Visual inspection device

Abstract

The utility model relates to a visual inspection device which comprises a visual inspection module, a motion control module and a processing module, the visual detection module comprises a microscopic assembly and a camera shooting assembly, the microscopic assembly is arranged below the camera shooting assembly, the microscopic assembly is used for amplifying the to-be-detected object, and the camera shooting assembly is used for shooting the amplified to-be-detected object to obtain a shot image; the motion control module comprises a first linear motor located below the microscopic assembly, and the first linear motor is used for driving the to-be-detected object to linearly move on the horizontal plane in the first direction; the controller is connected with the input end of the first linear motor, and the controller is used for controlling the first linear motor; the processing module is connected with the camera shooting assembly and used for processing the shot image obtained through shooting and obtaining the detection result of the to-be-detected object. According to the device, the linear motor is adopted to drive the to-be-detected object to move, so that the to-be-detected object can stably run, and accurate positioning of the to-be-detected object is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of visual detection, in particular to a visual detection device. Background Art

[0002] Traditional visual inspection technology mainly relies on human eyes, that is, human eyes for observation and judgment. This method is highly subjective and unstable, and cannot work continuously for a long time. Modern visual inspection technology uses computer vision and image processing algorithms to achieve high-efficiency, high-precision, and automated visual inspection.

[0003] At present, the inspection equipment used in modern visual inspection technology usually includes machine vision system, motion control system and data processing system. Although the existing inspection equipment can also complete visual inspection, it still has some defects: the motion control system does not run smoothly enough, and the stability and positioning accuracy are low, which may lead to large errors or even mistakes in the inspection results. Utility Model Content

[0004] In view of this, an embodiment of the utility model provides a visual inspection device, which can ensure the smooth operation of the object to be inspected and achieve accurate positioning of the object to be inspected by adopting a linear motor to drive the object to be inspected to move and position.

[0005] The embodiment of the utility model provides a visual inspection device, comprising: a support base, a visual inspection module, a motion control module and a processing module, wherein the support base comprises: a support base and a support stand disposed on the support base;

[0006] The visual inspection module comprises:

[0007] A microscope assembly and a camera assembly installed on the support stand, wherein the microscope assembly is arranged below the camera assembly, the microscope assembly is used to magnify the object to be detected, and the camera assembly is used to photograph the magnified object to be detected to obtain a photographed image;

[0008] The motion control module comprises:

[0009] A first linear motor installed on the support base, the first linear motor is located below the microscope assembly, and the first linear motor is used to drive the object to be detected to move linearly along a first direction on a horizontal plane;

[0010] A controller connected to an input end of the first linear motor, the controller being used to control the first linear motor;

[0011] The processing module is connected to the camera assembly, and is used to process the captured images captured by the camera assembly to obtain the detection results of the object to be detected.

[0012] In some embodiments, the visual detection module further comprises:

[0013] A guide rail and a lead screw motor mounted on the support stand, the microscope assembly being mounted on the guide rail;

[0014] The input end of the lead screw motor is connected to the controller, the output end of the lead screw motor is connected to the microscope assembly, and the lead screw motor is used to drive the microscope assembly to move vertically along the guide rail.

[0015] In some embodiments, the visual detection module further comprises:

[0016] A first rotary motor installed on the guide rail, wherein an output end of the first rotary motor is connected to the microscopic assembly, and the first rotary motor is used to drive the microscopic assembly to rotate;

[0017] The output end of the lead screw motor is connected to the first rotary motor, and the lead screw motor is used to drive the first rotary motor to move vertically along the guide rail.

[0018] In some embodiments, the visual detection module further comprises:

[0019] A light source is installed on the microscope assembly, and the light source is used to provide light.

[0020] In some embodiments, the motion control module further includes:

[0021] A second rotary motor installed on the first linear motor, wherein the output end of the first linear motor is connected to the second rotary motor, and the first linear motor is used to drive the second rotary motor to move horizontally and linearly;

[0022] The output end of the second rotating motor is connected to the object to be detected, and the second rotating motor is used to drive the object to be detected to rotate.

[0023] In some embodiments, the motion control module further includes:

[0024] A second linear motor is installed on the support base, the first linear motor is installed on the second linear motor, and the second linear motor and the first linear motor are perpendicular to each other;

[0025] The input end of the second linear motor is connected to the controller, the output end of the second linear motor is connected to the first linear motor, and the second linear motor is used to drive the object to be measured to move linearly along a second direction on a horizontal plane.

