SMIF wafer cartridge automatic uncovering scanning module

Abstract

The utility model discloses an automatic uncovering and scanning module for an SMIF wafer cartridge. Comprising an electric control component mounting box, a code scanning layer number sensor, an outer cover guide column, an intelligent label reader, a mounting plate, a material box cover opening detector, a cover limiting block, a baffle, a fixing plate, a sliding rail, a lead screw, a servo motor, a synchronous belt, a bottom plate, an outer cover, an observation window, a top plate, a side cover, a top cover, a connecting block, a supporting block, a placing plate, a supporting column, an inner cover, a placing table and a sliding base. An electric control component mounting box is fixedly connected to the bottom end of one side of the fixing plate, and a placement table is fixedly connected to the position, located at the top end of the electric control component mounting box, of one side of the fixing plate; according to the device, the servo motor works to drive the lead screw to rotate, and then the mounting plate is driven to move, so that the outer cover is driven to ascend and descend automatically, workers do not need to operate the outer cover, the previous operation mode is changed, the scanning efficiency is improved, and meanwhile the labor intensity of the workers is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer production, in particular to an automatic cover opening and scanning module of a SMIF wafer cassette. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its original material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. During production and use, the wafer needs to be scanned to ensure the quality of the product. However, the current scanning work requires manual opening of the lid, and then placing the wafer on the inspection table, and then manually closing the lid and using the scanning mechanism to complete the scanning work. Scanning in this way greatly reduces work efficiency and increases the labor intensity of the staff. Utility Model Content

[0003] 1. Technical issues to be resolved

[0004] The utility model aims to provide a SMIF wafer cassette automatic cover opening scanning module, which is used to solve the defects of low scanning efficiency of the existing scanning module and increased labor intensity of the staff. (II) Utility Model Content

[0006] In order to solve the above technical problems, the utility model provides the following technical solutions: a SMIF wafer cassette automatic cover opening scanning module, including an electronic control component installation box, a code scanning layer number sensor, an outer cover guide column, an intelligent label reader, a mounting plate, a material box cover opening detector, a cover limit block, a baffle, a fixed plate, a slide rail, a screw rod, a servo motor, a synchronous belt, a bottom plate, a first limit block, a second limit block, an outer cover, an observation window, a top plate, a side cover, a top cover, a connecting block, a supporting block, a placement plate, a supporting column, an inner cover, a placement table and a slide seat, wherein the bottom end of one side of the fixed plate is fixedly connected to the electronic control component installation box, and the fixed plate A placing table is fixedly connected to the top of the electronic control component installation box on one side, the bottom ends of the supporting columns are fixedly connected to the four corners of the top of the placing table, the top of the supporting columns is fixedly connected to a placing plate, the top edge of the placing table is fixedly connected to an inner cover, one side of the fixed plate is fixedly connected to a top plate, the top plate is fixedly connected to the two ends of the side cover, a servo motor is fixedly connected to one side of the inner part of the side cover, the output end of the servo motor and the bottom end of the lead screw are connected by a pulley and a synchronous belt, the lead screw is rotatably connected to the top plate by a bearing, and the lead screw is located inside the side cover, a ball nut is connected to the lead screw, and the ball nut is fixedly connected to the slide seat.

[0007] Preferably, a slide rail is slidably connected to the slide seat, the slide rail is fixedly connected to the side cover, a connecting block is fixedly connected to the slide seat, and a sliding hole is provided at the connection between the side cover and the connecting block.

[0008] Preferably, a supporting block is fixedly connected to the connecting block, and the top ends of the connecting block and the supporting block are fixedly connected to the bottom end of the mounting plate.

[0009] Preferably, a first limiting block and a second limiting block are fixedly connected to both sides of the top end of the mounting plate.

[0010] Preferably, a baffle is fixedly connected to the top of the first limiting block.

[0011] Preferably, a through hole is provided at the connection between the second limit block and the smart tag reader, and the smart tag reader is fixedly connected to the mounting plate.

[0012] Preferably, the top of the mounting plate is fixedly connected to a cover limit block, and a through hole is provided at the connection between the first limit block and the cover limit block, a top cover is clamped on the cover limit block, and the top cover is placed on the mounting plate, the top of the mounting plate is fixedly connected to a bottom plate, and a gap is provided between the mounting plate and the bottom plate, and a code scanning layer number sensor is fixedly connected to the mounting plate at the gap.

[0013] Preferably, a material box cover opening detector is embedded and installed at the center of the bottom plate, and an outer cover guide column is fixedly connected to the bottom end of the mounting plate, an outer cover is fixedly connected to the outer cover guide column, and an observation window is opened on the outer cover.

