Heat sink anti-sputtering device and propeller space experiment test vacuum system

By designing the heat sink sputtering device of the arch bracket and the drive device, the rotation of the strip baffle forms an arch mask or barrier, the problems of heat sink sputtering damage and space occupation in the electric propulsion test vacuum system are solved. Effective sputtering protection and temperature control are achieved, improving the flexibility and usability of the system.

CN222144526UActive Publication Date: 2024-12-10CHANGSHU YUHUA VACUUM EQUIP TECH CO LTD

Patent Information

Application Number
CN202323533568.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-25
Publication Date
2024-12-10
Estimated Expiration
2033-12-25

AI Technical Summary

Technical Problem

In the electric propulsion test vacuum system, the high-energy ions ejected by the thruster cause sputtering damage to the heat sink and affect the temperature control in the vacuum chamber. The existing technology is difficult to effectively protect and occupy a large space, which affects the availability of the equipment.

Method used

A heat sink anti-sputtering device is designed, using an arch bracket and a driving device, and the arch mask or hollow barrier is rotated on the arch bracket through several strips of baffles, and the strip is realized by using a vacuum reduction motor and transmission gear. The synchronous 90° rotation of the shaped baffle is combined with the roller and air cushion platform to achieve flexible adjustments, reducing the impact of shielding on the heat sink and space occupation.

Benefits of technology

It effectively prevents sputtering damage from heat sinks, reduces the impact on temperature control, and improves the usable space utilization rate in the vacuum chamber, achieving flexible movement and shock absorption effects of the device.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a heat sink anti-sputtering device and a propeller space experiment test vacuum system, the heat sink anti-sputtering device comprises an arch support and a driving device, the arch support is provided with a plurality of rotatable strip-shaped baffle plates, the strip-shaped baffle plates extend along the axial direction of the arch support, and the rotation axis of the strip-shaped baffle plates is parallel to the axial direction of the arch support. The driving device drives the strip-shaped baffles to rotate in the tangential direction and the radial direction of the arch shape, and the strip-shaped baffles are spliced into the arch-shaped shade in the tangential direction of the arch shape. The utility model further discloses a propeller space experiment test vacuum system which comprises a vacuum chamber, a heat sink and a transverse guide rail are arranged in the vacuum chamber, and a heat sink anti-sputtering device is arranged on the guide rail. According to the invention, the strip-shaped baffle plates can form an arch-shaped shielding cover to prevent the heat sink from sputtering damage as required, and the strip-shaped baffle plates can be rotated to reduce shielding of the heat sink, so that the radiation efficiency of the heat sink is improved; in the propeller space experiment test vacuum system, the position of the heat sink anti-sputtering device can be adjusted according to the position and angle of the propeller so as to achieve the optimal effect.
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Description

Technical Field

[0001] The invention relates to a vacuum test system, in particular to a heat sink anti-sputtering device and a thruster space experiment test vacuum system. Background Art

[0002] The main function of the electric propulsion test vacuum system is to simulate the vacuum high and low temperature environment of space and to effectively control the vacuum degree in the cabin. At the same time, it can provide voltage input, current input, microwave input, liquid input, signal feedback, diagnosis, observation, lighting, inflation (mixing) and other functions, providing convenience for the connection, interconnection and communication of equipment and instruments inside and outside the cabin.

[0003] When the electric propulsion system is working, the high-energy ions ejected toward the tail will cause sputtering corrosion to the internal components of the vacuum system. The Chinese patent with the announcement number CN107976316A discloses an integrated plume protection device for a xenon pump for electric propulsion testing, which uses a plurality of conical ring-shaped baffles stacked, welded to the cooling pipeline and fixed in the vacuum chamber. It can block the impact of working gas particles on the xenon pump cold plate. However, the position of the thruster in the vacuum chamber will affect the particle injection range. In order to fully cover the equipment to be protected, multiple coaxial conical rings need to be set to meet the large-angle coverage. The more conical rings there are, the smaller the movable space in the middle, and the space in the vacuum chamber cannot be fully utilized. In addition, the heat sink is different from the xenon pump. If a large area of ​​shielding is generated on the heat sink, it will seriously affect the temperature control of the space inside the vacuum chamber by the heat sink. Summary of the invention

[0004] In view of the above-mentioned defects of the prior art, the task of the present invention is to provide a heat sink anti-sputtering device, the purpose of which is to reduce the sputtering damage of the particles ejected by the thruster to the heat sink, while reducing the thermal shielding of the heat sink and the impact on the temperature control of the heat sink. Another task of the present invention is to provide a thruster space experiment test vacuum system with the heat sink anti-sputtering device.

