Rotation limiting device and wafer carrying manipulator
By designing a rotation limit device in the wafer handling robot hand, the elastic parts are used to achieve rotation of the rotating member exceeding 360° and prevent excessive rotation, the electromagnetic interference and cable tangling problems are solved, and the adaptability and working stability of the equipment are improved.
Patent Information
- Application Number
- CN202420670713.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-02
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-04-02
AI Technical Summary
The existing wafer handling robots that can rotate more than 360° are prone to electromagnetic interference during work, affecting the normal operation of the equipment.
A rotary limiting device is designed, including fixing parts, limiting parts, elastic parts and rotating parts. The rotation of the rotating part is achieved by compressing and deformation of the elastic parts, and prevent excessive rotation in the limit position to avoid cable entanglement. and electromagnetic interference.
It increases the adaptability of the robot to complex working conditions, prevents cable tangling, avoids electromagnetic interference, ensures the normal operation of the equipment, and absorbs impact through flexible contact, reducing noise and vibration.
Smart Images
Figure CN222155592U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of handling equipment, in particular to a rotation limiting device and a wafer handling manipulator. Background Art
[0002] A wafer is a sheet-like structure formed by grinding, polishing and slicing a crystal rod. With the rapid development of science and technology, the requirements for wafer processing technology and processing environment are becoming higher and higher. Correspondingly, the adaptability of wafer handling robots to complex working conditions and the stability of their operation are also improved.
[0003] Wafer handling robots have rotation conditions during operation. At present, some wafer handling robots can only rotate within a range of 360°, which makes it difficult to adapt to complex wafer handling environments. Based on this, some wafer handling robots are equipped with joint modules that can rotate more than 360°, but the hard stop protection measures taken to prevent excessive cable winding are based on the principle of magnet repulsion. Although this method can avoid impact and vibration during hard stop, it is easy to generate electromagnetic interference during the operation of the handling robot, thereby affecting the normal operation of the equipment. Utility Model Content
[0004] The first purpose of the utility model is to provide a rotation limiting device to solve the technical problem that the existing wafer handling robot that can rotate more than 360° is prone to generate electromagnetic interference and affect the normal operation of the equipment.
[0005] The utility model provides a rotation limiting device, including a fixing member, a limiting member, an elastic member and a rotating member. The fixing member is provided with a first stopper; the limiting member is rotatably arranged on the fixing member, and the limiting member is provided with a second stopper, and the second stopper is used to abut and cooperate with the first stopper to limit the rotation of the limiting member along the first direction; the elastic member connects the limiting member and the fixing member, and the elastic member is configured to make the second stopper always have a tendency to abut against the first stopper, and the elastic member has a compression displacement along the second direction, and the second direction is opposite to the first direction; the rotating member is rotatably arranged on the limiting member, and the rotating member is fixedly provided with a linkage block, and the limiting member is provided with a first limiting portion, and the linkage block is configured to abut and cooperate with the first limiting portion when the rotating member rotates along the second direction.
[0006] Further, the fixing member is provided with a accommodating cavity, and the limiting member is embedded in the accommodating cavity, wherein the limiting member includes an outer annular wall, and an accommodating groove is formed between the outer annular wall and the side wall of the accommodating cavity, the first stop block and the second stop block are both arranged in the accommodating groove, and the first stop block is fixedly arranged on the side wall of the accommodating cavity, and the second stop block is fixedly arranged on the outer annular wall.
[0007] Furthermore, the elastic member includes a compression spring, which is arranged in the accommodating groove, and one end of the compression spring abuts against a side of the first stopper circumferentially away from the second stopper, and the other end of the compression spring abuts against a side of the second stopper circumferentially away from the first stopper.
[0008] Furthermore, the accommodating groove is a circular ring-shaped groove.
[0009] Furthermore, the limiting member further comprises an inner annular wall, an annular guide groove is formed between the inner annular wall and the outer annular wall, and the linkage block is arranged in the annular guide groove.
[0010] Further, the limiting member also includes a fixed block, which connects the inner annular wall and the outer annular wall, and has a first surface and a second surface opposite to each other in the circumferential direction, wherein the first surface is used to form the first limiting portion, and the second surface is used to form a second limiting portion, and the second limiting portion is configured to abut and cooperate with the linkage block when the rotating member rotates along the first direction.