[0026] In some embodiments, the motion control module further includes:

[0027] A displacement reference component is provided on the second rotary motor, and the displacement reference component is used to measure the displacement of the first linear motor and the second linear motor, and calibrate the positions of the first linear motor and the second linear motor according to the displacement.

[0028] In some embodiments, the displacement reference component includes two pointers, a first pointer of the two pointers is used to measure a first displacement of the first linear motor, and calibrate the position of the first linear motor according to the first displacement;

[0029] The second pointer is used to measure the second displacement of the second linear motor and calibrate the position of the second linear motor according to the second displacement.

[0030] In some embodiments, the visual detection device further comprises:

[0031] A visual sensor disposed on the support base, the visual sensor is connected to the processing module, and the visual sensor is used to detect and obtain an image of the visual detection device;

[0032] The processing module is also used to process the image of the visual detection device to determine whether the visual detection device is in normal condition.

[0033] In some embodiments, the microscope component is a gimbal microscope, and the camera component is a CCD visual detection camera.

[0034] Beneficial effects of the embodiments of the utility model: Different from the prior art, the visual inspection device provided by the embodiments of the utility model includes: a support base, a visual inspection module, a motion control module and a processing module, wherein the support base includes: a support base and a support stand arranged on the support base; the visual inspection module includes: a microscope component and a camera component installed on the support stand, the microscope component is arranged below the camera component, the microscope component is used to magnify the object to be inspected, and the camera component is used to photograph the magnified object to be inspected to obtain a photographed image; the motion control module includes: a first linear motor installed on the support base, the first linear motor is located below the microscope component, and the first linear motor is used to drive the object to be inspected to move linearly along a first direction on a horizontal plane; a controller is connected to the input end of the first linear motor, and the controller is used to control the first linear motor; the processing module is connected to the camera component, and the processing module is used to process the photographed image obtained by the camera component to obtain the detection result of the object to be inspected.

[0035] The visual inspection device provided by the embodiment of the utility model can ensure the smooth operation of the object to be inspected and achieve accurate positioning of the object to be inspected by using a linear motor to drive the object to be inspected to move; and by using a microscope component to partially or fully magnify the object to be inspected, clear and detailed surface details of the object to be inspected can be obtained, thereby improving the accuracy of the inspection results. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the prior art description. Obviously, the drawings described below only show certain embodiments of the utility model, and therefore should not be regarded as limiting the scope of protection. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 It is a schematic diagram of the structure of a visual inspection device provided by some embodiments of the utility model;

[0038] Figure 2 yes Figure 1 A left side view of the visual inspection device shown in the embodiment;

[0039] Figure 3 yes Figure 1 A right side view of the visual inspection device shown in the embodiment.

[0040] Description of reference numerals:

[0041] 100. Visual inspection device;

[0042] 10. Support base; 11. Support base; 12. Support stand;

[0043] 20. Visual inspection module; 21. Microscope assembly; 22. Camera assembly; 23. Guide rail; 24. Lead screw motor; 25. First rotating motor;

[0044] 30. Motion control module; 31. First linear motor; 32. Second rotary motor; 33. Second linear motor;

[0045] 40. Processing module;

[0046] 200. Object to be detected. DETAILED DESCRIPTION

[0047] In order to have a clearer understanding of the technical features, purposes and effects of the utility model, the technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. The detailed description of the embodiments of the utility model in the drawings below does not limit the scope of protection claimed by the utility model, but only represents the selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0048] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be a centered element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centered element at the same time. The terms "vertical", "horizontal", "left", "right", "first", "second", "third" and other similar expressions used in this specification are only for the purpose of convenience of explanation and to distinguish between the same items or similar items with basically the same functions and effects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "multiple" refers to a number of two or more, unless otherwise clearly and specifically limited. In addition, although the functional module division is performed in the device schematic diagram, structural schematic diagram and other figures, in some cases, it can be divided into modules different from those in the device or structure.

