Resistivity value adjusting device

Abstract

The utility model discloses a resistivity value adjusting device which is used for adjusting the resistivity value of ultrapure water, a first on-off valve and a first flow control pipe are connected to an exhaust pipe, a first flow path communicated with the first on-off valve is arranged in the first flow control pipe, and a second flow path communicated with the second on-off valve is arranged in the second flow control pipe. And the overflowing area of the first flow path is smaller than that of the exhaust pipe. According to the resistivity value adjusting device provided by the utility model, the first on-off valve and the first flow control pipe are arranged on the exhaust pipe, so that the flow and the flow velocity of gas-liquid mixed fluid flowing through the first on-off valve and the exhaust pipe are reduced under the condition that gas can basically take out condensed water in a gas phase region; the large hammering effect of gas-liquid mixed fluid with the high flow speed on the first opening and closing valve under the condition that the first opening and closing valve is suddenly closed is avoided, the first opening and closing valve is protected, and long-time small-flow steady flow of the discharge pipe is achieved; meanwhile, the flow and the flow speed of the gas inlet pipe are reduced, and the large impact damage effect of the adjusted gas on the hollow fiber membrane is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid resistivity value adjustment, in particular to a resistivity value adjustment device. Background Art

[0002] In the production of semiconductors or liquid crystals, ultrapure water with low resistivity is required to clean the substrate. In the prior art, a hollow fiber membrane module is used to dissolve gases such as carbon dioxide or ammonia in ultrapure water, and ions are generated through dissociation equilibrium. The generated ions are used to reduce the resistivity of ultrapure water, thereby obtaining ultrapure water with low resistivity for cleaning the substrate, thereby reducing the situation where the substrate is broken down by insulation or particles are attached again.

[0003] However, when using a hollow fiber module to reduce the resistivity of ultrapure water, the water vapor generated by the volatilization of ultrapure water diffuses to the gas phase side area of ​​the hollow fiber membrane group and condenses into condensed water. The condensed water will cover the hollow fiber membrane, thereby causing the adjustment gas in the gas phase side area to be unable to pass through the hollow fiber membrane and dissolve into the ultrapure water, ultimately resulting in the resistivity of the ultrapure water cannot be effectively reduced.

[0004] In order to solve the above problems, there is also a related condensate discharge structure in the prior art. An on-off valve is set on the exhaust pipe connected to the gas phase area, and then the valve is opened regularly to discharge the condensate in the gas phase side area regularly through the exhaust pipe (mainly to take out the condensate when the adjustment gas is discharged). In addition, ultrapure water may also contain other gases (such as nitrogen and oxygen), and other gases will also diffuse back from the liquid phase side area to the gas phase side area. Therefore, when the exhaust pipe discharges the adjustment gas and takes away the condensate, other gases will also be discharged in the process.

[0005] In the prior art, the flow rate and opening duration of the on-off valve may be as follows: the flow rate of the on-off valve is 1-300 L / min, preferably not less than 10 L / min and not more than 100 L / min, and the opening duration of the on-off valve is 0.5-60s, preferably not less than 1 second and not more than 10 seconds. In actual use, the flow rate of the on-off valve is set to approximately 96 L / min, and the opening duration of the on-off valve is set to approximately 3s. Therefore, in general, the flow rate of the fluid passing through the on-off valve and the exhaust pipe is faster.

[0006] However, based on the actual use of the above-mentioned adjustment device, since the flow rate of the gas-liquid mixed fluid in the exhaust pipe is very high, on the one hand, when the on-off valve is opened, the flow rate of the adjustment gas in the intake pipe, which is the same as the diameter of the exhaust pipe, will be relatively large. Since the intake pipe and the outlet pipe are located in the same flow path system and have the same flow rate, the large flow rate of the adjustment gas entering the gas phase zone may cause impact damage to the hollow fiber membrane, especially the position opposite to the end of the intake pipe is more easily wrinkled by the adjustment gas with a larger flow rate. Long-term use will cause damage to the hollow fiber membrane and cause the ultrapure water in the liquid phase zone to leak into the gas phase zone. On the other hand, the opening time of the first on-off valve is relatively short. Therefore, after the first on-off valve is suddenly closed, the large flow rate of the gas-liquid mixed fluid will produce a hammering effect on the first on-off valve, which may damage the first on-off valve.

[0007] Therefore, it is necessary to improve the condensate discharge structure of the resistivity value adjusting device. Utility Model Content

[0008] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a resistivity value adjusting device, which solves the problem that in the prior resistivity value adjusting device, when the on-off valve is opened, the gas flow rate in the intake pipe is adjusted too fast and damages the hollow fiber membrane, and the hammering effect caused by the sudden stop of the gas-liquid mixed fluid flow rate in the exhaust pipe damages the first on-off valve.

[0009] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0010] A resistivity value adjusting device, used for adjusting the resistivity value of ultrapure water, comprising:

[0011] A hollow fiber membrane module, comprising a shell and a hollow fiber membrane located inside the shell, wherein the hollow fiber membrane enables the hollow fiber membrane module to be separated into a liquid phase region for ultrapure water to flow and a gas phase region for adjusting gas to flow, wherein the adjusting gas in the gas phase region penetrates into the liquid phase region through the hollow fiber membrane and dissolves in the ultrapure water;

[0012] A liquid inlet pipe, connected to the housing and in communication with the liquid phase region, for inputting ultrapure water into the liquid phase region;

[0013] A liquid outlet pipe, connected to the shell and in communication with the liquid phase region, for discharging ultrapure water from the liquid phase region;

[0014] A bypass pipe, directly connected between the liquid inlet pipe and the liquid outlet pipe, for bypassing the hollow fiber membrane assembly and inputting the ultrapure water in the liquid inlet pipe into the liquid outlet pipe;

[0015] An air inlet pipe, connected to the shell and in communication with the gas phase region, for inputting the adjustment gas into the gas phase region;

[0016] It also includes an exhaust pipe, which is connected to the shell and communicates with the gas phase region, and is used to discharge the adjustment gas and the water condensed in the gas phase region out of the gas phase region;

[0017] The exhaust pipe is connected to a first on-off valve and a first flow control tube. The first flow control tube has a first flow path connected to the first on-off valve. The flow area of ​​the first flow path is smaller than the flow area of ​​the exhaust pipe.

