Die bonder and die bonder
By using an elastic structure to movably connect the first end of the swing arm of the solid crystal machine and the rotating seat, an arc-shaped swing movement is achieved, which solves the problem of large movement amplitude of the swing arm, improves efficiency and reduces production costs.
Patent Information
- Application Number
- CN202420077795.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-10
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-01-10
AI Technical Summary
The swing arm in existing crystal-fixing machines has a large range of motion, resulting in low working efficiency.
By using an elastic structure to movably connect between the first end of the swing arm and the rotating seat, the first end of the swing arm is restrained by using the rotating seat and the elastic structure, so that when the lifting mechanism drives the connection point of the swing arm to lift and lower, The first end does not rise and fall synchronously with the connection point, thereby achieving arc-shaped swing motion and reducing the movement amplitude of the entire swing arm.
The movement efficiency of the swing arm is improved, the structure is simplified, and the production cost of the solid crystal device is reduced.
Smart Images
Figure CN222168339U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the technical field of crystal bonding machines, and more specifically, to a crystal bonding device and a crystal bonding machine. Background Art
[0002] A die bonder is a machine used to fix wafers or chips on a substrate. Existing die bonders generally include two servo motors and swing arms, one of which is used to drive the other servo motor and the swing arm to rotate as a whole, and the other servo motor is used to drive the swing arm to move up and down to remove or bond the wafer. This driving method results in a large swing arm movement range and low work efficiency. Utility Model Content
[0003] The purpose of the embodiments of the present application is to provide a crystal bonding device and a crystal bonding machine to solve the technical problems of large swing arm movement range and low working efficiency existing in the prior art.
[0004] To achieve the above-mentioned purpose, the technical solution adopted in the present application is: to provide a crystal fixing device, including a rotating mechanism, a rotating seat, a lifting mechanism and a swing arm; the rotating seat is installed at the output end of the rotating mechanism, and the lifting mechanism is installed on the rotating seat; the swing arm has a first end and a second end that are relatively arranged, and the swing arm also has a connection point located between the first end and the second end and close to the first end, the connection point is connected to the output end of the lifting mechanism, the first end and the rotating seat are movably connected by an elastic structure, and when the connection point is driven by the lifting mechanism, the swing arm makes an arc-shaped swinging motion.
[0005] In one embodiment, the elastic structure includes at least one spring sheet, one end of which is fitted and fixed to the rotating seat, and the other end of which is fitted and fixed to the swing arm.
[0006] In one embodiment, the elastic structure includes a first spring sheet and a second spring sheet, the first spring sheet and the second spring sheet are perpendicular to each other, and the opposite ends of the first spring sheet are respectively fixed on the rotating seat and the swing arm; the opposite ends of the second spring sheet are respectively fixed on the rotating seat and the swing arm, and the vertical intersection of the first spring sheet and the second spring sheet is the swing fulcrum of the swing arm.
[0007] In one embodiment, the lifting mechanism includes a voice coil motor, which includes a magnet assembly and a coil assembly. The magnet assembly is installed on the rotating seat, and the coil assembly is connected to the swing arm and performs arc-shaped swinging motion with the swing arm.
[0008] In one embodiment, an elastic member is connected between the coil assembly and the rotating seat, the elastic member is vertically arranged, and the elastic member and the connection point are respectively located on opposite sides of the swing fulcrum of the swing arm.
[0009] In one embodiment, the connection point between the coil assembly and the swing arm is connected via a connection seat, and the elastic member is connected between the connection seat and the rotating seat.
[0010] In one embodiment, the magnet assembly includes a magnet frame having a mounting cavity and an electromagnet spaced apart in the mounting cavity, and the magnet frame is mounted on the rotating seat; the coil assembly includes a coil frame and a coil, the coil frame is mounted between two of the electromagnets, and the coil is mounted on the coil frame.
[0011] In one embodiment, one end of the coil assembly is connected to the swing arm, and the other end of the coil assembly forms an arc surface, the center of the arc surface is located at the swing fulcrum of the swing arm, an arc-shaped grating scale is fitted on the arc surface, and a grating reader set at a distance from the grating scale is installed on the rotating seat.
