Silicon carbide flat grinding and barreling all-in-one machine

Abstract

The invention relates to the technical field of workpiece machining, in particular to a silicon carbide flat grinding and barreling all-in-one machine which comprises a lathe bed, a stand column on the lathe bed, a main shaft mechanism on the lathe bed for fixing a workpiece, a direction finder on the stand column for detecting the crystal orientation and an adjusting mechanism on the lathe bed for driving the main shaft mechanism to move. A feeding mechanism slides on the other side wall face of the stand column. A first sliding plate is slidably arranged on the side wall face, away from the orientation device, of the feeding mechanism, and a second sliding mechanism used for driving the first sliding plate to ascend and descend is arranged on the feeding mechanism. A barreling mechanism is fixedly arranged at one end of the first sliding plate, a flat grinding mechanism and a grooving mechanism are fixedly arranged on the portion, corresponding to one side of the barreling mechanism, of the first sliding plate, the grooving mechanism is arranged below the flat grinding mechanism, and grinding wheels of the barreling mechanism, the flat grinding mechanism and the grooving mechanism all face the main shaft mechanism. The device has the advantages that the occupied area is reduced, the maintenance cost is reduced, and the machining precision and the production efficiency are improved.

Description

Technical Field

[0001] The invention relates to a flat grinding all-in-one machine, in particular to a silicon carbide flat grinding and rolling grinding all-in-one machine. Background Art

[0002] At present, silicon carbide, as the third-generation semiconductor material, is widely used in various fields due to its high hardness, chemical stability and certain toughness, and has a large market demand.

[0003] Most of the existing silicon carbide workpieces need to be processed using separate equipment during rolling, flat grinding, surface grooving and crystal orientation detection, so multiple devices are needed, which results in a large space occupation, and the multiple devices increase the difficulty of manual operation and maintenance costs; in addition, each step of the processing of the silicon carbide workpiece requires clamping and positioning, and each clamping of different equipment has a certain cumulative error, and the number of manual interventions is large, which affects the processing accuracy and efficiency. Summary of the invention

[0004] In order to solve the problems in the related technology, the present application provides a silicon carbide flat grinding and rolling grinding all-in-one machine, which solves the problem that multiple devices cannot be integrated into one, and multiple clampings accumulate multiple errors, thereby affecting the processing accuracy.

[0005] The technical solution is as follows:

[0006] A silicon carbide flat grinding and rolling grinding machine comprises a bed, wherein a column is arranged on the bed, a spindle mechanism for fixing a workpiece is arranged on the bed on one side of the column, an orientation instrument for detecting a crystal orientation is arranged on the side wall surface of the column, an adjustment mechanism for driving the spindle mechanism to move to the orientation instrument is arranged on the bed, and the spindle mechanism moves along the width direction of the bed;

[0007] A feeding mechanism is slidably arranged on the other side wall surface of the column, and a first sliding mechanism for driving the feeding mechanism to move along the length direction of the bed is arranged on the column;

[0008] A first slide plate is slidably arranged on the side wall surface of the feeding mechanism away from the orientator, and a second sliding mechanism for driving the first slide plate to rise and fall is arranged on the feeding mechanism;

[0009] A rolling mechanism is fixedly provided at one end of the first slide plate, a flat grinding mechanism and a groove carving mechanism are fixedly provided on the first slide plate corresponding to one side of the rolling mechanism, the groove carving mechanism is arranged below the flat grinding mechanism, and the grinding wheels of the rolling mechanism, the flat grinding mechanism and the groove carving mechanism are all facing the spindle mechanism.

[0010] Through the above technical scheme, the rolling mechanism, flat grinding mechanism, grooving mechanism and orienting instrument are all integrated on the feeding mechanism, which makes the device integrate multiple processing equipment, and then the workpiece can be rolled, flat ground, grooved and crystal direction detected through the device, thereby reducing the floor space and speeding up the workpiece processing efficiency, and the integrated device has a simple structure and low assembly difficulty, thereby reducing the difficulty of subsequent maintenance; in addition, through the setting of the spindle mechanism, the workpiece only needs to be clamped once before processing the workpiece to perform rolling, flat grinding, grooving and crystal direction detection on the workpiece, thereby avoiding errors caused by multiple clamping of the workpiece, thereby improving processing accuracy and production efficiency.