[0018] The resistivity value adjusting device provided by the utility model reduces the flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve and the exhaust pipe by arranging a first flow control tube on the exhaust pipe. The reason is that the flow area of ​​the first flow channel of the first flow control tube is smaller than the flow area of ​​the exhaust pipe, and the flow velocity of the gas-liquid mixed fluid in the first flow channel becomes larger, thereby causing the friction resistance to increase. Due to the increase in resistance, a greater pressure is required to maintain the same flow rate. When the intake pressure of the intake pipe remains unchanged, the flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve will become smaller. When the intake pipe and the exhaust pipe are in the same flow path system and the flow rates of the two keep changing synchronously, On the premise that the flow areas of the two remain unchanged, the fluid flow rates in the intake pipe and the exhaust pipe will decrease. Therefore, when the first on-off valve is opened, the flow rate in the intake pipe will not be too large, thereby avoiding excessive flow rate of the adjustment gas in the intake pipe and damaging the hollow fiber membrane when entering the gas phase area; at the same time, in the exhaust pipe corresponding to the area upstream of the first on-off valve, the flow rate of the gas-liquid mixed fluid is reduced, avoiding the hammering effect of the gas-liquid mixed fluid with a faster flow rate on the first on-off valve when the first on-off valve is suddenly closed, thereby protecting the first on-off valve. In addition, the slower flow rate of the exhaust pipe realizes a long-term steady flow of a small flow rate in the exhaust pipe, and the reduced flow rate can also reduce the waste of excessive discharge of the adjustment gas.

[0019] Preferably, the first flow control tube is located on the downstream side of the first opening and closing valve, and the exhaust pipe is also connected to a flow tube. The connection between the flow tube and the exhaust pipe is located between the first opening and closing valve and the first flow control tube. The flow tube is also provided with a second opening and closing valve for controlling the opening and closing of the flow tube.

[0020] With such arrangement, the function of the circulation pipe is that, under the premise that the exhaust pipe maintains a long-term steady flow of a small flow rate, opening the second on-off valve can realize a short-term large-flow discharge from the exhaust pipe through the circulation pipe. Therefore, in some specific cases, such as before overhauling the entire adjustment device and the hollow fiber membrane assembly, the adjustment gas and condensate are discharged quickly and at a large flow rate to ensure that the condensate in the gas phase is drained as clean as possible, and to avoid excessive water in the gas phase that affects the overhaul; the first flow control pipe is arranged on the downstream side of the first on-off valve, and the inlet of the circulation pipe is arranged between the first flow control pipe and the first on-off valve, and the second on-off valve is opened on the premise that the first on-off valve is opened, that is, the first on-off valve and the second on-off valve are opened at the same time, so that the gas-liquid mixed fluid in the exhaust pipe first passes through the first on-off valve, and then enters the first flow control pipe or the circulation pipe, thereby realizing both a long-term steady flow of a small flow rate and a short-term large-flow discharge.

[0021] Preferably, the resistivity adjusting device further comprises a manual control switch, wherein the manual control switch is respectively connected to the first opening and closing valve and the second opening and closing valve, and is used to open and close the first opening and closing valve and the second opening and closing valve simultaneously.

[0022] With such arrangement, one of the functions of the manual control switch is that the staff can manually open and close the manual control switch during the use of the entire adjustment device at any desired time period according to the actual use of the entire adjustment device or the hollow fiber membrane assembly, thereby controlling the opening and closing of the first opening and closing valve and the second opening and closing valve at any time to achieve a long-term steady flow of a small flow or a short-term high-flow discharge; another function is that when the entire adjustment device stops supplying adjustment gas, the staff can press the manual control button to discharge other gases on the gas phase side, the adjustment gas and water vapor, and condensed water through the first opening and closing valve and the second opening and closing valve, thereby exhausting and draining gas at a large flow rate.

[0023] Preferably, a slow exhaust pipe is also connected to the exhaust pipe, and the connection between the slow exhaust pipe and the exhaust pipe is located on the upstream side of the first opening and closing valve; a second flow control pipe is provided on the slow exhaust pipe, and the second flow control pipe has a second flow path with a flow area smaller than the first flow path.

[0024] With such a configuration, the function of the slow exhaust pipe is to realize the communication between the gas phase area and the outside world when the first on-off valve is not opened, so that the exhaust pipe can continue to slowly discharge the adjustment gas, thereby ensuring that the adjustment gas in the gas phase area has a corresponding concentration. Because there may be a small amount of other gases (such as nitrogen and oxygen) in the ultrapure water, the slow exhaust pipe can timely remove excess other gases. If the gas phase area is not open to the outside world, as the adjustment gas is continuously input, the adjustment gas is dissolved in the ultrapure water and consumed, and the ratio of other gases in the gas phase area increases, and the space occupied is getting larger and larger, which is not conducive to the subsequent input of the adjustment gas, and the concentration of the adjustment gas in the gas phase area will be reduced. Since the flow area of ​​the second flow path of the second flow control tube on the slow exhaust pipe is smaller than the first flow path, its gas flow rate is smaller than the first flow path and the fluid flow rate flowing through the first on-off valve. When the first on-off valve is not opened, other gases and adjustment gases in the exhaust pipe can still be slowly discharged to the outside world through the second flow path in the slow exhaust pipe.