[0012] In one embodiment, the swing arm includes a swing arm body and a mounting seat fixedly connected to an end of the swing arm body, and the first end and the connection point are both located on the mounting seat.
[0013] The beneficial effect of the crystal bonding device provided by the present application is that: the crystal bonding device provided by the embodiment of the present application is movably connected between the first end of the swing arm and the rotating seat through an elastic structure, so that the first end of the swing arm can be constrained in motion by the rotating seat and the elastic structure, so that when the lifting mechanism drives the connection point of the swing arm to rise and fall, the first end will not rise and fall synchronously with the connection point, so that the swing arm performs an arc-shaped swinging motion, and then when the second end performs a lifting motion of the same amplitude, the movement amplitude of the entire swing arm is reduced, making the movement efficiency of the swing arm higher. In addition, since the swing arm in the present application performs an arc-shaped swinging motion, there is no need to set a cross guide rail for linear guidance on the lifting mechanism, which simplifies the structure and reduces the manufacturing cost of the crystal bonding device.
[0014] On the other hand, the present application also provides a die bonding machine, comprising the above-mentioned die bonding device.
[0015] The beneficial effect of the crystal bonding machine provided in the present application is that: the crystal bonding machine provided in the embodiment of the present application, through the setting of the above-mentioned crystal bonding device, makes the working effect of the crystal bonding machine higher and the structure simpler. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0017] Figure 1 A schematic diagram of the three-dimensional structure of a die-bonding device provided in an embodiment of the present application;
[0018] Figure 2 A schematic diagram of the side structure of a die bonding device provided in an embodiment of the present application;
[0019] Figure 3 It is an enlarged structural diagram of the lifting mechanism, rotating seat, swing arm and elastic structure corresponding to the second crystal bonding device;
[0020] Figure 4 A schematic diagram of the assembly of the elastic structure and the rotating seat in the die-bonding device provided in an embodiment of the present application;
[0021] Figure 5 A schematic diagram of the structure of a voice coil motor in a die bonding device provided in an embodiment of the present application;
[0022] Figure 6 A schematic diagram of the structure of a magnet assembly in a die-bonding device provided in an embodiment of the present application;
[0023] Figure 7 A schematic diagram of the structure of a coil assembly in a die bonding device provided in an embodiment of the present application;
[0024] Figure 8 A schematic diagram of the structure of a mounting seat in a die bonding device provided in an embodiment of the present application.
[0025] Among them, the reference numerals in the figure are:
[0026] 100, rotating mechanism; 200, rotating seat; 300, lifting mechanism; 310, magnet assembly; 311, magnet frame; 312, electromagnet; 313, mounting cavity; 320, coil assembly; 321, coil frame; 3211, arc surface; 322, coil; 400, swing arm; 410, swing arm body; 420, mounting seat; 421, mounting plate; 422, first mounting part; 423, side plate; 424, second mounting part; 430, first end; 440, second end; 450, connecting point; 500, elastic structure; 510, first spring piece; 520, second spring piece; 600, connecting seat; 700, fixing block; 800, elastic member; 900, grating ruler; 1000, grating reader; O, swing fulcrum. DETAILED DESCRIPTION
[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0028] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0029] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0031] See also Figures 1 to 3 Now, the die-bonding device provided in the embodiment of the present application is described. The die-bonding device is used to absorb semiconductor devices such as wafers or chips to attach the semiconductor devices to a substrate.
[0032] The crystal bonding device includes a rotating mechanism 100, a rotating seat 200, a lifting mechanism 300 and a swing arm 400; the rotating seat 200 is installed at the output end of the rotating mechanism 100, and the lifting mechanism 300 is installed at the rotating seat 200; the swing arm 400 has a first end 430, a connection point 450 and a second end 440, the first end 430 and the second end 440 are arranged opposite to each other, and the connection point 450 is located between the first end 430 and the second end 440 and is arranged close to the first end 430. The connection point 450 is connected to the output end of the lifting mechanism 300, and the second end 440 is used for crystal extraction or crystal bonding. The first end 430 and the rotating seat 200 are movably connected through an elastic structure 500, and the swing arm 400 performs an arc-shaped swinging motion when the connection point 450 is driven by the lifting mechanism 300.