[0005] The technical solution of the present invention is as follows: A heat sink anti-sputtering device includes an arch bracket and a driving device, a plurality of strip baffles are arranged on the arch bracket, the strip baffles extend along the axial direction of the arch bracket, the strip baffles are rotatably connected to the arch bracket, the rotation axis of the strip baffles is parallel to the axial direction of the arch bracket, the driving device drives the strip baffles to rotate between the tangential and radial directions of the arch, and the strip baffles are assembled into an arch shield when in the tangential direction of the arch.

[0006] Furthermore, the driving device includes a vacuum reduction motor and a transmission gear, the transmission gear is arranged at one end of the rotating shaft of the strip baffle, the transmission gears on adjacent strip baffles are meshed with each other, and the output shaft of the vacuum reduction motor is connected to a driving gear for meshing with the transmission gear. Through gear transmission, each strip baffle can be easily rotated 90° synchronously, thereby changing the tangential and radial positions of the arch.

[0007] Furthermore, when the strip-shaped single plates are in the tangential position of the arch, the adjacent strip-shaped single plates have overlapping parts. A certain overlapping part is provided to achieve sufficient shielding of the upper heat sink.

[0008] Furthermore, in order to facilitate the position adjustment of the heat sink anti-sputtering device in the vacuum chamber, a plurality of rollers are provided on the bottom edge of the arched support.

[0009] Another technical solution of the present invention is: a thruster space experiment test vacuum system, including a vacuum chamber, wherein a heat sink and a horizontal guide rail are arranged in the vacuum chamber, the guide rail is provided with the aforementioned heat sink anti-sputtering device, and the bottom edge of the arched bracket is movably arranged on the guide rail.

[0010] Furthermore, the axial direction of the arch support is coaxially arranged with the axial direction of the vacuum chamber.

[0011] Furthermore, a workpiece loading platform is provided in the vacuum chamber, a pulley is provided at the bottom of the workpiece loading platform, and the workpiece loading platform is rollingly arranged on the guide rail.

[0012] Furthermore, an air cushion platform is provided outside the vacuum chamber, a plurality of sealing bellows are provided at the bottom of the vacuum chamber, a support column is provided inside the sealing bellows, the bottom support of the sealing bellows is connected to the air cushion platform, and the support column is driven to move upward when the air cushion platform floats up, and the upward movement of the support column is used to lift the workpiece loading platform from the guide rail.

[0013] Furthermore, a plurality of wire ring shock-absorbing supports are arranged under the air cushion platform, and the wire ring shock-absorbing supports include an upper support plate, a lower support plate and a wire rope ring. The wire rope ring is arranged horizontally and connected to the upper support plate and the lower support plate respectively. The upper support plate is connected to the air cushion platform, and the lower support plate is supported on the ground.

[0014] Furthermore, the air cushion platform is provided with a plurality of horizontal guide rods, the upper support plate is movably connected to the horizontal guide rods, and the position of the upper support plate on the horizontal guide rods is adjusted to change the distance between the wire ring shock-absorbing support foot and the center of gravity of the air cushion platform.

[0015] The advantages of the present invention compared with the prior art are:

[0016] By rotating the strip baffle to form an arched shield or a hollow grille, the arched shield can well shield the heat sink to prevent the heat sink from being damaged by sputtering, while the grille can reduce shielding and improve the radiation temperature control efficiency of the heat sink.