[0025] Preferably, the first flow control tube or the second flow control tube comprises a connecting body and a fiber tube passing through the connecting body, and the interior of the fiber tube forms the first flow path or the second flow path.

[0026] In this way, the connecting body is used to protect the internal fiber tube and is connected to the exhaust pipe or the slow exhaust pipe. The fiber tube has stable chemical properties and aging resistance. The first flow path or the second flow path formed by it can prevent the precipitation of impurities from contaminating the discharged gas and liquid, and avoid the waste of these gases because they cannot be reused.

[0027] Preferably, the flow area of ​​the first flow path in the first flow control tube is S1, the flow area of ​​the exhaust pipe is S2, and S1 and S2 satisfy the following relationship: S1 / S2=1 / 30-1 / 8.

[0028] In this configuration, the flow area refers to the area of ​​the flow cross section of the fluid, the flow area of ​​the exhaust pipe refers to the area of ​​the internal cross section of the exhaust pipe, and the flow area of ​​the first flow path refers to the total area of ​​the internal cross section of the part of the pipes forming the first flow path in the first flow control pipe; by controlling the ratio of the two, the flow of the first opening and closing valve and the exhaust pipe can be controlled; the value range of S1 / S2 is 1 / 30-1 / 8, within this range, the flow of the first opening and closing valve can be controlled within the desired preset value range, which can not only ensure that the condensed water and other gases on the gas phase side are discharged as completely as possible to avoid covering the hollow fiber membrane, but also control the flow of the gas-liquid mixed fluid flowing through the first opening and closing valve to reduce the flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve, and reduce the fluid flow rate of the intake pipe and the exhaust pipe, which can not only avoid the adjustment gas of the intake pipe from damaging the hollow fiber membrane due to excessive flow rate when entering the gas phase area, but also avoid the hammering effect of the excessive flow rate of the gas-liquid mixed fluid in the exhaust pipe on the first opening and closing valve when the first opening and closing valve is suddenly closed, so as to protect the first opening and closing valve.

[0029] If S1 / S2 is less than 1 / 30, the flow area of ​​the first flow path is too small, the flow rate of the gas-liquid mixed fluid flowing through the first on-off valve is too low, and the fluid flow rate is too low to effectively carry out the condensed water and other gases covering the hollow fiber membrane; if S1 / S2 is greater than 1 / 8, the flow area of ​​the first flow path is too large. On the one hand, the flow rate of the gas-liquid mixed fluid will increase. The increase in the fluid flow rate will cause the hammering effect of the gas-liquid mixed fluid on the first on-off valve to become stronger when the first on-off valve is suddenly closed, which is not conducive to the protection of the first on-off valve; on the other hand, the excessive flow area of ​​the first flow path will also cause a large amount of adjustment gas to be discharged, resulting in excessive waste of adjustment gas.

[0030] Preferably, the flow area of ​​the first flow path in the first flow control tube is S1, the flow area of ​​the second flow path in the second flow control tube is S3, and S1 and S3 satisfy the following relationship: S3 / S1=3 / 160-1 / 10.

[0031] With such arrangement, based on the function of the slow exhaust pipe to maintain the corresponding concentration of the adjusting gas in the gas phase zone, the second flow path generally mainly discharges the adjusting gas and other gases slowly and continuously. S3 / S1=3 / 160-1 / 10 is within this range, so that the flow rate of the slow exhaust pipe is much smaller than the flow rate of the exhaust pipe. The slow exhaust pipe can discharge the adjusting gas and other gases slowly and continuously, and the discharge amount is small, which will not cause excessive waste of the adjusting gas. If S3 / S1<3 / 160, since the flow area of ​​the first flow path is originally small, the flow area of ​​the second flow path is negligible and cannot achieve its function. It can only discharge other gases when the first opening and closing valve is opened, which is not good for maintaining the corresponding concentration of the adjusting gas in the gas phase zone. If S3 / S1>1 / 10, the flow area of ​​the second flow path is too large, and the amount of gas discharged is also too large, resulting in a large amount of adjusting gas being wasted.

[0032] Preferably, the volume of the gas phase zone of the hollow fiber membrane module is V liters, the continuous opening time of the first on-off valve is t minutes, the flow rate after the first on-off valve is opened is Q, and the following conditions are satisfied: 100V≥Qt≥21V.

[0033] With such arrangement, in the time after the first on-off valve is opened, new adjustment gas enters the gas phase zone, mixes with the adjustment gas originally remaining in the gas phase zone and pushes the excess part to the exhaust pipe. In this process, the condensed water attached to the surface of the hollow fiber membrane can be taken away, and the formed gas-liquid mixed fluid is discharged through the first on-off valve and the first flow tube. Since the volume of the gas phase zone is limited and the input pressure of the air inlet pipe remains unchanged, the volume of the gas-liquid mixed fluid flowing out through the first on-off valve is basically equal to the volume of the adjustment gas newly introduced into the gas phase zone, so that the above parameters meet the following conditions: 100V≥Qt≥21V, which basically ensures that most or even all of the condensed water attached to the surface of the hollow fiber membrane is taken away, and can also avoid excessive adjustment gas discharge, which causes a sharp change in the adjustment gas in the gas phase zone of the hollow fiber membrane assembly and causes a sharp change in the resistivity value.

[0034] Preferably, the flow rate of the first on-off valve when opened is 0.3-0.9L / min, which can not only ensure that the condensed water and other gases on the gas phase side are discharged as completely as possible to avoid covering the hollow fiber membrane, but also control the flow rate of the gas-liquid mixed fluid flowing through the first on-off valve, and avoid the sudden closing of the first on-off valve. Avoid the large hammering effect of the gas-liquid mixed fluid on the first on-off valve due to the excessive flow rate of the gas-liquid mixed fluid, so as to protect the first on-off valve, and can also reduce the flow rate of the gas adjusted in the intake pipe to avoid damage to the hollow fiber membrane.

