Vacuum chamber pressurizing device for coated glass

Abstract

The utility model relates to the field of glass processing, in particular to a coated glass vacuum chamber pressurizing device which comprises a shell and a pumping device, a first air inlet cavity, a second air inlet cavity, a mixing cavity and a first air pressure sensor are arranged in the shell, and the air inlet end of the mixing cavity is respectively communicated with the air outlet end of the first air inlet cavity and the air outlet end of the second air inlet cavity. The air outlet end of the mixing cavity is communicated with the vacuum chamber; the second air inlet cavity is connected with the pumping device; a first control valve is arranged at the air outlet end of the first air inlet cavity, and a second control valve is arranged at the air outlet end of the second air inlet cavity. A third control valve is arranged at the air outlet end of the mixing cavity; the first air pressure sensor is arranged in the mixing cavity; according to the design, air with gradually increased pressure intensity can be input into the vacuum chamber, so that the situation that the pressure difference is too large and glass is damaged possibly caused by direct input of external air is avoided; and meanwhile, compared with directly fed air with different pressure intensities, the temperature of the mixed air can be closer to the outside.

Description

Technical Field

[0001] The utility model relates to the field of glass processing, in particular to a coating glass vacuum chamber pressurizing device. Background Art

[0002] After the glass is vacuum sputtered, the vacuum chamber needs to be pressurized to match the external air pressure, and then the coated glass can be taken out. The existing pressurization usually only uses an air inlet valve to introduce external air, and directly injects external air into the vacuum chamber to achieve pressurization and balance the air pressure inside and outside the vacuum chamber; however, this method still has the problem of excessive pressure difference between the introduced external air and the inside of the vacuum chamber, which may cause damage to the glass. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a coated glass vacuum chamber pressurizing device which can avoid excessive pressure difference between pressurized gas and vacuum chamber causing damage to the glass.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a coated glass vacuum chamber pressurizing device, comprising a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber is respectively connected with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, and the air outlet end of the mixing chamber is connected with the vacuum chamber; the first air inlet chamber is filled with external air, the second air inlet chamber is connected with the pumping device, and the pumping device pumps pressure-controllable air into the second air inlet chamber; a first control valve is arranged on the air outlet end of the first air inlet chamber, and a second control valve is arranged on the air outlet end of the second air inlet chamber; a third control valve is arranged on the air outlet end of the mixing chamber; the first air pressure sensor is arranged in the mixing chamber and is electrically connected with the first control valve, the second control valve and the third control valve.

[0005] Furthermore, the portion of the shell corresponding to the mixing chamber is in the shape of a flat plate, and a plurality of gas outlets are evenly arranged facing the bottom of the vacuum chamber.

[0006] Furthermore, the shell includes a fixed shell and a rotating shell, the fixed shell is provided with a first air inlet cavity and a second air inlet cavity, the rotating shell is provided with a mixing cavity, and the rotating shell is rotatably connected to the fixed shell.

[0007] Furthermore, a rotating shaft is connected between the fixed shell and the rotating shell, and the rotating shaft is arranged on the side wall of the vacuum chamber; the rotating shaft is hollow, and the fixed shell and the rotating shell are both connected to the inside of the rotating shaft.

[0008] Furthermore, the rotating shaft is provided with a hollow structure along its circumference at the connection portion corresponding to the fixed shell and the rotating shell; the connection portion between the fixed shell and the rotating shell and the rotating shaft is provided with a through hole and covers the hollow structure, and the through hole is opposite to the hollow structure and connects the fixed shell and the rotating shell.

[0009] Furthermore, there are two rotating shells, which are symmetrically arranged on both sides of the vacuum chamber.

[0010] Furthermore, one end of the rotating shaft extends to the outside of the vacuum chamber and is sleeved with a driving gear; it also includes a rotation control device, which includes a linear reciprocating mechanism, a moving guide rail, a moving rack and a first connecting rod. A moving guide rail is provided on the outside of the vacuum chamber, and the moving rack moves along the moving guide rail, and the moving rack is meshed with the driving gear; the output end of the linear reciprocating mechanism linearly reciprocates along a length direction perpendicular to the moving guide rail and is connected to the moving rack by a first connecting rod.