[0014] (III) Beneficial effects

[0015] The utility model provides an automatic cover opening and scanning module for a SMIF wafer cassette, which has the advantages that: the device drives the rotation of the lead screw through the operation of a servo motor, thereby driving the movement of a mounting plate, thereby driving the automatic lifting of an outer cover, and there is no need for a worker to operate the outer cover, thus changing the previous operating method, which not only improves the scanning efficiency, but also reduces the labor intensity of the workers, and in the process of lifting the outer cover, a set slide rail is used for limiting processing, thereby improving the lifting accuracy of the outer cover, thereby improving the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1It is a three-dimensional diagram of the overall structure of the utility model;

[0018] Figure 2-5 All of them are partial structural stereograms of the utility model.

[0019] In the figure: 1. Electronic control component installation box; 2. Scan code layer number sensor; 3. Outer cover guide column; 4. Smart label reader; 5. Mounting plate; 6. Material box cover opening detector; 7. Cover limit block; 8. Baffle; 9. Fixed plate; 10. Slide rail; 11. Screw rod; 12. Servo motor; 13. Synchronous belt; 14. Bottom plate; 15. First limit block; 16. Second limit block; 17. Outer cover; 18. Observation window; 19. Top plate; 20. Side cover; 21. Top cover; 22. Connecting block; 23. Support block; 24. Placement plate; 25. Support column; 26. Inner cover; 27. Placement table; 28. Slide seat. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-5 , the utility model provides an embodiment: a SMIF wafer cassette automatic cover opening scanning module, including an electric control component installation box 1, a code scanning layer number sensor 2, an outer cover guide column 3, an intelligent label reader 4, a mounting plate 5, a material box cover opening detector 6, a cover limit block 7, a baffle 8, a fixed plate 9, a slide rail 10, a screw rod 11, a servo motor 12, a synchronous belt 13, a bottom plate 14, a first limit block 15, a second limit block 16, an outer cover 17, an observation window 18, a top plate 19, a side cover 20, a top cover 21, a connecting block 22, a supporting block 23, a placement plate 24, a supporting column 25, an inner cover 26, a placement table 27 and a slide seat 28, and the bottom end of one side of the fixed plate 9 is fixedly connected with the electric control component installation box 1, and the electric control provided is used to facilitate the installation and processing of the electric control components;

[0022] One side of the fixing plate 9 is located at the top of the electronic control component installation box 1 and is fixedly connected to a placing table 27. The four corners of the top of the placing table 27 are fixedly connected to the bottom ends of the support columns 25. The top of the support columns 25 is fixedly connected to a placing plate 24. The placing plate 2 is provided to facilitate the placement of wafers, thereby completing subsequent scanning work.

[0023] An inner cover 26 is fixedly connected to the top edge of the placement table 27, a top plate 19 is fixedly connected to one side of the fixed plate 9, the top plate 19 is fixedly connected to both ends of the side cover 20, a servo motor 12 is fixedly connected to one side of the inner side of the side cover 20, the output end of the servo motor 12 and the bottom end of the screw rod 11 are connected through a pulley and a synchronous belt 13, and the cooperation of the servo motor 12 and the screw rod 11 can drive the ball nut on the screw rod 11 to rise and fall;

[0024] The screw rod 11 is rotatably connected to the top plate 19 through a bearing, and the screw rod 11 is located inside the side cover 20. A ball nut is matched and connected to the screw rod 11, and the ball nut is fixedly connected to the slide seat 28, so that the lifting and lowering of the ball nut drives the lifting and lowering of the slide seat 28;

[0025] The slide seat 28 is slidably connected with the slide rail 10, the slide rail 10 is fixedly connected to the side cover 20, the slide seat 28 is fixedly connected with the connecting block 22, and a slide hole is opened at the connection between the side cover 20 and the connecting block 22, through which the connecting block 22 can be raised and lowered easily;

[0026] The connecting block 22 is fixedly connected with a supporting block 23, the top ends of the connecting block 22 and the supporting block 23 are fixedly connected to the bottom end of the mounting plate 5, the first limiting block 15 and the second limiting block 16 are fixedly connected to both sides of the top end of the mounting plate 5, the top end of the first limiting block 15 is fixedly connected with a baffle 8, a through hole is provided at the connection between the second limiting block 16 and the smart tag reader 4, the smart tag reader 4 is fixedly connected to the mounting plate 5, and the set smart tag reader 4 is used to facilitate reading of information, and software is used to track different material boxes;

[0027] The top of the mounting plate 5 is fixedly connected with a cover stopper 7, and a through hole is provided at the connection between the first stopper 15 and the cover stopper 7. A top cover 21 is clamped on the cover stopper 7, and the top cover 21 is placed on the mounting plate 5. The cover stopper 7 is provided to prevent the top cover 21 from moving.