[0035] Preferably, the adjustment device also includes a timing device connected to the first opening and closing valve, and the timing device is used to time the opening and closing of the first opening and closing valve; the interval time set by the timing device is T minutes, and the continuous opening time of the first opening and closing valve is t minutes, satisfying the following condition 1 / 12000T<t.

[0036] In this arrangement, the interval time set by the timing device refers to the interval after closing the first opening and closing valve 61 before opening the first opening and closing valve 61 again. During this time interval, the water vapor generated by the volatilization of the ultrapure water will condense again in the gas phase side area of ​​the hollow fiber membrane group and gradually cover the hollow fiber membrane. The amount of condensed water is related to the time interval, and the continuous opening time of the first opening and closing valve is also related to the amount of condensed water to be discharged. Based on this, a correlation is established between the interval time T set by the timing device and the continuous opening time t of the first opening and closing valve, and 1 / 12000T<t is satisfied, which not only ensures that the discharge volume of the first opening and closing valve can take away the condensed water and other gases attached to the surface of the hollow fiber membrane, but also prevents the exhaust pipe from discharging too much adjustment gas, resulting in excessive loss of adjustment gas and causing a sudden change in the adjustment gas concentration in the hollow fiber membrane assembly, making the setting of the interval time T set by the timing device and the continuous opening time t of the first opening and closing valve more reasonable.

[0037] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0038] The resistivity value adjusting device provided by the utility model controls the flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve while ensuring that the adjusted gas can fully bring out the condensed water in the gas phase zone by arranging the first opening and closing valve and the first flow control tube on the exhaust pipe, thereby reducing the fluid flow rate of the intake pipe and the exhaust pipe, and can avoid the large hammering effect of the gas-liquid mixed fluid with a fast flow rate on the first opening and closing valve when the first opening and closing valve is suddenly closed, thereby protecting the first opening and closing valve and the exhaust pipe, and realizing a long-term stable flow of a small flow rate in the discharge pipe. The flow reduction can also reduce the waste of the adjusted gas, and can also avoid the impact damage to the hollow fiber membrane caused by the excessive flow rate of the adjusted gas in the intake pipe, thereby extending the life of the hollow fiber membrane component. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0040] Figure 1 It is a schematic diagram of a resistivity value adjusting device according to Embodiment 1 of the present utility model.

[0041] Figure 2 It is a schematic diagram of a resistivity value adjusting device according to the second embodiment of the utility model.

[0042] Figure 3 It is a schematic structural diagram of the first flow control tube of an embodiment of the utility model.

[0043] Figure 4 for Figure 3 Schematic diagram of the internal structure of the first flow control tube.

[0044] Description of Reference Numerals

[0045] 1. Hollow fiber membrane assembly; 11. Shell; 2. Liquid inlet pipe; 3. Liquid outlet pipe; 4. Bypass pipe; 41. Resistivity meter; 5. Air inlet pipe; 6. Exhaust pipe; 61. First opening and closing valve; 62. First flow control pipe; 621. First flow path; 622. Connecting body; 623. Fiber tube; 63. Circulation pipe; 64. Second opening and closing valve; 65. Slow exhaust pipe; 66. Second flow control pipe; 661. Second flow path; 7. Timing device; 8. Manual control switch. DETAILED DESCRIPTION

[0046] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0047] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0048] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] As attached Figure 1 and attached Figure 2 As shown, the resistivity value adjusting device of the embodiment of the utility model comprises a hollow fiber membrane assembly 1, a liquid inlet pipe 2, a liquid outlet pipe 3, a bypass pipe 4, an air inlet pipe 5 and an exhaust pipe 6. Among them, the hollow fiber membrane assembly 1 is used to adjust the resistivity value of ultrapure water. The hollow fiber membrane assembly 1 comprises a shell 11 and a hollow fiber membrane (not shown) located inside the shell 11. The hollow fiber membrane allows the hollow fiber membrane assembly 1 to be separated into a liquid phase region (not shown) for the circulation of ultrapure water and a gas phase region (not shown) for the circulation of the adjustment gas. It should be noted that the hollow fiber membrane assembly 1 is a relatively clear structure in the prior art. Simply put, the hollow fiber membrane is a tubular structure with micropores on the surface. Gas can shuttle between the inside and outside of the tube through the surface micropores, while liquid cannot pass through the surface micropores. The hollow fiber membrane can flow liquid inside the tube and gas outside the tube, or gas inside the tube and liquid outside the tube, thereby forming a liquid phase region and a gas phase region. I will not elaborate on this. However, in this embodiment, the hollow fiber membrane has liquid flowing inside the tube and gas flowing outside the tube, so the liquid phase region refers to the region inside the tube of the hollow fiber membrane, and the gas phase region refers to the region outside the tube of the hollow fiber membrane.

[0050] The liquid inlet pipe 2 is connected to the shell 11 and communicated with the liquid phase area, and is used to input ultrapure water into the liquid phase area; the liquid outlet pipe 3 is connected to the shell 11 and communicated with the liquid phase area, and is used to discharge the ultrapure water after adjusting the resistivity value from the liquid phase area; the air inlet pipe 5 is connected to the shell 11 and communicated with the gas phase area, and is used to input the adjustment gas into the gas phase area; the exhaust pipe 6 is connected to the shell 11 and communicated with the gas phase area, and is used to discharge the adjustment gas, other gases in the ultrapure water, and condensed water from the gas phase area; and the adjustment gas in the gas phase area penetrates into the liquid phase area through the hollow fiber membrane and dissolves in the ultrapure water, thereby adjusting the resistivity value of the ultrapure water. Among them, the adjustment gas can be a gas such as carbon dioxide gas or ammonia gas that can dissolve in ultrapure water and generate ions through dissociation equilibrium, and the resistivity value of the ultrapure water is reduced by using the ions generated by the dissolution; other gases can be nitrogen, oxygen, etc.

