4412, the top and bottom outer sides of the housing 4404 are respectively provided with internal threads 44041 and external threads B44042, the valve stem 4403 includes an insert A44031, the insert A44031 is inserted into the adjusting handle 4401 and locked and fixed by a fixing screw A4419, the bottom of the insert A44031 is connected to an external thread post 44032, the ... is connected to the base plate 44027 respectively, the valve stem 4403 is installed inside the housing 4404, the top of the housing 4404 can extend into the adjusting handle 4401, the top of the adjusting handle 4401 is movably connected to the base plate 4412, the bottom of the adjusting handle 4404 is connected to the base plate 44027 respectively, the valve stem 4403 is installed inside the housing 4404, the top of the adjusting handle 4404 is movably connected to the base plate 44027 respectively, the valve stem 4403 is installed inside the housing 4404, the valve stem 4403 is installed inside the housing 4404, the valve stem 4403 is installed inside the housing 4404, the valve stem 4403 is installed inside The threaded post 44032 is connected to the internal thread 44041 on the top of the outer shell 4404. A large scale 4405 is fixedly installed on the outer side of the top of the outer shell 4404 by a fixing screw B4420. The large scale 4405 has vertical scale lines 44051 engraved on it. A U-shaped groove 44033 is installed at the bottom of the external threaded post 44032. A ball bearing 4406 is installed in the U-shaped groove 44033. The bottom of the ball bearing 4406 is connected to an I-shaped fastener 4407. A bearing 4408 is installed on the I-shaped fastener 4407. The bearing 4408 is connected and fixed to the inner wall of the U-shaped groove 44033.The bottom of the I-shaped fastener 4407 is equipped with a support column 4409, and the bottom of the support column 4409 is vertically connected to a cover plate A4410. A metal bellows pipe 4411 is installed between the bottom of the cover plate A4410 and the base plate 4412. A piston 4413 is vertically installed in the middle of the bottom of the base plate 4412, and a valve head 4414 is vertically bolted to the bottom of the piston 4413. The base plate 4412 can move up and down within the slot 44021. 13 is installed in cavity 44022, valve head 4414 is installed in vertical cavity 44023, sealing gasket 4415 is fitted at the bottom of slot 44021, below base plate 4412, and outside piston 4413, valve body A4402 is connected and fixed to outer shell 4404 by valve body nut 4418; locking screw 4421 is installed below external threaded post 44032 and inside outer shell 4404, used to lock valve stem 4403 after flow rate setting. The water supply valve group 5 includes a union A51, which is connected to a water supply ball valve 53 via a union nut A52. The water supply ball valve 53 is connected to a detection device 54, which is equipped with a pressure and temperature dual display gauge 55. The detection device 54 is connected to a pressure reducing valve 57 via a union nut B56, and the pressure reducing valve 57 is connected to a union B59 via a union nut C58. The gas supply valve group A6 includes a pressure regulating valve 61. One end of the pressure regulating valve 61 is connected to a quick connector 62, and the other end is connected to a sealing connector 63. The other end of the sealing connector 63 is connected to a three-way valve A64. A pressure gauge 65 is connected to the middle channel of the three-way valve A64. The other end of the three-way valve A64 is connected to a connecting pipe 66, and a ball valve B67 is connected to the connecting pipe 66. The return water valve assembly 7 includes a horizontal connecting pipe 71, one end of which is connected to a hose connector 72, and a pressure reducer 73 is connected to the lower part of the horizontal connecting pipe 71. The other end of the pressure reducer 73 is connected to a return water ball valve 74. The return water ball valve 74 is connected to a flow meter A76 through a conversion connector A75, and the other end of the flow meter A76 is connected to a hose connector B78 through a conversion connector B77. The gas supply valve assembly B8 includes stainless steel pipes A81, B810, C825, and D827. One end of stainless steel pipe A81 is connected to a reducing tee B84, and the other end is connected to a reducing fitting 815. The other end of reducing tee B84 is connected to a tee B82. One end of tee B82 is connected to stainless steel pipe B810, and the other end is vertically connected to stainless steel pipe D827. A throttle valve 83 and a flow meter B88 are connected to both ends of stainless steel pipe D827, respectively. The other end of reducing fitting 815 is connected to a connecting fitting 816, and the other end of connecting fitting 816 is connected to a pagoda fitting 817. An external threaded nut A819 is installed on the other end of stainless steel pipe B810. The other end of