Integrating sphere gear switching device and integrating sphere detection device

Abstract

The utility model discloses an integrating sphere gear switching device and an integrating sphere detection device, which are applied to the technical field of semiconductor chip detection and comprise a mounting assembly, a dimming assembly and a detection element, the dimming assembly comprises an adjusting disc, a light shielding plate and a deviation rectifying structure, the adjusting disc is rotatably installed on the installation assembly, the light shielding plate is connected with the adjusting disc and can rotate along with the adjusting disc, and the adjusting disc is provided with a plurality of preset gears; the installation assembly is provided with a deviation rectifying structure, and the deviation rectifying structure is in transmission fit with the adjusting disc. The detection element is fixed to the installation assembly and can recognize the gear where the gear adjusting device is located. According to the utility model, the gear switching efficiency of the integrating sphere detection device can be effectively improved by arranging the preset gear and the deviation rectifying structure, and the integrating sphere detection device can be automatically reset, so that the condition that the detection is not in place due to improper gear adjustment is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip detection, in particular to an integrating sphere gear switching device and an integrating sphere detection device. Background Art

[0002] In the fields of semiconductor chip manufacturing, testing, and packaging, it is often necessary to use an integrating sphere detection device to detect semiconductor chips. By testing the light source emitted by the integrating sphere detection device with a spectrometer, important spectral parameters such as spectral flux, chromaticity, correlated color temperature, CRI, TM-30, peak wavelength, and main wavelength can be obtained. An integrating sphere detection device is usually provided with a shading plate, on which attenuation plates with different light transmittances are installed. These attenuation plates are used to detect different chip products. When different types of chips need to be detected, the attenuation plates used to detect the chip need to be replaced accordingly. Therefore, a convenient, stable, and reliable attenuation plate switching structure is particularly important.

[0003] In the existing attenuation plate switching structure technology, the attenuation plate is generally replaced or adjusted manually. However, during the manual adjustment process, the attenuation plate may not be installed properly or the adjustment may be over-adjusted due to inadequate visual judgment, resulting in inaccurate chip detection data and errors in the final detection results. Utility Model Content

[0004] The main purpose of the utility model is to provide an integrating sphere gear switching device, aiming to improve the gear switching efficiency of the integrating sphere.

[0005] To achieve the above-mentioned purpose, the utility model proposes an integrating sphere gear switching device, comprising a mounting assembly, a dimming assembly and a detection element; the mounting assembly is used to be connected to the integrating sphere; the dimming assembly comprises an adjusting disk, a shading plate and a correction structure, the adjusting disk is rotatably mounted on the mounting assembly, the shading plate is connected to the adjusting disk and can rotate with the adjusting disk, the adjusting disk has a plurality of preset gears, the shading plate is provided with a plurality of attenuation plates, and the attenuation plates are arranged in a one-to-one correspondence with the preset gears; the correction structure is connected to the mounting assembly and cooperates with the adjusting disk in transmission, the correction structure is used to correct the adjusting disk when it deviates from the preset gear; the detection element is fixed on the mounting assembly, and the detection element is used to detect the current gear position of the adjusting disk.

[0006] Optionally, the correction structure includes a pawl and a connecting piece, one end of the connecting piece is connected to the mounting assembly, and the other end is connected to the pawl, the pawl is located at the periphery of the adjusting disk, and the periphery of the adjusting disk is provided with a plurality of grooves, each groove corresponding to a preset gear position; the pawl is used to engage in the corresponding groove when the adjusting disk is rotated to one of the preset gear positions.

[0007] Optionally, the connecting member includes a spring sheet and a spring sheet pressing plate, the spring sheet pressing plate is connected to the mounting assembly, one end of the spring sheet is fixedly connected to the spring sheet pressing plate, and the other end is fixedly mounted on the pawl.