[0051] The resistivity value adjustment device also includes a bypass pipe 4, which is directly connected between the liquid inlet pipe 2 and the liquid outlet pipe 3, and is used to bypass the hollow fiber membrane assembly 1 and input the ultrapure water in the liquid inlet pipe 2 into the liquid outlet pipe 3. Its function is to mix part of the ultrapure water whose resistivity value has not been adjusted with the ultrapure water whose resistivity value has been adjusted, and to control the amount of the ultrapure water whose resistivity value has not been adjusted and the amount of the ultrapure water whose resistivity value has been adjusted by the adjusting gas, so that the ultrapure water finally output meets the required resistivity value requirements. Figure 1 As shown, the final output end of the ultrapure water is connected to a resistivity meter 41 to detect the resistivity value of the final output ultrapure water.

[0052] During the use of the resistivity value adjusting device, the water vapor generated by the volatilization of ultrapure water in the liquid phase region will pass through the hollow fiber membrane into the gas phase side and condense into water on the hollow fiber membrane, thereby covering the hollow fiber membrane, resulting in the adjustment gas in the gas phase side region being unable to pass through the hollow fiber membrane into the liquid phase region. Therefore, the exhaust pipe 6 is connected to a first opening and closing valve 61. The function of the first opening and closing valve 61 is to open the exhaust pipe 6 to connect it to the outside, thereby discharging the adjustment gas in the gas phase region. While discharging the adjustment gas, the adjustment gas will bring out the condensed water covering the hollow fiber membrane. In actual use, the adjustment gas entering the exhaust pipe 6 The fluid flowing through the air pipe 6 and the first opening and closing valve 61 is a gas-liquid mixed fluid with a large flow rate and a high flow rate. When the first opening and closing valve 61 is suddenly closed, the flow of these gas-liquid mixed fluids is rapidly stopped, which will have a large hammering effect on the first opening and closing valve 61. At the same time, since the intake pipe 5 and the exhaust pipe 6 are in the same flow system, when the first opening and closing valve 61 is opened, the adjustment gas flow and flow rate of the intake pipe 5 will be relatively large. Therefore, the adjustment gas will have a large impact on the hollow fiber membrane and damage the membrane, especially the hollow fiber membrane opposite to the end of the intake pipe 5 will be seriously damaged, and will be damaged after long-term use and cause leakage.

[0053] Based on this, the exhaust pipe 6 is also connected to a first flow control tube 62, and the first flow control tube 62 has a first flow path 621 connected to the first opening and closing valve 61. The flow area of ​​the first flow path 621 is smaller than the flow area of ​​the exhaust pipe 6. The function of the first flow control tube 62 is to control the flow of the exhaust pipe 6 and the gas-liquid mixed fluid flowing through the first opening and closing valve 61. The flow area of ​​the first flow path 621 of the first flow control tube 62 is smaller than the flow area of ​​the exhaust pipe 6. The flow velocity of the gas-liquid mixed fluid in the first flow path 621 becomes larger, thereby increasing the friction resistance. Due to the increase in resistance, a greater pressure is required to maintain the same flow rate, and the intake pressure of the intake pipe 5 is increased. When the pressure remains unchanged, the flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve 61 will become smaller. At the same time, when the flow area of ​​the exhaust pipe 6 is fixed, the smaller flow rate will reduce the flow rate of the gas-liquid mixed fluid in the area of ​​the exhaust pipe 6 upstream of the first opening and closing valve 61, thereby avoiding the large hammering effect of the gas-liquid mixed fluid with a faster flow rate on the first opening and closing valve 61 when the first opening and closing valve 61 is suddenly closed, protecting the first opening and closing valve 61, and achieving a long-term stable flow of a small flow rate in the exhaust pipe 6. The reduction in the flow rate of the exhaust pipe 6 can also reduce the waste of the adjustment gas; at the same time, the flow rate and velocity of the adjustment gas in the intake pipe 5 will also decrease, thereby avoiding the adjustment gas flow rate in the intake pipe 5 being too large to damage the hollow fiber membrane.

[0054] Specifically, in this embodiment, the flow area of ​​the first flow path 621 in the first flow control tube 62 is S1, and the flow area of ​​the exhaust pipe 6 is S2. The flow area refers to the area of ​​the flow cross section of the fluid. In the exhaust pipe 6, the flow area is the area of ​​the internal cross section of the exhaust pipe 6. When the exhaust pipe 6 is a circular pipe, the area calculation formula of the circle is applicable; in the first flow control tube 62, the flow area is the total area of ​​the internal cross section of the part of the pipe forming the first flow path 621 in the first flow control tube 62.

[0055] In a specific embodiment, as shown in the attached Figure 3 and attached Figure 4 As shown, the first flow control tube 62 includes a connecting body 622 and a fiber tube 623 passing through the connecting body 622. The interior of the fiber tube 623 forms the first flow path 621. The number of the fiber tubes 623 can be one or more. When the number of the fiber tubes 623 is more than one, the first flow path 621 is dispersedly formed in each fiber tube 623, and the flow area of ​​the first flow path 621 is the sum of the areas of the internal cross sections of the multiple fiber tubes 623. The connecting body 622 is used to connect the fiber tube 623 with the exhaust pipe 6.