[0033] The rotating mechanism 100 outputs a rotating motion, thereby driving the rotating seat 200, the lifting mechanism 300 and the swing arm 400 to rotate together, specifically, to rotate around a vertical axis, that is, to rotate in a horizontal plane.
[0034] The swing arm 400 is connected to the output end of the lifting mechanism 300 via the connection point 450. Therefore, when the lifting mechanism 300 outputs a lifting motion, the connection point 450 of the swing arm 400 will also follow the lifting. At the same time, since the first end 430 of the swing arm 400 is movably connected to the rotating seat 200 via the elastic structure 500, the first end 430 cannot be lifted or lowered along with the connection point 450. That is, the first end 430 is constrained by the elastic structure 500, so that the swing arm 400 can only make an arc-shaped swinging motion, specifically, an arc-shaped swinging motion around the swing fulcrum O, and the swing fulcrum O is located on the elastic structure 500.
[0035] For details, please refer to Figure 2 When the lifting mechanism 300 drives the connection point 450 downward, the elastic structure 500 has an upward pulling force on the first end 430, so that the swing arm 400 rotates around the swing fulcrum O and drives the second end 440 to move downward to remove the crystal or fix the crystal; when the lifting mechanism 300 drives the connection point 450 upward, the elastic structure 500 has a downward pulling force on the first end 430, so that the swing arm 400 rotates around the swing fulcrum O and drives the second end 440 to move upward to reset.
[0036] The crystal bonding device in the embodiment of the present application is movably connected between the first end 430 of the swing arm 400 and the rotating seat 200 through the elastic structure 500, so that the first end 430 of the swing arm 400 can be constrained in motion by the rotating seat 200 and the elastic structure 500, so that when the lifting mechanism 300 drives the connection point 450 of the swing arm 400 to rise and fall, the first end 430 will not rise and fall synchronously with the connection point 450, so that the swing arm 400 performs an arc-shaped swinging motion, and then when the second end 440 performs the same amplitude of lifting and falling motion, the movement amplitude of the entire swing arm 400 is reduced, so that the movement efficiency of the swing arm 400 is higher. In addition, since the swing arm 400 in the present application performs an arc-shaped swinging motion, there is no need to set a cross guide rail for linear guidance on the lifting mechanism 300, which simplifies the structure and reduces the manufacturing cost of the crystal bonding device.
[0037] In one embodiment, the elastic structure 500 includes at least one spring sheet, one end of which is fixedly attached to the rotating seat 200, and the other end of which is fixedly attached to the swing arm 400. The spring sheet is elastic, and when the lifting mechanism 300 drives the connection point 450 to rise and fall, the first end 430 of the swing arm 400 cannot be set synchronously with the connection point 450 due to the constraint of the spring sheet, and because the spring sheet is elastic, it deforms after being subjected to force, so that the swing arm 400 can swing in an arc relative to the mounting seat 420. It can be understood that in other embodiments of the present application, the elastic member 800 can also be an elastic rope or a spring, which is not limited here.
[0038] In one embodiment, see Figure 3 and Figure 4 The elastic structure 500 includes a first elastic sheet 510 and a second elastic sheet 520. The first elastic sheet 510 and the second elastic sheet 520 are perpendicular to each other. The opposite ends of the first elastic sheet 510 are respectively fixed on the rotating seat 200 and the swing arm 400; the opposite ends of the second elastic sheet 520 are respectively fixed on the rotating seat 200 and the swing arm 400. The vertical intersection of the first elastic sheet 510 and the second elastic sheet 520 is the swing fulcrum O of the swing arm 400.
[0039] Specifically, the swing arm 400 extends in the horizontal direction, the rotating seat 200 and the swing arm 400 are spaced apart in the horizontal direction, the first spring piece 510 is horizontally arranged, one end of the first spring piece 510 is fitted and fixed on the lower surface of the rotating seat 200, and the other end of the first spring piece 510 is fitted and fixed on the lower surface of the swing arm 400; the second spring piece 520 is vertically arranged, one end of the second spring piece 520 is fitted and fixed on the side surface of the rotating seat 200 facing the swing arm 400, and the other end of the second spring piece 520 is fitted and fixed on the side surface of the swing arm 400 facing the rotating seat 200.