[0011] Furthermore, the first limiting portion is provided with a first buffer pad, and the second limiting portion is provided with a second buffer pad.
[0012] Furthermore, the first buffer pad and the second buffer pad are both made of rubber.
[0013] Furthermore, the rotation limiting device also includes a rolling bearing, wherein the rotating member has a rotating shaft, and the rolling bearing is fixedly sleeved on the rotating shaft; the limiting member is provided with a center hole, and the limiting member is fixedly sleeved on the outer ring of the rolling bearing through the center hole.
[0014] The beneficial effects brought by the rotary limit device of the utility model are:
[0015] The use of the rotation limit device in a wafer handling robot is used as an example for explanation. By setting a rotation limit device mainly composed of a fixed part, a limit part, an elastic part and a rotating part, the rotating part can be used as a rotational motion output part of the wafer handling robot. During normal operation, the second stopper provided on the limiter cooperates with the first stopper provided on the fixed part to limit the limiter from rotating in the first direction, and the elastic part is in a compressed state, so that the second stopper abuts against the first stopper, and the elastic part still has a compression margin. At this time, the limiter and the fixed part remain relatively fixed; the rotating part can rotate relative to the limiter to realize the output of rotational power.
[0016] When the rotating member rotates along the second direction until the linkage block abuts against the first limiting portion of the limiting member, the rotational power of the rotating member will be transmitted to the limiting member through the first limiting portion, thereby driving the limiting member to rotate along the second direction; during the rotation of the limiting member along the second direction, the elastic member is compressed, so that the rotating member can continue to rotate more than 360°; when the rotating member rotates to the set angle, the elastic member is compressed to the extreme position to prevent the limiting member from continuing to rotate, that is, to prevent the rotating member from continuing to rotate, so as to prevent the cable entanglement problem caused by excessive rotation of the rotating member.
[0017] The rotation limit device allows the rotating part to rotate more than 360°, increases the adaptability of the wafer handling robot to complex working conditions, and prevents cable entanglement problems caused by excessive rotation of the rotating part. In addition, this method of using elastic parts to achieve rotation of the rotating part more than 360° can not only avoid electromagnetic interference and ensure the normal operation of the equipment, but also makes the mechanical limiting process a flexible stopping process, using the compression deformation of the elastic part to absorb the impact, thereby avoiding noise and vibration shock caused by rigid contact, and well adapting to the working environment of wafer handling.
[0018] The second purpose of the utility model is to provide a wafer handling robot to solve the technical problem that the existing wafer handling robot that can rotate more than 360° is prone to generate electromagnetic interference and affect the normal operation of the equipment.
[0019] The wafer handling robot provided by the utility model comprises a driving device and the above-mentioned rotation limiting device, wherein the driving device is installed on the fixing member, and the driving device is drivingly connected to the rotating member.
[0020] During the operation of the wafer handling robot, the driving device is activated to drive the rotating member to rotate to achieve the output of rotational power. By setting the above-mentioned rotation limiting device in the wafer handling robot, the wafer handling robot has all the advantages of the above-mentioned rotation limiting device, which will not be described one by one here. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.
[0022] Figure 1 A schematic diagram of the three-dimensional structure of the rotation limiting device provided in an embodiment of the utility model;
[0023] Figure 2 A left side schematic diagram of a rotation limiting device provided in an embodiment of the utility model;
[0024] Figure 3 for Figure 2 AA section view in;
[0025] Figure 4 For Figure 2 Schematic diagram of the three-dimensional structure after cutting through the AA section;
[0026] Figure 5 A schematic top view of a rotation limiting device provided in an embodiment of the utility model;
[0027] Figure 6 for Figure 5 BB section view in.
