Integrated module type tail gas treatment system with gas leakage detection function

Abstract

The utility model provides an integrated module type tail gas treatment system with a gas leakage detection function. The integrated module type tail gas treatment system comprises a dry pump treatment module, a tail gas treatment module and a connecting pipeline module, the tail gas treatment module is arranged on one side of the dry pump treatment module; the dry pump treatment module comprises a first dry pump treatment system and a second dry pump treatment system which are horizontally arranged, and gas leakage detection devices are arranged in the first dry pump treatment system and the second dry pump treatment system; the gas leakage detection device comprises an acoustic imaging detection device and a telescopic rotating support assembly, and the acoustic imaging detection device is arranged on the telescopic rotating support assembly. Thus, the gas leakage detection device can detect whether gas leakage occurs in the pipeline or not in real time and position the gas leakage position, once the gas leakage condition is found, an alarm prompt can be given out in time, the leakage position can be overhauled in time, and heavy losses caused by leakage of a large amount of gas are prevented.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor tail gas treatment, and in particular to an integrated modular tail gas treatment system with a gas leakage detection function. Background Art

[0002] The semiconductor industry is one of the important sub-industries of the electronic information manufacturing industry. With the smooth advancement of new infrastructure such as 5G technology, the Internet of Things, artificial intelligence, big data, and cloud computing, the semiconductor industry has developed rapidly. The semiconductor industry requires a large amount of acid, alkali, organic solvents and a variety of special gases in processes such as cleaning, photolithography, degumming, and drying. The entire production process will produce a large amount of toxic substances, acidic waste gas, alkaline waste gas, organic waste gas, etc.

[0003] Toxic substances and waste gases generated in this process are strictly prohibited from being discharged directly into the atmosphere without treatment. Relevant tail gas treatment must be carried out. The treated tail gas can only be discharged into the atmosphere after meeting environmental protection requirements. Normally, toxic substances and waste gases generated by the semiconductor industry are collected and treated in a classified and closed manner. The treatment system includes local treatment at the machine end and central treatment system at the plant end. For example, thermal oxidation, CVD, dry etching, ion implantation and other processes will produce characteristic gases, such as silane, arsine, phosphine, perfluorocarbons, halogen-containing gases and other toxic and high-boiling-point waste gases, which must first be pre-treated by the local LocalScrubber and then centrally treated by the central treatment system at the plant end.

[0004] The existing local scrubber tail gas treatment device is usually set in the lower layer of the semiconductor process equipment. The pump body pumps the tail gas from the semiconductor process equipment space to the tail gas treatment device. The tail gas treated by the tail gas treatment device is finally sent to the central processing system for centralized treatment. In the prior art, many tail gas treatment devices and many pump bodies are set in the same large space. In this setting mode, the integration between the devices is low. Once a gas leak occurs, the gas will quickly diffuse into the space, requiring large-scale detection. The location of the gas leak cannot be found in time, and the equipment cannot be repaired in time. In serious cases, it may cause fire, explosion, and poisoning of personnel. Utility Model Content

[0005] In order to solve the above-mentioned technical problems, the present application provides an integrated modular exhaust gas treatment system with a gas leakage detection function, including a dry pump treatment module, an exhaust gas treatment module and a connecting pipe module; one end of the connecting pipe module is connected to the dry pump treatment module, and the other end is connected to the exhaust gas treatment module; the exhaust gas treatment module is arranged on one side of the dry pump treatment module, and the exhaust gas is transported from the dry pump treatment module to the exhaust gas treatment module through the connecting pipe module; the dry pump treatment module includes a first dry pump treatment system and a second dry pump treatment system arranged horizontally, and a gas leakage detection device is arranged in the first dry pump treatment system and the second dry pump treatment system; the gas leakage detection device includes an acoustic imaging detection device and a telescopic rotating bracket assembly, and the acoustic imaging detection device is arranged on the telescopic rotating bracket assembly.

[0006] In some embodiments of the present application, the first dry pump processing system includes a first dry pump device and a second dry pump device arranged vertically; the second dry pump processing system includes a third dry pump device and a fourth dry pump device arranged vertically; the first dry pump device is arranged in the first container chamber, the second dry pump device is arranged in the second container chamber, the third dry pump device is arranged in the third container chamber, and the fourth dry pump device is arranged in the fourth container chamber; the first container chamber and the second container chamber are interconnected; the third container chamber and the fourth container chamber are interconnected.