[0008] Optionally, the groove has a first groove wall and a second groove wall that are opposite to each other and arranged at an angle along the rotation direction of the adjusting disk, and the pawl has a limiting portion and a sliding portion that are arranged at an angle, and when the pawl is inserted into the groove, the limiting portion abuts against the first groove wall, and the sliding portion abuts against the second groove wall; when the adjusting disk is subjected to a force in the rotation direction, the second groove wall is used to guide the sliding portion to slide out of the groove; when the adjusting disk is subjected to a force opposite to the rotation direction, the first groove wall and the limiting portion cooperate to limit the rotation of the adjusting disk.

[0009] Optionally, the detection element is a photoelectric switch, the adjustment disk is located above the shading plate, the adjustment disk is provided with a light-transmitting hole corresponding to the position of each attenuation plate, the adjustment disk is also provided with a photoelectric detection hole corresponding to each preset gear position, and the photoelectric detection hole is aligned with the photoelectric switch when the adjustment disk is adjusted to the preset gear position.

[0010] Optionally, the mounting assembly includes a first mounting member and a second mounting member, the first mounting member is fixedly connected to the top of the second mounting member. Optionally, the second mounting member includes a chassis and a mounting plate fixedly mounted on the chassis, the chassis is fixed on the first mounting member, and the mounting plate is used to fix the photoelectric switch and the deviation correction structure.

[0011] Optionally, the first mounting member includes a mounting groove, an adjustable aperture is provided in the mounting groove, and a light receiving hole is provided at the bottom of the mounting groove so that light emitted by the integrating sphere passes through the light receiving hole and enters the adjustable aperture.

[0012] Optionally, the side wall of the mounting groove is provided with a limiting hole for a fastener to pass through, and the outer wall of the adjustable iris is provided with a threaded hole corresponding to the limiting hole, and the fastener passes through the limiting hole and enters the threaded hole to lock the adjustable iris in the mounting groove.

[0013] The utility model also provides an integrating sphere detection device, comprising an integrating sphere and any one of the above integrating sphere gear switching devices.

[0014] The technical solution of the utility model adopts a method of arranging a dimming component on an integrating sphere gear switching device, wherein the dimming component is provided with an adjustment disk and a shading plate that rotates synchronously with the adjustment disk, and the shading plate is provided with attenuation plates with different light transmittances. A plurality of preset gears are formed by rotating the dimming component to a preset position, and each preset gear corresponds to a different attenuation plate, so that the integrating sphere detection device detects different types of chips through different gears. When using the integrating sphere detection device, it is only necessary to turn the gear adjustment device to the preset gear to perform the detection work of the gear. In addition, the integrating sphere gear switching device also includes a correction structure, which can rotate the gear adjustment device to the preset gear when the gear adjustment device deviates from the preset position by a certain angle, so as to avoid the problem of inadequate gear adjustment or overshoot of gear adjustment. The utility model can effectively improve the gear switching efficiency of the integrating sphere detection device by setting the preset gear and the correction structure, and can automatically return the adjustment device to the preset gear when it deviates from the preset gear, so as to avoid the situation of inadequate detection due to improper gear adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0016] Figure 1 This is a structural schematic diagram of an embodiment of an integrating sphere gear switching device of the utility model;

[0017] Figure 2 It is an exploded view of an embodiment of an integrating sphere gear switching device of the utility model;

[0018] Figure 3 It is a schematic diagram of a deviation correction structure and an adjustment disk in an embodiment of an integrating sphere gear switching device of the utility model.

[0019] Description of Figure Numbers:

[0020]

[0021]

[0022] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In addition, the descriptions of "first", "second", etc. in the present utility model are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0026] The utility model provides an integrating sphere gear switching device and an integrating sphere detection device.