[0011] Furthermore, a first guide rail is symmetrically arranged along the width direction of the bed, an adjustment plate is slidably arranged on the first guide rail, first sliders are fixedly arranged at both ends of the bottom of the adjustment plate, and a first slide groove adapted to the first guide rail is arranged at the bottom end of each first slider; the adjustment mechanism includes a first servo motor, the first servo motor is fixedly arranged on the bed corresponding to the two first guide rails, the output shaft of the first servo motor is fixedly connected to a first screw rod, the first screw rod is arranged along the length direction of the first guide rail, a first connecting piece is threadedly connected to the first screw rod, and the first connecting piece is fixedly connected to the adjustment plate.

[0012] Furthermore, the spindle mechanism includes a fixed sleeve, a second servo motor and a tooling for fixing a workpiece, the fixed sleeve is vertically arranged, and a connecting ring plate fixedly matched with the adjustment plate is arranged on the outer periphery of the fixed sleeve, the fixed sleeve below the connecting ring plate passes through the adjustment plate and is arranged between the two first guide rails, a shaft sleeve is concentrically fixedly arranged in the fixed sleeve, and a spindle that is interference-fitted with the inner ring of the shaft sleeve is arranged in the shaft sleeve, the bottom end of the spindle is connected to the output shaft of the second servo motor through a coupling, and a three-jaw chuck for tooling is fixedly arranged on the top end of the spindle.

[0013] Furthermore, a second guide rail is fixedly provided on the top of the column, and the length direction of the second guide rail is consistent with the length direction of the bed, and a third guide rail is fixedly provided on the bottom end of the column, and the length direction of the third guide rail is consistent with the length direction of the second guide rail, and the third guide rail is arranged on the side wall surface of the column away from the orientator; the feeding mechanism includes a second slide plate, and the second slide plate is arranged in an "L" shape, and the second slide plate includes a horizontal section and a vertical section, and a second slider is fixedly provided on the bottom end surface of the horizontal section, and a second slide groove adapted to the second guide rail is provided at the bottom end of the second slider; a third slider is fixedly provided on a side of the vertical section close to the column, and a third slide groove adapted to the third guide rail is provided at one end of the third slider close to the column.

[0014] A strip groove is provided at one end of the column close to the second slide, the strip groove is provided along the length direction of the second guide rail, and the strip groove is provided between the second guide rail and the third guide rail; the first sliding mechanism includes a third servo motor, the output shaft of the third servo motor is fixedly connected to a horizontal screw rod, the horizontal screw rod is provided along the length direction of the strip groove, a second connecting piece is threadedly connected to the horizontal screw rod, and the second connecting piece is fixedly connected to the second slide;

[0015] Two fourth guide rails with the same structure are symmetrically arranged along the height direction of the second slide plate, and fourth sliders are fixedly arranged at both ends of the first slide plate close to the side wall surface of the second slide plate, and each fourth slider is provided with a fourth slide groove adapted to the fourth guide rail;

[0016] The second sliding mechanism includes a fourth servo motor, which is fixedly arranged on the second slide plate between the two fourth guide rails. The output shaft of the fourth servo motor is fixedly connected with a vertical screw rod, which is arranged along the length direction of the fourth guide rail. A third connecting piece is threadedly connected to the vertical screw rod, and the third connecting piece is fixedly connected to the first slide plate.

[0017] Through the above technical solution, through the arrangement of the second guide rail and the third guide rail, since the rolling grinding mechanism, the flat grinding mechanism and the grooving mechanism are all installed on the first slide of the feeding mechanism, the center of gravity of the first slide is tilted forward, and by making the fourth guide rail on the second slide and the second guide rail and the third guide rail on the column be arranged perpendicular to each other, this is more conducive to the force of the first slide, thereby improving the stability of the feeding mechanism.

