Vacuum coating chamber and vacuum coating equipment

Abstract

The utility model discloses a vacuum coating chamber and vacuum coating equipment, and relates to the technical field of vacuum coating equipment. The vacuum coating chamber comprises a coating cavity, a coating frame and a protection body, the coating frame is arranged in the coating cavity, a plurality of hanging positions are arranged in the circumferential direction of the coating frame and used for hanging substrates, and the coating surfaces of the substrates are hung on the hanging positions in an outward mode and then can surround the coating frame in the circumferential direction. The protection body comprises a top protection body and a bottom protection body, and the top protection body is arranged between the top wall of the coating cavity and the coating frame and used for enclosing the space between the coating frame and the top wall of the coating cavity. The bottom protection body is arranged between the bottom wall of the coating cavity and the coating frame and used for enclosing the space between the coating frame and the bottom wall of the coating cavity. The top protection body, the base plate in the circumferential direction of the film coating frame and the bottom protection body divide the film coating cavity into an inner space and an outer space, the outer space is a film coating space, the inner space is a non-film coating space, and the probability that particles generated in the non-film coating space fall on the base plate is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a vacuum coating chamber and vacuum coating equipment. Background Art

[0002] The vacuum coating chamber is the key chamber for the vacuum coating equipment to carry out the coating process. The substrate is mounted on the coating rack in the vacuum coating chamber for coating. During the vacuum coating process, the coating surface of the substrate needs to be kept clean. Once dust or particles fall on the coating surface of the substrate, it will seriously affect the coating quality of the substrate.

[0003] In the prior art, the probability of the substrate coating surface being contaminated by particles is often reduced by improving the substrate handling efficiency and optimizing the handling action of the handling mechanism. However, since the coating rack in the vacuum coating chamber rotates during the coating process, particles will also be generated. These particles may fall on the coating surface of the substrate being coated, thereby affecting the coating quality of the substrate. Utility Model Content

[0004] The utility model aims to provide a vacuum coating chamber and vacuum coating equipment to prevent particles generated by the rotation of a coating frame in the vacuum coating chamber from falling on the coating surface of a substrate, thereby further improving the coating quality of the substrate.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] Vacuum coating chamber, comprising:

[0007] Coating chamber;

[0008] A coating rack is arranged in the coating chamber, and a plurality of mounting positions are arranged around the coating rack, and the mounting positions are used to mount substrates. The coating surfaces of the plurality of substrates are mounted on the plurality of mounting positions one by one with the coating surfaces facing outwards, and the coating rack can be enclosed around the coating rack.

[0009] The protective body comprises a top protective body and a bottom protective body, wherein the top protective body is arranged between the top wall of the coating chamber and the coating frame, and is used to enclose the space between the coating frame and the top wall of the coating chamber; the bottom protective body is arranged between the bottom wall of the coating chamber and the coating frame, and is used to enclose the space between the coating frame and the bottom wall of the coating chamber; the top protective body, the substrate around the coating frame and the bottom protective body separate the coating chamber into two spaces, the outer space is the coating space, and the inner space is the non-coating space.

[0010] As an optional solution of the vacuum coating chamber, the top protective body includes a top wall connector and a first circumferential body, the top wall connector is detachably connected to the top wall of the coating chamber, and the outer edge of the top wall connector protrudes from the circumferential arrangement of the coating rack; one end of the first circumferential body is connected to the top wall connector, and the other end is inserted into the top end of the coating rack;

[0011] The bottom protective body includes a bottom wall connector and a second circumferential body, the bottom wall connector is detachably connected to the bottom wall of the coating chamber, and the outer edge of the bottom wall connector protrudes from the circumferential setting of the coating frame, one end of the second circumferential body is connected to the bottom wall connector, and the other end is inserted into the bottom end of the coating frame.

[0012] As an optional solution for the vacuum coating chamber, a mounting cavity is provided on the top wall connector, and the mounting cavity passes through the top wall connector. The vacuum coating chamber also includes a first driving member, which is disposed in the mounting cavity. The first driving member is connected to the central axis of the coating frame and is used to drive the coating frame to rotate.

[0013] As an optional solution of the vacuum coating chamber, the top wall connector includes a plurality of first annular plates, and the plurality of first annular plates are spliced ​​end to end to form the top wall connector;

[0014] The bottom wall connector includes a plurality of second annular plates, and the plurality of second annular plates are spliced ​​end to end to form the bottom wall connector.

[0015] As an optional solution of the vacuum coating chamber, the first annular plate is connected to the top wall of the coating chamber through a first quick-release structure;

[0016] The second annular plate is connected to the bottom wall of the coating chamber through a second quick-release structure.