[0027] Reference Figure 1-3 , Figure 1 This is a structural schematic diagram of an embodiment of an integrating sphere gear switching device of the utility model; Figure 2 It is an exploded view of an embodiment of an integrating sphere gear switching device of the utility model; Figure 3 The schematic diagram of the correction structure 23 in one embodiment of an integrating sphere gear switching device of the utility model. In one embodiment, the utility model proposes an integrating sphere gear switching device, comprising a mounting assembly 1, a dimming assembly 2 and a detection element 3; the mounting assembly 1 is used to connect with the integrating sphere; the dimming assembly 2 comprises an adjusting disk 21, a shading plate 22 and a correction structure 23, the adjusting disk 21 is rotatably mounted on the mounting assembly 1, the shading plate 22 is connected to the adjusting disk 21 and can rotate with the adjusting disk 21, the adjusting disk 21 has a plurality of preset gears, the shading plate 22 is provided with a plurality of attenuation plates 221, and the attenuation plates 221 are arranged one by one corresponding to the preset gears; the correction structure 23 is connected to the mounting assembly 1 and cooperates with the adjusting disk 21 in transmission, and the correction structure 23 is used to correct the adjustment disk 21 when it deviates from the preset gear; the detection element 3 is fixed on the mounting assembly 1, and the detection element 3 is used to detect the gear position currently in which the adjusting disk 21 is located.

[0028] In this embodiment, the installation component 1 is an upper and lower structure, and the middle part of the upper and lower structures is hollowed out, so that a accommodating space is formed in the middle part of the upper and lower structures of the installation component 1. The dimming component 2 can be installed in the accommodating space. The installation component 1 has a fixed axis, which is fixedly installed in the accommodating space, so that the dimming component 2 is installed in the accommodating space and can adjust the gear position by rotating in the accommodating space. In this embodiment, the gear adjustment device and the shading plate 22 in the dimming component 2 are coaxially arranged and fixedly connected. When the gear adjustment device is rotated, the shading plate 22 will rotate synchronously with the gear adjustment device. Attenuation plates 221 with different transmittances are installed on the shading plate 22. When the gear adjustment device is rotated to a preset gear, the attenuation plate 221 corresponding to the gear will also rotate to the working position to realize the detection of different types of chips. The gear adjustment device specifically sets six gears, and each gear is provided with a corresponding photoelectric detection hole 214. The detection element 3 is installed on the mounting component 1, which can work normally when the equipment is running and will not block the rotation adjustment of the gear adjustment device. The detection element 3 cooperates with the photoelectric detection hole 214 so that the equipment can identify the gear it is in to detect the chip placed on the gear.

[0029] The technical solution of the utility model adopts a method of arranging a dimming component 2 on an integrating sphere gear switching device, wherein the dimming component 2 is provided with an adjustment disk 21 and a shading plate 22 which rotates synchronously with the adjustment disk 21, and the shading plate 22 is provided with attenuation plates 221 with different light transmittances, and a plurality of preset gears are formed by rotating the dimming component 2 to a preset position, and each preset gear corresponds to a different attenuation plate 221, so that the integrating sphere detection device detects different types of chips through different gears. When using the integrating sphere detection device, it is only necessary to turn the gear adjustment device to the preset gear to perform the detection work of the gear. In addition, the integrating sphere gear switching device also includes a correction structure 23, which can rotate the gear adjustment device to the preset gear when the gear adjustment device deviates from the preset position by a certain angle, so as to avoid the problem of inadequate gear adjustment or overshoot of gear adjustment. The utility model can effectively improve the gear switching efficiency of the integrating sphere detection device by setting the preset gear and the correction structure, and can automatically return the adjustment device to the preset gear when it deviates from the preset gear, so as to avoid the inadequate detection due to improper gear adjustment.