[0018] Further, the rolling mechanism includes a first mounting seat, a first electric spindle and a rolling grinding wheel, the first mounting seat is fixedly mounted on the first slide plate, the first mounting seat is used to fix the first electric spindle, and the first electric spindle is arranged longitudinally, the rolling grinding wheel is concentrically connected to the first electric spindle, and the rolling grinding wheel is fixedly arranged at the bottom end of the first electric spindle;

[0019] The flat grinding mechanism comprises a second mounting seat, a second electric spindle and a grinding wheel, wherein the second mounting seat is fixedly mounted on the first slide plate at one side of the first mounting seat, the second mounting seat is used to fix the second electric spindle, and the two electric spindles are arranged horizontally, the grinding wheel is concentrically connected to the second electric spindle, and the grinding wheel is fixedly arranged at the left end of the second electric spindle;

[0020] The groove engraving mechanism includes a third mounting seat, a third electric spindle and a groove engraving grinding wheel. The third mounting seat is fixedly mounted on the first slide corresponding to the lower side of the second mounting seat. The third mounting seat is used to fix the third electric spindle, and the three electric spindles are arranged horizontally. The groove engraving grinding wheel is concentrically connected to the third electric spindle, and the grinding wheel is fixedly arranged at the left end of the third electric spindle.

[0021] Furthermore, first telescopic accordion covers are provided on the columns corresponding to the left and right sides of the second slide, and one end of each of the first telescopic accordion covers that are away from each other is fixedly matched with the column, and one end of each of the first telescopic accordion covers that are close to each other is slidably and telescopically matched with the column; second telescopic accordion covers are provided on the second slides corresponding to the upper and lower sides of the first slide, and one end of each of the second telescopic accordion covers that are away from each other is fixedly matched with the second slide, and one end of each of the second telescopic accordion covers that are close to each other is slidably and telescopically matched with the second slide.

[0022] Through the above technical scheme, by setting the first telescopic accordion cover and the second telescopic accordion cover, the moving components such as the vertical screw, horizontal screw, second guide rail, third guide rail and fourth guide rail in the feeding mechanism can be effectively sealed and protected to prevent the normal use of the device from being affected by the entry of dust or impurities, thereby reducing the difficulty and cost of maintenance.

[0023] In summary, the beneficial effects of a silicon carbide flat grinding and rolling grinding machine are:

[0024] 1. The rolling mechanism, flat grinding mechanism, groove carving mechanism and orientation instrument are all integrated into the feeding mechanism, so that the device integrates multiple processing equipment, and then the workpiece can be rolled, flat ground, grooved and crystal direction detected by the device, thereby reducing the floor space and speeding up the workpiece processing efficiency. The integrated device has a simple structure and low assembly difficulty, thereby reducing the difficulty of subsequent maintenance. In addition, through the setting of the spindle mechanism, the workpiece only needs to be clamped once before processing the workpiece to roll, flat grind, groove and crystal direction detect the workpiece, thereby avoiding errors caused by clamping the workpiece multiple times, thereby improving processing accuracy and production efficiency.

[0025] 2. By setting the second guide rail and the third guide rail, since the rolling grinding mechanism, the flat grinding mechanism and the groove carving mechanism are all installed on the first slide plate of the feeding mechanism, the center of gravity of the first slide plate is tilted forward, and by setting the fourth guide rail on the second slide plate and the second guide rail and the third guide rail on the column to be perpendicular to each other, it is more conducive to the force of the first slide plate, thereby improving the stability of the feeding mechanism;

[0026] 3. By setting the first telescopic accordion cover and the second telescopic accordion cover, the vertical screw, horizontal screw, second guide rail, third guide rail and fourth guide rail in the feeding mechanism can be effectively sealed and protected to prevent the normal use of the device from being affected by the entry of dust or impurities, thereby reducing the difficulty and cost of maintenance.