[0028] Description of reference numerals:
[0029] 100-fixed part; 200-limiting part; 300-elastic part; 400-rotating part; 500-accommodating groove; 600-rolling bearing; 700-annular pressure plate;
[0030] 110-first stopper; 120-side surrounding wall;
[0031] 210 - second stopper; 220 - outer annular wall; 230 - inner annular wall; 240 - annular guide groove; 250 - fixing block; 251 - first limiting portion; 252 - second limiting portion; 253 - first buffer pad; 254 - second buffer pad; 260 - center hole;
[0032] 410- linkage block; 420- rotating shaft. DETAILED DESCRIPTION
[0033] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific embodiments of the utility model are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0034] Figure 1 A schematic diagram of the three-dimensional structure of the rotation limiting device provided in this embodiment, Figure 2 A left side schematic diagram of the rotation limiting device provided in this embodiment, Figure 3 for Figure 2 AA section view in. Figures 1 to 3As shown, this embodiment provides a rotation limiting device, including a fixing member 100, a limiting member 200, an elastic member 300 and a rotating member 400. Specifically, the fixing member 100 is provided with a first stopper 110; the limiting member 200 is rotatably arranged on the fixing member 100, and the limiting member 200 is provided with a second stopper 210, and the second stopper 210 is used to abut and cooperate with the first stopper 110 to limit the limiting member 200 from rotating in a first direction; the elastic member 300 connects the limiting member 200 and the fixing member 100. 0, the elastic member 300 is configured to make the second stop block 210 always have a tendency to abut against the first stop block 110, and the elastic member 300 has a compression displacement along the second direction, and the second direction is opposite to the first direction; the rotating member 400 is rotatably set on the limiting member 200, and the rotating member 400 is fixedly provided with a linkage block 410, and the limiting member 200 is provided with a first limiting portion 251, and the linkage block 410 is configured to abut and cooperate with the first limiting portion 251 when the rotating member 400 rotates along the second direction.
[0035] The use of the rotation limit device in a wafer handling robot is used as an example for explanation. By setting a rotation limit device mainly composed of a fixed part 100, a limit member 200, an elastic member 300 and a rotating member 400, the rotating member 400 can be used as a rotational motion output member of the wafer handling robot. During normal operation, the second stopper 210 provided on the limit member 200 cooperates with the first stopper 110 provided on the fixed part 100 to limit the limit member 200 from rotating in the first direction, and the elastic member 300 is in a compressed state, so that the second stopper 210 abuts against the first stopper 110, and the elastic member 300 still has a compression margin. At this time, the limit member 200 and the fixed part 100 remain relatively fixed; the rotating member 400 can rotate relative to the limit member 200 to achieve the output of rotational power.
[0036] When the rotating member 400 rotates along the second direction until the linkage block 410 abuts against the first limiting portion 251 of the limiting member 200, the rotational power of the rotating member 400 will be transmitted to the limiting member 200 through the first limiting portion 251, thereby driving the limiting member 200 to rotate along the second direction; during the rotation of the limiting member 200 along the second direction, the elastic member 300 is compressed, so that the rotating member 400 can continue to rotate more than 360°; when the rotating member 400 rotates to the set angle, the elastic member 300 is compressed to the extreme position to prevent the limiting member 200 from continuing to rotate, that is, to prevent the rotating member 400 from continuing to rotate, so as to prevent the cable entanglement problem caused by excessive rotation of the rotating member 400.
[0037] The rotation limit device allows the rotating part 400 to rotate more than 360°, which increases the adaptability of the wafer handling robot to complex working conditions and prevents cable entanglement caused by excessive rotation of the rotating part 400. In addition, this method of using the elastic part 300 to achieve a rotation of the rotating part 400 of more than 360° can not only avoid electromagnetic interference and ensure the normal operation of the equipment, but also makes the mechanical limiting process a flexible stopping process, using the compression deformation of the elastic part 300 to absorb the impact, thereby avoiding the noise and vibration impact caused by rigid contact, and well adapting to the working environment of wafer handling.
[0038] It should be noted that, in this embodiment, the first direction can be Figure 3 The second direction can be represented by the arrow a in Figure 3 It is indicated by the arrow b in FIG.
[0039] It should also be noted that, in this embodiment, only the use of the rotation limit device in a wafer handling robot is used as an example for explanation. It can be understood that the rotation limit device can also be used in other devices that have a rotation of more than 360° and need to be limited after rotation. This embodiment only demonstrates a specific application of the rotation limit device and cannot be regarded as a limitation of the present utility model.