[0030] Reference Figure 1 , 3 , Figure 1 This is a structural schematic diagram of an embodiment of an integrating sphere gear switching device of the utility model. Figure 3It is a schematic diagram of the correction structure and the adjustment disk in an embodiment of an integrating sphere gear switching device of the utility model; in one embodiment, the correction structure 23 includes a pawl 231 and a connecting member 232, one end of the connecting member 232 is connected to the mounting assembly 1, and the other end is connected to the pawl 231, the pawl 231 is located at the outer periphery of the adjusting disk 21, and the outer periphery of the adjusting disk 21 is provided with a plurality of grooves, each groove corresponding to a preset gear position; the pawl 231 is used to snap into the corresponding groove when the adjusting disk is rotated to one of the preset gear positions; in the present embodiment, the adjusting disk 21 is a ratchet with grooves evenly distributed on the outer periphery, and six grooves are specifically arranged on the outer periphery of the ratchet to correspond to the six gear positions, and the connecting member 232 is used to fix the pawl 231 on a horizontal plane at the same height as the grooves, one end of the connecting member 232 is fixed to the mounting assembly 1, and the other end is movably arranged. When the ratchet rotates to a preset gear position, the pawl 231 at the movable end is engaged in the groove to limit the ratchet. At this time, the ratchet cannot rotate due to the limitation of the pawl 231 without the action of external force, and is fixed at the preset position and stays at the preset gear position. When the ratchet is rotated to adjust the gear position, the pawl 231 exits the groove, and under the action of the pawl 231 and the outer wall profile of the ratchet, the movable end deviates in the direction away from the fixed axis until the ratchet rotates to the next preset gear position and is re-engaged in the groove of the preset gear position to perform the work of the next gear.

[0031] In one embodiment, the connecting member 232 includes a spring piece 2321 and a spring piece pressure plate 2322. The spring piece pressure plate 2322 is connected to the mounting assembly 1. One end of the spring piece 2321 is fixedly connected to the spring piece pressure plate 2322, and the other end is fixedly mounted with the pawl 231. The spring piece 2321 can be bent and deformed under the action of an external force so that the pawl 231 can be pushed out of the groove under the action of the outer wall profile of the ratchet when adjusting the gear position. When the external force is cancelled, the spring piece 2321 can restore its original shape and re-insert the pawl 231 into the groove.

[0032] Reference Figure 1 , 3 , Figure 1 This is a structural schematic diagram of an embodiment of an integrating sphere gear switching device of the utility model. Figure 3It is a schematic diagram of a correction structure and an adjustment disk in an embodiment of an integrating sphere gear switching device of the utility model. In one embodiment, the groove has a first groove wall 211 and a second groove wall 212 which are opposite to each other and arranged at an angle along the rotation direction of the adjusting disk 21, and the pawl 231 has a limiting portion and a sliding portion which are arranged at an angle. When the pawl 231 is inserted into the groove, the limiting portion abuts against the first groove wall 211, and the sliding portion abuts against the second groove wall 212; when the adjusting disk 21 is subjected to a force in the rotation direction, the second groove wall 212 is used to guide the sliding portion to slide out of the groove; when the adjusting disk 21 is subjected to a force opposite to the rotation direction, the first groove wall 211 cooperates with the limiting portion to limit the rotation of the adjusting disk 21. The first groove wall 211 cooperates with the limiting portion of the pawl 231. After the pawl 231 is inserted into the groove, the first groove wall 211 can prevent the ratchet from rotating. It can only continue to rotate in the same direction so that the sliding portion of the pawl 231 and the second groove wall 212 slide relative to each other and exit the groove along the second groove wall 212. The arrangement of the first groove wall 211 and the limiting portion can prevent the ratchet from rotating. The user can observe whether the ratchet can rotate by applying force in the opposite direction to determine whether the pawl 231 is completely inserted into the gear position and limit the ratchet to the preset position. gear position; and in the process of switching gears, when the ratchet wheel deviates slightly from the preset gear position due to excessive rotation angle, resulting in the pawl 231 not being completely engaged in the groove, the pawl 231 is on the second groove wall 212, and under the action of the elastic force of the spring piece 2321, the pawl 231 slides along the inclination angle of the second groove wall 212 to the bottom of the groove, and the pawl 231 is re-engaged in the groove. The ratchet wheel rotates back to the preset gear position under the action of the pawl 231, which can avoid the deviation in the gear adjustment process and cause the final detection result to be inaccurate.