[0049] Unless otherwise defined, the technical terms and scientific terms used in this specification have the same meanings as those generally understood by those of ordinary skill in the technical field of the present utility model. The terms used in this specification are only for the purpose of describing specific implementations and are not used to limit the present utility model. The term "and / or" used in this specification includes any and all combinations of one or more related listed items. It should be understood that the technical features involved in each implementation of the present utility model described below can be combined with each other as long as there is no conflict.

[0050] See also Figures 1 to 3 , Figure 1 The structure diagram of the visual inspection device 100 provided in some embodiments of the present utility model is shown. Figure 2 and Figure 3The left view and right view of the visual inspection device 100 provided by some embodiments of the utility model are respectively shown. The visual inspection device 100 includes a support base 10, a visual inspection module 20, a motion control module 30 and a processing module 40. The support base 10 is used to carry the various components of the visual inspection device 100. The support base 10 includes a support base 11 and a support stand 12 arranged on the support base 11, the support base 11 is used to carry the motion control module 30 and the processing module 40, and the support stand 12 is used to carry the visual inspection module 20.

[0051] Specifically, the visual inspection module 20 includes: a microscope component 21 and a camera component 22. The microscope component 21 and the camera component 22 are both mounted on the support stand 12, and the microscope component 21 is arranged below the camera component 22. The microscope component 21 is used to magnify the object to be detected 200. Exemplarily, the microscope component 21 can partially or all-roundly magnify the object to be detected 200, so that the camera component 22 can capture clearer and more detailed surface details of the object to be detected 200. The camera component 22 is used to capture the magnified object to be detected 200 to obtain a captured image of the object to be detected 200. In some embodiments, the microscope component 21 can be a gimbaled stereo microscope, which has the advantages of lenses with better optical properties and higher magnification, so as to obtain a higher quality magnified image of the object to be detected 200 and improve the accuracy of the detection results. The camera assembly 22 may be a CCD visual inspection camera, which has the advantages of high imaging quality, low noise level, high sensitivity, large dynamic range, strong stability, etc., and is widely used in systems or devices such as quality control, visual inspection, and machine vision to provide accurate, stable, and high-precision inspection images. It should be understood that in some other embodiments, the microscope assembly 21 and the camera assembly 22 may also be other suitable components, and the embodiment of the utility model does not impose any limitation on this.

[0052] Specifically, the motion control module 30 includes: a first linear motor 31 and a controller ( Figure 1-3). The controller can be arranged at any suitable position in the visual inspection device 100, and the embodiment of the utility model does not impose any restriction on this. The controller is connected to the input end of the first linear motor 31, and the controller is used to control the first linear motor 31. The first linear motor 31 is mounted on the support base 11 and is located below the microscope assembly 21, so that the microscope assembly 21 can accurately magnify the object to be detected 200 located at the first linear motor 31. The first linear motor 31 is used to drive the object to be detected 200 to move linearly along the first direction on the horizontal plane. After the camera assembly 22 obtains the captured image of the object to be detected 200, the captured image can be sent to the processing module 40, or the processing module 40 can actively obtain the captured image and process the captured image of the object to be detected 200. In the embodiment of the utility model, the processing module 40 is connected to the camera assembly 22, and is used to receive or obtain the captured image obtained by the camera assembly 22, and then process the captured image to obtain the detection result of the object to be detected 200.

[0053] The embodiment of the utility model adopts a first linear motor 31, and uses a controller to control the first linear motor 31 to steadily drive the object to be detected 200 to move linearly along the first direction on the horizontal plane. When the object to be detected 200 moves to a suitable position, the object to be detected 200 is accurately and stably positioned at a suitable position, thereby achieving precise positioning of the object to be detected 200. Thus, the visual detection module 20 can capture and obtain high-quality images of the object to be detected 200, thereby improving the accuracy of the detection results.

[0054] In some embodiments, the processing module 40 can be an electronic device (such as a laptop computer, a desktop computer, a tablet computer, etc.), and the electronic device includes a processor and a memory and a display connected to the processor in communication, and the processor is used to process the received or acquired captured image of the object to be detected 200 to obtain the detection result of the object to be detected 200; the memory is used to store the captured image of the object to be detected 200 and the detection result of the object to be detected 200; the display is used to display the captured image of the object to be detected 200 and the detection result of the object to be detected 200. It can be understood that in other embodiments, the electronic device can also include more or fewer components, or components different from this embodiment. The processing module 40 can also be other types of devices, such as computing devices, cloud devices, etc., and the embodiments of the utility model do not impose any restrictions on this.