[0017] The axial length of the strip baffle determines the shielding area of ​​the heat sink. Even if a large area is required to be shielded, it will not affect the inner diameter of the arched shield. Therefore, the heat sink sputtering protection device occupies little actual available space in the vacuum chamber, making the test device more miniaturized and the overall manufacturing cost lower.

[0018] The thruster space experiment test vacuum system sets a guide rail in the vacuum chamber, so that the heat sink sputtering protection device can be moved as needed to adapt to the shielding requirements of the heat sink when different thrusters are implemented, avoiding the problem in the prior art that a larger annular area is needed (which correspondingly affects the size of the available space in the vacuum chamber) to obtain a larger shielding range to adapt to different injection angles of the thruster.

[0019] The use of an air cushion platform to separate the workpiece loading platform from the guide rail can reduce the impact of external vibration on the thruster. Further combined with the movable wire ring shock-absorbing support foot, a double shock-absorbing effect can be achieved. At the same time, the workpiece loading platform can conveniently adjust the horizontal error caused by the air cushion platform by adjusting the distance between the wire ring shock-absorbing support foot and the center of gravity of the air cushion platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the main structure of the vacuum system for thruster space experiment testing.

[0021] Figure 2 Schematic diagram of the lateral structure of the vacuum system for thruster space experiment testing.

[0022] Figure 3 This is a schematic diagram of the main structure of the heat sink anti-sputtering device.

[0023] Figure 4 for Figure 3 Local schematic diagram of point A.

[0024] Figure 5 This is a schematic diagram of the main structure of the wire ring shock-absorbing support foot.

[0025] Figure 6 It is a schematic diagram of the top view of the wire rope loop and the air cushion platform.

[0026] Figure 7 Schematic diagram of the strip baffle in the arch tangent direction.

[0027] Figure 8 Schematic diagram of the strip baffle in the arch radial direction. DETAILED DESCRIPTION

[0028] The present invention will be further described below in conjunction with the embodiments, but are not intended to limit the present invention.

[0029] Please combine Figure 1 , Figure 2 As shown, the thruster space experiment test vacuum system involved in this embodiment includes a vacuum chamber 1, and a heat sink 2 is arranged in the vacuum chamber 1. The heat sink 2 is cylindrical and arranged according to the inner wall of the vacuum chamber 1. The vacuum chamber 1 is a horizontal vacuum tank, and a horizontal guide rail 3 is installed in the internal space of the vacuum chamber 1. The vacuum chamber 1 is also equipped with a vacuum guarantee system: mainly including various vacuum pumps, vacuum valves, pipelines and vacuum measurements, etc. The vacuum guarantee system mainly provides vacuum degree for the vacuum chamber 1, and the specific coordination can refer to the existing technical settings.

[0030] A heat sink anti-sputtering device is also provided in the vacuum chamber 1. Figures 2 to 4 As shown. The heat sink anti-sputtering device 100 includes an arch support 101 and a driving device 102. In some preferred embodiments, the arch support 101 forms a cylindrical structure. The arch support 101 mainly includes arch beams 101a at both ends and two bottom edges 101b connected between the bottoms of the arch beams 101a, and the bottom edges 101b extend along the axial direction of the arch support 101a. The arch support 101 is set on the guide rail 3 and can move along the guide rail 3, thereby changing the position of the heat sink anti-sputtering device in the vacuum chamber 1. In a preferred embodiment, in order to facilitate the adjustment of the position of the heat sink anti-sputtering device in the vacuum chamber 1, a roller 103 is provided on the bottom edge 101b of the arch support 101, so that the position can be easily adjusted by pushing the arch support 101. At the same time, the axial direction of the arch support 101 is preferably coaxial with the axial direction of the vacuum chamber 1.

[0031] A plurality of strip baffles 104 are mounted on the arch support 101. In a preferred embodiment, the strip baffles 104 are straight titanium plates, but are not limited to straight structures. The cross-section of the strip baffles 104 may also have a certain curvature. Both ends of the strip baffles 104 are rotatably connected to the arch beam 101a on the arch support 101. The length direction of the strip baffles 104 is parallel to the axial direction of the arch support 101, that is, the strip baffles 104 extend along the axial direction of the arch support 101, and the rotation axis of the strip baffles 104 is parallel to the axial direction of the arch support 101. The strip baffles 104 are fully distributed on the arch beam 101a, so that these strip baffles 104 form a form similar to a blind.

