Split type rectifying plate supporting base structure capable of avoiding slight shock abrasion influence

Abstract

The utility model provides a split type rectifying plate supporting base structure capable of avoiding the influence of slight shock abrasion, a teflon upper cover is arranged above a base body, and a teflon gasket is arranged below the base body; stepped threaded holes are formed in the two sides of the base body in a penetrating mode, first threaded holes are formed in the two sides of the Teflon gasket in a penetrating mode, the first bolts sequentially penetrate through the stepped threaded holes and the first threaded holes to fixedly lock the base body and the Teflon gasket on a VCD cavity bottom plate, and two hidden grooves corresponding to the stepped threaded holes are formed in the bottom face of the Teflon upper cover. The head of the first bolt is embedded in the hidden groove and the stepped threaded hole; the second bolt penetrates through the rectifying plate and then sequentially penetrates through the teflon upper cover, the base body and a second threaded hole in the middle of the teflon gasket, and the supporting base structure and the rectifying plate on the upper portion are fixedly locked. According to the utility model, the problems of dust production and even rustiness caused by damage to the surface of the rectifying plate due to vacuum micro-vibration friction between the rectifying plate and the base can be avoided, and the problem of bad products or scrapping caused by mechanism wear is effectively reduced.

Description

[Technical field]

[0001] The utility model relates to a split type rectifier plate supporting base structure which can avoid the influence of micro-vibration and wear. [Background technology]

[0002] In the VCD vacuum equipment in the CF coating area of ​​the panel factory, its main function is to evacuate the chamber environment pressure to a near vacuum state below 10pa through the PUMP, evaporate the solvent (PGMEA) in the wet film photoresist above the inner substrate, and increase the close fit between the photoresist and the substrate by reduced pressure drying to ensure the film formation rate.

[0003] The equipment is mainly designed for substrates and to ensure the uniformity of vacuum fluid. The rectifier plate is designed with a base to match the vacuum exhaust hole. The existing design is cylindrical, and the base is made of SUS304 and the locking bolts are locked to the bottom of the cavity. The material and structure are single. During long-term vacuum exhaust, the cavity, base and rectifier plate will vibrate and rub to generate dust, causing dust problems in the cavity environment, and even damaging the surface of the rectifier plate to cause rust and other problems, resulting in poor product quality. [Utility Model Content]

[0004] The technical problem to be solved by the utility model is to provide a split rectifier plate support base structure that can avoid the influence of micro-vibration wear, which can avoid the dust generation between the rectifier plate and the base due to vacuum micro-vibration friction and even damage the surface of the rectifier plate to cause rust and other problems, and effectively reduce the problem of product defects or scrap caused by mechanism wear.

[0005] The utility model is achieved in this way:

[0006] A split rectifier support base structure capable of avoiding microvibration wear, comprising a base body, a Teflon upper cover, a Teflon gasket, a first bolt and a second bolt, wherein the base body is cylindrical, the Teflon upper cover is arranged above the base body, and the Teflon gasket is arranged below the base body;

[0007] Stepped threaded holes are provided on both sides of the base body, first threaded holes are provided on both sides of the Teflon gasket, two first bolts are sequentially passed through the corresponding stepped threaded holes and the first threaded holes, and the base body and the Teflon gasket are fixedly locked on the bottom plate of the VCD cavity, and two hidden grooves are provided on the bottom surface of the Teflon upper cover, the two hidden grooves correspond to the stepped threaded holes, and the heads of the first bolts are embedded in the hidden grooves and the stepped threaded holes;

[0008] The Teflon upper cover, the base body, and the middle of the Teflon gasket are respectively provided with a second threaded hole. The second bolt passes through the rectifier plate and then passes through the Teflon upper cover, the base body, and the second threaded hole in the middle of the Teflon gasket in sequence to lock the supporting base structure with the upper rectifier plate.

[0009] Furthermore, the base body is made of SUS304 material.

[0010] Furthermore, the first bolt and the second bolt are made of titanium alloy.

[0011] Furthermore, the thickness of the Teflon upper cover is 2-3 mm.

[0012] Furthermore, the thickness of the Teflon gasket is 0.5-1.5 mm.

[0013] The advantages of the utility model are:

[0014] (1) Teflon upper covers and Teflon gasket structures are provided at the upper and lower parts of the base body to prevent the rectifier plate and the base from generating dust due to vacuum micro-vibration friction, and even damaging the surface of the rectifier plate and causing rust and other problems;

[0015] (2) The use of titanium alloy bolts improves the locking stability of the existing rectifier plate;

[0016] (3) The split Teflon cover optimizes the risk of dust collection in the screw hole gap and improves the convenience of on-site maintenance and cleaning;

[0017] (4) Effectively reduce product defects or scrap problems caused by mechanical wear.

Brief Description of the Drawings

[0018] The present invention will be further described below in conjunction with the embodiments with reference to the accompanying drawings.

[0019] Figure 1 It is a schematic diagram of a split rectifier plate supporting base structure of the utility model which can avoid the influence of micro-vibration and wear.

[0020] Figure 2 This is a disassembled diagram of a split rectifier plate support base structure of the utility model which can avoid the influence of micro-vibration and wear.

[0021] Figure 3 The utility model is a schematic diagram of a base body structure of a split rectifier plate supporting base structure which can avoid the influence of micro-vibration and wear.