[0055] It should be understood that the controller can adopt Googol Technology's GHN series high-performance multi-axis network motion controller. The GHN series high-performance multi-axis network motion controller is a network-based, modular plug-in motion controller. Among them, the controller main card realizes the motion planning of each axis, the axis control module completes the interaction with external hardware, and the main card and the axis control module, and the axis control module and the axis control module communicate through the gLink-II bus. According to the actual application requirements, different types of axis control modules (3-axis module, 4-axis module, 6-axis module, etc.) can be selected to quickly build a multi-axis motion control system to meet the requirements of distributed field motion control and control system flexibility.

[0056] In some embodiments, the visual inspection module 20 further includes: a guide rail 23 and a lead screw motor 24. The guide rail 23 and the lead screw motor 24 are both mounted on the support stand 12, wherein the guide rail 23 is vertically mounted on the support stand 12. In the embodiment of the utility model, the microscopic assembly 21 is mounted on the guide rail 23, and the microscopic assembly 21 can be driven by an external force such as the lead screw motor 24 to move vertically along the guide rail 23.

[0057] Specifically, the input end of the lead screw motor 24 is connected to the controller, and the controller is also used to control the lead screw motor 24. The output end of the lead screw motor 24 is connected to the microscope assembly 21, and the lead screw motor 24 is used to drive the microscope assembly 21 to move vertically along the guide rail 23. The lead screw motor 24 can also fix the microscope assembly 21 at a suitable height. Since different camera assemblies 22 usually have different focal lengths, when shooting the image after the enlargement of the microscope assembly 21, it is necessary to maintain a suitable distance from the microscope assembly 21 (i.e., meet the focal length requirements of the camera assembly 22). After the lead screw motor 24 drives the microscope assembly 21 to move vertically along the guide rail 23 to maintain a suitable distance (i.e., a suitable height) from the camera assembly 22, the microscope assembly 21 is fixed at the suitable height to magnify and detect the object 200 to be detected.

[0058] In some embodiments, the visual inspection module 20 further includes: a first rotary motor 25. The first rotary motor 25 is mounted on the guide rail 23, and the output end of the lead screw motor 24 is connected to the first rotary motor 25. The lead screw motor 24 is used to drive the first rotary motor 25 to move vertically along the guide rail 23, so as to drive the first rotary motor 25 to a suitable height and fix it at a suitable height, thereby driving the microscope assembly 21 to move vertically to a suitable height and fix it at a suitable height. The output end of the first rotary motor 25 is connected to the microscope assembly 21, and the first rotary motor 25 is used to drive the microscope assembly 21 to perform rotational motion, so as to be able to perform all-round inspection of the object 200 to be inspected.

[0059] In some embodiments, the visual detection module 20 further includes: a light source ( Figure 1-3In this embodiment, the light source is adapted to the shape of the microscope component 21 and is cylindrical, and the light source is integrated in the microscope component 21, so that the light required for the microscope component 21 to magnify the image of the object to be detected 200 and the camera component 22 to shoot the image of the object to be detected 200 can be fully provided, thereby ensuring the quality of the captured image and improving the accuracy of the detection result. It can be understood that in some other embodiments, the shape, setting position and setting method of the light source can be the same as or different from the embodiment of the utility model, and the embodiment of the utility model does not impose any limitation on this.

[0060] In some embodiments, the motion control module 30 further includes: a second rotary motor 32. The second rotary motor 32 is mounted on the first linear motor 31, and the output end of the second rotary motor 32 is connected to the object to be detected 200, and the second rotary motor 32 is used to drive the object to be detected 200 to perform rotational motion, so that the object to be detected 200 can be detected in all directions. The output end of the first linear motor 31 is connected to the second rotary motor 32, and the first linear motor 31 is used to drive the second rotary motor 32 to move horizontally and linearly, so as to drive the second rotary motor 32 to a suitable position and position it at the suitable position, thereby driving the object to be detected 200 connected to the output end of the second rotary motor 32 to move horizontally and linearly to a suitable position and position it at the suitable position.