[0007] In some embodiments of the present application, the exhaust gas treatment module is disposed in the fifth chamber.

[0008] In some embodiments of the present application, the connecting pipe module includes a first connecting pipe assembly connected to the first dry pump device, a second connecting pipe assembly connected to the second dry pump device, a third connecting pipe assembly connected to the third dry pump device, and a fourth connecting pipe assembly connected to the fourth dry pump device; the first connecting pipe assembly connects the first dry pump device and the exhaust gas treatment module; the second connecting pipe assembly connects the second dry pump device and the exhaust gas treatment module; the third connecting pipe assembly connects the third dry pump device and the exhaust gas treatment module; the fourth connecting pipe assembly connects the fourth dry pump device and the exhaust gas treatment module.

[0009] In some embodiments of the present application, the first dry pump device includes an intake pipe, a first dry pump, and an intake flow control valve; the intake flow control valve is arranged at the intake end of the intake pipe, and the intake pipe connects the intake flow control valve and the first dry pump.

[0010] In some embodiments of the present application, the first connecting pipe assembly includes a first connecting pipe, a second connecting pipe, a third connecting pipe and a bypass valve; the first connecting pipe connects the first dry pump and the bypass valve, the second connecting pipe connects the bypass valve and the exhaust gas treatment module, and the third connecting pipe connects the bypass valve and the exhaust gas treatment module.

[0011] In some embodiments of the present application, a gas concentration detection device is provided on the top of the first chamber, the third chamber and the fifth chamber.

[0012] In some embodiments of the present application, the telescopic rotating bracket assembly includes a first driving unit arranged on the side wall, and the output end of the first driving unit is transmission-connected to a driving gear; an electric push rod is also arranged below the first driving unit; a passive gear is arranged on the electric push rod, and the passive gear is meshed with the driving gear for transmission; one end of the electric push rod is rotatably arranged on the side wall through a bearing, and a fixed bracket for fixing the acoustic imaging detection device is arranged on the other end.

[0013] In some embodiments of the present application, the fixed bracket includes a hollow tubular portion sleeved on the electric push rod, a plurality of support rods are evenly arranged on the hollow tubular portion, and an acoustic imaging detection device is provided at the end of the support rod.

[0014] In some embodiments of the present application, the fixed bracket includes a first support rod, a second support rod and a third support rod, the first support rod is provided with a first acoustic imaging detection device, the second support rod is provided with a second acoustic imaging detection device, and the third support rod is provided with a third acoustic imaging detection device, and the detection directions of the first acoustic imaging detection device, the second acoustic imaging detection device and the third acoustic imaging detection device are set at a preset angle.

[0015] Compared with the prior art, the utility model has the following advantages and beneficial effects: the integrated modular exhaust gas treatment system with gas leakage detection function of the present application integrates the exhaust gas treatment module and the dry pump treatment module into one, and the integration of the entire system is high. A gas leakage detection device is arranged in the dry pump treatment module, so that the gas leakage detection device can detect in real time whether there is gas leakage in the pipeline and locate the position of the gas leakage. Once gas leakage is found, an alarm can be issued in time, and the leakage position can be inspected and repaired in time to prevent major losses caused by large-scale gas leakage.

[0016] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings constituting a part of this document are used to provide a further understanding of this document. The exemplary embodiments and descriptions of this document are used to explain this document and do not constitute an improper limitation on this document. In the accompanying drawings:

[0018] Figure 1 is a front view of an integrated modular exhaust gas treatment system with a gas leakage detection function provided by an exemplary embodiment of the present application;

[0019] Figure 2 is a front view of a dry pump processing module provided by an exemplary embodiment of the present application;

[0020] Figure 3 is a top view of an integrated modular exhaust gas treatment system with a gas leakage detection function provided by an exemplary embodiment of the present application;

[0021] Figure 4 is a structural schematic diagram of a gas leakage detection device provided by an exemplary embodiment of the present application;

[0022] Figure 5 It is a schematic structural diagram of a fixing bracket provided by an exemplary embodiment of the present application.