[0032] Each strip baffle 104 has two positions, one of which is that the strip baffle 104 is in the tangential direction of the arch. Figure 7 As shown, the other is that the strip baffle 104 is in the radial direction of the arch, as shown Figure 8When the strip baffles 104 are in the tangential direction of the arch, the side edges of adjacent strip baffles 104 are close together or in some embodiments, the side edges of adjacent strip baffles 104 have a small amount of overlap, so that all the strip baffles 104 form an arch shield. When the heat sink anti-sputtering device is set on the guide rail 3, the arch shield can cover most of the upper heat sink area, and play an anti-sputtering effect on the heat sink 2. When the strip baffles 104 are in the radial direction of the arch, the largest gap is formed between all the strip baffles 104, forming the smallest shielding for the heat sink 2.

[0033] The driving device 102 is used to drive the strip baffle 104 to change its position, so as to shield the heat sink 2 as needed. The driving device 102 includes a vacuum reduction motor 102a and a transmission gear 102b. The vacuum reduction motor 102a is arranged on one side of the arched beam 101a. The transmission gear 102b is arranged at one end of the rotating shaft of the strip baffle 104. The transmission gears 102b on adjacent strip baffles 104 are meshed with each other. The output shaft of the vacuum reduction motor 102a is connected to a driving gear for meshing with the transmission gear 102b. When the vacuum reduction motor 102a is working, it can easily make each strip baffle 104 rotate 90° synchronously through gear transmission, so as to change the tangential and radial positions of the arch. It should be pointed out that the aforementioned driving gear can also be a transmission gear 102b connected to a strip-shaped baffle 104, that is, the vacuum reduction motor 102a can directly drive a strip-shaped baffle 104 to rotate, and then drive other strip-shaped baffles 104 through the engagement between the transmission gears 102b. At this time, the transmission gear 102b on the strip-shaped baffle 104 that is directly driven is the driving gear.

[0034] Please continue to combine Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, the thruster space experiment test vacuum system is also provided with a workpiece loading platform 4 for placing the thruster, the workpiece loading platform 4 and the heat sink anti-sputtering device share the guide rail 3, the bottom of the workpiece loading platform 4 is provided with a pulley 5, and the workpiece loading platform 4 is rolled on the guide rail 3. In this way, the position of the thruster in the vacuum chamber 1 can also be adjusted as needed.

[0035] Since the vacuum support system connected to the vacuum chamber will generate vacuum during operation, the stability of the thruster will be affected. Outside the vacuum chamber 1, an air cushion platform 6 is provided below the vacuum chamber 1. Four sealing bellows 7 are provided at the bottom of the vacuum chamber 1. Support columns 8 are provided inside the sealing bellows 7. The bottom support of the sealing bellows 7 is connected to the air cushion platform 6. The air cushion platform 6 is provided with four horizontal guide rods 9. The horizontal guide rods 9 are provided with adjustable wire ring shock-absorbing feet 10. Specifically, the wire ring shock-absorbing feet 10 include an upper support plate 10a, a lower support plate 10b and a wire rope ring 10c. The wire rope ring 10c is arranged horizontally and connected to the upper support plate 10a and the lower support plate 10b respectively. A sliding sleeve 10d is provided on the upper support plate 10a. The sliding sleeve 10d is adjustably sleeved on the horizontal guide rod 9 and is locked by adjusting screws to fix the position of the sliding sleeve 10d. The lower support plate 10b of the wire ring shock-absorbing feet 10 is supported on the ground. Through this structure, when the air cushion platform 6 floats up, the support column 8 is driven to move up, and the top of the support column 8 is supported on the bottom surface of the workpiece loading platform 6. After the support column 8 moves up, the workpiece loading platform 6 is lifted from the guide rail 3, so that there is no hard connection between the workpiece loading platform 6 and the vacuum chamber 1. The double shock absorption formed by the wire ring shock-absorbing support foot 10 and the air cushion platform 6 can also reduce the vibration from the ground transmitted to the propeller. When the propeller is placed on the workpiece loading platform 6, it is inevitable that a certain center of mass offset will occur, thereby causing inclination. The movable wire ring shock-absorbing support foot 10 is set. By adjusting the position of the sliding sleeve 10d on the horizontal guide rod 9, the distance between the wire ring shock-absorbing support foot 10 and the center of gravity of the air cushion platform 6 can be changed, thereby adjusting the force of different wire ring shock-absorbing support feet 10, so that the workpiece loading platform 6 can be adjusted in a small range. Level.