[0061] In some embodiments, the motion control module 30 also includes: a second linear motor 33. The second linear motor 33 is installed on the support base 11, the first linear motor 31 is installed on the second linear motor 33, and the second linear motor 33 and the first linear motor 31 are perpendicular to each other. The input end of the second linear motor 33 is connected to the controller, and the controller is also used to control the second linear motor 33. The output end of the second linear motor 33 is connected to the first linear motor 31, and the second linear motor 33 is used to drive the first linear motor 31 to move linearly along the second direction on the horizontal plane, so as to drive the first linear motor 31 to a suitable position and position it at the suitable position, thereby driving the object to be detected 200 to move linearly along the second direction on the horizontal plane to a suitable position and position it at the suitable position.

[0062] In some embodiments, the motion control module 30 further includes: a displacement reference component ( Figure 1-3The displacement reference component is provided on the second rotary motor 32, and is used to measure the displacement of the first linear motor 31 and the second linear motor 33. According to the displacement of the first linear motor 31 and the second linear motor 33, the controller controls the first linear motor 31 and the second linear motor 33 to move linearly, respectively, so as to calibrate the positions of the first linear motor 31 and the second linear motor 33. After calibrating the positions of the first linear motor 31 and the second linear motor 33, the object 200 to be detected is detected to ensure the accuracy of the detection result of the object 200 to be detected.

[0063] In some embodiments, the displacement reference component can be two pointers. Specifically, the first pointer of the two pointers is used to measure the first displacement of the first linear motor 31. The controller controls the first linear motor 31 to move linearly according to the first displacement to calibrate the position of the first linear motor 31; the second pointer is used to measure the second displacement of the second linear motor 33. The controller controls the second linear motor 33 to move linearly according to the second displacement to calibrate the position of the second linear motor 33. It can be understood that the displacement reference component is a displacement indicator of the first linear motor 31 and the second linear motor 33. Since the displacement of the first linear motor 31 and the second linear motor 33 is not easy to be observed, it is necessary to set a displacement reference component (i.e., a pointer) on the second rotary motor 32 to indicate the displacement of the first linear motor 31 and the second linear motor 33. It should be understood that the displacement reference component can also be other components of suitable types that can be used to measure the displacement of the first linear motor 31 and the second linear motor 33, and the embodiment of the utility model does not impose any restrictions on this.

[0064] In some embodiments, the visual detection device 100 further includes: a visual sensor ( Figure 1-3 The visual sensor is arranged on the support base 10, and the visual sensor is connected to the processing module 40. The visual sensor is used to detect and obtain the image of the visual detection device 100, and send the image of the visual detection device 100 to the processing module 40, or the processing module 40 actively obtains the image of the visual detection device 100. The processing module 40 is also used to process the image of the visual detection device 100 to obtain a corresponding processing result, and the processing result can be used to accurately determine whether the visual detection device 100 is normal. For example, it is determined whether there is an object 200 to be detected or other debris in the visual detection device 100 that has fallen on the support base 10, the first linear motor 31 and the second linear motor 33, which may affect the detection.

[0065] It should be understood that the visual sensor can also be set at other suitable positions in the visual detection device 100 to detect and obtain the image of the visual detection device 100. In addition, the number of visual sensors can be single or multiple. By setting multiple visual sensors, the image of the visual detection device 100 can be detected and obtained in an all-round manner. Exemplarily, the visual sensor includes but is not limited to: infrared sensor, CCD (Charge-Coupled Device, CCD) sensor, laser radar, CMOS (Complementary Metal-Oxide-Semiconductor, CMOS) sensor, camera and photodiode, etc.

[0066] In summary, the visual inspection device provided by the embodiment of the utility model includes: a supporting base, a visual inspection module, a motion control module and a processing module, the supporting base includes: a supporting base and a supporting stand arranged on the supporting base; the visual inspection module includes: a microscope component and a camera component installed on the supporting stand, the microscope component is arranged below the camera component, the microscope component is used to magnify the object to be inspected, and the camera component is used to photograph the magnified object to be inspected to obtain a photographed image; the motion control module includes: a first linear motor installed on the supporting base, the first linear motor is located below the microscope component, and the first linear motor is used to drive the object to be inspected to move linearly in a first direction on a horizontal plane; a controller is connected to the input end of the first linear motor, and the controller is used to control the first linear motor; the processing module is connected to the camera component, and the processing module is used to process the photographed image obtained by the camera component to obtain the detection result of the object to be inspected.