[0023] In the figure:

[0024] 10. dry pump processing module; 101. first dry pump processing system; 1011. first dry pump device; 1011a. air intake pipe; 1011b. first dry pump; 1011c. air intake flow control valve; 1012. second dry pump device; 1013. first chamber; 1014. second chamber; 102. second dry pump processing system; 1021. third dry pump device; 1022. fourth dry pump device; 1023. third chamber; 1024. fourth chamber;

[0025] 20. Exhaust treatment module; 2011. Fifth chamber;

[0026] 30. Connecting pipe module; 301. First connecting pipe assembly; 3011. First connecting pipe; 3012. Bypass valve; 3013. Second connecting pipe; 3014. Third connecting pipe; 302. Second connecting pipe assembly; 303. Third connecting pipe assembly; 304. Fourth connecting pipe assembly;

[0027] 40. Gas concentration detection device;

[0028] 50. Gas leakage detection device; 501. Telescopic rotating bracket assembly; 5011. First driving unit; 5012. Driving gear; 5013. Electric push rod; 5014. Passive gear; 5015. Bearing; 5016. Fixed bracket; 5016a. Hollow tubular portion; 5016b. First support rod; 5016c. Second support rod; 5016d. Third support rod; 5021. First acoustic imaging detection device; 5022. Second acoustic imaging detection device; 5023. Third acoustic imaging detection device. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application. It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other arbitrarily.

[0030] The semiconductor industry is one of the important sub-industries of the electronic information manufacturing industry. With the smooth advancement of new infrastructure such as 5G technology, the Internet of Things, artificial intelligence, big data, and cloud computing, the semiconductor industry has developed rapidly. The semiconductor industry requires a large amount of acid, alkali, organic solvents and a variety of special gases in processes such as cleaning, photolithography, degumming, and drying. The entire production process will produce a large amount of toxic substances, acidic waste gas, alkaline waste gas, organic waste gas, etc.

[0031] Toxic substances and waste gases generated in this process are strictly prohibited from being discharged directly into the atmosphere without treatment. Relevant tail gas treatment must be carried out. The treated tail gas can only be discharged into the atmosphere after meeting environmental protection requirements. Normally, toxic substances and waste gases generated by the semiconductor industry are collected and treated in a classified and closed manner. The treatment system includes local treatment at the machine end and central treatment system at the plant end. For example, thermal oxidation, CVD, dry etching, ion implantation and other processes will produce characteristic gases, such as silane, arsine, phosphine, perfluorocarbons, halogen-containing gases and other toxic and high-boiling-point waste gases, which must first be pre-treated by the local LocalScrubber and then centrally treated by the central treatment system at the plant end.

[0032] The existing local scrubber tail gas treatment device is usually set in the lower layer of the semiconductor process equipment. The pump body pumps the tail gas from the semiconductor process equipment space to the tail gas treatment device. The tail gas treated by the tail gas treatment device is finally sent to the central processing system for centralized treatment. In the prior art, many tail gas treatment devices and many pump bodies are set in the same large space. In this setting mode, the integration between the devices is low. Once a gas leak occurs, the gas will quickly diffuse into the space, requiring large-scale detection. The location of the gas leak cannot be found in time, and the equipment cannot be repaired in time. In serious cases, it may cause fire, explosion, and poisoning of personnel.

[0033] Based on this, an exemplary embodiment of the present application provides an integrated modular exhaust gas treatment system with a gas leakage detection function, in which the exhaust gas treatment module and the dry pump treatment module are integrated into one, and the whole system has a high degree of integration. A gas leakage detection device is arranged in the dry pump processing module, so that the gas leakage detection device can detect in real time whether there is a gas leakage in the pipeline and locate the position of the gas leakage. Once a gas leakage is detected, an alarm can be issued in time, and the leakage position can be inspected and repaired in time to prevent major losses caused by large-scale gas leakage.

