Online plasma cleaning device

Abstract

The utility model provides an on-line plasma cleaning device. The on-line plasma cleaning device comprises a plasma cleaning mechanism, a feeding conveying mechanism, a discharging conveying mechanism and a material moving mechanism. The feeding conveying mechanism comprises two feeding bearing plates and two feeding conveying belts, the feeding conveying belts are arranged on the feeding bearing plates, and the feeding conveying belts can move towards the plasma cleaning mechanism; the material moving mechanism is arranged on the outer side of the feeding conveying mechanism and the outer side of the discharging conveying mechanism and comprises a translation module, a first material taking assembly and a second material taking assembly, the first material taking assembly and the second material taking assembly are both slidably connected to the translation module, the first material taking assembly can move back and forth between the feeding conveying mechanism and the plasma cleaning mechanism, and the second material taking assembly can move back and forth between the discharging conveying mechanism and the plasma cleaning mechanism. The second material taking assembly can move back and forth between the plasma cleaning mechanism and the feeding conveying mechanism, the first material taking assembly comprises a plurality of first suction cups, and the first suction cups can move horizontally and vertically along the horizontal moving module; the device has the advantages of being simple in structure and high in working efficiency.

Description

Technical Field

[0001] The utility model relates to the field of cleaning devices, in particular to an online plasma cleaning device. Background Art

[0002] Plasma cleaning has been widely used due to its environmental protection, low temperature and wide application range, especially for cleaning the surface of PCB boards. Traditional plasma cleaning equipment usually uses manual loading and unloading, which leads to low loading and unloading efficiency, time-consuming and labor-intensive, and easy damage to PCB boards during the loading and unloading process. Utility Model Content

[0003] The utility model aims to provide an online plasma cleaning device with simple structure and high working efficiency.

[0004] In order to achieve the above-mentioned purpose, the utility model provides an online plasma cleaning device, including a plasma cleaning mechanism, a loading and conveying mechanism, a unloading and conveying mechanism and a material shifting mechanism; the loading and conveying mechanism and the unloading and conveying mechanism are respectively arranged on both sides of the plasma cleaning mechanism, the loading and conveying mechanism includes two loading and adjusting frames, two loading and conveying belts and two loading and driving devices, the two loading and conveying belts are respectively arranged on the two loading and adjusting frames, the two loading and driving devices respectively drive the corresponding loading and conveying belts to convey and move toward the plasma cleaning mechanism, a loading and supporting plate is arranged on one side of the loading and adjusting frame, the supporting part of the loading and conveying belt is arranged on the loading and supporting plate and can move relative to the loading and supporting plate; the material shifting mechanism is arranged on the outside of the loading and conveying mechanism and the unloading and conveying mechanism, the material shifting mechanism includes a translation module, a first The first material picking assembly and the second material picking assembly, the two ends of the translation module extend to the upper material conveying mechanism and the lower material conveying mechanism respectively, the first material picking assembly and the second material picking assembly are both slidably connected to the translation module, the first material picking assembly can move back and forth between the upper material conveying mechanism and the plasma cleaning mechanism, the second material picking assembly can move back and forth between the plasma cleaning mechanism and the upper material conveying mechanism, the first material picking assembly includes a first descending moving assembly, a first material picking mounting frame and a plurality of first suction cups, the first descending moving assembly is slidably connected to the translation module, the first end of the first material picking mounting frame is slidably connected to the first descending moving assembly, the first suction cup is arranged on the second end of the first material picking mounting frame and is arranged above the upper material conveying mechanism, and the first descending moving assembly can drive the first material picking mounting frame and the first suction cup to move up and down.

[0005] It can be seen from the above scheme that by setting up a loading and unloading conveying mechanism to replace manual loading and unloading, it is beneficial to realize automatic loading and unloading of workpieces, so as to save manpower and improve work efficiency; by setting up a loading support plate to assist in supporting the loading conveyor belt and prevent the loading conveyor belt from sinking downward under the action of load gravity, it is beneficial to ensure that the conveying surface of the loading conveyor belt is on a plane, so that the workpieces on the loading conveyor belt are basically on a plane, which facilitates the first material picking component to accurately absorb the workpieces on the loading conveyor belt; by setting up a suction cup to absorb the workpiece and transfer the workpiece to the next workstation, this embodiment has the advantages of simple structure and high work efficiency.