[0040] Figure 4 For Figure 2 The schematic diagram of the three-dimensional structure after cutting through the AA section. Please continue to refer to Figure 3 , and combined with Figure 4 In this embodiment, the fixing member 100 is provided with a receiving cavity, and the limiting member 200 is embedded in the receiving cavity. Specifically, the limiting member 200 includes an outer annular wall 220, and a receiving groove 500 is formed between the outer annular wall 220 and the side wall 120 of the receiving cavity. The first stopper 110 and the second stopper 210 are both arranged in the receiving groove 500, and the first stopper 110 is fixedly arranged on the side wall 120 of the receiving cavity, and the second stopper 210 is fixedly arranged on the outer annular wall 220.
[0041] The above-mentioned installation method of the fixing member 100 and the limiting member 200 enables the limiting member 200 to be at least partially accommodated in the accommodating cavity opened by the fixing member 100 in the axial direction, which not only effectively reduces the axial dimension of the limiting member 200 after assembly with the fixing member 100, and helps to reduce the thickness of the rotation limiting device, but also can limit the limiting member 200 in the radial direction, so as to facilitate the assembly of the limiting member 200.
[0042] Please continue to refer to Figure 3 and Figure 4In this embodiment, the elastic member 300 may include a compression spring. Specifically, the compression spring is disposed in the receiving groove 500, and one end of the compression spring abuts against a side of the first stopper 110 that is circumferentially away from the second stopper 210, and the other end of the compression spring abuts against a side of the second stopper 210 that is circumferentially away from the first stopper 110. In other words, the elastic member 300 traverses the receiving groove 500 circumferentially to exclude the area of the first stopper 110 and the second stopper 210.
[0043] This arrangement of the elastic member 300 can not only effectively store elastic potential energy between the limiting member 200 and the fixing member 100, so that the first stopper 110 and the second stopper 210 are kept in contact, but also can realize the detachable installation of the elastic member 300, which is convenient for maintenance or replacement of the elastic member 300. In addition, there is no need to set an additional fixing structure for the elastic member 300, which helps to simplify the structure of the limiting member 200 and the fixing member 100, thereby reducing the manufacturing cost of the rotation limiting device of this embodiment.
[0044] It should be noted that, in other embodiments, a mounting plate fixedly connected to the fixing member 100 may be provided in the accommodating groove 500, so that one end of the elastic member 300 abuts against a side of the second stopper 210 that is circumferentially away from the first stopper 110, and the other end of the elastic member 300 abuts against the mounting plate. This arrangement can also keep the first stopper 110 in contact with the second stopper 210, and enable the limiting member 200 to compress the elastic member 300 under the action of the linkage block 410 to achieve a rotational movement of more than 360°.
[0045] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the receiving groove 500 is a circular groove. That is to say, the side wall 120 of the receiving cavity formed by the fixing member 100 is a circumferential wall.
[0046] By setting the accommodating groove 500 as a circular ring groove, the accommodating groove 500 can be used to guide the compression and extension process of the elastic member 300 during the process of the linkage block 410 driving the limit ring to rotate, and during the process of the limit ring being reset under the elastic restoring force of the elastic member 300, thereby ensuring the smooth rotation of the limit ring.
[0047] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the limiting member 200 may further include an inner annular wall 230 . Specifically, an annular guide groove 240 is formed between the inner annular wall 230 and the outer annular wall 220 , and the linkage block 410 is disposed in the annular guide groove 240 .
[0048] By arranging the linkage block 410 in the annular guide groove 240 formed between the inner annular wall 230 and the outer annular wall 220, not only can the linkage block 410 be guided during the relative rotation of the rotating member 400 and the limiting member 200, but the inner annular wall 230 and the outer annular wall 220 can also be used to radially limit the linkage block 410, thereby facilitating the assembly of the rotating member 400 relative to the limiting member 200.
[0049] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the limit member 200 may further include a fixing block 250. Specifically, the fixing block 250 connects the inner annular wall 230 and the outer annular wall 220. The fixing hole has a first surface and a second surface opposite to each other in the circumferential direction. The first surface is used to form a first limit portion 251, and the second surface is used to form a second limit portion 252. The second limit portion 252 is configured to abut and cooperate with the linkage block 410 when the rotating member 400 rotates in the first direction.