[0056] In this embodiment, S1 and S2 satisfy the following relationship: S1 / S2=1 / 30-1 / 8. Within this range, the flow rate of the first opening and closing valve 61 can be controlled within the desired preset value range, which can ensure that the condensed water and other gases in the gas phase are discharged as completely as possible to avoid covering the hollow fiber membrane, and can also control the flow rate and flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve 61 to avoid the large hammering effect of the gas-liquid mixed fluid on the first opening and closing valve 61 when the first opening and closing valve 61 is suddenly closed, so as to protect the first opening and closing valve 61, and also reduce the flow rate and flow rate of the adjustment gas in the intake pipe 5 to avoid the large impact of the adjustment gas on the hollow fiber membrane. If S1 / S2 is less than 1 / 30, the flow area of ​​the first flow path 621 is too small, and the flow rate and flow velocity of the gas-liquid mixed fluid flowing through the first opening and closing valve 61 are too low to carry out the condensed water covering the hollow fiber membrane; if S1 / S2 is greater than 1 / 8, the flow area of ​​the first flow path 621 is too large. On the one hand, the flow rate and flow velocity of the gas-liquid mixed fluid will increase, and the force of the gas-liquid mixed fluid acting on the first opening and closing valve 61 will increase when the first opening and closing valve 61 is suddenly closed; on the other hand, the gas-liquid mixed fluid will also carry out a large amount of adjustment gas, and the excessively large flow area of ​​the first flow path 621 will result in excessive waste of adjustment gas.

[0057] In this embodiment, for example, the inner diameter of the exhaust pipe 6 is 4 mm, and the flow area S2 is 12.56 mm. 2 , the flow area S1 of the first flow path 621 is 0.5-1.57mm 2 , thereby controlling the flow rate of the gas-liquid mixed fluid flowing through the first opening and closing valve 61 to be 0.3-0.9 L / min. Preferably, the flow rate of the first opening and closing valve 61 when opened is 0.8 L / min. In this embodiment, the inner diameter of the air intake pipe 5 is also 4 mm.

[0058] In this embodiment, in the time after the first opening and closing valve 61 is opened, the air inlet pipe 5 allows new adjustment gas to enter the gas phase zone, mixes with the adjustment gas originally remaining in the gas phase zone and pushes the excess part to the exhaust pipe 6. In this process, the condensed water attached to the surface of the hollow fiber membrane can be taken away, and the formed gas-liquid mixed fluid is discharged through the first opening and closing valve 61 and the first flow rate; since the volume of the gas phase zone is limited and the input pressure of the exhaust pipe 6 remains unchanged, the volume of the gas-liquid mixed fluid flowing out through the first opening and closing valve 61 is basically equal to the volume of the adjustment gas newly introduced into the gas phase zone. Therefore, the volume of the gas phase zone of the hollow fiber membrane module 1 is V liters, the continuous opening time of the first opening and closing valve 61 is t minutes, and the flow rate after the first opening and closing valve 61 is opened is Q, which satisfies the following conditions: 100V≥Qt≥21V, which basically ensures that the adjustment gas takes away most or even all of the condensed water attached to the surface of the hollow fiber membrane, and can also avoid excessive adjustment gas discharge causing a sharp change in the adjustment gas on the gas phase side of the hollow fiber membrane module 1.

[0059] In this embodiment, for example, the volume V of the gas phase side is 0.038L, 100V is 3.8L, 21V is 0.798L, the first on-off valve 61 is continuously opened for t=2min, the flow rate Q is 0.8L / min, and the volume of the gas-liquid mixed fluid actually passing through the first on-off valve 61 is 1.6L, which is between 0.798-3.8L. Through experiments, V, Q, and t satisfy the following relationship: when 100V≥Qt≥29V, the effect of discharging condensed water is better; if Qt>100V, a large amount of adjustment gas is discharged in the gas phase region in a short time, resulting in a drastic change in its concentration in the gas phase region, affecting the effect of adjusting gas dissolving in ultrapure water and affecting the resistivity value.

[0060] As attached Figure 1 In the illustrated embodiment 1, the adjustment device includes a timing device 7 connected to the first opening and closing valve 61, and the timing device 7 is used to time the opening and closing of the first opening and closing valve 61; the interval time set by the timing device 7 is T minutes, and the continuous opening time of the first opening and closing valve 61 is t minutes, satisfying the following condition: 1 / 12000T<t. The interval time set by the timing device 7 refers to the interval after closing the first opening and closing valve 61 before opening the first opening and closing valve 61 again. During this time interval, the water vapor generated by the volatilization of the ultrapure water will condense again in the gas phase side area of ​​the hollow fiber membrane group and gradually cover the hollow fiber membrane. The amount of condensed water is related to the time interval, and the continuous opening time of the first opening and closing valve 61 is also related to the amount of condensed water that can be discharged. Based on this, the association between the interval time T set by the timing device 7 and the continuous opening time t of the first opening and closing valve 61 is established, and it is made to satisfy 1 / 12000T<t, which not only ensures that the discharge volume of the first opening and closing valve 61 can take away the condensed water and other gases attached to the surface of the hollow fiber membrane, but also prevents the exhaust pipe 6 from discharging too much adjustment gas, causing excessive loss of adjustment gas and causing a sudden change in the adjustment gas concentration in the hollow fiber membrane assembly 1, so that the setting of the interval time T set by the timing device 7 and the continuous opening time t of the first opening and closing valve 61 is more reasonable.

[0061] In this embodiment, for example, the interval time T is 200 hours, that is, 12000 minutes, the first on-off valve 61 is opened every 12000 minutes, and the first on-off valve 61 is opened for 2 minutes, which satisfies 1 / 12000T<t.