[0027] It is to be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0029] Figure 1 It is a structural schematic diagram of a silicon carbide flat grinding and rolling grinding machine;

[0030] Figure 2 It is a structural schematic diagram of a first sliding mechanism in a silicon carbide flat grinding and rolling grinding machine;

[0031] Figure 3 It is a structural schematic diagram of an adjustment plate in a silicon carbide flat grinding and rolling grinding machine;

[0032] Figure 4 It is a cross-sectional view of a spindle mechanism in a silicon carbide flat grinding and rolling grinding machine;

[0033] Figure 5 It is a schematic diagram of the structure of the second slide plate in a silicon carbide flat grinding and rolling grinding machine;

[0034] Figure 6 It is a schematic diagram of the structure of the second guide rail in a silicon carbide flat grinding and rolling grinding machine;

[0035] Figure 7 It is a schematic diagram of the structure of the first slide plate in a silicon carbide flat grinding and rolling grinding machine;

[0036] In the figure, 1, bed; 2, column; 3, spindle mechanism; 301, fixed sleeve; 302, second servo motor; 303, tooling; 4, adjustment mechanism; 5, feeding mechanism; 6, first sliding mechanism; 7, first slide plate; 8, second sliding mechanism; 9, rolling mechanism; 10, flat grinding mechanism; 11, notching mechanism; 12, first guide rail; 13, adjustment plate; 14, first slide block; 15, first screw rod; 16, first connecting piece ; 17. Connecting ring plate; 18. Bushing; 19. Main shaft; 20. Coupling; 21. Three-jaw chuck; 22. Second guide rail; 23. Third guide rail; 24. Second slider; 25. Third slider; 26. Strip groove; 27. Horizontal screw rod; 28. Second connecting piece; 29. ​​Fourth guide rail; 30. Fourth slider; 31. Vertical screw rod; 32. Third connecting piece; 33. First telescopic accordion cover; 34. Second telescopic accordion cover. DETAILED DESCRIPTION

[0037] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Instead, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0038] In a possible embodiment, as shown in the attached Figure 1-7 As shown, a silicon carbide flat grinding and rolling grinding machine includes a bed 1. In this specific embodiment, the bed 1 is cast using HT250 gray cast iron. After casting, aging treatment is performed to remove stress before processing to prevent deformation.

[0039] A column 2 is arranged on the bed 1. The column 2 is cast with HT250 gray cast iron. After the casting is completed, the column 2 is subjected to aging treatment to remove stress and then processed. The casting has a good shock-absorbing effect.

[0040] A spindle mechanism 3 for fixing the workpiece is provided on the bed 1 on one side of the column 2, and an orientation instrument for detecting the crystal direction is provided on the side wall of the column 2. A basic characteristic of a crystal is that it has directionality, and the crystal properties are different along different directions of the lattice. The lattice points of the Bravais lattice can be seen as arranged in a series of mutually parallel straight lines, which are called crystal columns. The same lattice point can form crystal columns with different directions, and each crystal column defines a direction, which is called a crystal direction.

[0041] The bed 1 is provided with an adjustment mechanism 4 for driving the spindle mechanism 3 to move to the orientation instrument, and the spindle mechanism 3 moves along the width direction of the bed 1. The specific structure of the orientation instrument belongs to the prior art and will not be described in detail here. A model capable of detecting the crystal orientation of the workpiece can be selected and will not be described in detail here.

[0042] A feeding mechanism 5 is slidably arranged on the other side wall of the column 2, and a first sliding mechanism 6 for driving the feeding mechanism 5 to move along the length direction of the bed 1 is arranged on the column 2;

[0043] A first slide plate 7 is slidably arranged on the side wall surface of the feeding mechanism 5 away from the orientator, and a second sliding mechanism 8 for driving the first slide plate 7 to rise and fall is arranged on the feeding mechanism 5;

[0044] A rolling grinding mechanism 9 is fixedly provided at one end of the first slide plate 7, and a flat grinding mechanism 10 and a groove carving mechanism 11 are fixedly provided on the first slide plate 7 corresponding to one side of the rolling grinding mechanism 9. The groove carving mechanism 11 is arranged below the flat grinding mechanism 10, and the grinding wheels of the rolling grinding mechanism 9, the flat grinding mechanism 10 and the groove carving mechanism 11 are all facing the spindle mechanism 3.