[0017] As an optional solution for the vacuum coating chamber, the first quick-release structure and the second quick-release structure are both quick-locking pins.

[0018] As an optional solution of the vacuum coating chamber, the first circumferential body includes a plurality of first arc-shaped plates, and the plurality of first arc-shaped plates are spliced ​​end to end to form the first circumferential body;

[0019] The second circumferential body includes a plurality of second arc-shaped plates, and the plurality of second arc-shaped plates are spliced ​​end to end to form the second circumferential body.

[0020] As an optional solution of the vacuum coating chamber, a first arc-shaped groove is provided on a side of the first annular plate close to the first arc-shaped plate, and the first arc-shaped plate is hung in the first arc-shaped groove;

[0021] A second arc-shaped groove is provided on one side of the second annular plate close to the second arc-shaped plate, and the second arc-shaped plate is plugged into the second arc-shaped groove.

[0022] As an optional solution of the vacuum coating chamber, the protective body is made of stainless steel;

[0023] And / or, the surface roughness Ra of the protective body is greater than 3 micrometers.

[0024] A vacuum coating device comprises a vacuum coating chamber as described in any of the above schemes.

[0025] Beneficial effects of the utility model:

[0026] The vacuum coating chamber provided by the utility model hangs the coating surface of the substrate outward on the mounting position of the coating rack in the coating cavity, and multiple mounting positions are arranged along the circumference of the coating rack, so that the circumference of the coating rack can be enclosed after the multiple mounting positions are fully hung with substrates. By setting a protective body, the protective body includes a top protective body and a bottom protective body. The top protective body is arranged between the top wall of the coating cavity and the coating rack, and is used to enclose the space between the coating rack and the top wall of the coating cavity. The bottom protective body is arranged between the bottom wall of the coating cavity and the coating rack, and is used to enclose the space between the coating rack and the bottom wall of the coating cavity. The top protective body, the substrate around the coating rack and the bottom protective body divide the coating cavity into two spaces, the outer space is the coating space, and the inner space is the non-coating space. The coating rack is located in the non-coating space, and the coating source is arranged in the coating space to coat the coating surface of the substrate. When the coating rack rotates to drive the circumferential substrate to be coated, particles generated in the non-coating space are not easy to enter the coating space, thereby reducing the probability of particles generated in the non-coating space falling on the coated surface of the substrate, further improving the coating quality of the substrate.

[0027] The vacuum coating equipment provided by the utility model comprises the above-mentioned vacuum coating chamber. When a substrate is coated in the above-mentioned vacuum coating chamber, the particle adhesion on the coating surface of the substrate is reduced during the coating process, thereby further improving the coating quality of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of a top protective body and a part of a substrate hidden inside a vacuum coating chamber provided by a specific embodiment of the utility model;

[0029] Figure 2 It is a structural schematic diagram of a substrate mounted on a coating frame provided by a specific embodiment of the utility model;

[0030] Figure 3 It is a structural schematic diagram of a top protective body, a bottom protective body and a circumferential protective plate provided by a specific embodiment of the utility model;

[0031] Figure 4 It is a schematic structural diagram of the cooperation between the base plate and the bottom protection body provided in a specific embodiment of the utility model.

[0032] In the figure:

[0033] 100. Substrate;

[0034] 1. Coating rack; 11. Mounting position;

[0035] 2. Bottom protection body; 21. Bottom wall connecting body; 211. Second annular plate; 22. Second circumferential body; 221. Second arc-shaped plate; 222. Second connecting plate;

[0036] 3. A first driving member;

[0037] 4. Top protection body; 41. Top wall connector; 411. First annular plate; 412. Mounting cavity; 42. First circumferential body; 421. First arc-shaped plate; 422. First connecting plate;

[0038] 5. Circumferential protective plate. DETAILED DESCRIPTION

[0039] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] like Figure 1-Figure 4As shown, this embodiment provides a vacuum coating chamber, including a coating chamber, a coating rack 1 and a protective body. The coating rack 1 is arranged in the coating chamber. The coating rack 1 is provided with a plurality of mounting positions 11 in the circumference. The mounting positions 11 are used to mount substrates 100. The coating surfaces of the plurality of substrates 100 are mounted on the plurality of mounting positions 11 one by one with the coating surfaces facing outwards, and the circumference of the coating rack 1 can be enclosed. The protective body includes a top protective body 4 and a bottom protective body 2. The top protective body 4 is arranged between the top wall of the coating chamber and the coating rack 1, and is used to enclose the space between the coating rack 1 and the top wall of the coating chamber; the bottom protective body 2 is arranged between the bottom wall of the coating chamber and the coating rack 1, and is used to enclose the space between the coating rack 1 and the bottom wall of the coating chamber. The top protective body 4, the substrates 100 in the circumference of the coating rack 1 and the bottom protective body 2 divide the coating chamber into two spaces, the outer space is the coating space, and the inner space is the non-coating space. The coating rack 1 is located in the non-coating space, and the coating source is arranged in the coating space to coat the coating surface of the substrate 100. When the coating rack 1 rotates to drive the circumferential substrate 100 to be coated, the particles generated in the non-coating space are not easy to enter the coating space, thereby reducing the probability of the particles generated in the non-coating space falling on the coating surface of the substrate 100, and further improving the coating quality of the substrate 100.