[0034] An exemplary embodiment of the present application provides an integrated modular exhaust gas treatment system with a gas leakage detection function, such as Figures 1 to 4 As shown, the integrated modular exhaust gas treatment system with gas leakage detection function includes a dry pump treatment module 10, an exhaust gas treatment module 20 and a connecting pipe module 30; one end of the connecting pipe module 30 is connected to the dry pump treatment module 10, and the other end is connected to the exhaust gas treatment module 20; the exhaust gas treatment module 20 is arranged on one side of the dry pump treatment module 10, and the exhaust gas is transported from the dry pump treatment module 10 to the exhaust gas treatment module 20 through the connecting pipe module 30, and the exhaust gas after being treated by the exhaust gas treatment module 20 is subsequently treated by the central processing system, and the exhaust gas treatment module 20 can be a combustion exhaust gas treatment device. The dry pump treatment module 10 includes a first dry pump treatment system 101 and a second dry pump treatment system 102 arranged horizontally. The first dry pump treatment system 101 and the second dry pump treatment system 102 are both provided with a gas leakage detection device 50, and the gas leakage detection device 50 includes an acoustic imaging detection device and a telescopic rotating bracket assembly 501, and the acoustic imaging detection device is arranged on the telescopic rotating bracket assembly 501, and the acoustic imaging detection device can use an existing acoustic imaging detection device on the market. Once a gas leak is detected in the system, the gas leak detection device 50 can promptly detect the location of the gas leak and issue an alarm so that the leak location can be promptly inspected and repaired to prevent major losses caused by a large amount of gas leakage.

[0035] The dry pump treatment module 10 and the exhaust gas treatment module 20 are each designed as a module with a high degree of integration. According to actual work requirements, the modules can be designed in combination to meet different working conditions. The entire system has a high degree of integration and occupies a small space. The length of the pipeline connecting the pipeline module is greatly reduced, reducing the risk of exhaust gas leakage. At the same time, it is easy to detect the gas leakage of each module and can quickly locate the location of the gas leakage.

[0036] At the same time, when conducting modular design, a spare dry pump processing module 10 and a spare exhaust gas treatment module 20 can also be designed in combination, so that when a fault such as gas leakage occurs, the spare dry pump processing module 10 and the exhaust gas treatment module 20 can be activated, which can prevent equipment shutdown and maintenance due to gas leakage, affecting production and reducing production efficiency.

[0037] The first dry pump processing system 101 and the second dry pump processing system 102 can work simultaneously; or, the first dry pump processing system 101 is a dry pump processing system in normal working state, and the second dry pump processing system 102 is a backup dry pump processing system. When a leakage occurs, the second dry pump processing system 102 is started; of course, the second dry pump processing system 102 can also be a dry pump processing system in normal working state, and the first dry pump processing system 101 is a backup dry pump processing system.

[0038] The first dry pump processing system 101 includes a first dry pump device 1011 and a second dry pump device 1012 arranged vertically; the second dry pump processing system 102 includes a third dry pump device 1021 and a fourth dry pump device 1022 arranged vertically; the first dry pump device 1011 is arranged in the first chamber 1013, the second dry pump device 1012 is arranged in the second chamber 1014, the third dry pump device 1021 is arranged in the third chamber 1023, and the fourth dry pump device 1022 is arranged in the fourth chamber 1024; the first chamber 1013 and the second chamber 1014 are interconnected; the third chamber 1023 and the fourth chamber 1024 are interconnected. The first chamber 1013, the second chamber 1014 and the third chamber 1023, the fourth chamber 1024 are relatively sealed, and sealing rings are provided at the connection between each chamber and each pipeline for sealing.

[0039] The tail gas treatment module 20 is disposed in the fifth chamber 2011. The fifth chamber 2011 is relatively sealed from the first chamber 1013, the second chamber 1014, the third chamber 1023, and the fourth chamber 1024 to prevent leaked gas from flowing into the entire system.

[0040] A gas concentration detection device 40 is provided on the top of the first chamber 1013, the third chamber 1023 and the fifth chamber 2011. The gas concentration detection device 40 may be an existing gas concentration detection device 40 on the market, for example, an electrochemical gas concentration detector or an infrared gas concentration detector. When a gas leak occurs in the first chamber 1013, the second chamber 1014, the third chamber 1023, the fourth chamber 1024 and the fifth chamber 2011, the leaked gas will contact the gas concentration detection device 40 through the pipeline, and the gas concentration detection device 40 may trigger an alarm system to remind the staff that a gas leak occurs in the system, so as to timely inspect and maintain the system. The gas concentration detection device 40 can assist in gas leakage detection. Since the fifth chamber 2011, the first chamber 1013 and the second chamber 1014, the third chamber 1023 and the fourth chamber 1024 are relatively sealed, when a gas leakage occurs, the gas concentration detection device 40 above the corresponding chamber can detect the gas leakage in the chamber to issue an alarm and inspect the pipeline in the chamber, which can reduce the workload of checking the pipeline and promptly find the location of the gas leakage.