[0050] The setting of the above-mentioned fixed block 250 can not only obtain the first limiting portion 251 and the second limiting portion 252 on the limiting member 200, so that when the rotating member 400 rotates along the first direction, it cooperates with the second limiting portion 252 to limit the maximum rotation range of the rotating member 400 along the first direction, and when the rotating member 400 rotates along the second direction, it cooperates with the first limiting portion 251 to drive the limiting member 200 to rotate the compression elastic member 300 to obtain a rotational movement of more than 360°, but also can realize support for the inner annular wall 230 and the outer annular wall 220 to ensure the structural strength of the limiting member 200.
[0051] It should be noted that, in the present embodiment, when the rotating member 400 rotates so that the linkage block 410 moves in the annular guide groove 240 between the first limiting portion 251 and the second limiting portion 252, the rotation range of the rotating member 400 is approximately 360°; when the rotating member 400 rotates until the linkage block 410 abuts against the first limiting portion 251, the limiting member 200 is driven to compress the elastic member 300 to continue to rotate a certain angle, and the angle is superimposed on the angle that the linkage block 410 rotates in the annular guide groove 240, thereby realizing a rotational movement of the rotating member 400 exceeding 360°.
[0052] It should also be noted that, in this embodiment, only one specific position of the first stopper 110 is illustrated. In actual use, the first stopper 110 can be set at other positions according to the use environment to achieve hard stop protection of the rotating member 400 at different angles. In addition, the stiffness of the elastic member 300 can also be selected according to the angle that the rotating member 400 needs to continue to rotate. For example, when the rotating member 400 needs to continue to rotate at a larger angle, an elastic member 300 with a smaller stiffness can be selected; when the rotating member 400 needs to continue to rotate at a smaller angle, an elastic member 300 with a larger stiffness can be selected.
[0053] Please continue to refer to Figure 3 and Figure 4 In this embodiment, the first limiting portion 251 is provided with a first buffer pad 253 , and the second limiting portion 252 is provided with a second buffer pad 254 .
[0054] By providing a first buffer pad 253 on the first limiting portion 251 and a second buffer pad 254 on the second limiting portion 252, during the rotation of the rotating member 400, no matter whether the rotating member 400 is limited by the first limiting portion 251 or by the second limiting portion 252, the rigid impact between the corresponding surfaces of the linkage block 410 and the fixed block 250 can be buffered, thereby reducing the impact force and noise during the rotation of the rotating member 400.
[0055] In this embodiment, the first buffer pad 253 and the second buffer pad 254 are both made of rubber. The first buffer pad 253 and the second buffer pad 254 of this material form not only have reliable buffering, but also have low cost.
[0056] Figure 5 A schematic top view of the rotation limiting device provided in this embodiment, Figure 6 for Figure 5 BB section view in. Figure 5 and Figure 6 As shown, in this embodiment, the rotation limiting device may further include a rolling bearing 600. Specifically, the rotating member 400 has a rotating shaft 420, and the rolling bearing 600 is fixedly mounted on the rotating shaft 420. The limiting member 200 is provided with a center hole 260, and the limiting member 200 is fixedly mounted on the outer ring of the rolling bearing 600 through the center hole 260.
[0057] Please continue to refer to Figure 6In this embodiment, the rotating shaft 420 of the rotating member 400 is inserted into the central hole 260 of the limiting member 200, and the rolling bearing 600 is supported between the rotating shaft 420 and the central hole 260. This configuration converts the sliding friction between the rotating member 400 and the limiting member 200 into rolling friction, which can effectively reduce the friction loss of the rotating member 400 during the rotation process, and at the same time, can further reduce the noise of the rotation limiting device during the working process.
[0058] Please continue to refer to Figure 6 In this embodiment, the outer ring of the rolling bearing 600 is fixed to the limiting member 200 through the annular pressure plate 700.
[0059] In addition, this embodiment further provides a wafer handling robot, including a driving device and the above-mentioned rotation limiting device, wherein the driving device is installed on the fixing member 100, and the driving device is drivingly connected to the rotating member 400.
[0060] During the operation of the wafer handling robot, the driving device operates to drive the rotating member 400 to rotate to achieve the output of rotational power. By setting the above rotation limiter in the wafer handling robot, the wafer handling robot has all the advantages of the above rotation limiter, which will not be described in detail here.