[0006] A further solution is that driven wheels are provided at both ends of the feeding adjustment frame, the feeding drive device is provided between the two driven wheels, and a driving wheel is provided at the driving end of the feeding drive device, and the feeding conveyor belt is wound around the outside of the driving wheel and the two driven wheels; the two feeding adjustment frames are arranged opposite to each other and spaced by a preset distance, and the preset distance is adjustable.

[0007] A further solution is that the two feeding adjustment racks are respectively a fixed feeding adjustment rack and a movable feeding adjustment rack, and the movable feeding adjustment rack can move closer to or away from the fixed feeding adjustment rack.

[0008] It can be seen from the above scheme that by setting the preset distance between the two loading adjustment frames to be adjustable, it is beneficial to be compatible with workpieces of different specifications.

[0009] A further solution is that the feeding and conveying mechanism also includes an amplitude modulation drive device, a first lead screw, a second lead screw, a first belt and a second belt; the first lead screw is respectively connected to the first end of the fixed feeding adjustment frame and the first end of the movable feeding adjustment frame, and one end of the first lead screw is connected to the first pulley and the second pulley; the second lead screw is respectively connected to the second end of the fixed feeding adjustment frame and the second end of the movable feeding adjustment frame, and one end of the second lead screw is connected to the third pulley; the driving end of the amplitude modulation drive device is provided with a first driving wheel, the first belt is wound around the outside of the first driving wheel and the first pulley, and the second belt is wound around the outside of the second pulley and the third pulley, and the amplitude modulation drive device can simultaneously drive the first lead screw and the second lead screw to rotate around their respective axes, thereby driving the movable feeding adjustment frame to translate.

[0010] It can be seen from the above scheme that by providing an amplitude modulation drive device to simultaneously drive the first lead screw and the second lead screw to rotate, and then simultaneously drive the two ends of the movable adjustment frame to move synchronously in the same direction, it is beneficial to save parts and reduce production costs.

[0011] A further solution is that the material unloading conveying mechanism includes two material unloading driving devices, two material unloading conveying belts and two material unloading adjustment racks, the two material unloading adjustment racks are arranged opposite to each other, and the distance between the two material unloading adjustment racks is adjustable, the two material unloading conveying belts are arranged on the two material unloading adjustment racks respectively, and the two material unloading driving devices respectively drive the two material unloading conveying belts to convey and move back to the plasma cleaning mechanism; the material unloading adjustment rack is provided with a material unloading support plate, the supporting part of the material unloading conveying belt is arranged on the material unloading support plate, and the material unloading conveying belt can move relative to the material unloading support plate.

[0012] A further solution is that the first material taking assembly and the second material taking assembly both move independently, or the first material taking assembly and the second material taking assembly move synchronously.

[0013] A further solution is that two cross bars are provided at the second end of the first material picking mounting frame, and the two cross bars are arranged along the length direction of the first material picking mounting frame. The middle part of the cross bar is fixedly connected to the first material picking mounting frame, and bending parts are provided at both ends of the cross bar, and the first suction cup is arranged on the bending part.

[0014] It can be seen from the above scheme that by providing a bent portion at the end of the cross bar, it is beneficial to improve the structural strength of the cross bar and prevent the cross bar from being deformed.

[0015] A further solution is that the plasma cleaning mechanism includes a lower cavity, an upper cavity and a lifting drive device, the upper cavity and the lower cavity are arranged correspondingly up and down, the lifting drive device can drive the upper cavity to move up and down, and a sealing structure is arranged between the upper cavity and the lower cavity; a cathode plate and two support seats are arranged in the lower cavity, an L-shaped groove is arranged on the support seat, the two L-shaped grooves are arranged opposite to each other to form a placement groove, the cathode plate is arranged below the placement groove, and an anode plate is arranged in the upper cavity.