[0041] The connecting pipe module 30 includes a first connecting pipe assembly 301 connected to the first dry pump device 1011, a second connecting pipe assembly 302 connected to the second dry pump device 1012, a third connecting pipe assembly 303 connected to the third dry pump device 1021, and a fourth connecting pipe assembly 304 connected to the fourth dry pump device 1022; the first connecting pipe assembly 301 connects the first dry pump device 1011 and the exhaust gas treatment module 20; the second connecting pipe assembly 302 connects the second dry pump device 1012 and the exhaust gas treatment module 20; the third connecting pipe assembly 303 connects the third dry pump device 1021 and the exhaust gas treatment module 20; the fourth connecting pipe assembly 304 connects the fourth dry pump device 1022 and the exhaust gas treatment module 20.

[0042] like Figure 2 As shown, the first dry pump device 1011 includes an intake pipe 1011a, a first dry pump 1011b, and an intake flow control valve 1011c; the intake flow control valve 1011c is arranged at the intake end of the intake pipe 1011a, and the intake pipe 1011a is connected to the intake flow control valve 1011c and the first dry pump 1011b. Based on the same principle, the second dry pump device 1012 includes an intake pipe 1011a, a second dry pump, and an intake flow control valve 1011c, the third dry pump device 1021 includes an intake pipe 1011a, a third dry pump, and an intake flow control valve 1011c, and the fourth dry pump device 1022 includes an intake pipe 1011a, a fourth dry pump, and an intake flow control valve 1011c.

[0043] The first connecting pipe assembly 301 includes a first connecting pipe 3011, a second connecting pipe 3013, a third connecting pipe 3014 and a bypass valve 3012; the first connecting pipe 3011 connects the first dry pump 1011b and the bypass valve 3012, the second connecting pipe 3013 connects the bypass valve 3012 and the exhaust gas treatment module 20, and the third connecting pipe 3014 connects the bypass valve 3012 and the exhaust gas treatment module 20. Based on the same principle, the second connecting pipe assembly 302, the third connecting pipe assembly 303 and the fourth connecting pipe assembly 304 all include the first connecting pipe 3011, the second connecting pipe 3013, the third connecting pipe 3014 and the bypass valve 3012, and the directions of the pipes in different chambers are slightly different.

[0044] In one embodiment, if Figure 1 As shown, a gas leakage detection device 50 is provided in the first chamber 1013, the second chamber 1014, the third chamber 1023 and the fourth chamber 1024. In normal operation, the bypass valve 3012 is connected to the second connecting pipe 3013 and delivers the gas to the exhaust gas treatment module 20; the third connecting pipe 3014 is a spare pipeline. In normal operation, the bypass valve 3012 and the third connecting pipe 3014 are sealed, and the third connecting pipe 3014 does not work. At this time, under the action of the bypass valve 3012, the exhaust gas is sucked into the first dry pump 1011b, the second dry pump, the third dry pump and the fourth dry pump from the intake pipe 1011a, and then enters the exhaust gas treatment module 20 through the second connecting pipe 3013. After being processed by the exhaust gas treatment module 20, it enters the central processing system for subsequent processing.

[0045] The gas leakage detection device 50 can detect in real time whether there is any leakage of gas in the pipelines in the first chamber 1013, the second chamber 1014, the third chamber 1023 and the fourth chamber 1024. Once a gas leakage is found, the gas leakage detection device 50 can trigger the alarm system in time, and the control system can control the intake flow control valve 1011c and the bypass valve 3012 in time according to the location of the leakage to keep the entire system in a stable working state. For example, assuming that the gas leakage detection device 50 detects a gas leak on the first connecting pipe 3011 in the first connecting pipe assembly 301, at this time, the control system can control the closing of the intake flow control valve 1011c of the first dry pump device 1011. At this time, the first dry pump device 1011 does not work and waits for maintenance by the staff. The second dry pump device 1012, the third dry pump device 1021 and the fourth dry pump device 1022 continue to work. The control system can also adjust the intake flow control valve 1011c of the second dry pump device 1012, the third dry pump device 1021 and the fourth dry pump device 1022 to maintain the total intake flow within a preset range. Not only will the gas leakage not cause downtime maintenance and affect production, but the intake flow of the entire system can be maintained within a stable working range by adjusting the intake flow, and the production time will not be extended.