[0045] The present device integrates four processing equipments, namely, a rolling grinding mechanism 9, a flat grinding mechanism 10, a grooving mechanism 11 and an orienting instrument, and can perform rolling grinding, flat grinding, grooving and crystal orientation detection operations on the workpiece through the present device, thereby reducing the floor space occupied and accelerating the workpiece processing efficiency. The integrated device has a simple structure and low assembly difficulty, thereby reducing the difficulty of subsequent maintenance. In addition, through the setting of the spindle mechanism 3, the workpiece only needs to be clamped once before processing the workpiece to perform rolling grinding, flat grinding, grooving and crystal orientation detection on the workpiece, thereby avoiding errors caused by multiple clamping of the workpiece, thereby improving processing accuracy and production efficiency.

[0046] A first guide rail 12 is symmetrically arranged along the width direction of the bed 1, an adjustment plate 13 is slidably arranged on the first guide rail 12, and first sliders 14 are fixedly arranged at both ends of the bottom of the adjustment plate 13, and a first slide groove adapted to the first guide rail 12 is arranged at the bottom end of each first slider 14;

[0047] The adjustment mechanism 4 includes a first servo motor, which is fixedly arranged on the bed 1 corresponding to the two first guide rails 12. The output shaft of the first servo motor is fixedly connected to a first screw rod 15, which is arranged along the length direction of the first guide rail 12. A first connecting member 16 is threadedly connected to the first screw rod 15, and the first connecting member 16 and the adjustment plate 13 are fixedly connected.

[0048] The spindle mechanism 3 includes a fixed sleeve 301, a second servo motor 302 and a tool 303 for fixing a workpiece. The fixed sleeve 301 is arranged vertically, and the outer periphery of the fixed sleeve 301 is provided with a connecting ring plate 17 that is fixedly matched with the adjustment plate 13. The fixed sleeve 301 below the connecting ring plate 17 passes through the adjustment plate 13 and is arranged between the two first guide rails 12. A shaft sleeve 18 is concentrically fixedly arranged in the fixed sleeve 301, and a spindle 19 that is interference-matched with the inner ring of the shaft sleeve 18 is arranged in the shaft sleeve 18. The bottom end of the spindle 19 is connected to the output shaft of the second servo motor 302 through a coupling 20, and the top end of the spindle 19 is fixedly arranged There is a three-jaw chuck 21 for the tooling 303. The technical solution of fixing the tooling 303 with the three-jaw chuck 21 is a commonly used technical means in this field. The specific structure and installation method of the three-jaw chuck 21 are common knowledge and will not be described in detail here. The specific structure of the tooling 303 for fixing the silicon carbide workpiece is common knowledge and will not be described in detail here. In this specific embodiment, after the silicon carbide workpiece is placed on the workpiece placement surface on the tooling 303, the inclination angle of the workpiece placement surface on the tooling 303 can be adjusted by adjusting the long screw and nut on the tooling 303, so that it is more conducive to the subsequent processing of the silicon carbide workpiece.

[0049] A second guide rail 22 is fixedly provided on the top of the column 2, and the length direction of the second guide rail 22 is consistent with the length direction of the bed 1. A third guide rail 23 is fixedly provided on the bottom end of the column 2, and the length direction of the third guide rail 23 is consistent with the length direction of the second guide rail 22, and the third guide rail 23 is arranged on the side wall surface of the column 2 away from the orientator;

[0050] The feeding mechanism 5 includes a second slide plate, which is arranged in an "L" shape. The second slide plate includes a horizontal section and a vertical section. A second slider 24 is fixedly arranged on the bottom end surface of the horizontal section, and a second slide groove adapted to the second guide rail 22 is arranged at the bottom end of the second slider 24; a third slider 25 is fixedly arranged on one side of the vertical section close to the column 2, and a third slide groove adapted to the third guide rail 23 is arranged at one end of the third slider 25 close to the column 2;

[0051] A strip groove 26 is provided at one end of the column 2 close to the second slide, the strip groove 26 is provided along the length direction of the second guide rail 22, and the strip groove 26 is provided between the second guide rail 22 and the third guide rail 23; the first sliding mechanism 6 includes a third servo motor, and the output shaft of the third servo motor is fixedly connected with a horizontal screw rod 27, the horizontal screw rod 27 is provided along the length direction of the strip groove 26, and a second connecting member 28 is threadedly connected to the horizontal screw rod 27, and the second connecting member 28 is fixedly connected to the second slide.