[0016] A further solution is that the plasma cleaning mechanism also includes a support plate, a connecting plate and multiple guide pillars, the support plate is arranged above the upper cavity, the connecting plate is arranged above the support plate, the upper part of the guide pillar is connected to the connecting plate, the middle part of the guide pillar passes through the support plate and is slidably connected to the support plate, the lower part of the guide pillar is connected to the upper cavity, the lifting drive device is arranged on the support plate, and the driving end of the lifting drive device passes through the support plate and is connected to the upper cavity.

[0017] It can be seen from the above solution that by arranging the guide pillar above the upper cavity, the upper cavity is suspended above the lower cavity, and sufficient space is reserved for the material moving mechanism to avoid collision between the guide pillar and the material moving mechanism.

[0018] A further solution is that the online plasma cleaning device also includes a workbench and a frame, the frame is arranged on the workbench, the plasma cleaning mechanism, the loading and conveying mechanism, the unloading and conveying mechanism and the material moving mechanism are all arranged on the workbench and on the inner side of the frame; the frame is connected to two beams on its opposite sides, and the two sides of the support plate are respectively fixedly connected to the two beams. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a side view of an embodiment of the utility model.

[0020] Figure 2 It is a structural diagram of an embodiment of the utility model when the frame is omitted.

[0021] Figure 3 It is a structural diagram of the feeding and conveying structure in the embodiment of the utility model.

[0022] Figure 4 It is a structural diagram of the material moving mechanism in the embodiment of the utility model.

[0023] Figure 5 It is a structural diagram of a plasma cleaning mechanism in an embodiment of the utility model.

[0024] The present invention will be further described below with reference to the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0025] See also Figures 1 to 5 The online plasma cleaning device provided in this embodiment includes a workbench 1, a frame 2, a plasma cleaning mechanism 3, a loading and conveying mechanism 4, a unloading and conveying mechanism 5, and a material moving mechanism 6. The frame 2 is arranged around the workbench 1, and the plasma cleaning mechanism 3, the loading and conveying mechanism 4, the unloading and conveying mechanism 5, and the material moving mechanism 6 are all arranged on the workbench 1 and on the inner side of the frame 2. The frame 2 is connected to two beams 21 on opposite sides thereof, and the upper cavity 32 of the plasma cleaning mechanism 3 is mounted on the two beams 21.

[0026] The plasma cleaning mechanism 3 is arranged in the middle of the workbench 1, and the loading and conveying mechanism 4 and the unloading and conveying mechanism 5 are respectively arranged on both sides of the plasma cleaning mechanism 3, preferably on opposite sides, that is, the loading and conveying mechanism 4, the plasma cleaning mechanism 3 and the unloading and conveying mechanism 5 are arranged in a row along the Y direction. The material moving mechanism 6 is arranged outside the loading and conveying mechanism 4 and the unloading and conveying mechanism 5, and extends along the Y direction.

[0027] exist Figure 3 In the figure, the feeding conveying mechanism 4 includes a feeding bottom plate 41, an amplitude modulation driving device 42, two feeding adjustment frames, two feeding supporting plates 44, two feeding driving devices 45 and two feeding conveying belts 46.

[0028] The two feeding adjustment frames are arranged relatively on the feeding base plate 41 along the X direction and are spaced by a preset distance. Driven wheels 47 are arranged at both ends of the feeding adjustment frames. The feeding drive device 45 is arranged between the two driven wheels 47, and a driving wheel 451 is arranged at the driving end of the feeding drive device 45. The feeding conveyor belt 46 is wound around the outer sides of the driving wheel 451 and the two driven wheels 47. The feeding drive device 45 can drive the feeding conveyor belt 46 to rotate, thereby realizing the feeding of the feeding conveyor belt 46.

[0029] In order to ensure that the feeding drive device 45 can effectively drive the feeding conveyor belt 46 to rotate, in this embodiment, two auxiliary wheels 48 are further provided in the middle of the feeding adjustment frame. The two auxiliary wheels 48 are respectively provided on both sides of the driving wheel 451. The feeding conveyor belt 46 is wrapped around the outer sides of the two auxiliary wheels 48, so that the feeding conveyor belt 46 is tightly fitted with half of the circumferential wall of the driving wheel 451 to increase the contact area between the feeding conveyor belt 46 and the driving wheel 451 to prevent the two from moving relative to each other.

