Punching tool for TGV glass production

By introducing an adjustment mechanism and a suction cup system into the TGV glass drilling tool, the problem of insufficient flexibility in the drilling position in the prior art is solved, and the arbitrary movement of the laser drilling head and the stable fixation of the glass plate are realized, thereby improving the drilling flexibility and efficiency.

CN222113888UActive Publication Date: 2024-12-06JIANGSU MEIDONG SEMICON CO LTD
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Patent Information

Application Number
CN202420492357.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-14
Publication Date
2024-12-06
Estimated Expiration
2034-03-14

AI Technical Summary

Technical Problem

The existing TGV glass drilling tooling is difficult to achieve flexible drilling in transverse and longitudinal positions on the same horizontal plane, and requires manual change of glass position. It is not flexible enough to use, and its practicality and drilling efficiency are low.

Method used

A drilling tool including a workbench, a placement frame, a support column, an adjustment mechanism and a suction cup is designed. The laser drilling head can be moved arbitrarily in the same plane through the adjustment mechanism, and the glass plate is fixed by a suction cup and a suction machine to ensure that Punching stability and cooling through the pore system.

Benefits of technology

The laser drilling head is realized at will in the same plane, which improves the flexibility and accuracy of drilling, prevents glass from being offset and heat-up, and improves the overall drilling stability and efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a punching tool for TGV glass production, and relates to the technical field of TGV glass production, the punching tool comprises a workbench, a placing frame is fixedly installed in the middle of the upper portion of the surface of the workbench, and supporting columns are fixedly installed on the left side and the right side of the upper portion of the surface of the workbench; an adjusting mechanism is arranged in the middle of the opposite side above the supporting columns, a laser drilling head is arranged below the adjusting mechanism, the adjusting mechanism comprises transverse frames which are fixedly installed on the opposite sides above the surfaces of the supporting columns on the two sides correspondingly, and a first lead screw is rotationally arranged on the inner surface of the transverse frame on the left side through a bearing; and a first guide rod is fixedly mounted on the inner surface of the right transverse frame. Compared with an existing common punching tool for TGV glass production, according to the punching tool for TGV glass production, through the adjusting mechanism, the laser punching head is located in the same plane and can move at will, accurate punching can be conducted on any position of glass, using is more flexible, and practicability is higher.
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Description

Technical Field

[0001] The utility model relates to the technical field of TGV glass production, in particular to a punching tool used for TGV glass production. Background Art

[0002] TGV glass is a material used in advanced three-dimensional integrated circuit technology, and TGV stands for vertical electrical interconnection through a glass substrate. Corresponding to TSV, it uses high-quality borosilicate glass or quartz glass as a substrate, and uses seed layer sputtering, electroplating filling, chemical mechanical planarization, RDL rewiring and bump processes to make micro-vias, which are usually 10μm to 100μm in diameter. TGV technology is considered to be a key technology for the next generation of three-dimensional integration due to its low cost, easy access to large-size ultra-thin glass substrates, and excellent high-frequency electrical performance. During the production process of TGV glass, a specific glass plate needs to be punched by a punching device so that the circuit technology materials can pass through and be assembled with the glass plate to form TGV glass.

[0003] For example, the public document with application number 201921484065.2 discloses a glass substrate laser drilling processing device. The utility model can firstly conveniently adjust the position of the laser drilling head, so that the drilling of the glass substrate can be completed quickly, and the labor intensity of the staff can be reduced. Then, the cooling of the glass substrate under processing can be completed quickly, which fully improves the working efficiency of the glass substrate processing. At the same time, the practicality of the entire laser drilling equipment is further improved. However, when drilling holes in the glass, the drilling tool can only adjust the glass to be drilled at a single straight line position, and it is difficult to meet the different horizontal and vertical positions on the same horizontal plane for flexible drilling. It is necessary to manually change the position of the glass, which is not flexible enough to use, and has low practicality and drilling efficiency.