[0052] Two fourth guide rails 29 with the same structure are symmetrically arranged along the height direction of the second slide plate, and fourth sliders 30 are fixedly arranged at both ends of the first slide plate 7 close to the side wall surface of the second slide plate, and each fourth slider 30 is provided with a fourth slide groove adapted to the fourth guide rail 29;

[0053] The second sliding mechanism 8 includes a fourth servo motor, which is fixedly arranged on the second slide plate between the two fourth guide rails 29. The output shaft of the fourth servo motor is fixedly connected with a vertical screw rod 31, and the vertical screw rod 31 is arranged along the length direction of the fourth guide rail 29. A third connecting member 32 is threadedly connected to the vertical screw rod 31, and the third connecting member 32 is fixedly connected to the first slide plate 7.

[0054] The rolling mechanism 9 includes a first mounting seat, a first electric spindle and a rolling grinding wheel. The first mounting seat is fixedly mounted on the first slide plate 7. The first mounting seat is used to fix the first electric spindle, and the first electric spindle is arranged longitudinally. The rolling grinding wheel is concentrically connected to the first electric spindle, and the rolling grinding wheel is fixedly arranged at the bottom end of the first electric spindle.

[0055] The flat grinding mechanism 10 comprises a second mounting seat, a second electric spindle and a grinding wheel. The second mounting seat is fixedly mounted on a first slide plate 7 on one side of the first mounting seat. The second mounting seat is used to fix the second electric spindle, and the two electric spindles are arranged horizontally. The grinding wheel is concentrically connected to the second electric spindle, and the grinding wheel is fixedly arranged at the left end of the second electric spindle.

[0056] The groove carving mechanism 11 includes a third mounting seat, a third electric spindle and a groove carving grinding wheel. The third mounting seat is fixedly mounted on the first slide plate 7 corresponding to the lower side of the second mounting seat. The third mounting seat is used to fix the third electric spindle, and the three electric spindles are arranged horizontally. The groove carving grinding wheel is concentrically connected to the third electric spindle, and the grinding wheel is fixedly arranged at the left end of the third electric spindle.

[0057] The first electric spindle, the second electric spindle and the third electric spindle have the same structure, and because the first electric spindle, the second electric spindle and the third electric spindle have high speed, high power, small space and intuitive structure, they are more conducive to the installation and positioning of the first electric spindle, the second electric spindle and the third electric spindle, and also make the subsequent maintenance easier;

[0058] First telescopic accordion covers 33 are provided on the columns 2 corresponding to the left and right sides of the second slide plate, and the ends of each first telescopic accordion cover 33 that are far away from each other are fixedly matched with the column 2, and the ends of each first telescopic accordion cover 33 that are close to each other are slidably and telescopically matched with the column 2; second telescopic accordion covers 34 are provided on the second slide plates corresponding to the upper and lower sides of the first slide plate 7, and the ends of each second telescopic accordion cover 34 that are far away from each other are fixedly matched with the second slide plate, and the ends of each second telescopic accordion cover 34 that are close to each other are slidably and telescopically matched with the column 2. Both slide plates are slidably and telescopically matched; the first telescopic accordion cover 33 and the second telescopic accordion cover 34 can effectively provide a closed and protective function for the moving components such as the vertical screw rod 31, the horizontal screw rod 27, the second guide rail 22, the third guide rail 23 and the fourth guide rail 29 in the feeding mechanism 5, thereby preventing the normal use of the feeding mechanism 5 from being affected by the entry of dust or impurities, thereby reducing the maintenance difficulty and cost; the specific structure and installation method of the first telescopic accordion cover 33 and the second telescopic accordion cover 34 are common knowledge and will not be elaborated on here.

