Z-axis motion platform and test dotting device

Abstract

The utility model discloses a Z-axis motion platform and a test dotting device, which are used for driving a carrier for placing a chip to lift, the Z-axis motion platform comprises a base, a bearing table, three screw rods and a driving piece, and the base is provided with a guide rail extending along the vertical direction of the base; the bearing table is arranged above the base, a sliding block is arranged on the bearing table, the bearing table is arranged on the guide rail in a sliding mode through the sliding block, and the bearing table is provided with a bearing face for supporting a carrier; the three lead screws are rotationally arranged on the bearing table and connected with the base, and the three lead screws are annularly arranged; the driving piece is arranged on the bearing table; the driving part is used for driving the three lead screws to rotate so that the bearing table can ascend and descend above the base. According to the Z-axis motion platform, the three lead screws are driven by the driving part to rotate, so that the bearing table ascends and descends above the base, the three lead screws can support multiple positions of the bearing table, the stress state of the bearing table is improved, stress of the bearing table is more uniform, and therefore position deviation of the bearing table is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing and dotting, in particular to a Z-axis motion platform and a testing and dotting device. Background Art

[0002] During semiconductor testing and marking, it is often necessary to drive the carrier on which the chip is placed to rise and fall so that the carrier can cooperate with the test piece and the marking piece to complete the chip testing and marking work. The existing Z-axis motion mechanism that drives the carrier to rise and fall uses a screw drive to drive the carrier to rise and fall above the base. However, due to the uneven force on the carrier, when it moves to the end of the screw far away from the base, the position of the carrier is very likely to deviate, resulting in inaccurate chip testing and marking positions.

[0003] Therefore, it is necessary to provide a new Z-axis motion platform and a test dot device to solve the above technical problems. Utility Model Content

[0004] The main purpose of the utility model is to provide a Z-axis motion platform and a test dot device, aiming to solve the problem of uneven force on the bearing platform in the prior art.

[0005] In order to achieve the above-mentioned purpose, the utility model proposes a Z-axis motion platform, which is used to drive the carrier for placing chips to rise and fall, and the Z-axis motion platform includes:

[0006] A base, wherein the base is provided with a guide rail extending in a vertical direction of the base;

[0007] A loading platform, the loading platform is arranged above the base, a slider is arranged on the loading platform, the loading platform is slidably arranged on the guide rail through the slider, and the loading platform has a loading surface for supporting the carrier;

[0008] Three screw rods, all of which are rotatably disposed on the bearing platform and connected to the base, and the three screw rods are arranged in a ring shape;

[0009] A driving member is arranged on the bearing platform; the driving member is used to drive the three screw rods to rotate so that the bearing platform can be lifted or lowered above the base.

[0010] In one embodiment, the output end of the driving member and the ends of the three screw rods away from the base are both provided with pulleys, the four pulleys are arranged in a ring shape, and the four pulleys are connected by a synchronous belt.

[0011] In one embodiment, the support platform is provided with a tensioning member, and at least one tensioning member is provided between any two adjacent pulleys, and the tensioning member is in contact with the synchronous belt.

[0012] In one embodiment, the tensioning member includes a base and a tensioning wheel, the base is disposed on the supporting platform, the tensioning wheel is rotatably disposed on the base, and the outer circumferential surface of the tensioning wheel is drivingly connected to the synchronous belt.

[0013] In one embodiment, the bearing platform is provided with three first mounting seats in an annular shape, and the screw rods are rotatably connected with the first mounting seats in a one-to-one correspondence;

[0014] The base is provided with a second mounting seat at a position corresponding to the first mounting seat, the second mounting seat is provided with a threaded hole, and one end of each screw rod away from the first mounting seat is threadedly connected to the corresponding threaded hole.

[0015] In one embodiment, the base is provided with a first limiting block, and the first limiting block can abut against the supporting platform.

[0016] In one embodiment, the base is formed with four columns, each of the columns is provided with the guide rail, the support platform is provided with sliders at positions corresponding to the four guide rails, and each slider is slidably connected to the corresponding guide rail.

[0017] In one embodiment, a second limit block is disposed at one end of each of the columns away from the base, and the second limit block can abut against the corresponding sliding block.

[0018] In one embodiment, the base and the supporting platform are both provided with weight-reducing grooves.