[0030] The loading support plate 44 is protrudingly arranged on the side wall of the loading adjustment frame and is arranged between the two driven wheels 47, and the end of the loading support plate 44 is as close to the driven wheel 47 as possible. The supporting portion of the loading conveyor belt 46 is arranged on the loading support plate 44 and can move relative to the loading support plate 44, that is, when the loading drive device 45 drives the loading conveyor belt 46 to convey and move toward the plasma cleaning mechanism 3, the loading conveyor belt 46 can move relative to the loading support plate 44 on the loading support plate 44. The workpiece 7 or the tray carrying the workpiece 7 in this embodiment can be placed on the loading conveyor belt 46. Due to the gravity of the workpiece 7 or the tray, the supporting portion of the loading conveyor belt 46 will bend and deform downward, so that the workpiece 7 or the tray cannot be in a horizontal state, resulting in that when the subsequent material transfer mechanism 6 takes the material, part of the suction cup 623 cannot be effectively adsorbed with the workpiece 7 or the tray, causing the workpiece 7 or the tray to accidentally fall.

[0031] In this embodiment, the preset distance between the two feeding adjustment racks is adjustable. In this embodiment, the two feeding adjustment racks are named as the fixed feeding adjustment rack 43a and the movable feeding adjustment rack 43b respectively. The amplitude modulation drive device 42 can drive the movable feeding adjustment rack 43b to move closer to or away from the fixed feeding adjustment rack 43a to be compatible with workpieces 7 or pallets of different specifications. Specifically:

[0032] The feeding and conveying mechanism 4 further includes a first lead screw 49a, a second lead screw 49b, a first belt 40a, a second belt 40b, a first fixed seat 400a and a second fixed seat 400b. The first fixed seat 400a and the second fixed seat 400b are respectively arranged at the two ends of the feeding bottom plate 41 and are arranged on the side of the movable feeding adjustment frame 43b away from the fixed feeding adjustment frame 43a. The first lead screw 49a is respectively connected to the first end of the fixed feeding adjustment frame 43a, the first end of the movable feeding adjustment frame 43b and the first fixed seat 400a, and the first lead screw 49a is connected to the first pulley 491 and the second pulley 492 at one end passing through the first fixed seat 400a; the second lead screw 49b is respectively connected to the second end of the fixed feeding adjustment frame 43a, the second end of the movable feeding adjustment frame 43b and the second fixed seat 400b, and the second lead screw 49b is connected to the third pulley 493 at one end passing through the second fixed seat 400b. The amplitude modulation drive device 42 is arranged on the loading base plate 41, and a first driving wheel 421 is arranged at the driving end of the amplitude modulation drive device 42. The first belt 40a is wound around the outside of the first driving wheel 421 and the first pulley 491, and the second belt 40b is wound around the outside of the second pulley 492 and the third pulley 493. The amplitude modulation drive device 42 is preferably a motor. The amplitude modulation drive device 42 can simultaneously drive the first lead screw 49a and the second lead screw 49b to rotate around their respective axes, thereby driving the two ends of the movable loading adjustment frame 43b to translate along the X direction.

[0033] Combination Figure 2 and Figure 3 The material unloading conveying mechanism 5 includes two unloading driving devices and two relatively arranged unloading adjustment racks. The distance between the two unloading adjustment racks is adjustable to accommodate workpieces 7 or pallets of different specifications. Each unloading adjustment rack is provided with an unloading support plate and an unloading conveying belt. The supporting portion of the unloading conveying belt is provided on the unloading support plate. The unloading driving device can drive the unloading conveying belt to move on the unloading support plate away from the plasma cleaning mechanism 3. The specific structure of the unloading conveying mechanism 5 is basically the same as that of the loading conveying mechanism 4, and will not be repeated here.