[0028] The top of the mounting plate 5 is fixedly connected to the bottom plate 14, and a gap is provided between the mounting plate 5 and the bottom plate 14. The mounting plate 5 is fixedly connected to the code scanning layer number sensor 2 at the gap, and the provided code scanning layer number sensor 2 is used to facilitate scanning processing of the wafer;

[0029] A box cover opening detector 6 is embedded and installed at the center of the bottom plate 14, and the bottom end of the mounting plate 5 is fixedly connected to the outer cover guide column 3, and the outer cover 17 is fixedly connected to the outer cover guide column 3, and the outer cover 17 is provided with an observation window 18;

[0030] Specifically, when in use, first, manually load the material and place the wafer box on the placement plate 24. At the same time, use the smart label reader 4 to identify the information of the box. Use the servo motor 12 to drive the rotation of the synchronous belt 13 and the screw 11, and then drive the slide 28, the connecting block 22, the support block 23, the mounting plate 5 and the top cover 21 to move up, thereby completing the opening of the cover. While opening the cover, use the code scanning layer number sensor 2 to scan the products in the box to identify the corresponding wafer product position. Then use the servo motor 12 to close the cover. When closing the cover, you can also scan the wafer products in the wafer box to identify the corresponding wafer product position, so that it is convenient for fingers to take and place the wafer products.

Claims

1. A SMIF wafer cassette automatic cover opening scanning module, comprising a code scanning layer number sensor (2), an outer cover guide column (3), an intelligent label reader (4), a material box cover opening detector (6), a cover limit block (7), a baffle (8), a fixing plate (9), a screw rod (11), a synchronous belt (13), a bottom plate (14), an outer cover (17), an observation window (18) and a top cover (21), characterized in that: The bottom end of one side of the fixing plate (9) is fixedly connected to an electric control component installation box (1); one side of the fixing plate (9) is fixedly connected to a placement platform (27) at the top of the electric control component installation box (1); the bottom ends of the support columns (25) are fixedly connected to the four corners of the top of the placement platform (27); the top of the support column (25) is fixedly connected to a placement plate (24); the top edge of the placement platform (27) is fixedly connected to an inner cover (26); one side of the fixing plate (9) is fixedly connected to a top plate (19); The top plate (19) is fixedly connected to the two ends of the side cover (20), and a servo motor (12) is fixedly connected to one side of the inside of the side cover (20). The output end of the servo motor (12) and the bottom end of the screw rod (11) are matched and connected through a pulley and a synchronous belt (13). The screw rod (11) is rotatably connected to the top plate (19) through a bearing, and the screw rod (11) is located inside the side cover (20). A ball nut is matched and connected to the screw rod (11), and the ball nut is fixedly connected to the slide seat (28).

2. The SMIF wafer cassette automatic cover opening and scanning module according to claim 1, characterized in that: The slide seat (28) is slidably connected to a slide rail (10), the slide rail (10) is fixedly connected to the side cover (20), the slide seat (28) is fixedly connected to a connecting block (22), and a sliding hole is provided at the connection between the side cover (20) and the connecting block (22).

3. The SMIF wafer cassette automatic cover opening and scanning module according to claim 2, characterized in that: The connecting block (22) is fixedly connected to a supporting block (23), and the top ends of the connecting block (22) and the supporting block (23) are fixedly connected to the bottom end of the mounting plate (5).

4. The SMIF wafer cassette automatic cover opening and scanning module according to claim 3, characterized in that: A first limiting block (15) and a second limiting block (16) are fixedly connected to both sides of the top end of the mounting plate (5).

5. The SMIF wafer cassette automatic cover opening and scanning module according to claim 4, characterized in that: A baffle (8) is fixedly connected to the top end of the first limiting block (15).

6. The SMIF wafer cassette automatic cover opening and scanning module according to claim 4, characterized in that: A through hole is provided at the connection between the second limit block (16) and the smart tag reader (4), and the smart tag reader (4) is fixedly connected to the mounting plate (5).

7. The SMIF wafer cassette automatic cover opening and scanning module according to claim 6, characterized in that: The top end of the mounting plate (5) is fixedly connected to a cover stop block (7), and a through hole is provided at the connection between the first stop block (15) and the cover stop block (7), a top cover (21) is clamped on the cover stop block (7), and the top cover (21) is placed on the mounting plate (5), the top end of the mounting plate (5) is fixedly connected to a bottom plate (14), and a gap is provided between the mounting plate (5) and the bottom plate (14), and a code scanning layer number sensor (2) is fixedly connected to the mounting plate (5) at the gap.

8. The SMIF wafer cassette automatic cover opening and scanning module according to claim 7, characterized in that: A material box cover opening detector (6) is embedded and installed at the center of the bottom plate (14); the bottom end of the mounting plate (5) is fixedly connected to an outer cover guide column (3); an outer cover (17) is fixedly connected to the outer cover guide column (3); and an observation window (18) is provided on the outer cover (17).

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