[0019] In addition, the utility model also provides a test dot device, including the Z-axis motion platform as described above.

[0020] In the technical solution of the utility model, the driving member can drive three screws to rotate so that the bearing platform can be lifted and lowered above the base, and then drive the carrier placed on the bearing platform to lift and lower. The three screws drive the bearing platform to lift and lower, and can support multiple positions of the bearing platform to improve the stress state of the bearing platform, make it more evenly stressed, and avoid the bearing platform from deviating from its position when it is at one end of the screw far away from the base; the bearing platform is slidably arranged on a guide rail extending along the vertical direction of the base through a slider, which can provide guidance for the lifting of the bearing platform to ensure the stability of the bearing platform when it is lifted and lowered above the base, and the cooperation between the slider and the guide rail can also limit the position of the bearing platform to a certain extent. The Z-axis motion platform drives three screws to rotate through the driving member so that the bearing platform can be lifted and lowered above the base, and the three screws can support multiple positions of the bearing platform to improve the stress state of the bearing platform, make it more evenly stressed, and avoid the bearing platform from deviating from its position. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0022] Figure 1 This is a schematic diagram of the overall structure of the Z-axis motion platform in the embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of the connection between the base and the screw rod in the embodiment of the utility model;

[0024] Figure 3 It is a schematic diagram of the connection between the carrier platform, the driving member, the pulley and the synchronous belt in the embodiment of the utility model;

[0025] Figure 4 for Figure 3 Schematic diagram from another perspective.

[0026] Description of Figure Numbers:

[0027] Label name Label name 100 Base 110 guide 120 Second Mount 130 The first limit block 140 Column 141 The second limit block 150 Height detection parts 200 Loading platform 210 slider 220 Bearing surface 230 Tensioner 231 Base 232 Tensioner 233 Outer circumference 240 First Mount 250 Weight reduction slot 300 Screw 310 Pulley 311 Timing belt 400 Drive parts

[0028] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0031] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0032] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0034] The utility model provides a Z-axis motion platform and a test dot device, aiming to solve the problem of large position deviation of the bearing platform in the prior art.

[0035] The embodiment of the utility model provides a Z-axis motion platform for driving the carrier for placing the chip to rise and fall, such as Figure 1 As shown, the Z-axis motion platform includes a base 100, a carrying platform 200, three screw rods 300 and a driving member 400. The base 100 is provided with a guide rail 110 extending in a vertical direction of the base 100; the carrying platform 200 is arranged above the base 100, and a slider 210 is arranged on the carrying platform 200. The carrying platform 200 is slidably arranged on the guide rail 110 through the slider 210, and the carrying platform 200 has a carrying surface 220 for supporting a carrier; the three screw rods 300 are all rotatably arranged on the carrying platform 200 and connected to the base 100, and the three screw rods 300 are arranged in a ring; the driving member 400 is arranged on the carrying platform 200; the driving member 400 is used to drive the three screw rods 300 to rotate so that the carrying platform 200 can be raised or lowered above the base 100.

[0036] The Z-axis motion platform is applied to the chip test dotting device, and is used to drive the lifting of the carrier on which the chip is placed. Specifically, the driving member 400 can drive the three screw rods 300 to rotate, so that the carrier 200 can be lifted and lowered above the base 100, and then drive the carrier placed on the carrier 200 to lift and lower. It drives the carrier 200 to lift and lower through the three screw rods 300, and can support multiple positions of the carrier 200 to improve the stress state of the carrier 200, so that the stress is more uniform, and avoid the position deviation of the carrier 200 when the screw rod 300 is at one end away from the base 100; the carrier 200 is slidably arranged on the guide rail 110 extending in the vertical direction of the base 100 through the slider 210, which can provide guidance for the lifting of the carrier 200 to ensure the stability of the carrier 200 when it is lifted and lowered above the base 100, and the cooperation between the slider 210 and the guide rail 110 can also limit the position of the carrier 200 to a certain extent. The Z-axis motion platform drives the three screws 300 to rotate through the driving member 400 so that the supporting platform 200 can be raised or lowered above the base 100. The three screws 300 can support multiple positions of the supporting platform 200 to improve the stress state of the supporting platform 200 and make the stress more uniform, thereby avoiding position deviation of the supporting platform 200.