[0040] Among them, the distance between the rotating seat 200 and the swing arm 400 should not be too small, otherwise it will cause structural interference between the swing arm 400 and the rotating seat 200 during the swinging process, resulting in the swing arm 400 being unable to swing according to the preset trajectory; the distance between the rotating seat 200 and the swing arm 400 should not be too large, otherwise it will make the size of the elastic member 800 too large, and the elastic member 800 will not be able to support the swing arm 400 enough, which will cause the swing arm 400 to be unable to swing in an arc, but to follow the connection point 450 to do lifting and lowering movements. In summary, the distance between the rotating seat 200 and the swing arm 400 only needs to meet the requirement that the swing arm 400 will not have structural interference with the rotating seat 200 during the rotation and swinging process, and does not need to be too large.
[0041] In the embodiment of the present application, the rotating seat 200 and the swing arm 400 are connected by the mutually perpendicular first spring piece 510 and the second spring piece 520, so that the spring piece will constrain the movement of the swing arm 400 whether it swings upward or downward relative to the rotating seat 200, thereby ensuring the stable rotation movement of the swing arm 400, high movement accuracy, and stable chip attachment, and the vertical intersection of the first spring piece 510 and the second spring piece 520 is the swing fulcrum O of the swing arm 400. It can be understood that in other embodiments of the present application, when the structural strength and elastic deformation capacity of the spring piece can meet the conditions for the rotation of the swing arm 400, only the horizontally arranged first spring piece 510 or the vertically arranged second spring piece 520 can be set, and this is not the only limitation here.
[0042] In one embodiment, see Figure 3 and Figure 4 The elastic structure 500 includes two first elastic sheets 510 and two second elastic sheets 520, and the two second elastic sheets 520 are respectively arranged on the outside of the two first elastic sheets 510, so that the connection strength of the elastic structure 500 to the swing arm 400 can be increased. It can be understood that in other embodiments of the present application, the number of the first elastic sheets 510 can also be one, three or more than three, and the number of the second elastic sheets 520 can also be one, three or more than three, which is not limited here.
[0043] In one embodiment, see Figure 3 and Figure 4 The crystal fixing device further includes a plurality of fixing blocks 700, each of which is provided at the opposite ends of each spring sheet. The fixing blocks 700 are used to be attached to the ends of the spring sheets, and fasteners are sequentially passed through the fixing blocks 700 and the spring sheets to lock and fix the spring sheets on the rotating seat 200 or the swing arm 400. The setting of the fixing blocks 700 enables the spring sheets to be firmly and stably installed on the rotating seat 200 and the swing arm 400, so that the spring sheets can only be stretched or compressed, but will not flip at the two ends, thereby ensuring the movement stability of the swing arm 400.
[0044] In one embodiment, see Figure 1 , Figure 3 and Figure 5The lifting mechanism 300 includes a voice coil motor, which includes a magnet assembly 310 and a coil assembly 320. The magnet assembly 310 is mounted on the rotating seat 200, and the coil assembly 320 is connected to the swing arm 400 and performs arc swinging motion with the swing arm 400. The magnet assembly 310 is used to generate a stable magnetic field. When the coil assembly 320 is energized, a magnetic field is generated. Under the action of the magnetic field, the coil assembly 320 is lifted relative to the magnet assembly 310, thereby driving the connection point 450 of the swing arm 400 to lift and lower. At the same time, due to the connection of the elastic structure 500, the coil assembly 320 and the swing arm 400 perform arc swinging motion around the swing fulcrum O together. In the embodiment of the present application, a voice coil motor is used instead of a servo motor to drive the swing arm 400 to move. The voice coil motor has better high-frequency response characteristics, can achieve high-speed reciprocating linear motion, and is particularly suitable for short-stroke servo control with high positioning accuracy. The voice coil motor has no intermediate transmission link, which can greatly simplify the lifting mechanism 300 and improve the compactness of the entire crystal bonding device. At the same time, it also reduces the motion inertia of the rotating mechanism 100 and improves the rotation efficiency of the rotating mechanism 100.