[0034] See also Figure 4 , and combined with Figure 2The material transfer mechanism 6 includes a translation module 61, a first material picking assembly 62, and a second material picking assembly 63. The two ends of the translation module 61 extend to the upper material conveying mechanism 4 and the lower material conveying mechanism 5 respectively, that is, the translation module 61 extends along the Y direction. The specific structure of the translation module 61 is the prior art and will not be repeated here. The first material picking assembly 62 and the second material picking assembly 63 are both slidably connected to the translation module 61. The first material picking assembly 62 can move back and forth between the upper material conveying mechanism 4 and the plasma cleaning mechanism 3 to transfer the workpiece 7 or the tray on the upper material conveying mechanism 4 to the plasma cleaning mechanism 3; the second material picking assembly 63 can move back and forth between the plasma cleaning mechanism 3 and the upper material conveying mechanism 4 to transfer the workpiece 7 or the tray in the plasma cleaning mechanism 3 to the lower material conveying mechanism 5.

[0035] The translation module 61 is slidably connected with a first slider 611 and a second slider 612, the first material picking assembly 62 is connected to the first slider 611, and the second material picking assembly 63 is connected to the second slider 612. The first material picking assembly 62 and the second material picking assembly 63 move independently, or the first material picking assembly 62 and the second material picking assembly 63 move synchronously.

[0036] The first material picking assembly 62 includes a first descending moving assembly 621, a first material picking mounting frame 622 and a plurality of first suction cups 623. The first descending moving assembly 621 is connected to the first slider 611, and the first end of the first material picking mounting frame 622 is connected to the first descending moving assembly 621. The first descending moving assembly 621 can drive the first material picking mounting frame 622 to move up and down along the Z direction. The plurality of first suction cups 623 are all arranged at the second end of the first material picking mounting frame 622 and are arranged above the loading conveying mechanism 4 and the plasma cleaning mechanism 3. Two cross bars 624 are arranged at the second end of the first material picking mounting frame 622, and the two cross bars 624 are arranged in an arranged manner along the length direction of the first material picking mounting frame 622. The middle part of the cross bar 624 is fixedly connected to the first material picking mounting frame 622, and both ends of the cross bar 624 are provided with bending parts. The plurality of first suction cups 623 are respectively arranged on the corresponding bending parts. Preferably, the plurality of first suction cups 623 are all at the same height. The first suction cup is connected to the vacuum generator through an air pipe, and utilizes vacuum adsorption to suck up the workpiece 7 or the tray away.

[0037] In this embodiment, the structure of the second material taking component 63 is the same as that of the first material taking component 62, and will not be described in detail here.

[0038] Combination Figure 1 and Figure 5The plasma cleaning mechanism 3 includes a lower cavity 31, an upper cavity 32 and a lifting drive device 33. The lower cavity 31 is fixedly arranged on the workbench 1 and arranged between the loading and unloading conveying mechanism 4 and the unloading and unloading conveying mechanism 5. The upper cavity 32 and the lower cavity 31 are arranged correspondingly up and down. The lifting drive device 33 can drive the upper cavity 32 to move up and down, so that the upper cavity 32 and the lower cavity 31 are connected up and down to form a sealed chamber. A first channel connected to a vacuum generator is also provided on the upper cavity 32 or the lower cavity 31, and the sealed chamber is evacuated through an external vacuum generator. A second channel connected to a gas supply device is also provided on the upper cavity 32 or the lower cavity 31, and a preset gas can be infused into the vacuum sealed chamber through an external gas supply device to meet different processing requirements. The preset gas includes but is not limited to: argon, oxygen, nitrogen, hydrogen, and carbon tetrafluoride gas.

[0039] In order to improve the sealing performance, a sealing structure is provided between the upper cavity 32 and the lower cavity 31, and the sealing structure includes a lower sealing ring 311 and an upper sealing ring. The lower sealing ring 311 is provided on the lower cavity 31, and the lower sealing ring 311 extends along the four sides of the lower cavity 31; the upper sealing ring is provided on the upper cavity 32, and the upper sealing ring extends along the four sides of the upper cavity 32. In one embodiment, the upper sealing ring and the lower sealing ring 311 are provided correspondingly up and down, and when the upper cavity 32 is connected to the lower cavity 31, the upper sealing ring and the lower sealing ring 311 are mutually squeezed and deformed to ensure the sealing performance; in another embodiment, the upper sealing ring and the lower sealing ring 311 are provided offset on the horizontal projection plane, and when the upper cavity 32 is connected to the lower cavity 31, the upper sealing ring and the lower sealing ring 311 are both squeezed and deformed to form a double seal.