[0059] Operation principle: The silicon carbide workpiece to be processed is mounted on the fixture 303 of the spindle mechanism 3, and the first servo motor is controlled to adjust the position of the silicon carbide workpiece on the adjustment plate 13 according to the subsequent processing requirements. After the adjustment is completed, the height position of the first slide plate 7 and the horizontal position of the second slide plate are adjusted according to the processing operation each time, so that the corresponding processing mechanism can process the silicon carbide workpiece. By controlling the third motor and the fourth motor, the flat grinding wheel is moved to the position on the silicon carbide workpiece that needs to be processed, and the surfaces of both ends of the crystal are processed. After the flat grinding is completed, when the roller grinding mechanism is used, the flat grinding wheel is moved to the position that needs to be processed on the silicon carbide workpiece. When the silicon carbide workpiece is circularly ground, the third motor and the fourth motor are controlled again to move the grinding wheel to the position on the silicon carbide workpiece that needs to be processed. After the grinding is completed, the spindle mechanism 3 and the silicon carbide on the spindle mechanism 3 are moved to the orientation instrument for crystal orientation detection by controlling the first motor. After the detection is completed, the positions of the silicon carbide workpiece and the grooved grinding wheel are adjusted by controlling the first motor, the third motor and the fourth motor respectively, so that the grooved grinding wheel is moved to the position on the silicon carbide workpiece that needs to be processed, and then the Notch groove and the OF surface are processed on the silicon carbide workpiece.

[0060] Those skilled in the art will readily appreciate other embodiments of the present invention after considering the specification and practicing the invention invented herein. This application is intended to cover any variations, uses or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art that are not invented by the present invention. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present invention are indicated by the appended claims.

[0061] It should be understood that the present invention is not limited to the exact construction that has been described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A silicon carbide flat grinding and rolling grinding machine, comprising a bed, characterized in that: The bed is provided with a column, the bed on one side of the column is provided with a spindle mechanism for fixing the workpiece, the side wall surface of the column is provided with an orientation instrument for detecting the crystal orientation, the bed is provided with an adjustment mechanism for driving the spindle mechanism to move to the orientation instrument, and the spindle mechanism moves along the width direction of the bed; A feeding mechanism is slidably arranged on the other side wall surface of the column, and a first sliding mechanism for driving the feeding mechanism to move along the length direction of the bed is arranged on the column; A first slide plate is slidably arranged on the side wall surface of the feeding mechanism away from the orientator, and a second sliding mechanism for driving the first slide plate to rise and fall is arranged on the feeding mechanism; A rolling mechanism is fixedly provided at one end of the first slide plate, a flat grinding mechanism and a groove carving mechanism are fixedly provided on the first slide plate corresponding to one side of the rolling mechanism, the groove carving mechanism is arranged below the flat grinding mechanism, and the grinding wheels of the rolling mechanism, the flat grinding mechanism and the groove carving mechanism are all facing the spindle mechanism.

2. The silicon carbide flat grinding and rolling grinding machine according to claim 1, characterized in that: A first guide rail is symmetrically arranged along the width direction of the bed, an adjustment plate is slidably arranged on the first guide rail, first sliders are fixedly arranged at both ends of the bottom of the adjustment plate, and a first slide groove adapted to the first guide rail is arranged at the bottom end of each first slider; The adjustment mechanism includes a first servo motor, which is fixedly arranged on the bed corresponding to the two first guide rails. The output shaft of the first servo motor is fixedly connected to a first screw rod, which is arranged along the length direction of the first guide rail. A first connecting piece is threadedly connected to the first screw rod, and the first connecting piece is fixedly connected to the adjustment plate.

3. The silicon carbide flat grinding and rolling grinding machine according to claim 2, characterized in that: The spindle mechanism includes a fixed sleeve, a second servo motor and a tool for fixing a workpiece, the fixed sleeve is arranged vertically, and a connecting ring plate fixedly matched with the adjustment plate is arranged on the outer periphery of the fixed sleeve, the fixed sleeve below the connecting ring plate passes through the adjustment plate and is arranged between the two first guide rails, a shaft sleeve is concentrically fixedly arranged in the fixed sleeve, and a spindle that is interference-matched with the inner ring of the shaft sleeve is arranged in the shaft sleeve, the bottom end of the spindle is connected to the output shaft of the second servo motor through a coupling, and a three-jaw chuck for tooling is fixedly arranged on the top end of the spindle.