[0004] Therefore, in view of this, the existing structural deficiencies are studied and improved, and a punching tool for TGV glass production is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a drilling tool for TGV glass production to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a drilling tool for TGV glass production, comprising a workbench, a placement rack is fixedly installed in the middle above the surface of the workbench, support columns are fixedly installed on both sides of the left and right sides above the surface of the workbench, an adjustment mechanism is provided in the middle of the upper opposite side of the support column, and a laser drilling head is provided below the adjustment mechanism.

[0007] Preferably, the adjusting mechanism includes cross frames fixedly mounted on opposite sides above the surfaces of the support columns on both sides, and a first screw rod is rotatably provided on the inner surface of the left cross frame through a bearing, and a first guide rod is fixedly mounted on the inner surface of the right cross frame, the front end of the first screw rod passes through the cross frame and a rotating motor is provided, an adjusting plate is provided on the surfaces of the first screw rod and the first guide rod, a second screw rod and a second guide rod are provided in sequence from top to bottom in the middle of the opposite side of the surface of the adjusting plate, the second screw rod is rotatably connected to the adjusting plate, and the right end of the second screw rod passes through the adjusting plate and a rotating motor is also provided, and the surfaces of the second screw rod and the second guide rod are provided with the same moving block.

[0008] Preferably, the adjustment plate is threadedly connected to the first screw rod and slidably connected to the first guide rod, and the moving block is threadedly connected to the upper second screw rod and slidably connected to the lower second guide rod, and the laser drilling head is fixedly connected to the lower end of the moving block.

[0009] Preferably, an air hole is opened in the middle of the upper surface of the placement rack, and suction cups are fixedly installed at the four corners of the upper surface of the placement rack.

[0010] Preferably, a connecting pipe is fixedly installed on the lower end of the inner side of the surface of the suction cup, and the lower end of the connecting pipe passes through the workbench and a suction machine is fixedly installed inside the workbench.

[0011] Preferably, an exhaust pipe is connected to the upper end of the suction machine, and the exhaust pipe passes through the workbench and is located inside the placement rack.

[0012] Preferably, the surface of the connecting pipe located inside the placement rack is fixedly connected to a one-way air intake valve pipe on one side close to the inner surface of the placement rack, and the one-way air intake valve pipe passes through the placement rack.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model is provided with an adjustment mechanism, a horizontal frame, a first screw rod, a first guide rod, a rotating motor, an adjustment plate, a second screw rod, a second guide rod and a moving block. Through the adjustment mechanism, the laser drilling head can be moved arbitrarily in the same plane, and any position of the glass can be accurately drilled, which is more flexible to use and more practical;

[0015] 2. The utility model arranges a suction cup, a connecting pipe, a suction machine, an exhaust pipe, a one-way air inlet valve pipe and air holes. The glass plate is placed on the suction cup. The suction machine sucks the air inside the suction cup through the connecting pipe, which can form a vacuum inside the suction cup, so that the glass plate can be stably fixed above the placement rack by using atmospheric pressure, thereby preventing the glass plate from shifting during the punching process and improving the punching stability. At the same time, when the suction machine extracts the air inside the suction cup, the outside air will also enter the connecting pipe through the one-way air inlet valve pipe and be discharged to the inside of the placement rack through the exhaust pipe, and be dispersed and discharged through the air holes to cool the glass plate, thereby avoiding the situation where the glass plate heats up and breaks due to thermal expansion during the punching process. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the adjustment mechanism of the utility model;

[0018] Figure 3 It is a schematic diagram of the cross-sectional structure of the workbench and the placement rack of the utility model.