[0033] In one embodiment, the detection element 3 is a photoelectric switch, the adjustment disk 21 is located above the shading plate, and the adjustment disk 21 is provided with a light-transmitting hole 213 corresponding to the position of each attenuation plate, and the adjustment disk 21 is also provided with a photoelectric detection hole 214 corresponding to each preset gear. The photoelectric detection hole 214 is aligned with the photoelectric switch when the adjustment disk 21 is adjusted to the preset gear. In this embodiment, each preset gear has a light-transmitting hole 213, which is evenly distributed along the circumference of the rotation center of the ratchet wheel. The light to be detected and analyzed passes through the light-transmitting hole 213 to reach the lower instrument. The photoelectric detection hole 214 is set at the outer edge of each preset gear of the adjustment disk 21 to avoid the light-transmitting hole 213. When the adjustment disk 21 is rotated to the preset gear, the corresponding photoelectric detection hole 214 of the gear will rotate to the bottom of the detection element 3 and align with the detection element 3. The gear position of the device is determined by the cooperation between the detection element 3 and the photoelectric detection hole 214.

[0034] In one embodiment, the mounting assembly 1 includes a first mounting member 11 and a second mounting member 12, the second mounting member 12 is fixedly mounted on the integrating sphere, the first mounting member 11 is fixedly connected to the top of the second mounting member 12, the dimming assembly 2 is fixedly mounted between the first mounting member 11 and the second mounting member 12, and the detection element 3 is fixedly mounted on the second mounting member 12. A boss higher than the plane is provided at the periphery of the first mounting member 11, and the second mounting member 12 is fixed on the boss to form a hollow accommodation space between the first mounting member 11 and the second mounting member 12. The first mounting member 11 and the second mounting member 12 can be integrally formed, or can be fixed by fasteners or welding.

[0035] In one embodiment, the second mounting member 12 includes a chassis and a mounting plate fixedly mounted on the chassis. The chassis is fixed on the second mounting member 12. The mounting plate is used to fix the detection element 3 and the correction structure 23. The chassis and the mounting plate can be non-detachable structural parts that are integrally formed or welded, or can be arranged as detachable structures connected by fasteners to facilitate the replacement and installation of the detection element 3.

[0036] In one embodiment, the first mounting member 11 includes a mounting groove, in which an adjustable aperture 111 is provided, and a light receiving hole is provided at the bottom of the mounting groove so that light emitted by the integrating sphere passes through the light receiving hole and enters the adjustable aperture 111. The adjustable aperture 111 is used to adjust the light receiving size to adjust the light size received by the detection instrument.

[0037] In one embodiment, a limiting hole is provided on the side wall of the mounting groove for the fastener to pass through, and a threaded hole corresponding to the limiting hole is provided on the outer wall of the adjustable iris 111. The fastener is inserted into the threaded hole through the limiting hole to lock the adjustable iris 111 in the mounting groove. The fastener can be a threaded fastener such as a screw or a bolt, which can detachably connect the adjustable iris 111 to the first mounting member 11, thereby providing convenience for the disassembly, replacement and installation of the adjustable iris 111.

[0038] The utility model also proposes an integrating sphere detection device. In one embodiment, the integrating sphere detection device includes an integrating sphere 20 and any one of the above integrating sphere gear switching devices. A power detector is provided on the integrating sphere 20, which is fixedly installed on the integrating sphere avoiding the integrating sphere gear switching device. A lens assembly is also provided, which is fixedly installed on the second mounting member 12 of the mounting assembly 1. The integrating sphere gear switching device can be adjusted to different detection gears according to the characteristics of different types of chips. The lower detection instrument detects the light emitted by the lens assembly to determine the performance parameters of the semiconductor chip being detected.