[0042] Specifically, the top protective body 4 includes a top wall connector 41 and a first circumferential body 42. The top wall connector 41 is detachably connected to the top wall of the coating chamber, and the outer edge of the top wall connector 41 protrudes from the circumferential arrangement of the coating frame 1; one end of the first circumferential body 42 is connected to the top wall connector 41, and the other end is inserted into the top end of the coating frame 1. A very small gap is left between the inner side of the mounted substrate 100 and the outer wall of the first circumferential body 42, which can relatively close the space between the coating frame 1 and the top wall of the coating chamber without affecting the rotation of the substrate 100. The bottom protection body 2 includes a bottom wall connector 21 and a second circumferential body 22. The bottom wall connector 21 is detachably connected to the bottom wall of the coating chamber, and the outer edge of the bottom wall connector 21 protrudes from the circumferential arrangement of the coating rack 1. One end of the second circumferential body 22 is connected to the bottom wall connector 21, and the other end is inserted into the bottom end of the coating rack 1. A small gap is left between the inner side of the mounted substrate 100 and the outer wall of the second circumferential body 22, which can relatively close the space between the coating rack 1 and the bottom wall of the coating chamber without affecting the rotation of the substrate 100. The top wall connector 41 and the bottom wall connector 21 are respectively protruded from the top and bottom ends of the coating rack 1, which can block the small gap between the first circumferential body 42 and the substrate 100, and the small gap between the second circumferential body 22 and the substrate 100, so as to prevent particles in the non-coating area from overflowing from the small gap between the substrate 100 and the first circumferential body 42 and the second circumferential body 22 and attaching to the coating surface of the substrate 100, and the protective performance is better. The top wall connector 41 is detachably connected to the top wall of the coating chamber, and the bottom wall connector 21 is detachably connected to the bottom wall of the coating chamber, which makes it easier to install and remove the protective body, thereby providing convenience for the maintenance of the coating rack 1. It should be noted that there may be gaps between adjacent substrates 100, and the particles that overflow through the gaps are very few and can be ignored.

[0043] In this embodiment, a circumferential protective plate 5 is provided at a position of the coating chamber wall where no coating source is provided. The circumferential protective plate 5 is used to protect the coating chamber wall to prevent the coating chamber from being dirty. The circumferential protective plate 5 is periodically disassembled and cleaned.

[0044] Specifically, the vacuum coating chamber further includes a first driving member 3, which is connected to the central axis of the coating rack 1 and is used to drive the coating rack 1 to rotate. In order to achieve that when mounting the substrate 100, different mounting positions 11 are aligned with the conveying port to mount and unload the substrate 100, the coating rack 1 is driven to rotate by the first driving member 3 so that different mounting positions 11 are aligned with the conveying port. At the same time, when the substrate 100 is mounted on the coating rack 1 for circumferential coating, the first driving member 3 drives the coating rack 1 to rotate to ensure the uniformity of the coating of the substrate 100 mounted on the coating rack 1 in the circumferential direction.

[0045] Furthermore, a mounting cavity 412 is provided on the top wall connector 41, and the mounting cavity 412 is provided through the top wall connector 41, and the first driving member 3 is provided in the mounting cavity 412. The first driving member 3 is provided in the mounting cavity 412, and the first driving member 3 is a motor, and the main shaft of the motor extends into the non-coating space through a through end of the mounting cavity 412 and is connected to the central axis of the coating frame 1. The other through end of the mounting cavity 412 is provided corresponding to the avoidance hole on the top wall of the coating cavity, and the motor extends out of the vacuum coating chamber through the other through end of the mounting cavity 412 and the avoidance hole on the top wall of the coating cavity, and the motor is enclosed between the mounting cavity 412 and the top wall of the coating cavity, thereby realizing the separation of the motor and the coating space, and preventing particles generated on the motor from flying to the coating space and adhering to the coating surface of the substrate 100.