[0011] Furthermore, the linear reciprocating mechanism includes a slider, a fixed slide rail, a second connecting rod, a third connecting rod and a rotating motor. The fixed slide rail is perpendicular to the movable guide rail, and the slider moves along the fixed slide rail. The two sides of the slider are respectively connected to the adjacent movable racks with a first connecting rod; the lower side of the slider is sequentially connected to the second connecting rod, the third connecting rod and the rotating motor.

[0012] The beneficial effects of the utility model are as follows: air of different pressures can be formed by mixing the air of the first air inlet chamber and the air of the second air inlet chamber in the mixing chamber, so that air of gradually increasing pressure can be input into the vacuum chamber to avoid excessive pressure difference and damage to the glass caused by directly inputting outside air; at the same time, the temperature of the mixed air can be closer to the outside world than the directly input air of different pressures; the pressure of the mixed air in the mixing chamber is identified by the first air pressure sensor to ensure that the air is input into the vacuum chamber under the designed pressure conditions in cooperation with the control of the first control valve, the second control valve and the third control valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the first state of the rotating shell of the coated glass vacuum chamber pressurizing device according to the specific embodiment of the utility model;

[0014] Figure 2 It is a structural schematic diagram of the second state of the rotating shell of the coated glass vacuum chamber pressurizing device according to the specific embodiment of the utility model;

[0015] Figure 3 It is a structural schematic diagram of the rotating shaft of the pressurizing device for the coated glass vacuum chamber according to a specific embodiment of the utility model;

[0016] Figure 4It is a structural schematic diagram of a rotation control device of a coated glass vacuum chamber pressurizing device according to a specific implementation mode of the utility model.

[0017] Description of labels:

[0018] 1. Fixed shell; 2. Rotating shell; 21. Mixing chamber; 3. Rotating shaft; 31. Hollow structure; 4. Driving gear; 5. Moving guide rail; 6. Moving rack; 7. Sliding block; 8. Fixed slide rail; 9. First connecting rod; 10. Second connecting rod; 11. Third connecting rod; 12. Vacuum chamber. DETAILED DESCRIPTION

[0019] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in conjunction with the implementation modes and the accompanying drawings.

[0020] Please refer to Figures 1 to 4 , a pressurizing device for a coated glass vacuum chamber 12, comprising a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber 21 and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber 21 is respectively connected with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, and the air outlet end of the mixing chamber 21 is connected with the vacuum chamber 12; the first air inlet chamber is filled with external air, the second air inlet chamber is connected with the pumping device, and the pumping device pumps air with controllable pressure into the second air inlet chamber; a first control valve is arranged on the air outlet end of the first air inlet chamber, and a second control valve is arranged on the air outlet end of the second air inlet chamber; a third control valve is arranged on the air outlet end of the mixing chamber 21; the first air pressure sensor is arranged in the mixing chamber 21 and is electrically connected with the first control valve, the second control valve and the third control valve.

[0021] From the above description, it can be seen that the beneficial effect of the utility model is that: by mixing the air of the first air inlet chamber and the air of the second air inlet chamber in the mixing chamber 21, air of different pressures can be formed, so that air with gradually increased pressure can be input into the vacuum chamber 12 to avoid excessive pressure difference and damage to the glass caused by directly inputting external air; at the same time, the temperature of the mixed air can be closer to the outside world than the directly input air of different pressures; the first air pressure sensor is used to identify the pressure of the mixed air in the mixing chamber 21 to ensure that the air is input into the vacuum chamber 12 under the designed pressure conditions in cooperation with the control of the first control valve, the second control valve and the third control valve.

[0022] Furthermore, the portion of the shell corresponding to the mixing chamber 21 is in the shape of a flat plate, and a plurality of gas outlets are evenly arranged facing the bottom of the vacuum chamber 12 .

[0023] It can be seen from the above description that the flat plate design of the portion of the shell corresponding to the mixing chamber 21 allows the input air to flow evenly toward the glass, thereby ensuring even distribution of the pressurized air.

[0024] Furthermore, the shell includes a fixed shell 1 and a rotating shell 2 , the fixed shell 1 is provided with a first air inlet cavity and a second air inlet cavity, the rotating shell 2 is provided with a mixing cavity 21 , and the rotating shell 2 is rotatably connected to the fixed shell 1 .