[0022] Figure 4 The utility model is an installation effect diagram of a split rectifier plate supporting base structure which can avoid the influence of micro-vibration and wear. [Specific implementation method]

[0023] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings and specific implementation methods. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] See also Figures 1 to 4 As shown, a split rectifier plate support base structure of the utility model that can avoid the influence of micro-vibration wear includes a base body 1, a Teflon upper cover 2, a Teflon gasket 3, a first bolt 4 and a second bolt 5. The base body 1 is cylindrical, the Teflon upper cover is arranged above the base body, and the Teflon gasket is arranged below the base body. The shapes of the Teflon upper cover 2 and the Teflon gasket 3 match the base body 1.

[0026] Stepped threaded holes 6 are provided on both sides of the base body 1, first threaded holes 7 are provided on both sides of the Teflon gasket 3, two first bolts 4 are sequentially passed through the corresponding stepped threaded holes 6 and the first threaded holes 7, and the base body 1 and the Teflon gasket 3 are fixedly locked on the VCD cavity bottom plate 10, and two hidden grooves 9 are provided on the bottom surface of the Teflon upper cover 2, and the two hidden grooves 9 correspond to the stepped threaded holes 6, and the heads of the first bolts 4 are embedded in the hidden grooves and the stepped threaded holes 6;

[0027] The Teflon upper cover 2, the base body 1, and the Teflon gasket 3 are respectively provided with a second threaded hole 8 in the middle. The second bolt 5 passes through the rectifier plate 20, and then passes through the Teflon upper cover 2, the base body 1, and the second threaded hole 8 in the middle of the Teflon gasket 3 in turn to lock the supporting base structure with the upper rectifier plate 20.

[0028] In a specific implementation, a preferred embodiment is as follows: the base body 1 is made of SUS304 material.

[0029] In a specific implementation, a preferred embodiment is as follows: the first bolt 4 and the second bolt 5 are made of titanium alloy.

[0030] In a specific implementation, a preferred embodiment is as follows: the thickness of the Teflon upper cover 2 is 2-3 mm.

[0031] In a specific implementation, a preferred embodiment is as follows: the thickness of the Teflon gasket 3 is 0.5-1.5 mm.

[0032] In another embodiment of the present invention: a Teflon upper cover 2 is used at the top, and a Teflon gasket 3 is used at the bottom to cover the middle SUS304 base body 1, the lower Teflon gasket 3 cooperates with the base body 1 and is used to lock the VCD cavity bottom plate 10 with M3*2pcs titanium alloy bolts, and the upper Teflon upper cover 2 is closed and is used to lock the upper rectifier plate 20 with M4*1pc titanium alloy bolts to achieve the effects of shock absorption, wear resistance, and stress release; at the same time, the upper split Teflon cover is designed to undertake the rectifier plate surface, and the effect of regular maintenance and cleaning of the rectifier plate contact surface can be achieved by disassembling the M4 single bolt.

[0033] In summary, the utility model is provided with a Teflon upper cover and a Teflon gasket structure at the upper and lower parts of the base body, and utilizes the wear-resistant and low-friction-coefficient lubrication properties of Teflon at the upper and lower structures to enable the supporting base structure to withstand the PGMEA corrosive environment and prevent the influence of stress and deformation factors during the locking process; the structural design of the utility model effectively solves the problem of dust generation due to material friction during the micro-vibration of the rectifier plate, and its split structure can be continuously maintained and cleaned, ensuring the stability of the rectifier plate and the cleanliness of the cavity.

[0034] Although the specific implementation methods of the present invention are described above, those skilled in the art should understand that the specific embodiments described are only illustrative and are not intended to limit the scope of the present invention. Equivalent modifications and changes made by those skilled in the art in accordance with the spirit of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. A split rectifier plate support base structure that can avoid the influence of micro-vibration wear, Features: It includes a base body, a Teflon upper cover, a Teflon gasket, a first bolt and a second bolt, the base body is cylindrical, the Teflon upper cover is arranged above the base body, and the Teflon gasket is arranged below the base body; Stepped threaded holes are provided on both sides of the base body, first threaded holes are provided on both sides of the Teflon gasket, two first bolts are sequentially passed through the corresponding stepped threaded holes and the first threaded holes, and the base body and the Teflon gasket are fixedly locked on the bottom plate of the VCD cavity, and two hidden grooves are provided on the bottom surface of the Teflon upper cover, the two hidden grooves correspond to the stepped threaded holes, and the heads of the first bolts are embedded in the hidden grooves and the stepped threaded holes; The Teflon upper cover, the base body, and the middle of the Teflon gasket are respectively provided with a second threaded hole. The second bolt passes through the rectifier plate and then passes through the Teflon upper cover, the base body, and the second threaded hole in the middle of the Teflon gasket in sequence to lock the supporting base structure with the upper rectifier plate.

2. A split rectifier plate support base structure capable of avoiding microvibration wear as claimed in claim 1, Features: The base body is made of SUS304 material.

3. A split rectifier plate support base structure capable of avoiding micro-vibration wear as claimed in claim 1, Features: The first bolt and the second bolt are made of titanium alloy.

4. A split rectifier plate support base structure capable of avoiding microvibration and wear as claimed in claim 1, Features: The thickness of the Teflon upper cover is 2-3 mm.

5. A split rectifier plate support base structure capable of avoiding microvibration wear as claimed in claim 1, Features: The thickness of the Teflon gasket is 0.5-1.5 mm.

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