[0046] Further, the top wall connector 41 includes a plurality of first annular plates 411, which are spliced ​​end to end to form the top wall connector 41; the bottom wall connector 21 includes a plurality of second annular plates 211, which are spliced ​​end to end to form the bottom wall connector 21. The top wall connector 41 and the bottom wall connector 21 are both configured as split structures to facilitate the installation of the protective body. Since the center of the top wall connector 41 is provided with a mounting cavity 412, the plurality of first annular plates 411 are configured as first annular plates 411 of various diameters, which are assembled according to the diameter size. Starting from the center of the top wall connector 41, the first annular plates 411 of the smallest diameter are connected end to end to form the inner circle of the top wall connector 41, and the first annular plates 411 of the largest diameter are connected end to end to form the outer circle of the top wall connector 41. Similarly, the bottom wall connector 21 can also be configured with second annular plates 211 of various diameters according to the configuration of the top wall connector 41, and assembled according to the diameter size to form the bottom wall connector 21.

[0047] Furthermore, the first annular plate 411 is connected to the top wall of the coating chamber through a first quick-release structure; and the second annular plate 211 is connected to the bottom wall of the coating chamber through a second quick-release structure. In this embodiment, the protective body is completely supported by the inner wall of the coating chamber. To facilitate installation and disassembly, the first annular plate 411 is directly connected to the top wall of the coating chamber through the first quick-release structure, spliced ​​to form a top wall connector 41, and then the first circumferential body 42 is connected to the top wall connector 41. The second annular plate 211 is connected to the bottom wall of the coating chamber through a second quick-release structure, spliced ​​to form a bottom wall connector 21, and then the second circumferential body 22 is connected to the bottom wall connector 21.

[0048] Specifically, the first quick-release structure and the second quick-release structure are both quick-locking pins, which can realize quick disassembly of the first annular plate 411 and the top wall of the coating chamber, and quick disassembly of the second annular plate 211 and the bottom wall of the coating chamber, thereby improving the disassembly efficiency of the protective body.

[0049] Of course, in other embodiments, the first quick-release structure and the second quick-release structure may also be other quick-release structures such as bolt connection, clip connection or plug connection.

[0050] Similarly, in order to facilitate the disassembly and assembly of the first circumferential body 42 and the second circumferential body 22 and reduce the processing difficulty, the first circumferential body 42 includes a plurality of first arcuate plates 421, which are spliced ​​end to end to form the first circumferential body 42; the second circumferential body 22 includes a plurality of second arcuate plates 221, which are spliced ​​end to end to form the second circumferential body 22.

[0051] Specifically, a first arc groove is provided on one side of the first annular plate 411 close to the first arc plate 421, and the first arc plate 421 is hung in the first arc groove. The two first arc grooves on two adjacent first annular plates 411 are butted, and a first arc plate 421 is hung in each first arc groove, and a plurality of first arc plates 421 are enclosed to form a first circumferential body 42. In order to prevent a gap between two adjacent first arc plates 421, a first connecting plate 422 is provided between two adjacent first arc plates 421, and the two ends of the first connecting plate 422 are respectively inserted into the two adjacent first arc grooves, and the first connecting plate 422 can block the gap between the two first arc plates 421. Specifically, a hook is provided in the first arc groove, and a hook groove is provided on the first arc plate 421, and the first arc plate 421 is inserted into the first arc groove and hooked on the hook through the hook groove.

[0052] Similarly, a second arc groove is provided on one side of the second annular plate 211 close to the second arc plate 221, and the second arc plate 221 is plugged into the second arc groove. The second arc grooves on two adjacent second annular plates 211 are butted, and a second arc plate 221 is plugged into each second arc groove, and a plurality of second arc plates 221 are enclosed to form a second circumferential body 22. In order to prevent a gap between two adjacent second arc plates 221, a second connecting plate 222 is provided between two adjacent second arc plates 221, and the two ends of the second connecting plate 222 are respectively inserted into two adjacent second arc grooves, and the second connecting plate 222 can block the gap between the two second arc plates 221.

[0053] Furthermore, the protective body is made of stainless steel; and / or the surface roughness of the protective body Ra>3 microns. The protective body made of stainless steel is not easy to rust, so that the rust spots on the protective body can be prevented from falling onto the coating surface of the substrate 100 and affecting the coating quality of the substrate 100.

[0054] Furthermore, in the present embodiment, the surface of the protective body made of stainless steel is sandblasted to increase the surface roughness of the protective body so that the surface roughness Ra of the protective body is greater than 3 microns. With such a setting, during the coating process in the coating chamber, the film material adsorbed on the surface of the protective body is not easy to fall off, thereby preventing the film material on the protective body from falling onto the coating surface of the substrate 100 and affecting the coating quality of the substrate 100.