[0025] It can be seen from the above description that the mixing chamber 21 is provided in the rotating shell 2, and the rotating shell 2 can rotate relative to the fixed shell 1, so that the rotating shell 2 can rotate and avoid during the coating process stage.

[0026] Furthermore, a rotating shaft 3 is connected between the fixed shell 1 and the rotating shell 2 , and the rotating shaft 3 is arranged on the side wall of the vacuum chamber 12 ; the rotating shaft 3 is hollow, and the fixed shell 1 and the rotating shell 2 are both connected to the inside of the rotating shaft 3 .

[0027] It can be seen from the above description that the rotating shaft 3 serves as a hinge structure and can also serve as a structure for connecting the fixed housing 1 and the rotating housing 2 .

[0028] Furthermore, the rotating shaft 3 is provided with a hollow structure 31 along its circumference at the connection portion corresponding to the fixed shell 1 and the rotating shell 2; the connection portion between the fixed shell 1 and the rotating shell 2 and the rotating shaft 3 is provided with a through hole and covers the hollow structure 31, and the through hole is opposite to the hollow structure 31 and connects the fixed shell 1 and the rotating shell 2.

[0029] From the above description, it can be seen that the fixed shell 1 and the rotating shell 2 are connected by the hollow structure 31 on the rotating shaft 3 and the through hole at the connecting part of the fixed shell 1 and the rotating shell 2; at the same time, the non-hollow structure 31 of the rotating shaft 3 at the connecting part serves as a supporting structure for the rotation cooperation.

[0030] Furthermore, there are two rotating shells 2 symmetrically arranged on both sides of the vacuum chamber 12 .

[0031] It can be seen from the above description that the symmetrical design of the rotating shell 2 ensures uniform distribution of the air output from the mixing chamber 21 .

[0032] Furthermore, one end of the rotating shaft 3 extends to the outside of the vacuum chamber 12 and is sleeved with a driving gear 4; it also includes a rotation control device, which includes a linear reciprocating mechanism, a moving guide rail 5, a moving rack 6 and a first connecting rod 9. A moving guide rail 5 is provided on the outside of the vacuum chamber 12, and the moving rack 6 moves along the moving guide rail 5, and the moving rack 6 is meshed with the driving gear 4; the output end of the linear reciprocating mechanism moves linearly and reciprocates along a length direction perpendicular to the moving guide rail 5 and is connected to the moving rack 6 by a first connecting rod 9.

[0033] As can be seen from the above description, the rotation control device is used to rotate the rotating housing 2. Specifically, through the cooperation of the linear reciprocating mechanism and the first connecting rod 9, the moving rack 6 is driven to reciprocate on the moving guide rail 5, and the moving rack 6 cooperates with the driving gear 4 to realize the rotation control of the rotating shaft 3 and the rotating housing 2.

[0034] Furthermore, the linear reciprocating mechanism includes a slider 7, a fixed slide rail 8, a second connecting rod 10, a third connecting rod 11 and a rotating motor. The fixed slide rail 8 is perpendicular to the movable guide rail 5. The slider 7 moves along the fixed slide rail 8. The two sides of the slider 7 are respectively connected to the adjacent movable racks 6 with the first connecting rod 9; the lower side of the slider 7 is sequentially connected to the second connecting rod 10, the third connecting rod 11 and the rotating motor.

[0035] From the above description, it can be seen that the linear reciprocating mechanism drives the third connecting rod 11 by rotating the motor, and the third connecting rod 11 drives the second connecting rod 10 and the slider 7 to move, and the slider 7 reciprocates along the fixed slide rail 8; the moving slider 7 drives the first connecting rod 9 and the moving rack 6 to move.

[0036] Embodiment 1:

[0037] Application scenario: After the glass is vacuum sputtered, the vacuum chamber needs to be pressurized to match the external air pressure, and then the coated glass can be taken out. The existing pressurization usually only uses an air inlet valve to introduce external air, and directly injects external air into the vacuum chamber to achieve pressurization and balance the air pressure inside and outside the vacuum chamber; however, this method still has the problem of excessive pressure difference between the introduced external air and the inside of the vacuum chamber, which may cause damage to the glass.