[0067] The visual inspection device provided by the embodiment of the utility model can ensure the smooth operation of the object to be inspected and achieve accurate positioning of the object to be inspected by using a linear motor to drive the object to be inspected to move; and by using a microscope component to partially or comprehensively magnify the object to be inspected, clear and detailed surface details of the object to be inspected can be obtained, thereby improving the accuracy of the inspection results.

[0068] It should be noted that the above-mentioned technical features can be used in any combination without limitation. The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to more clearly understand the technical features, purposes and effects of the utility model and implement them accordingly. They cannot be used to limit the scope of protection of the rights of the utility model. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the utility model, or directly or indirectly used in other related technical fields, should be included in the scope of protection of the claims of the utility model.

Claims

1. A visual inspection device, characterized in that: include: A support base, a visual detection module, a motion control module and a processing module, wherein the support base comprises: a support base and a support stand arranged on the support base; The visual inspection module comprises: A microscope assembly and a camera assembly installed on the support stand, wherein the microscope assembly is arranged below the camera assembly, the microscope assembly is used to magnify the object to be detected, and the camera assembly is used to photograph the magnified object to be detected to obtain a photographed image; The motion control module comprises: A first linear motor installed on the support base, the first linear motor is located below the microscope assembly, and the first linear motor is used to drive the object to be detected to move linearly along a first direction on a horizontal plane; A controller connected to an input end of the first linear motor, the controller being used to control the first linear motor; The processing module is connected to the camera assembly, and is used to process the captured images captured by the camera assembly to obtain the detection results of the object to be detected.

2. The visual inspection device according to claim 1, characterized in that: The visual inspection module also includes: A guide rail and a lead screw motor mounted on the support stand, the microscope assembly being mounted on the guide rail; The input end of the lead screw motor is connected to the controller, the output end of the lead screw motor is connected to the microscope assembly, and the lead screw motor is used to drive the microscope assembly to move vertically along the guide rail.

3. The visual inspection device according to claim 2, characterized in that: The visual inspection module also includes: A first rotary motor installed on the guide rail, wherein an output end of the first rotary motor is connected to the microscopic assembly, and the first rotary motor is used to drive the microscopic assembly to rotate; The output end of the lead screw motor is connected to the first rotary motor, and the lead screw motor is used to drive the first rotary motor to move vertically along the guide rail.

4. The visual inspection device according to claim 1, characterized in that: The visual inspection module also includes: A light source is installed on the microscope assembly, and the light source is used to provide light.

5. The visual inspection device according to any one of claims 1 to 4, characterized in that: The motion control module also includes: A second rotary motor installed on the first linear motor, wherein the output end of the first linear motor is connected to the second rotary motor, and the first linear motor is used to drive the second rotary motor to move horizontally and linearly; The output end of the second rotating motor is connected to the object to be detected, and the second rotating motor is used to drive the object to be detected to rotate.

6. The visual inspection device according to claim 5, characterized in that: The motion control module also includes: A second linear motor is installed on the support base, the first linear motor is installed on the second linear motor, and the second linear motor and the first linear motor are perpendicular to each other; The input end of the second linear motor is connected to the controller, the output end of the second linear motor is connected to the first linear motor, and the second linear motor is used to drive the object to be detected to move linearly along a second direction on a horizontal plane.

7. The visual inspection device according to claim 6, characterized in that: The motion control module also includes: A displacement reference component is provided on the second rotary motor, and the displacement reference component is used to measure the displacement of the first linear motor and the second linear motor, and calibrate the positions of the first linear motor and the second linear motor according to the displacement.

8. The visual inspection device according to claim 7, characterized in that: The displacement reference component includes two pointers, a first pointer of the two pointers is used to measure a first displacement of the first linear motor, and calibrate the position of the first linear motor according to the first displacement; The second pointer is used to measure the second displacement of the second linear motor and calibrate the position of the second linear motor according to the second displacement.

9. The visual inspection device according to claim 5, characterized in that: The visual detection device also includes: A visual sensor disposed on the support base, the visual sensor is connected to the processing module, and the visual sensor is used to detect and obtain an image of the visual detection device; The processing module is also used to process the image of the visual detection device to determine whether the visual detection device is in normal condition.

10. The visual inspection device according to claim 5, characterized in that: The microscope component is a gimbal microscope, and the camera component is a CCD visual detection camera.

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