[0045] In one embodiment, see Figure 3 An elastic member 800 is connected between the coil assembly 320 and the rotating seat 200. The elastic member 800 is vertically arranged. The elastic member 800 and the connection point 450 are respectively located on opposite sides of the swing fulcrum O of the swing arm 400. When the swing arm 400 is in a horizontal state, the elastic member 800 is in a compressed state. The elastic member 800 is used to support the coil assembly 320 and the swing arm 400. When the swing arm 400 swings downward, the elastic member 800 is stretched and accumulates energy, and the elastic member 800 has a pulling force on the coil assembly 320 to ensure the movement stability of the coil assembly 320; when the swing arm 400 swings upward, the elastic member 800 is compressed and has a pushing force on the coil assembly 320, so that the coil assembly 320 and the swing arm 400 rotate stably.
[0046] Optionally, the elastic member 800 is a spring or a spring sheet.
[0047] In one embodiment, see Figure 1 and Figure 3, the connection point 450 between the coil assembly 320 and the swing arm 400 is connected through the connection seat 600, and the elastic member 800 is connected between the connection seat 600 and the rotating seat 200. Specifically, the connection seat 600 extends outward from the coil assembly 320, and the connection seat 600 is arranged above the part of the rotating seat 200 for installing the elastic member 800. The elastic member 800 is arranged vertically, and the opposite ends of the elastic member 800 are respectively connected to the rotating seat 200 and the connection seat 600. In the embodiment of the present application, by providing the connection seat 600, the coil assembly 320 can be connected to the swing arm 400 and the elastic member 800 respectively through the connection seat 600, without changing the structure of the coil assembly 320, simplifying the design of the coil assembly 320 and reducing the manufacturing cost of the coil assembly 320.
[0048] In one embodiment, see Figures 5 to 7 The magnet assembly 310 includes a magnet frame 311 having a mounting cavity 313 and an electromagnet 312 disposed in the mounting cavity 313 at intervals. The magnet frame 311 is mounted on the rotating seat 200. The coil assembly 320 includes a coil frame 321 and a coil 322. The coil frame 321 is mounted between two electromagnets 312, and the coil 322 is mounted on the coil frame 321. In this embodiment, by disposing electromagnets 312 on both sides of the coil 322, a stable magnetic field can be generated at the coil 322, so that the coil 322 can be stably driven to rise and fall.
[0049] Specifically, a accommodating cavity is formed in the rotating seat 200, and the magnet frame 311 is accommodated in the accommodating cavity. The magnet frame 311 and the rotating seat 200 are fixed by screws. Two groups of electromagnets 312 are respectively arranged in the installation cavity 313 of the magnet frame 311 and are arranged at intervals along the thickness direction of the swing arm 400. The coil frame 321 is arranged between the two electromagnets 312. The coil frame 321 forms an installation cavity 313 that penetrates along the thickness direction of the swing arm 400. The coil 322 is installed in the installation cavity 313. Under the action of the magnetic field of the electromagnet 312, the coil 322 drives the coil frame 321 to rise and fall, and then drives the connection point 450 of the swing arm 400 to rise and fall. At the same time, with the constraint of the elastic structure 500, the coil 322, the coil frame 321, the swing arm 400 and the connecting seat 600 all rotate around the swing fulcrum O.
[0050] In one embodiment, see Figure 3 and Figure 8The swing arm 400 includes a swing arm body 410 and a mounting seat 420 fixedly connected to the end of the swing arm body 410. The first end 430 and the connection point 450 are both located on the mounting seat 420, and the second end 440 is located on the swing arm body 410. The swing arm 400 is in the shape of an elongated strip, and the width of the swing arm 400 gradually increases from the second end 440 to the first end 430. The mounting seat 420 is fixedly connected to the end of the swing arm 400 away from the second end 440, specifically, by screw locking connection. In this embodiment, by providing the mounting seat 420, it is possible to design the structure of the mounting seat 420, realize the connection between the swing arm 400 and the elastic structure 500 and the connecting seat 600, avoid complex structural design of the swing arm body 410, and the structure of the part of the swing arm 400 corresponding to the mounting seat 420 is not damaged, so it is easy to disassemble, repair or replace.