[0019] In the figure: 1. workbench; 2. placement rack; 3. support column; 4. adjustment mechanism; 401. cross frame; 402. first screw rod; 403. first guide rod; 404. rotating motor; 405. adjustment plate; 406. second screw rod; 407. second guide rod; 408. moving block; 5. laser drilling head; 6. suction cup; 7. connecting pipe; 8. suction machine; 9. exhaust pipe; 10. one-way air inlet valve pipe; 11. air hole. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] like Figure 1-Figure 2As shown, a drilling tool for TGV glass production includes a workbench 1, a placing frame 2 is fixedly installed in the middle of the upper surface of the workbench 1, support columns 3 are fixedly installed on both sides of the upper surface of the workbench 1, an adjustment mechanism 4 is arranged in the middle of the upper opposite side of the support column 3, and a laser drilling head 5 is arranged below the adjustment mechanism 4. The adjustment mechanism 4 includes a horizontal frame 401 fixedly installed on the upper opposite side of the surface of the support columns 3 on both sides, and a first screw rod 402 is rotatably arranged on the inner surface of the left horizontal frame 401 through a bearing, and a first guide rod 403 is fixedly installed on the inner surface of the right horizontal frame 401, and the front end of the first screw rod 402 passes through the horizontal frame 401 and is provided with a rotating motor 404, and the first screw rod 402 and An adjustment plate 405 is provided on the surface of the first guide rod 403, and a second screw rod 406 and a second guide rod 407 are provided in sequence from top to bottom in the middle of the opposite side of the surface of the adjustment plate 405. The second screw rod 406 is rotatably connected to the adjustment plate 405, and the right end of the second screw rod 406 passes through the adjustment plate 405 and is also provided with a rotating motor 404. The surfaces of the second screw rod 406 and the second guide rod 407 are both provided with the same moving block 408, the adjustment plate 405 is threadedly connected to the first screw rod 402, and is slidably connected to the first guide rod 403, and the moving block 408 is threadedly connected to the upper second screw rod 406, and is slidably connected to the lower second guide rod 407, and the laser drilling head 5 is fixedly connected to the lower end of the moving block 408.

[0022] Furthermore, the horizontal frame composed of the left and right adjustment plates 405, the second screw rod 406 and the second guide rod 407, when the first screw rod 402 rotates, uses the first guide rod 403 to limit the position and then moves forward and backward through the thread pushing force, driving the laser drilling head 5 to adjust forward and backward synchronously.

[0023] Furthermore, the second screw rod 406 rotates, and under the limitation of the second guide rod 407, the moving block 408 drives the laser drilling head 5 to move left and right to adjust the position.

[0024] Furthermore, the laser drilling head 5 can be moved in any direction, front, back, left, or right, by means of the adjustment mechanism 4, so that a hole can be accurately drilled at any position of the glass.

[0025] like Figure 1 and Figure 3As shown, an air hole 11 is opened in the middle part above the surface of the placement rack 2, and suction cups 6 are fixedly installed at the four corners above the surface of the placement rack 2, a connecting pipe 7 is fixedly installed on the lower end of the inner side of the surface of the suction cup 6, and the lower end of the connecting pipe 7 passes through the workbench 1, and a suction machine 8 is fixedly installed inside the workbench 1, the upper end of the suction machine 8 is connected to an exhaust pipe 9, and the exhaust pipe 9 passes through the workbench 1 and is located inside the placement rack 2, a one-way air intake valve pipe 10 is fixedly connected to the surface of the connecting pipe 7 located inside the placement rack 2, close to the inner surface of the placement rack 2, and the one-way air intake valve pipe 10 passes through the placement rack 2.

[0026] Furthermore, the suction cup 6 can absorb and fix the glass to prevent the glass from shifting when drilling.

[0027] Furthermore, the suction machine 8 can use the connecting pipe 7 to forcibly exhaust the air in the suction cup 6, thereby improving the adsorption capacity of the suction cup 6.

[0028] Furthermore, when the suction machine 8 sucks the air inside the suction cup 6, it also inhales the outside air through the one-way air inlet valve pipe 10, and blows it to the glass surface through the exhaust pipe 9 and the air hole 11 to cool the glass.

[0029] Furthermore, the one-way air intake valve tube 10 can only allow air to enter but cannot exhaust air, so that after the glass drilling is completed, the suction machine 8 stops working, and the air in the connecting tube 7 will flow back into the connection between the suction cup 6 and the glass, and cannot flow through the one-way air intake valve tube 10, thereby automatically separating the glass from the suction cup 6.