[0062] The first flow control pipe 62 can be arranged at the upstream of the first opening and closing valve 61, or at the downstream side of the first opening and closing valve 61. In some embodiments, the exhaust pipe 6 is also connected to a flow pipe 63, and the flow pipe 63 is also provided with a second opening and closing valve 64 for controlling the opening and closing of the flow pipe 63. The function of the flow pipe 63 is to achieve a short-term large flow discharge from the exhaust pipe 6 under the premise that the exhaust pipe 6 maintains a long-term stable flow of a small flow. Therefore, the first flow control pipe 62 needs to be located at the downstream side of the first opening and closing valve 61, and the connection between the flow pipe 63 and the exhaust pipe 6 is located at the first opening and closing valve. 61 and the first flow control tube 62, so that the gas-liquid mixed fluid in the exhaust pipe 6 first passes through the first opening and closing valve 61, and then enters the first flow control tube 62 or the circulation tube 63, that is, when the first opening and closing valve 61 is opened and the second opening and closing valve 64 is closed, the gas-liquid mixed fluid can only pass through the first flow control tube 62 with a smaller flow rate, thereby realizing a long-term steady flow of a small flow rate. When the first opening and closing valve 61 and the second opening and closing valve 64 are opened at the same time, part of the gas-liquid mixed fluid enters the first flow control tube 62, and part enters the circulation tube 63, thereby realizing both a long-term steady flow of a small flow rate and a short-term large flow rate discharge. The second on-off valve 64 is generally opened when required under specific circumstances. For example, before inspecting the entire adjustment device and the hollow fiber membrane assembly 1, the adjustment gas and condensed water in the hollow fiber membrane assembly 1 are quickly discharged at a large flow rate to ensure that the condensed water in the gas phase area is drained as clean as possible to avoid too much condensed water in the gas phase area affecting the inspection. At this time, since the air inlet pipe 5 no longer introduces adjustment gas into the gas phase area, and the adjustment gas and condensed water in the gas phase area are discharged in large quantities, there is very little adjustment gas and condensed water remaining in the exhaust pipe 6, and the flow rate is not fast, so the second on-off valve 64 will not be damaged when it is closed.

[0063] As attached Figure 1 As shown, in this embodiment, the resistivity adjustment device further includes a manual control switch 8, which is connected to the first opening and closing valve 61 and the second opening and closing valve 64 respectively, and is used to open and close the first opening and closing valve 61 and the second opening and closing valve 64 at the same time. One of the functions of the manual control switch 8 is that the staff can manually open and close the manual control switch 8 during use according to the actual use of the hollow fiber membrane module 1 in any required time period, thereby controlling the on and off of the first opening and closing valve 61 and the second opening and closing valve 64, and realizing a long-term small flow rate steady flow or a short-term large flow rate discharge, so as to distinguish from the situation of opening the first opening and closing valve 61 at a fixed time; another function is that when the entire adjustment device stops supplying the adjustment gas, the staff can press the manual control switch 8, and other gases, adjustment gas and condensed water on the gas phase side will be exhausted and drained from the first opening and closing valve 61 and the second opening and closing valve 64 at a large flow rate.

[0064] It should be noted that the manual control switch 8 can be a manual button type, can also be a remote manual control, or both, so that the staff can more conveniently control the first on-off valve 61 and the second on-off valve 64 at the same time.

[0065] In the attached Figure 2 In another embodiment shown, the difference from the above embodiment is that the manual control switch 8 is only connected to the first on-off valve 61, and the staff can manually open and close the manual control switch 8 and open the first on-off valve 61 at any required time period according to the actual situation of the hollow fiber membrane assembly 1 to discharge the condensed water on the hollow fiber membrane and the adjustment gas and other gases in the gas phase.

[0066] As attached Figure 1 and attached Figure 2 In the illustrated embodiment, the exhaust pipe 6 is further connected to a slow exhaust pipe 65, and the connection between the slow exhaust pipe 65 and the exhaust pipe 6 is located on the upstream side of the first on-off valve 61; no on-off valve is provided on the slow exhaust pipe 65, so its function is to realize the communication between the gas phase zone and the outside, so that the exhaust pipe 6 can continue to exhaust slowly, thereby ensuring that the adjustment gas in the gas phase zone has a corresponding concentration; because there may be a small amount of other gases in the adjustment gas, the slow exhaust pipe 65 can promptly remove excess other gases; if the gas phase zone is not open to the outside world, then with the continuous input of the adjustment gas, the adjustment gas is dissolved in the ultrapure water and consumed, the ratio of other gases in the gas phase zone increases, and the space occupied becomes larger and larger, which is not conducive to the subsequent input of the adjustment gas and may even block the adjustment gas and prevent it from being input. The slow exhaust pipe 65 is provided with a second flow control pipe 66, which has a second flow path with a flow area smaller than the first flow path 621, and its gas flow rate is smaller than the first flow path 621 and the flow rate flowing through the first opening and closing valve 61. When the first opening and closing valve 61 is not opened, other gases and adjustment gases in the exhaust pipe 6 can still be slowly discharged to the outside through the small flow rate of the second flow path in the slow exhaust pipe 65.

[0067] The structure of the second flow control tube 66 may be the same as that of the first flow control tube 62, both of which include a connecting body 622 and a fiber tube 623 passing through the connecting body 622, the interior of the fiber tube 623 forming a second flow path, and the flow area of ​​the second flow path refers to the total area of ​​the internal cross section of the part of the pipe forming the second flow path in the second flow control tube 66. Specifically, the second flow control tube 66 includes a connecting body 622 and a fiber tube 623 passing through the connecting body 622, the interior of the fiber tube 623 forming the second flow path, the number of fiber tubes 623 may be one or more, when the number of fiber tubes 623 is multiple, the second flow path is dispersedly formed in each fiber tube 623, and the flow area of ​​the second flow path is the sum of the areas of the internal cross sections of the multiple fiber tubes 623. Since the flow area of ​​the second flow path is smaller than the flow area of ​​the first flow path 621, the number of fiber tubes 623 in the second flow path control tube can be directly reduced, for example, the second flow control tube 66 has only one fiber tube 623. The connecting body 622 is used to connect the fiber tube 623 with the exhaust pipe 6 .