Claims

1. A heat sink anti-sputtering device, characterized in that: It includes an arch support and a driving device, wherein a plurality of strip baffles are arranged on the arch support, wherein the strip baffles extend along the axial direction of the arch support, the strip baffles are rotatably connected to the arch support, and the rotation axis of the strip baffles is parallel to the axial direction of the arch support. The driving device drives the strip baffles to rotate between the tangential and radial directions of the arch, and the strip baffles are assembled into an arch cover when in the tangential direction of the arch.

2. The heat sink anti-sputtering device according to claim 1, characterized in that: The driving device includes a vacuum reduction motor and a transmission gear. The transmission gear is arranged at one end of the rotating shaft of the strip baffle. The transmission gears on adjacent strip baffles mesh with each other. The output shaft of the vacuum reduction motor is connected to a driving gear for meshing with the transmission gear.

3. The heat sink anti-sputtering device according to claim 1, characterized in that: When the strip-shaped baffles are in the tangential position of the arch, the adjacent strip-shaped baffles have overlapping portions.

4. The heat sink anti-sputtering device according to claim 1, characterized in that: A plurality of rollers are arranged on the bottom edge of the arch support.

5. A propulsion space experiment test vacuum system, comprising a vacuum chamber, characterized in that: A heat sink and a horizontal guide rail are provided in the vacuum chamber, and the heat sink anti-sputtering device according to any one of claims 1 to 4 is provided on the guide rail. The bottom edge of the arch support is movably arranged on the guide rail.

6. The thruster space experiment test vacuum system according to claim 5, characterized in that: The axial direction of the arch support is coaxially arranged with the axial direction of the vacuum chamber.

7. The thruster space experiment test vacuum system according to claim 5, characterized in that: A workpiece loading platform is arranged in the vacuum chamber, a pulley is arranged at the bottom of the workpiece loading platform, and the workpiece loading platform is rollingly arranged on the guide rail.

8. The thruster space experiment test vacuum system according to claim 7, characterized in that: An air cushion platform is provided outside the vacuum chamber, a plurality of sealing bellows are provided at the bottom of the vacuum chamber, support columns are provided inside the sealing bellows, the bottom support of the sealing bellows is connected to the air cushion platform, and the support columns are driven to move upward when the air cushion platform floats, and the upward movement of the support columns is used to lift the workpiece loading platform from the guide rail.

9. The thruster space experiment test vacuum system according to claim 8, characterized in that: A plurality of wire ring shock-absorbing feet are arranged below the air cushion platform, and the wire ring shock-absorbing feet include an upper support plate, a lower support plate and a wire rope ring. The wire rope ring is arranged horizontally and connected to the upper support plate and the lower support plate respectively. The upper support plate is connected to the air cushion platform, and the lower support plate is supported on the ground.

10. The thruster space experiment test vacuum system according to claim 9, characterized in that: The air cushion platform is provided with a plurality of horizontal guide rods, and the upper support plate is movably connected to the horizontal guide rods. The position of the upper support plate on the horizontal guide rods is adjusted to change the distance between the wire ring shock-absorbing support foot and the center of gravity of the air cushion platform.

Citation Information

Patent Citations

  • Xenon-pump-integrated plume protection device for electric propulsion tests

    CN107976316A

Cited By

  • Research on structural design method of oversized horizontal vacuum device

    CN119683027A

  • Space environment simulation device with movable heat sink

    CN119796540A