[0040] A cathode plate (not shown in the figure) and two support seats 312 are arranged in the lower cavity 31, and an L-shaped groove 3121 is arranged on the support seat 312. The two L-shaped grooves 3121 are arranged opposite to each other and form a placement groove for placing the workpiece 7 or the tray. The cathode plate is arranged below the placement groove, and an anode plate is arranged in the upper cavity 32.

[0041] The plasma cleaning mechanism 3 also includes a support plate 34, a connecting plate 35 and a plurality of guide pillars 36. Both sides of the support plate 34 are fixedly connected to the crossbeam 21, so that the upper cavity 32 is suspended above the lower cavity 31. The support plate 34 is arranged above the upper cavity 32, the connecting plate 35 is arranged above the support plate 34, the upper part of the guide pillar 36 is connected to the connecting plate 35, the middle part of the guide pillar 36 passes through the support plate 34 and is slidably connected to the support plate 34, the lower part of the guide pillar 36 is connected to the upper cavity 32, and the lifting drive device 33 is arranged on the support plate 34, and the driving end of the lifting drive device 33 passes through the support plate 34 and is connected to the upper cavity 32. When the lifting drive device 33 drives the upper cavity 32 to move up and down, the connecting plate 35 and the guide pillar 36 both move synchronously with the upper cavity 32.

[0042] In summary, it can be seen that the utility model provides a loading and unloading conveying mechanism to replace manual loading and unloading, which is beneficial to realize automatic loading and unloading of workpieces, so as to save manpower and improve work efficiency; by providing a loading support plate to assist in supporting the loading conveyor belt, the loading conveyor belt is prevented from sinking downward under the action of load gravity, which is beneficial to ensure that the conveying surface of the loading conveyor belt is on a plane, so that the workpieces on the loading conveyor belt are basically on a plane, which facilitates the first material picking component to accurately absorb the workpieces on the loading conveyor belt; by providing a suction cup to absorb the workpiece and transfer the workpiece to the next workstation, this embodiment has the advantages of simple structure and high work efficiency.

[0043] Finally, it should be emphasized that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. Online plasma cleaning device, characterized in that: It includes a plasma cleaning mechanism, a loading and conveying mechanism, a unloading and conveying mechanism and a material moving mechanism; The loading conveying mechanism and the unloading conveying mechanism are respectively arranged on both sides of the plasma cleaning mechanism, the loading conveying mechanism comprises two loading adjustment racks, two loading conveyor belts and two loading driving devices, the two loading conveyor belts are respectively arranged on the two loading adjustment racks, the two loading driving devices respectively drive the corresponding loading conveyor belts to convey and move toward the plasma cleaning mechanism, a loading support plate is arranged on one side of the loading adjustment rack, the supporting part of the loading conveyor belt is arranged on the loading support plate and can move relative to the loading support plate; The material moving mechanism is arranged at the outer side of the loading and conveying mechanism and the unloading and conveying mechanism, and the material moving mechanism includes a translation module, a first material picking component and a second material picking component, and the two ends of the translation module extend to the loading and conveying mechanism and the unloading and conveying mechanism respectively, and the first material picking component and the second material picking component are both slidably connected to the translation module, and the first material picking component can move back and forth between the loading and conveying mechanism and the plasma cleaning mechanism, and the second material picking component can move back and forth between the plasma cleaning mechanism and the loading and conveying mechanism. The first material picking component includes a first descending moving component, a first material picking mounting frame and a plurality of first suction cups, and the first descending moving component is slidably connected to the translation module, and the first end of the first material picking mounting frame is slidably connected to the first descending moving component, and the first suction cup is arranged on the second end of the first material picking mounting frame and is arranged above the loading and conveying mechanism, and the first descending moving component can drive the first material picking mounting frame and the first suction cup to move up and down.

2. The online plasma cleaning device according to claim 1, characterized in that: Both ends of the feeding adjustment frame are provided with driven wheels, the feeding drive device is arranged between the two driven wheels, and the driving end of the feeding drive device is provided with a driving wheel, and the feeding conveyor belt is wound around the outer sides of the driving wheel and the two driven wheels; The two feeding adjustment racks are arranged opposite to each other and spaced apart by a preset distance, and the preset distance is adjustable.