[0037] It should be noted that the Z-axis motion platform can drive the lifting of a high-load carrier, and when driving the lifting of a high-load carrier, the Z-axis motion platform can avoid the deviation of the position of the carrier, thereby ensuring the accurate position of the chip during testing and marking. For example: the Z-axis motion platform can drive the lifting of a carrier for placing a 600mm*600mm square chip.

[0038] In one embodiment, if Figures 2 to 4 As shown, the output end of the driving member 400 and the ends of the three screw rods 300 away from the base 100 are both provided with pulleys 310 , and the four pulleys 310 are arranged in a ring shape and connected by a synchronous belt 311 . Specifically, its driving member 400 can drive the pulley 310 installed at its output end to rotate, and drive the pulley 310 installed at the end of the screw rod 300 away from the base 100 to rotate through the synchronous belt 311. It is transmitted through the cooperation of the pulley 310 and the synchronous belt 311, which can ensure that the rotation speed of the three screw rods 300 is consistent, so that the force on the support platform 200 is more uniform, thereby avoiding the deviation of the position of the support platform 200. At the same time, it can also ensure the stability of the support platform 200 when it is raised or lowered above the base 100; it should be noted that the pulley 310 installed at the output end of the driving member 400 is the driving wheel, and the pulley 310 installed at the end of the three screw rods 300 away from the base 100 is the driven wheel, and in this embodiment, the driving member 400 is a driving motor.

[0039] In a specific embodiment, Figure 3 As shown, the carrier 200 is provided with a tensioning member 230, and at least one tensioning member 230 is provided between any two adjacent pulleys 310, and the tensioning member 230 is fitted with the synchronous belt 311. Specifically, the tensioning member 230 can fit with the synchronous belt 311 to tighten the synchronous belt 311, thereby preventing the synchronous belt 311 from slipping.

[0040] In a more specific embodiment, Figure 3 As shown, the tensioning member 230 includes a base 231 and a tensioning wheel 232. The base 231 is disposed on the carrier 200. The tensioning wheel 232 is rotatably disposed on the base 231, and the outer circumferential surface 233 of the tensioning wheel 232 is transmission-connected with the synchronous belt 311. Specifically, the tensioning member 230 tensions the synchronous belt 311 through the tensioning wheel 232. When tensioning the synchronous belt 311, the tensioning wheel 232 can roll on the outer surface of the synchronous belt 311 and press the synchronous belt 311 to tension the synchronous belt 311. The tensioning of the synchronous belt 311 by rolling can reduce the wear of the synchronous belt 311 and extend the service life of the synchronous belt 311.

[0041] In one embodiment, if Figure 3 As shown, the bearing platform 200 is provided with three first mounting seats 240 in an annular manner, and the screw rods 300 are rotatably connected with the first mounting seats 240 in a one-to-one correspondence; the base 100 is provided with second mounting seats 120 at positions corresponding to the first mounting seats 240, and the second mounting seats 120 are provided with threaded holes, and one end of each screw rod 300 away from the first mounting seat 240 is threadedly connected to the corresponding threaded hole. Specifically, the driving member 400 can drive the pulley 310 installed on its output end to rotate, and then drive the pulley 310 installed on the screw rod 300 to rotate through the synchronous belt 311, and finally drive the screw rod 300 to rotate on the first mounting seat 240, and make the screw rod 300 rotate in the threaded hole of the second mounting seat 120, and through the cooperation between the external thread of the screw rod 300 and the internal thread of the threaded hole, the meshing position of the screw rod 300 and the second mounting seat 120 is changed, so as to realize the lifting and lowering of the bearing platform 200.

[0042] In one embodiment, if Figure 2 As shown, the base 100 is provided with a first limit block 130, and the first limit block 130 can abut against the carrying platform 200. Specifically, the first limit block 130 can limit the position of the carrying platform 200 to prevent the carrying platform 200 and the base 100 from being damaged due to collision. In this embodiment, the first limit block 130 is provided on the upper end surface of the base 100, and the first limit block 130 can abut against the bottom of the carrying platform 200.