[0061] It should be noted that, in this embodiment, the fixing member 100 can be set as a hollow structure, and the driving device can be installed in the above hollow structure. The specific structure of the driving device and its connection with the rotating member 400 can refer to the prior art. Since this part is not the focus of improvement of this application, it will not be described in detail.
[0062] It should also be noted that, in the present embodiment, the rotating member 400 can be used as an output disk of the upper arm joint of the wafer handling robot to realize the rotational power output of the upper arm.
[0063] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.
[0064] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.
[0065] In the above embodiments, the descriptions of directions such as “upper”, “lower”, “inner”, “outer”, and “side” are all based on the drawings.
[0066] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A rotation limiting device, characterized in that: include: The fixing member (100) is provided with a first stopper (110); a limiting member (200) rotatably disposed on the fixing member (100), the limiting member (200) being provided with a second stopper (210), the second stopper (210) being used to abut and cooperate with the first stopper (110) to limit the limiting member (200) from rotating along a first direction; an elastic member (300) connecting the limiting member (200) and the fixing member (100), the elastic member (300) being configured to make the second stopper (210) always have a tendency to abut against the first stopper (110), and the elastic member (300) having a compression displacement along a second direction, the second direction being opposite to the first direction; and A rotating member (400) is rotatably disposed on the limiting member (200); a linkage block (410) is fixedly disposed on the rotating member (400); the limiting member (200) is provided with a first limiting portion (251); and the linkage block (410) is configured to abut and cooperate with the first limiting portion (251) when the rotating member (400) rotates along the second direction.
2. The rotation limiting device according to claim 1, characterized in that: The fixing member (100) is provided with a receiving cavity, and the limiting member (200) is embedded in the receiving cavity, wherein the limiting member (200) includes an outer annular wall (220), and a receiving groove (500) is formed between the outer annular wall (220) and a side wall (120) of the receiving cavity, and the first stop block (110) and the second stop block (210) are both arranged in the receiving groove (500), and the first stop block (110) is fixedly arranged on the side wall (120) of the receiving cavity, and the second stop block (210) is fixedly arranged on the outer annular wall (220).
3. The rotation limiting device according to claim 2, characterized in that: The elastic member (300) comprises a compression spring, which is arranged in the accommodating groove (500), and one end of the compression spring abuts against a side of the first stopper (110) that is circumferentially away from the second stopper (210), and the other end of the compression spring abuts against a side of the second stopper (210) that is circumferentially away from the first stopper (110).
4. The rotation limiting device according to claim 2, characterized in that: The accommodating groove (500) is a circular ring-shaped groove.
5. The rotation limiting device according to claim 2, characterized in that: The limiting member (200) further comprises an inner annular wall (230), an annular guide groove (240) is formed between the inner annular wall (230) and the outer annular wall (220), and the linkage block (410) is arranged in the annular guide groove (240).
6. The rotation limiting device according to claim 5, characterized in that: The limiting member (200) further comprises a fixing block (250), wherein the fixing block (250) connects the inner annular wall (230) and the outer annular wall (220), and the fixing block (250) comprises a first surface and a second surface which are opposite to each other in the circumferential direction, wherein the first surface is used to form the first limiting portion (251), and the second surface is used to form the second limiting portion (252), and the second limiting portion (252) is configured to abut and cooperate with the linkage block (410) when the rotating member (400) rotates in the first direction.
7. The rotation limiting device according to claim 6, characterized in that: The first limiting portion (251) is provided with a first buffer pad (253), and the second limiting portion (252) is provided with a second buffer pad (254).
8. The rotation limiting device according to claim 7, characterized in that: The first buffer pad (253) and the second buffer pad (254) are both made of rubber.
9. The rotation limiting device according to any one of claims 1 to 8, characterized in that: The rotation limiting device also includes a rolling bearing (600), wherein the rotating member (400) has a rotating shaft (420), and the rolling bearing (600) is fixedly sleeved on the rotating shaft (420); the limiting member (200) is provided with a center hole (260), and the limiting member (200) is fixedly sleeved on the outer ring of the rolling bearing (600) through the center hole (260).
10. A wafer handling robot, characterized in that: It comprises a driving device and the rotation limiting device according to any one of claims 1 to 9, wherein the driving device is mounted on the fixing member (100), and the driving device is drivingly connected to the rotating member (400).