[0030] Working principle: When using the punching tool for TGV glass production, first, place the glass plate on the suction cup 6, use the suction cup 6 to absorb and position it, then continue to start the suction machine 8, and suck the air inside the suction cup 6 through the connecting pipe 7, so that a vacuum can be formed inside the suction cup 6, so that the glass plate can be stably fixed on the top of the placement rack 2 by using the atmospheric pressure. At the same time, when the suction machine 8 extracts the air inside the suction cup 6, the outside air will also enter the connecting pipe 7 through the one-way air inlet valve pipe 10, and be discharged to the inside of the placement rack 2 through the exhaust pipe 9, and be dispersed and discharged through the air hole 11, so as to cool the glass plate being punched, and the punching tool The operation is performed by the laser drilling head 5. According to different drilling points, the first screw rod 402 is driven to rotate by the rotating motor 404. The horizontal frame composed of the left and right adjustment plates 405, the second screw rod 406 and the second guide rod 407 is limited by the right first guide rod 403, so that the laser drilling head 5 can move forward and backward, and the right rotary motor 404 drives the second screw rod 406 to rotate. Under the limit of the second guide rod 407, the moving block 408 will drive the laser drilling head 5 to move left and right, and then accurately drill holes at the required drilling positions. This is the working principle of the drilling tooling used for TGV glass production.

Claims

1. A drilling tool for TGV glass production, comprising a workbench (1), characterized in that: A placement rack (2) is fixedly installed in the middle of the upper surface of the workbench (1); support columns (3) are fixedly installed on both left and right sides of the upper surface of the workbench (1); an adjustment mechanism (4) is arranged in the middle of the upper opposite side of the support column (3); and a laser drilling head (5) is arranged below the adjustment mechanism (4); The adjustment mechanism (4) comprises a horizontal frame (401) respectively fixedly mounted on the opposite sides of the surface of the two side support columns (3), and a first screw rod (402) is rotatably mounted on the inner surface of the left horizontal frame (401) through a bearing, and a first guide rod (403) is fixedly mounted on the inner surface of the right horizontal frame (401), and a rotating motor (404) is mounted at the front end of the first screw rod (402) penetrating the horizontal frame (401), and the first screw rod (402) and the first guide rod (403) are An adjustment plate (405) is arranged on the surface, and a second screw rod (406) and a second guide rod (407) are arranged in sequence from top to bottom in the middle of the opposite side of the surface of the adjustment plate (405). The second screw rod (406) is rotatably connected to the adjustment plate (405), and a rotating motor (404) is also arranged at the right end of the second screw rod (406) that penetrates the adjustment plate (405). The surfaces of the second screw rod (406) and the second guide rod (407) are both provided with the same moving block (408).

2. The punching tool for TGV glass production according to claim 1, characterized in that: The adjustment plate (405) is threadedly connected to the first screw rod (402) and slidably connected to the first guide rod (403), and the moving block (408) is threadedly connected to the second screw rod (406) and slidably connected to the second guide rod (407), and the laser drilling head (5) is fixedly connected to the lower end of the moving block (408).

3. The punching tool for TGV glass production according to claim 1, characterized in that: An air hole (11) is provided in the middle of the upper surface of the placement rack (2), and suction cups (6) are fixedly installed at the four corners of the upper surface of the placement rack (2).

4. The punching tool for TGV glass production according to claim 3, characterized in that: A connecting pipe (7) is fixedly installed at the lower end of the inner side of the surface of the suction cup (6), and the lower end of the connecting pipe (7) passes through the workbench (1) and a suction machine (8) is fixedly installed inside the workbench (1).

5. The punching tool for TGV glass production according to claim 4, characterized in that: The upper end of the suction machine (8) is connected to an exhaust pipe (9), and the exhaust pipe (9) passes through the workbench (1) and is located inside the placement rack (2).

6. The punching tool for TGV glass production according to claim 4, characterized in that: The surface of the connecting pipe (7) located inside the placement rack (2) is fixedly connected to a one-way air intake valve pipe (10) on one side close to the inner surface of the placement rack (2), and the one-way air intake valve pipe (10) passes through the placement rack (2).

Citation Information

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