[0068] Based on the function of the slow exhaust pipe 65, the second flow path is generally mainly used to continuously and slowly discharge the adjustment gas and other gases. If the flow rate of the second flow path is too large, it will cause waste of the adjustment gas; S3 / S1=3 / 160-1 / 10 Within this range, the slow exhaust pipe 65 can continuously and slowly discharge the adjustment gas and other gases, and the discharge amount is small, and no waste of the adjustment gas will be caused; if S3 / S1<3 / 160, since the flow area of ​​the first flow path 621 is originally small, the flow area of ​​the second flow path is negligible and cannot achieve its function. It can only rely on the first opening and closing valve 61 to open to discharge other gases, and the effect is not good; if S3 / S1>1 / 10, the flow area of ​​the second flow path is too large, and the amount of gas discharged is also too large. In addition, the first flow rate of the first opening and closing valve 61 that is opened at a fixed time discharges the gas-liquid mixed fluid, so that most of the gas discharged from the second flow path is adjustment gas, resulting in a large amount of adjustment gas being wasted.

[0069] In this embodiment, for example, the inner diameter of the exhaust pipe 6 is 4 mm, and the flow area S2 is 12.56 mm. 2 , the flow area S1 of the first flow path 621 is 1 mm 2 , then the flow area S3 of the second flow path is 0.008mm2-0.1mm 2 , which corresponds to an inner diameter of the fiber tube 623 of about 0.05 mm-0.17 mm. Thus, the second flow control tube 66 controls the flow of the slow discharge tube 65 to 15 ml / min.

[0070] The above-mentioned implementation modes are only preferred implementation modes of the present invention, and cannot be used to limit the protection scope of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. A resistivity value adjusting device for adjusting the resistivity value of ultrapure water, include: A hollow fiber membrane module, comprising a shell and a hollow fiber membrane located inside the shell, wherein the hollow fiber membrane enables the hollow fiber membrane module to be separated into a liquid phase region for ultrapure water to flow and a gas phase region for adjusting gas to flow, wherein the adjusting gas in the gas phase region penetrates into the liquid phase region through the hollow fiber membrane and dissolves in the ultrapure water; A liquid inlet pipe, connected to the housing and in communication with the liquid phase region, for inputting ultrapure water into the liquid phase region; A liquid outlet pipe, connected to the shell and in communication with the liquid phase region, for discharging ultrapure water from the liquid phase region; A bypass pipe, directly connected between the liquid inlet pipe and the liquid outlet pipe, for bypassing the hollow fiber membrane assembly and inputting the ultrapure water in the liquid inlet pipe into the liquid outlet pipe; An air inlet pipe is connected to the shell and communicated with the gas phase region, and is used to input the adjustment gas into the gas phase region; characterized in that: It also includes an exhaust pipe, which is connected to the shell and communicates with the gas phase region, and is used to discharge the adjustment gas and the water condensed in the gas phase region out of the gas phase region; The exhaust pipe is connected to a first on-off valve and a first flow control tube. The first flow control tube has a first flow path connected to the first on-off valve. The flow area of ​​the first flow path is smaller than the flow area of ​​the exhaust pipe.

2. The resistivity value adjusting device according to claim 1, It is characterized in that The first flow control tube is located on the downstream side of the first opening and closing valve. The exhaust pipe is also connected to a flow tube. The connection between the flow tube and the exhaust pipe is located between the first opening and closing valve and the first flow control tube. The flow tube is also provided with a second opening and closing valve for controlling the opening and closing of the flow tube.

3. The resistivity value adjusting device according to claim 2, It is characterized in that It also includes a manual control switch, which is connected to the first opening and closing valve and the second opening and closing valve respectively, and is used to open and close the first opening and closing valve and the second opening and closing valve at the same time.

4. The resistivity value adjusting device according to claim 1, It is characterized in that The exhaust pipe is also connected to a slow exhaust pipe, and the connection between the slow exhaust pipe and the exhaust pipe is located on the upstream side of the first opening and closing valve; the slow exhaust pipe is provided with a second flow control pipe, and the second flow control pipe has a second flow path with a flow area smaller than the first flow path.

5. The resistivity value adjusting device according to claim 4, It is characterized in that The first flow control tube or the second flow control tube includes a connecting body and a fiber tube passing through the connecting body, and the interior of the fiber tube forms the first flow path or the second flow path.

6. The resistivity value adjusting device according to claim 1, It is characterized in that The flow area of ​​the first flow path in the first flow control tube is S1, the flow area of ​​the exhaust pipe is S2, and S1 and S2 satisfy the following relationship: S1 / S2=1 / 30-1 / 8.

7. The resistivity value adjusting device according to claim 4, It is characterized in that The flow area of ​​the first flow path in the first flow control tube is S1, and the flow area of ​​the second flow path in the second flow control tube is S3. S1 and S3 satisfy the following relationship: S3 / S1=3 / 160-1 / 10.

8. The resistivity value adjusting device according to claim 1, It is characterized in that The volume of the gas phase zone of the hollow fiber membrane module is V liters, the continuous opening time of the first on-off valve is t minutes, the flow rate after the first on-off valve is opened is Q, and the following conditions are met: 100V≥Qt≥21V.

9. The resistivity value adjusting device according to claim 1, It is characterized in that The flow rate of the first on-off valve when opened is 0.3-0.9 L / min.

10. The resistivity value adjusting device according to claim 1, It is characterized in that The adjustment device also includes a timing device connected to the first opening and closing valve, and the timing device is used to time the opening and closing of the first opening and closing valve; the interval time set by the timing device is T minutes, and the continuous opening time of the first opening and closing valve is t minutes, satisfying the following condition 1 / 12000T<t.

Images