3. The online plasma cleaning device according to claim 2, characterized in that: The two feeding adjustment racks are respectively a fixed feeding adjustment rack and a movable feeding adjustment rack, and the movable feeding adjustment rack can move closer to or away from the fixed feeding adjustment rack.

4. The online plasma cleaning device according to claim 3, characterized in that: The feeding and conveying mechanism further comprises an amplitude modulation driving device, a first lead screw, a second lead screw, a first belt and a second belt; The first lead screw is connected to the first end of the fixed feeding adjustment frame and the first end of the movable feeding adjustment frame respectively, and one end of the first lead screw is connected to the first pulley and the second pulley; The second lead screw is connected to the second end of the fixed feeding adjustment frame and the second end of the movable feeding adjustment frame respectively, and one end of the second lead screw is connected to the third pulley; The driving end of the amplitude modulation drive device is provided with a first driving wheel, the first belt is wound around the first driving wheel and the outer side of the first pulley, the second belt is wound around the outer side of the second pulley and the third pulley, and the amplitude modulation drive device can simultaneously drive the first lead screw and the second lead screw to rotate around their respective axes, thereby driving the movable feeding adjustment frame to translate.

5. The online plasma cleaning device according to claim 1, characterized in that: The material unloading conveying mechanism comprises two material unloading driving devices, two material unloading conveying belts and two material unloading adjustment racks, the two material unloading adjustment racks are arranged opposite to each other, and the distance between the two material unloading adjustment racks is adjustable, the two material unloading conveying belts are respectively arranged on the two material unloading adjustment racks, and the two material unloading driving devices respectively drive the two material unloading conveying belts to move back to the plasma cleaning mechanism for conveying; The unloading adjustment frame is provided with an unloading support plate, the supporting portion of the unloading conveyor belt is arranged on the unloading support plate, and the unloading conveyor belt can move relative to the unloading support plate.

6. The online plasma cleaning device according to claim 1, characterized in that: The first material taking component and the second material taking component both move independently, or the first material taking component and the second material taking component move synchronously.

7. The online plasma cleaning device according to claim 6, characterized in that: Two cross bars are provided at the second end of the first material picking mounting frame, and the two cross bars are arranged along the length direction of the first material picking mounting frame. The middle part of the cross bar is fixedly connected to the first material picking mounting frame, and both ends of the cross bar are provided with a bending part, and the first suction cup is arranged on the bending part.

8. The online plasma cleaning device according to any one of claims 1 to 7, characterized in that: The plasma cleaning mechanism comprises a lower cavity, an upper cavity and a lifting drive device, the upper cavity and the lower cavity are arranged correspondingly up and down, the lifting drive device can drive the upper cavity to move up and down, and a sealing structure is arranged between the upper cavity and the lower cavity; The lower cavity is provided with a cathode plate and two support seats, the support seat is provided with an L-shaped groove, the two L-shaped grooves are arranged opposite to each other to form a placement groove, the cathode plate is arranged below the placement groove, and the upper cavity is provided with an anode plate.

9. The online plasma cleaning device according to claim 8, characterized in that: The plasma cleaning mechanism also includes a support plate, a connecting plate and a plurality of guide pillars, wherein the support plate is arranged above the upper cavity, the connecting plate is arranged above the support plate, the upper portion of the guide pillar is connected to the connecting plate, the middle portion of the guide pillar passes through the support plate and is slidably connected to the support plate, the lower portion of the guide pillar is connected to the upper cavity, the lifting drive device is arranged on the support plate, and the driving end of the lifting drive device passes through the support plate and is connected to the upper cavity.

10. The online plasma cleaning device according to claim 9, characterized in that: The online plasma cleaning device further comprises a workbench and a frame, wherein the frame is arranged on the workbench, and the plasma cleaning mechanism, the loading and conveying mechanism, the unloading and conveying mechanism and the material moving mechanism are all arranged on the workbench and on the inner side of the frame; The frame is connected to two cross beams on two opposite sides thereof, and the two sides of the support plate are respectively fixedly connected to the two cross beams.

Images