4. The silicon carbide flat grinding and rolling grinding machine according to claim 1, characterized in that: A second guide rail is fixedly arranged on the top of the column, and the length direction of the second guide rail is consistent with the length direction of the bed. A third guide rail is fixedly arranged on the bottom end of the column, and the length direction of the third guide rail is consistent with the length direction of the second guide rail. The third guide rail is arranged on the side wall surface of the column away from the orientator; The feeding mechanism includes a second slide plate, which is arranged in an "L" shape. The second slide plate includes a horizontal section and a vertical section. A second slider is fixedly arranged on the bottom end surface of the horizontal section, and a second slide groove adapted to the second guide rail is arranged at the bottom end of the second slider; a third slider is fixedly arranged on one side of the vertical section close to the column, and a third slide groove adapted to the third guide rail is arranged at one end of the third slider close to the column.

5. The silicon carbide flat grinding and rolling grinding machine according to claim 4, characterized in that: A strip groove is provided at one end of the column close to the second slide, the strip groove is provided along the length direction of the second guide rail, and the strip groove is provided between the second guide rail and the third guide rail; the first sliding mechanism includes a third servo motor, and the output shaft of the third servo motor is fixedly connected with a horizontal screw rod, the horizontal screw rod is provided along the length direction of the strip groove, a second connecting piece is threadedly connected to the horizontal screw rod, and the second connecting piece and the second slide board are fixedly connected.

6. The silicon carbide flat grinding and rolling grinding machine according to claim 5, characterized in that: Two fourth guide rails with the same structure are symmetrically arranged along the height direction of the second slide plate, and fourth sliders are fixedly arranged at both ends of the first slide plate close to the side wall surface of the second slide plate, and each fourth slider is provided with a fourth slide groove adapted to the fourth guide rail; The second sliding mechanism includes a fourth servo motor, which is fixedly arranged on the second slide plate between the two fourth guide rails. The output shaft of the fourth servo motor is fixedly connected with a vertical screw rod, which is arranged along the length direction of the fourth guide rail. A third connecting piece is threadedly connected to the vertical screw rod, and the third connecting piece is fixedly connected to the first slide plate.

7. The silicon carbide flat grinding and rolling grinding machine according to claim 1, characterized in that: The rolling mechanism comprises a first mounting seat, a first electric spindle and a rolling grinding wheel, wherein the first mounting seat is fixedly mounted on the first slide plate, the first mounting seat is used to fix the first electric spindle, and the first electric spindle is arranged longitudinally, the rolling grinding wheel is concentrically connected to the first electric spindle, and the rolling grinding wheel is fixedly arranged at the bottom end of the first electric spindle; The flat grinding mechanism comprises a second mounting seat, a second electric spindle and a grinding wheel, wherein the second mounting seat is fixedly mounted on the first slide plate at one side of the first mounting seat, the second mounting seat is used to fix the second electric spindle, and the two electric spindles are arranged horizontally, the grinding wheel is concentrically connected to the second electric spindle, and the grinding wheel is fixedly arranged at the left end of the second electric spindle; The groove engraving mechanism includes a third mounting seat, a third electric spindle and a groove engraving grinding wheel. The third mounting seat is fixedly mounted on the first slide corresponding to the lower side of the second mounting seat. The third mounting seat is used to fix the third electric spindle, and the three electric spindles are arranged horizontally. The groove engraving grinding wheel is concentrically connected to the third electric spindle, and the grinding wheel is fixedly arranged at the left end of the third electric spindle.

8. The silicon carbide flat grinding and rolling grinding machine according to claim 6, characterized in that: First telescopic accordion covers are provided on the columns corresponding to the left and right sides of the second slide board, and one end of each of the first telescopic accordion covers that are away from each other is fixedly matched with the column, and one end of each of the first telescopic accordion covers that are close to each other is slidably and telescopically matched with the column; second telescopic accordion covers are provided on the second slide boards corresponding to the upper and lower sides of the first slide board, and one end of each of the second telescopic accordion covers that are away from each other is fixedly matched with the second slide board, and one end of each of the second telescopic accordion covers that are close to each other is slidably and telescopically matched with the second slide board.

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