[0046] For example, assuming that the gas leakage detection device 50 detects that there is a gas leakage in the second connecting pipe 3013 in the first connecting pipe assembly 301, the control system can control the bypass valve 3012 to seal the second connecting pipe 3013 and connect the third connecting pipe 3014. At this time, the gas enters the third connecting pipe 3014 through the bypass valve 3012 and enters the exhaust gas treatment module 20. The staff can inspect and repair the second connecting pipe 3013 without causing the entire system to shut down due to the leakage of the second connecting pipe 3013, and will not affect production.

[0047] The telescopic rotating bracket assembly 501 is arranged on the side wall of the first chamber 1013 or the second chamber 1014 or the third chamber 1023 or the fourth chamber 1024, and the acoustic imaging detection device is arranged on the telescopic rotating bracket assembly 501. Preferably, the first chamber 1013, the second chamber 1014, the third chamber 1023 and the fourth chamber 1024 are all provided with a gas leakage detection device 50, which can respectively detect the gas leakage of the pipelines in the first chamber 1013, the second chamber 1014, the third chamber 1023 and the fourth chamber 1024, and timely transmit the leakage information of the pipelines to the control system, so that the control system can take corresponding control in time to reduce the leakage of gas and reduce the risk of gas leakage.

[0048] like Figure 4As shown, the telescopic rotating bracket assembly 501 includes a first driving unit 5011 arranged on the side wall, the first driving unit 5011 can be a motor, and the output end of the first driving unit 5011 is connected to the driving gear 5012 in a transmission manner; an electric push rod 5013 is also arranged below the first driving unit 5011; a passive gear 5014 is arranged on the electric push rod 5013, and the passive gear 5014 is meshed with the driving gear 5012 for transmission; one end of the electric push rod 5013 is rotatably arranged on the side wall through a bearing 5015, and a fixed bracket 5016 for fixing the acoustic imaging detection device is arranged on the other end. In this way, the first driving unit 5011 can drive the driving gear 5012 and drive the passive gear 5014 and the electric push rod 5013 to rotate, thereby driving the fixed bracket 5016 and the acoustic imaging detection device to rotate, so as to achieve all-round detection of each room space.

[0049] Exemplarily, the fixed bracket 5016 includes a hollow tubular portion 5016a sleeved on the electric push rod 5013, and a plurality of support rods are evenly arranged on the hollow tubular portion 5016a, and an acoustic imaging detection device is provided at the end of the support rod.

[0050] like Figure 5 As shown, in one embodiment, the fixed support 5016 includes a first support rod 5016b, a second support rod 5016c and a third support rod 5016d, the first support rod 5016b is provided with a first acoustic imaging detection device 5021, the second support rod 5016c is provided with a second acoustic imaging detection device 5022, and the third support rod 5016d is provided with a third acoustic imaging detection device 5023, and the detection directions of the first acoustic imaging detection device 5021, the second acoustic imaging detection device 5022 and the third acoustic imaging detection device 5023 are arranged at a preset angle. Preferably, as Figure 5 As shown, the arrow directions in the figure indicate the detection directions of the first acoustic imaging detection device 5021, the second acoustic imaging detection device 5022 and the third acoustic imaging detection device 5023, and each detection direction is set at an angle of 120°. Since the lens of the acoustic imaging detection device has a certain field of view angle, for example, a field of view angle of 120°, when the first driving unit 5011 drives the fixed bracket 5016 and drives the first acoustic imaging detection device 5021, the second acoustic imaging detection device 5022 and the third acoustic imaging detection device 5023 to rotate around the extension direction of the electric push rod 5013, the three acoustic imaging detection devices can realize the detection of the entire space of the first chamber 1013, the second chamber 1014, the third chamber 1023 and the fourth chamber 1024, so as to detect the pipelines in each chamber and detect the gas leakage position in real time, so as to reduce the risk caused by gas leakage in the system, perform system maintenance in time, and reduce the risk to a minimum.

[0051] When a gas leak occurs and the pipeline is to be inspected, the electric push rod 5013 can drive the fixed bracket 5016 and the acoustic imaging detection device to move toward the side walls of the first chamber 1013, the second chamber 1014, the third chamber 1023 and the fourth chamber 1024, so that the fixed bracket 5016 and the acoustic imaging detection device are close to the side walls, reserving space for the inspection of the pipeline.