[0038] like Figures 1 to 4 As shown, the pressurizing device of the coated glass vacuum chamber 12 of this embodiment includes a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber 21 and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber 21 is respectively connected with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, and the air outlet end of the mixing chamber 21 is connected with the vacuum chamber 12; the first air inlet chamber is filled with external air, the second air inlet chamber is connected with the pumping device, and the pumping device pumps pressure-controllable air into the second air inlet chamber; a first control valve is arranged on the air outlet end of the first air inlet chamber, and a second control valve is arranged on the air outlet end of the second air inlet chamber; a third control valve is arranged on the air outlet end of the mixing chamber 21; the first air pressure sensor is arranged in the mixing chamber 21 and is electrically connected with the first control valve, the second control valve and the third control valve.

[0039] The housing comprises a fixed housing 1 and a rotating housing 2. The fixed housing 1 is provided with a first air inlet cavity and a second air inlet cavity. The rotating housing 2 is provided with a mixing cavity 21. The rotating housing 2 is rotatably connected to the fixed housing 1. The rotating housing 2 is in a flat plate shape and is evenly provided with a plurality of air outlets facing the bottom of the vacuum chamber 12. There are two rotating housings 2, which are symmetrically arranged on both sides of the vacuum chamber 12.

[0040] A rotating shaft 3 is connected between the fixed housing 1 and the rotating housing 2, and the rotating shaft 3 is arranged on the side wall of the vacuum chamber 12; the rotating shaft 3 is hollow, and the fixed housing 1 and the rotating housing 2 are both connected to the inside of the rotating shaft 3. Specifically, the rotating shaft 3 is provided with a hollow structure 31 along its circumference at the connection part corresponding to the fixed housing 1 and the rotating housing 2; the connection part of the fixed housing 1 and the rotating housing 2 with the rotating shaft 3 is provided with a through hole and covers the hollow structure 31, and the through hole is opposite to the hollow structure 31 and connects the fixed housing 1 and the rotating housing 2.

[0041] One end of the rotating shaft 3 extends to the outside of the vacuum chamber 12 and is sleeved with a driving gear 4; it also includes a rotation control device, which includes a linear reciprocating mechanism, a moving guide rail 5, a moving rack 6 and a first connecting rod 9. The moving guide rail 5 is provided on the outside of the vacuum chamber 12, and the moving rack 6 moves along the moving guide rail 5, and the moving rack 6 is meshed with the driving gear 4; the output end of the linear reciprocating mechanism moves linearly and reciprocates along the length direction perpendicular to the moving guide rail 5, and the first connecting rod 9 is connected to the moving rack 6. The linear reciprocating mechanism includes a slider 7, a fixed slide rail 8, a second connecting rod 10, a third connecting rod 11 and a rotating motor. The fixed slide rail 8 is perpendicular to the moving guide rail 5, and the slider 7 moves along the fixed slide rail 8. The two sides of the slider 7 are respectively connected to the adjacent moving racks 6 with first connecting rods 9; the lower side of the slider 7 is sequentially connected to the second connecting rod 10, the third connecting rod 11 and the rotating motor.

[0042] Working principle: the fixed housing 1 is arranged on the upper side of the vacuum chamber 12, and the rotating housing 2 is arranged in the vacuum chamber 12. During the coating process, the driving gear 4 is controlled to rotate by the rotation control device, thereby driving the rotating shaft 3 and the rotating housing 2 to rotate. At this time, the rotating housing 2 rotates toward the side wall of the vacuum chamber 12, and the side with the air outlet is facing the side wall of the vacuum chamber 12 to avoid it, and at the same time, it also prevents impurities generated during the coating process from falling into the air outlet. The rotating housing 2 is in the first state. After the coating process, pressurized gas needs to be introduced to make the pressure in the vacuum chamber 12 consistent with the outside to take out the glass. At this time, the rotating housing 2 is controlled by the rotation control device to rotate toward the upper side of the vacuum chamber 12, so that its air outlet can face the glass, and the rotating housing 2 is in the second state; then, through the cooperation of the first air inlet cavity, the second air inlet cavity and the mixing cavity 21, the opening and closing of multiple control valves are controlled by the first air pressure sensor, and air of different pressures is gradually input, so that the vacuum chamber 12 gradually matches the external air pressure environment to safely take out the coated glass after approaching.