external threaded nut A819 is connected to an internal threaded nut A820. The other end of internal threaded nut A820 is connected to a welded joint. The flow meter B88 is connected to a ball valve C813 at the bottom of the flow meter B88 via a ferrule tee B connector 86. A heater 821 is connected to the bottom of the ferrule tee B connector 86. A pressure sensor 826 is connected to the middle of the ferrule tee B connector 86 via an internal threaded connection B811. A ball valve C813 is connected to the top of the flow meter B88 via a ferrule tee connector 89. A stainless steel pipe elbow A812 is connected to the other end of the ball valve C813. A stainless steel pipe elbow B814 is connected to the other end of the stainless steel pipe elbow A812 via a stainless steel pipe C825. A check valve 85 is connected to the other end of the check valve 85 via an internal threaded connection A87. An external threaded nut B823 is connected to the other end of the external threaded nut B823. An internal threaded nut B824 is connected to the other end of the internal threaded nut B824. A welded joint B822 is connected to the other end of the internal threaded nut B824. The one-way valve 85 includes a valve body C8501. The valve body C8501 has internal threads 85012 and external threads 85011 at both its top and bottom. Locking screws A8502 and B8508 are threadedly connected to the inner sides of the top and bottom of the valve body C8501, respectively. A connecting body 8503 is installed below the locking screw A8502. A nitrile rubber sealing ring 8505 is installed between the bottom of the connecting body 8503 and the inner side of the valve body C8501. A lifting head 8504 is movably installed below the connecting body 8503. The lifting head 8504 is an integral structure, with a sealing plate 85041 at the top. The sealing plate 85041 is connected to a pipe A85042 below. Air inlets 85043 are opened around the top of the pipe A85042. An annular support plate 85044 is installed inside the pipe A85042. An adjusting screw 8507 is installed above the locking screw B8508. A U-shaped support 85071 is provided on the top of the adjusting screw 8507. A metal spring 8506 is installed between the annular support plate 85044 and the U-shaped support 85071. A baffle 8509 is installed below the lifting head 8504 and inside the valve body C8501. The sealing plate 85041 of the lifting head 8504 and the pipe A85042 are integrally formed. The outer diameter of the sealing plate 85041 is smaller than the outer diameter of the pipe A85042. The upper surface of the sealing plate 85041 forms a sealing surface for sealing with the connector 8503. When gas pressure is applied, the lifting head 8504 moves downward as a whole, and the upper surface of the sealing plate 85041 separates from the connector 8503. Gas enters the internal channel of the pipe A85042 through the air inlet 85043. When the gas stops or reverses, the lifting head 8504 moves upward and resets under the action of spring force. The upper surface of the sealing plate 85041 fits tightly with the connector 8503, achieving a sealing stop. Ball valves A45, B67, and C813 have the same structure, each including a handle 4501, a top bolt 4502, a ball valve stem 4503, and a valve body B4504. The top bolt 4502 is embedded in the handle 4501 and fixed by a fixing screw C4511. The ball valve stem 4503 includes a main stem 45031 and an insert B45032. The insert B45032 passes through the top bolt 4502 and is inserted into the handle 4501. The bottom of the main stem 45031... A ball 45033 is installed, and identical trunnions 45034 are installed between the bottom and top of the ball 45033 and the main rod 45031. A base 45035 is installed at the bottom of the trunnion 45034 below the ball 45033. A valve seat 45041 is installed inside the valve body B4504. Side holes 450411 are opened on both sides of the valve seat 45041, and a bottom hole 450412 is opened at the bottom of the valve seat 45041. The ball 4503... 3. The trunnion 45034 is installed inside the valve seat 45041. The base 45035 passes through the bottom hole 450412 and is connected to the valve body B4504. The ball 45033 has a horizontal through hole 45036. A cover plate B4505 is installed on the top of the valve seat 45041. A leaf spring 4506 is installed between the cover plate B4505 and the top bolt 4502. A retaining ring 4507 is installed on the inner wall of the side hole 450411 of the valve seat 45041. 7. A sealing ring 4508 is installed on the inner wall; external threaded ports B45042 are installed on both sides of the valve body B4504, and internal threaded connectors B4510 are installed on the external threaded ports B45042. A pipe B45043 is provided between the external threaded ports B45042 and the valve body B4504. The through hole 45036, the side hole 450411, and the pipe B45043 are on the same horizontal line, and the side hole 450411, the pipe B45043 and the through hole 45036 pass through each other.