[0039] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An integrating sphere gear switching device, characterized in that: include: A mounting assembly for connecting with an integrating sphere; A dimming assembly, the dimming assembly comprising an adjustment disk, a shading plate and a deviation correction structure, the adjustment disk being rotatably mounted on the mounting assembly, the shading plate being connected to the adjustment disk and being able to rotate with the adjustment disk, the adjustment disk having a plurality of preset gear positions, the shading plate being provided with a plurality of attenuation sheets, the attenuation sheets being arranged in one-to-one correspondence with the preset gear positions; the deviation correction structure being connected to the mounting assembly and being in transmission cooperation with the adjustment disk, the deviation correction structure being used to correct the adjustment disk when it deviates from the preset gear position; and A detection element is fixed on the mounting assembly, and the detection element is used to detect the current gear position of the adjustment disk.

2. The integrating sphere gear switching device according to claim 1, characterized in that: The correction structure includes a pawl and a connecting piece, one end of the connecting piece is connected to the mounting assembly, and the other end is connected to the pawl, the pawl is located at the outer periphery of the adjusting disk, and the outer periphery of the adjusting disk is provided with a plurality of grooves, each of which corresponds to a preset gear position; the pawl is used to be inserted into the corresponding groove when the adjusting disk is rotated to one of the preset gear positions.

3. The integrating sphere gear switching device according to claim 2, characterized in that: The connecting member includes a spring sheet and a spring sheet pressing plate, wherein the spring sheet pressing plate is connected to the mounting assembly, one end of the spring sheet is fixedly connected to the spring sheet pressing plate, and the other end of the spring sheet is fixedly mounted on the pawl.

4. The integrating sphere gear switching device according to claim 2, characterized in that: The groove has a first groove wall and a second groove wall that are opposite to each other and arranged at an angle along the rotation direction of the adjusting disk, and the pawl has a limiting portion and a sliding portion that are arranged at an angle. When the pawl is inserted into the groove, the limiting portion abuts against the first groove wall, and the sliding portion abuts against the second groove wall; when the adjusting disk is subjected to a force in the rotation direction, the second groove wall is used to guide the sliding portion to slide out of the groove; when the adjusting disk is subjected to a force opposite to the rotation direction, the first groove wall and the limiting portion cooperate to limit the rotation of the adjusting disk.

5. The integrating sphere gear switching device according to claim 1, characterized in that: The detection element is a photoelectric switch. The adjustment disk is located above the shading plate. The adjustment disk is provided with a light-transmitting hole corresponding to the position of each attenuation plate. The adjustment disk is also provided with a photoelectric detection hole corresponding to each preset gear position. The photoelectric detection hole is aligned with the photoelectric switch when the adjustment disk is adjusted to the preset gear position.

6. The integrating sphere gear switching device according to claim 1, characterized in that: The mounting assembly includes a first mounting member and a second mounting member, the second mounting member is fixedly mounted on the integrating sphere, the first mounting member is fixedly connected above the second mounting member, the dimming assembly is fixedly mounted between the first mounting member and the second mounting member, and the detection element is fixedly mounted on the second mounting member.

7. The integrating sphere gear switching device according to claim 6, characterized in that: The second mounting member includes a chassis and a mounting plate fixedly mounted on the chassis. The chassis is fixed on the first mounting member, and the mounting plate is used for fixedly mounting the detection element and the deviation correction structure.

8. The integrating sphere gear switching device according to claim 6, characterized in that: The first mounting member comprises a mounting groove, an adjustable diaphragm is arranged in the mounting groove, and a light receiving hole is provided at the bottom of the mounting groove so that the light emitted by the integrating sphere can pass through the light receiving hole and enter the adjustable diaphragm.

9. The integrating sphere gear switching device according to claim 8, characterized in that: The side wall of the installation groove is provided with a limiting hole for the fastener to pass through, and the outer wall of the adjustable iris is provided with a threaded hole corresponding to the limiting hole. The fastener passes through the limiting hole and enters the threaded hole to lock the adjustable iris in the installation groove.

10. An integrating sphere detection device, characterized in that: It comprises an integrating sphere and an integrating sphere gear switching device as claimed in any one of claims 1 to 9.

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