[0055] This embodiment also provides a vacuum coating device, including the above vacuum coating chamber. When the substrate 100 is coated in the above vacuum coating chamber, the particle adhesion on the coating surface of the substrate 100 is reduced during the coating process, and the coating quality of the substrate 100 is further improved.

[0056] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. Vacuum coating chamber, characterized in that, include: Coating chamber; A coating frame (1) is arranged in the coating chamber, and a plurality of mounting positions (11) are arranged in the circumference of the coating frame (1), and the mounting positions (11) are used to mount substrates (100). When the coating surfaces of the plurality of substrates (100) are mounted one by one on the plurality of mounting positions (11) facing outward, the circumference of the coating frame (1) can be enclosed; The protective body comprises a top protective body (4) and a bottom protective body (2), wherein the top protective body (4) is arranged between the top wall of the coating chamber and the coating frame (1) and is used to enclose the space between the coating frame (1) and the top wall of the coating chamber; the bottom protective body (2) is arranged between the bottom wall of the coating chamber and the coating frame (1) and is used to enclose the space between the coating frame (1) and the bottom wall of the coating chamber; the top protective body (4), the substrate (100) around the coating frame (1) and the bottom protective body (2) separate the coating chamber into two inner and outer spaces, the outer space being a coating space and the inner space being a non-coating space.

2. The vacuum coating chamber according to claim 1, characterized in that: The top protective body (4) comprises a top wall connector (41) and a first circumferential body (42); the top wall connector (41) is detachably connected to the top wall of the coating chamber, and the outer edge of the top wall connector (41) protrudes from the circumferential arrangement of the coating frame (1); one end of the first circumferential body (42) is connected to the top wall connector (41), and the other end is inserted into the top end of the coating frame (1); The bottom protective body (2) comprises a bottom wall connector (21) and a second circumferential body (22); the bottom wall connector (21) is detachably connected to the bottom wall of the coating chamber, and the outer edge of the bottom wall connector (21) protrudes from the circumferential arrangement of the coating frame (1); one end of the second circumferential body (22) is connected to the bottom wall connector (21), and the other end is inserted into the bottom end of the coating frame (1).

3. The vacuum coating chamber according to claim 2, characterized in that: The top wall connector (41) is provided with a mounting cavity (412), and the mounting cavity (412) is arranged through the top wall connector (41). The vacuum coating chamber also includes a first driving member (3), and the first driving member (3) is arranged in the mounting cavity (412). The first driving member (3) is connected to the central axis of the coating frame (1) and is used to drive the coating frame (1) to rotate.

4. The vacuum coating chamber according to claim 2, characterized in that: The top wall connector (41) comprises a plurality of first annular plates (411), and the plurality of first annular plates (411) are spliced ​​end to end to form the top wall connector (41); The bottom wall connector (21) comprises a plurality of second annular plates (211), and the plurality of second annular plates (211) are spliced ​​end to end to form the bottom wall connector (21).

5. The vacuum coating chamber according to claim 4, characterized in that: The first annular plate (411) is connected to the top wall of the coating chamber via a first quick-release structure; The second annular plate (211) is connected to the bottom wall of the coating chamber via a second quick-release structure.

6. The vacuum coating chamber according to claim 5, characterized in that: The first quick-release structure and the second quick-release structure are both quick-locking pins.

7. The vacuum coating chamber according to claim 4, characterized in that: The first circumferential body (42) comprises a plurality of first arc-shaped plates (421), and the plurality of first arc-shaped plates (421) are spliced ​​end to end to form the first circumferential body (42); The second circumferential body (22) comprises a plurality of second arc-shaped plates (221), and the plurality of second arc-shaped plates (221) are spliced ​​end to end to form the second circumferential body (22).

8. The vacuum coating chamber according to claim 7, characterized in that: A first arc-shaped groove is provided on one side of the first annular plate (411) close to the first arc-shaped plate (421), and the first arc-shaped plate (421) is hung in the first arc-shaped groove; A second arc-shaped groove is provided on one side of the second annular plate (211) close to the second arc-shaped plate (221), and the second arc-shaped plate (221) is plugged into the second arc-shaped groove.

9. The vacuum coating chamber according to any one of claims 1 to 8, characterized in that: The protective body is made of stainless steel; And / or, the surface roughness Ra of the protective body is greater than 3 micrometers.

10. Vacuum coating equipment, characterized in that: Comprising the vacuum coating chamber as described in any one of claims 1-9.

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