[0052] In this application, the terms "comprises", "comprising" or any other variations thereof are intended to cover non-exclusive inclusion, so that an article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of more restrictions, the elements defined by the sentence "comprising..." do not exclude the presence of other identical elements in the article or device comprising the elements.

[0053] Although the preferred embodiments of the present application have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0054] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the intention of the present application also includes these modifications and variations.

Claims

1. An integrated modular exhaust gas treatment system with gas leakage detection function, characterized in that: It includes a dry pump processing module, an exhaust gas processing module and a connecting pipe module; one end of the connecting pipe module is connected to the dry pump processing module, and the other end is connected to the exhaust gas processing module; the exhaust gas processing module is arranged on one side of the dry pump processing module, and the exhaust gas is transported from the dry pump processing module to the exhaust gas processing module through the connecting pipe module; the dry pump processing module includes a first dry pump processing system and a second dry pump processing system arranged horizontally, and a gas leakage detection device is arranged in the first dry pump processing system and the second dry pump processing system; the gas leakage detection device includes an acoustic imaging detection device and a telescopic rotating bracket assembly, and the acoustic imaging detection device is arranged on the telescopic rotating bracket assembly.

2. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 1, characterized in that: The first dry pump processing system includes a first dry pump device and a second dry pump device arranged vertically; the second dry pump processing system includes a third dry pump device and a fourth dry pump device arranged vertically; the first dry pump device is arranged in the first container, the second dry pump device is arranged in the second container, the third dry pump device is arranged in the third container, and the fourth dry pump device is arranged in the fourth container; the first container and the second container are connected to each other; the third container and the fourth container are connected to each other.

3. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 1, characterized in that: The exhaust gas treatment module is arranged in the fifth chamber.

4. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 2, characterized in that: The connecting pipe module includes a first connecting pipe assembly connected to the first dry pump device, a second connecting pipe assembly connected to the second dry pump device, a third connecting pipe assembly connected to the third dry pump device, and a fourth connecting pipe assembly connected to the fourth dry pump device; the first connecting pipe assembly connects the first dry pump device and the exhaust gas treatment module; the second connecting pipe assembly connects the second dry pump device and the exhaust gas treatment module; the third connecting pipe assembly connects the third dry pump device and the exhaust gas treatment module; the fourth connecting pipe assembly connects the fourth dry pump device and the exhaust gas treatment module.

5. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 4, characterized in that: The first dry pump device includes an intake pipe, a first dry pump, and an intake flow control valve; the intake flow control valve is arranged at the intake end of the intake pipe, and the intake pipe is connected to the intake flow control valve and the first dry pump.

6. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 5, characterized in that: The first connecting pipe assembly includes a first connecting pipe, a second connecting pipe, a third connecting pipe and a bypass valve; the first connecting pipe connects the first dry pump and the bypass valve, the second connecting pipe connects the bypass valve and the exhaust gas treatment module, and the third connecting pipe connects the bypass valve and the exhaust gas treatment module.

7. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 2, characterized in that: Gas concentration detection devices are arranged on the tops of the first chamber, the third chamber and the fifth chamber.

8. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 1, characterized in that: The telescopic rotating bracket assembly includes a first driving unit arranged on the side wall, and the output end of the first driving unit is transmission-connected with a driving gear; an electric push rod is also arranged below the first driving unit; a passive gear is arranged on the electric push rod, and the passive gear is meshed with the driving gear for transmission; one end of the electric push rod is rotatably arranged on the side wall through a bearing, and a fixed bracket for fixing the acoustic imaging detection device is arranged on the other end.

9. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 8, characterized in that: The fixed bracket comprises a hollow tubular portion sleeved on the electric push rod, a plurality of support rods are evenly arranged on the hollow tubular portion, and an acoustic imaging detection device is arranged at the end of the support rod.

10. The integrated modular exhaust gas treatment system with gas leakage detection function according to claim 9, characterized in that: The fixed bracket includes a first support rod, a second support rod and a third support rod, the first support rod is provided with a first acoustic imaging detection device, the second support rod is provided with a second acoustic imaging detection device, and the third support rod is provided with a third acoustic imaging detection device, and the detection directions of the first acoustic imaging detection device, the second acoustic imaging detection device and the third acoustic imaging detection device are arranged at a preset angle.

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