[0034] The outrigger 01, top beam 02, upper crossbeam 03, and lower crossbeam 04 are all made of C-shaped steel.

[0035] A locking nut A4417 is fitted on the outer side of the external thread B44042 at the bottom of the housing 4404 for locking and fixing with the connecting panel.

[0036] The valve seat 45041 is made of soluble polytetrafluoroethylene in one piece.

[0037] Both welding joints A818 and B822 are stainless steel external thread welding joints.

[0038] Both locking screws A8502 and B8508 have internal hexagonal sockets on their inner sides and external threads on their outer sides that connect with valve body A8501.

[0039] The number of air inlets 85043 is four, which are evenly distributed in the front, back, left and right positions of the lifting head 8504.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An integrated pump rack system for semiconductor manufacturing, comprising a support frame and a support table, characterized in that, The support frame includes four legs. A top beam is bolted to the top of adjacent legs via right-angle connectors. An upper crossbeam and a lower crossbeam are bolted to the bottom of the top and between adjacent legs via T-shaped connectors. The legs are fixed to the ground via T-shaped fixing feet. The supporting table includes a tabletop. Table legs are vertically welded to the bottom of the four corners of the tabletop. The table legs are fixed to the ground via right-angle fixing pieces. Vacuum pumps are installed on the top of the tabletop and on the ground below the tabletop. Vacuum pipes are installed on the top of the vacuum pumps. A shut-off valve is installed near the lower part of the vacuum pipes. A connecting valve is installed on the top of the vacuum pipes. An air supply metering valve group, a water supply valve group, an air supply valve group A, a return water valve group, and an air supply valve group B are sequentially installed on the upper and lower crossbeams via clamps. The gas metering valve assembly includes a stainless steel pipe and a metering valve. One end of the stainless steel pipe is connected to an external threaded connector, which is connected to a quick-connect fitting. The other end of the stainless steel pipe is connected to the metering valve, which is also connected to a ball valve A. The metering valve includes an adjusting handle, a valve body A, a valve stem, and a housing. A small scale is installed at the bottom of the adjusting handle, with horizontal graduation lines engraved on the outer bottom of the small scale. The top of the valve body A has a slot, and the interior of the valve body A has a cavity. A vertical cavity is connected to the bottom of the cavity, with an oblique hole on the left side of the vertical cavity and a straight hole on one side of the bottom of the cavity. External threaded ports A are installed on both sides of the valve body A, and internal threaded connectors A are connected to the external threaded ports A. A communicating pipe A is provided inside the external threaded ports A and the internal threaded connectors A. The oblique hole and the straight hole are respectively connected to pipe A. The valve stem is installed inside the housing, and the top of the housing can extend into the adjusting handle. A base plate is movably connected to the bottom of the housing. Internal threads and external threads B are respectively provided on the outer sides of the top and bottom of the housing. The valve stem includes an insert A, which is inserted into the adjusting handle. The part is secured by fixing screw A. The bottom of the insert A is connected to an externally threaded post, which is connected to the internal thread on the top of the outer shell. A large dial with vertical graduations is fixedly installed on the outer side of the top of the outer shell by fixing screw B. A U-shaped groove is installed at the bottom of the externally threaded post, containing a ball bearing. The bottom of the ball bearing is contacted with an I-shaped fastener, on which a bearing is installed. The bearing is fixedly connected to the inner wall of the U-shaped groove. A support post is installed at the bottom of the I-shaped fastener. A cover plate A is vertically connected to the base plate, and a metal bellows is installed between the bottom of the cover plate A and the base plate. A piston is vertically installed in the middle of the bottom of the base plate, and a valve head is vertically bolted to the bottom of the piston. The base plate can move up and down within the slot. The piston is installed in the cavity, and the valve head is installed in the vertical cavity. Sealing gaskets are fitted at the bottom of the slot, below the base plate, and outside the piston. The valve body A is connected and fixed to the outer shell by a valve body nut. A locking screw is installed below the external threaded column and inside the outer shell, which is used to lock the valve stem after the flow rate is set. The water supply valve assembly includes a union A, which is connected to a water supply ball valve via a union nut A. The water supply ball valve is connected to a detection device, which is equipped with a pressure and temperature dual display. The detection device is connected to a pressure reducing valve via a union nut B, which is connected to the union B via a union nut C. The gas supply valve group A includes a pressure regulating valve. One end of the pressure regulating valve is connected to a quick connector, and the other end is connected to a sealing connector. The other end of the sealing connector is connected to a three-way valve A. A pressure gauge is connected to the middle channel of the three-way valve A. The other end of the three-way valve A is connected to a connecting pipe, and the connecting pipe is connected to a ball valve B. The return water valve assembly includes a horizontal connecting pipe, one end of which is connected to a hose connector, a pressure reducer is connected to the lower part of the horizontal connecting pipe, the other end of which is connected to a return water ball