[0043] In summary, the coated glass vacuum chamber pressurizing device provided by the utility model can form air of different pressures by mixing the air of the first air inlet chamber and the air of the second air inlet chamber in the mixing chamber, so that air with gradually increased pressure can be input into the vacuum chamber to avoid excessive pressure difference and damage to the glass caused by directly inputting outside air; at the same time, the temperature of the mixed air can be closer to the outside world than the directly input air of different pressures; the pressure of the mixed air in the mixing chamber is identified by the first air pressure sensor to ensure that the air is input into the vacuum chamber under the designed pressure conditions in cooperation with the control of the first control valve, the second control valve and the third control valve.

[0044] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical field, are also included in the patent protection scope of the present invention.

Claims

1. A coated glass vacuum chamber pressurizing device, characterized in that: It includes a shell and a pumping device, wherein a first air inlet chamber, a second air inlet chamber, a mixing chamber and a first air pressure sensor are arranged in the shell, the air inlet end of the mixing chamber is respectively connected with the air outlet end of the first air inlet chamber and the air outlet end of the second air inlet chamber, and the air outlet end of the mixing chamber is connected with a vacuum chamber; the first air inlet chamber is filled with external air, the second air inlet chamber is connected with the pumping device, and the pumping device pumps air with controllable pressure into the second air inlet chamber; a first control valve is arranged on the air outlet end of the first air inlet chamber, and a second control valve is arranged on the air outlet end of the second air inlet chamber; a third control valve is arranged on the air outlet end of the mixing chamber; the first air pressure sensor is arranged in the mixing chamber and is electrically connected with the first control valve, the second control valve and the third control valve.

2. The coated glass vacuum chamber pressurizing device according to claim 1, characterized in that: The portion of the shell corresponding to the mixing chamber is in a flat plate shape, and a plurality of gas outlets are evenly arranged facing the bottom of the vacuum chamber.

3. The coated glass vacuum chamber pressurizing device according to claim 2, characterized in that: The shell comprises a fixed shell and a rotating shell. A first air inlet cavity and a second air inlet cavity are arranged in the fixed shell. A mixing cavity is arranged in the rotating shell. The rotating shell is rotatably connected to the fixed shell.

4. The coated glass vacuum chamber pressurizing device according to claim 3, characterized in that: A rotating shaft is connected between the fixed shell and the rotating shell, and the rotating shaft is arranged on the side wall of the vacuum chamber; the rotating shaft is hollow, and the fixed shell and the rotating shell are both connected to the inside of the rotating shaft.

5. The coated glass vacuum chamber pressurizing device according to claim 4, characterized in that: The rotating shaft is provided with a hollow structure along its circumference at the connection part corresponding to the fixed shell and the rotating shell; the connection part between the fixed shell and the rotating shell and the rotating shaft is provided with a through hole and covers the hollow structure, and the through hole is opposite to the hollow structure and connects the fixed shell and the rotating shell.

6. The coated glass vacuum chamber pressurizing device according to claim 4, characterized in that: There are two rotating shells, which are symmetrically arranged on both sides of the vacuum chamber.

7. The coated glass vacuum chamber pressurizing device according to claim 6, characterized in that: One end of the rotating shaft extends to the outside of the vacuum chamber and is sleeved with a driving gear; it also includes a rotation control device, which includes a linear reciprocating mechanism, a moving guide rail, a moving rack and a first connecting rod. A moving guide rail is provided on the outside of the vacuum chamber, and the moving rack moves along the moving guide rail, and the moving rack is meshed with the driving gear; the output end of the linear reciprocating mechanism linearly reciprocates along a length direction perpendicular to the moving guide rail and is connected to the moving rack by a first connecting rod.

8. The coated glass vacuum chamber pressurizing device according to claim 7, characterized in that: The linear reciprocating mechanism includes a slider, a fixed slide rail, a second connecting rod, a third connecting rod and a rotating motor. The fixed slide rail is perpendicular to the movable guide rail. The slider moves along the fixed slide rail. The two sides of the slider are respectively connected to the adjacent movable racks with the first connecting rod; the lower side of the slider is connected to the second connecting rod, the third connecting rod and the rotating motor in sequence.

Images