[0043] In one embodiment, if Figure 2As shown, the base 100 is formed with four columns 140, each column 140 is provided with a guide rail 110, and the position of the carrying platform 200 corresponding to the four guide rails 110 is provided with a slider 210, and each slider 210 is slidably connected with the corresponding guide rail 110. Specifically, the four sliders 210 on the carrying platform 200 are guided by the four guide rails 110 respectively installed on the four columns 140, which can further ensure the stability of the carrying platform 200 when it is raised or lowered.

[0044] In a specific embodiment, Figure 2 As shown, each column 140 is provided with a second stopper 141 at one end away from the base 100, and the second stopper 141 can abut against the corresponding slider 210. Specifically, the second stopper 141 can abut against the corresponding slider 210, which can limit the position of the slider 210 when sliding along the guide rail 110, and prevent the slider 210 from slipping off the guide rail 110.

[0045] In one embodiment, if Figure 4 As shown, the base 100 and the carrier platform 200 are both provided with a weight-reducing groove 250. Specifically, the base 100 and the carrier platform 200 are both provided with a weight-reducing groove 250, which can reduce the weight of the base 100 and the carrier platform 200, reduce the assembly difficulty of the Z-axis motion platform, and also reduce the production cost of the Z-axis motion platform; in this embodiment, the base 100 is also provided with a height detection member 150, and the height detection member 150 can sound an alarm when the carrier platform 200 descends to a preset position to remind the staff.

[0046] In addition, an embodiment of the present invention further provides a test dot-marking device, comprising the above Z-axis motion platform.

[0047] The test dotting device is applied to the test dotting process of the chip. Since the test dotting device includes the Z-axis motion platform as described above, the test dotting device has all the beneficial effects of the above-mentioned Z-axis motion platform, which will not be described in detail here.

[0048] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A Z-axis motion platform, used to drive the lifting of a carrier for placing chips, characterized in that: The Z-axis motion platform includes: A base, wherein the base is provided with a guide rail extending in a vertical direction of the base; A loading platform, the loading platform is arranged above the base, a slider is arranged on the loading platform, the loading platform is slidably arranged on the guide rail through the slider, and the loading platform has a loading surface for supporting the carrier; Three screw rods, all of which are rotatably disposed on the bearing platform and connected to the base, and the three screw rods are arranged in a ring shape; A driving member is arranged on the bearing platform; the driving member is used to drive the three screw rods to rotate so that the bearing platform can be lifted or lowered above the base.

2. The Z-axis motion platform according to claim 1, characterized in that: The output end of the driving member and the ends of the three screw rods away from the base are both provided with pulleys, the four pulleys are arranged in an annular shape, and the four pulleys are connected by a synchronous belt.

3. The Z-axis motion platform as claimed in claim 2, characterized in that: The bearing platform is provided with a tensioning member, and at least one tensioning member is provided between any two adjacent pulleys, and the tensioning member is in contact with the synchronous belt.

4. The Z-axis motion platform as claimed in claim 3, characterized in that: The tensioning member comprises a base and a tensioning wheel, wherein the base is arranged on the bearing platform, the tensioning wheel is rotatably arranged on the base, and the outer circumferential surface of the tensioning wheel is drivingly connected to the synchronous belt.

5. The Z-axis motion platform according to claim 1, characterized in that: The bearing platform is provided with three first mounting seats in an annular shape, and the screw rods are rotatably connected with the first mounting seats in a one-to-one correspondence; The base is provided with a second mounting seat at a position corresponding to the first mounting seat, the second mounting seat is provided with a threaded hole, and one end of each screw rod away from the first mounting seat is threadedly connected to the corresponding threaded hole.

6. The Z-axis motion platform according to claim 1, characterized in that: The base is provided with a first limiting block, and the first limiting block can abut against the supporting platform.

7. The Z-axis motion platform according to any one of claims 1 to 6, characterized in that: The base is formed with four columns, each of which is provided with the guide rails, and the bearing platform is provided with sliders at positions corresponding to the four guide rails, and each slider is slidably connected to the corresponding guide rail.

8. The Z-axis motion platform according to claim 7, characterized in that: A second limit block is disposed at one end of each column away from the base, and the second limit block can abut against the corresponding sliding block.

9. The Z-axis motion platform according to any one of claims 1 to 6, characterized in that: The base and the bearing platform are both provided with weight-reducing grooves.

10. A test dotting device, characterized in that: It comprises a Z-axis motion platform as described in any one of claims 1 to 9.

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