valve, and the return water ball valve is connected to a flow meter A through a conversion connector A, and the other end of the flow meter A is connected to a hose connector B through a conversion connector B. The gas supply valve assembly B includes stainless steel pipes A, B, C, and D. One end of stainless steel pipe A is connected to a reducing tee B, and the other end is connected to a reducing fitting. The other end of the reducing tee B is connected to a tee B. One end of tee B is connected to stainless steel pipe B, and the other end is vertically connected to stainless steel pipe D. A throttle valve and a flow meter B are connected to both ends of stainless steel pipe D, respectively. The other end of the reducing fitting is connected to a connecting fitting, and the other end of the connecting fitting is connected to a pagoda fitting. An external threaded nut A is installed on the other end of stainless steel pipe B. The other end of the external threaded nut A is connected to an internal threaded nut A. The other end of the internal threaded nut A is connected to a welded... Connector A, the bottom of the throttle valve is connected to a ferrule tee B connector, the bottom of the ferrule tee B connector is connected to a heater, the middle of the ferrule tee B connector is connected to a pressure sensor via an internal thread connection B, the top of the flow meter B is connected to a ball valve C via a ferrule connector, the other end of the ball valve C is connected to a stainless steel pipe elbow A, the other end of the stainless steel pipe elbow A is connected to a stainless steel elbow B via stainless steel pipe C, the other end of the heater is connected to a check valve, the other end of the check valve is connected to an external thread nut B via an internal thread connection A, the other end of the external thread nut B is connected to an internal thread nut B, and the other end of the internal thread nut B is connected to a welded joint B. The one-way valve includes a valve body C, with internal and external threads at the top and bottom. Locking screws A and B are threadedly connected to the inner sides of the top and bottom of the valve body C, respectively. A connecting body is installed below locking screw A, and a nitrile rubber sealing ring is installed between the bottom of the connecting body and the inner side of the valve body C. A lifting head is movably installed below the connecting body. The lifting head is an integral structure with a sealing plate at its top, and a pipe A connected below the sealing plate. Air inlets are opened around the top of pipe A, and an annular support plate is installed inside pipe A. An adjusting screw is installed above locking screw B, with a U-shaped support at its top. A metal spring is installed between the annular support plate and the U-shaped support. A baffle is installed below the lifting head and inside the valve body C. The sealing plate of the lifting head and pipe A are integrally formed, with the outer diameter of the sealing plate smaller than the outer diameter of pipe A. The upper surface of the sealing plate forms a sealing surface for sealing with the connecting body. Ball valves A, B, and C have identical structures, each including a handle, a top bolt, a spherical valve stem, and a valve body B. The top bolt is embedded in the handle and fixed by a fixing screw C. The spherical valve stem includes a main stem and an insert B, with the insert B passing through the top bolt and inserted into the handle. A ball is mounted at the bottom of the main stem, and identical trunnions are installed between the bottom and top of the ball and the main stem. A base is mounted at the bottom of the trunnions below the ball. A valve seat is installed inside the valve body B, with side holes on both sides and a bottom hole at the bottom. The valve body and trunnion are installed inside the valve seat. The base passes through the bottom hole and connects to the valve body B. A through hole is horizontally opened in the ball. A cover plate B is installed on the top of the valve seat. A leaf spring is installed between the cover plate B and the top bolt. A retaining ring is installed on the inner wall of the side hole of the valve seat. A sealing ring is installed on the inner wall of the retaining ring. External threaded ports B are installed on both sides of the valve body B. An internal threaded connector B is installed on the external threaded port B. A pipe B is provided between the external threaded port B and the valve body B. The through hole, side hole, and pipe B are on the same horizontal line and the side hole, pipe B and through hole are connected.

2. The integrated pump rack system for semiconductor manufacturing according to claim 1, characterized in that, The outriggers, top beam, upper crossbeam, and lower crossbeam are all made of C-shaped steel.

3. An integrated pump holder system for semiconductor manufacturing according to claim 1, characterized in that, A locking nut A is fitted on the outer side of the external thread B at the bottom of the housing for locking and fixing it to the connecting panel.

4. An integrated pump holder system for semiconductor manufacturing according to claim 1, characterized in that, The valve seat is made of soluble polytetrafluoroethylene in one piece.

5. An integrated pump holder system for semiconductor manufacturing according to claim 1, characterized in that, Both welded joint A and welded joint B are stainless steel external thread welded joints.

6. An integrated pump rack system for semiconductor manufacturing according to claim 1, characterized in that, Both locking screws A and B have internal hexagonal sockets on their inner sides and external threads on their outer sides that connect to the valve body A.

7. An integrated pump holder system for semiconductor manufacturing according to claim 1, characterized in that, The number of air inlets is four, which are evenly distributed in the four directions of front, back, left and right of the lifting head.

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