[0051] In one embodiment, see Figure 8 The mounting seat 420 includes a mounting plate 421, a first mounting portion 422 protruding from the upper side of the mounting plate 421, a side plate 423 formed on the lower side of the mounting plate 421, and a second mounting portion 424 formed on the lower side of the mounting plate 421 and on the side of the side plate 423 away from the swing arm body 410, wherein the side plate 423 is fitted with the swing arm body 410 and is locked and connected by fasteners. The first mounting portion 422 is locked and connected to the connecting seat 600, the connection point 450 is located at the first mounting portion 422, the second spring piece 520 is attached to the side of the second mounting portion 424 facing the rotating seat 200 and is locked, and the first spring piece 510 is attached to the lower side of the mounting plate 421 and is located on the opposite sides of the second mounting portion 424 and is locked by fasteners. Through the provision of the mounting seat 420, the present application can respectively mount the first spring piece 510, the second spring piece 520, the connecting seat 600 and the swing arm body 410 on the mounting seat 420, and the structural layout is compact.
[0052] In one embodiment, see Figure 3One end of the coil assembly 320 is connected to the swing arm 400, and the other end of the coil assembly 320 is formed with an arc surface 3211, the center of the arc surface 3211 is located at the swing fulcrum O of the swing arm 400, and an arc-shaped grating ruler 900 is attached to the arc surface 3211, and a grating reader 1000 is installed on the rotating seat 200 and is spaced from the grating ruler 900. The grating reader 1000 is used to read the changes in the interference phenomenon caused by the light irradiating on the grating ruler 900 to determine the direction and speed of the movement of the coil assembly 320. In this embodiment, since the coil assembly 320 and the swing arm 400 both make arc-shaped swinging motions, the motion trajectory of the end of the coil assembly 320 for mounting the grating scale 900 is also arc-shaped. By setting the grating scale 900 to be arc-shaped, it is ensured that when the coil assembly 320 swings, the distance between the grating scale 900 and the grating reader 1000 is always the same, thereby ensuring that the grating reader 1000 accurately feeds back the movement of the coil assembly 320.
[0053] On the other hand, the present application also provides a die bonding machine, including the above-mentioned die bonding device. In addition, the die bonding machine also includes a loading assembly and a unloading assembly, which are arranged around the periphery of the die bonding device, the loading assembly is used to provide wafers and substrates, and the unloading assembly is used to output the substrate with the wafer attached.
[0054] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims
1. A die bonding device, It is characterized in that It includes a rotating mechanism, a rotating seat, a lifting mechanism and a swing arm; the rotating seat is installed on the output end of the rotating mechanism, and the lifting mechanism is installed on the rotating seat; the swing arm has a first end and a second end that are relatively arranged, and the swing arm also has a connection point located between the first end and the second end and close to the first end, the connection point is connected to the output end of the lifting mechanism, the first end and the rotating seat are movably connected through an elastic structure, and when the connection point is driven by the lifting mechanism, the swing arm performs an arc-shaped swinging motion.
2. The die bonding device according to claim 1, It is characterized in that The elastic structure includes at least one spring sheet, one end of which is fitted and fixed to the rotating seat, and the other end of which is fitted and fixed to the swing arm.
3. The die bonding device according to claim 1, It is characterized in that The elastic structure includes a first spring sheet and a second spring sheet, the first spring sheet and the second spring sheet are perpendicular to each other, and the opposite ends of the first spring sheet are respectively fixed on the rotating seat and the swing arm; the opposite ends of the second spring sheet are respectively fixed on the rotating seat and the swing arm, and the vertical intersection of the first spring sheet and the second spring sheet is the swing fulcrum of the swing arm.
4. The die bonding device according to any one of claims 1 to 3, It is characterized in that The lifting mechanism comprises a voice coil motor, which comprises a magnet assembly and a coil assembly. The magnet assembly is mounted on the rotating seat, and the coil assembly is connected to the swing arm and performs arc-shaped swinging motion with the swing arm.
5. The die bonding device according to claim 4, It is characterized in that An elastic member is connected between the coil assembly and the rotating seat, the elastic member is vertically arranged, and the elastic member and the connection point are respectively located on two opposite sides of the swing fulcrum of the swing arm.
6. The die bonding device according to claim 5, It is characterized in that The connection point between the coil assembly and the swing arm is connected via a connection seat, and the elastic member is connected between the connection seat and the rotating seat.
7. The die bonding device according to claim 4, It is characterized in that The magnet assembly includes a magnet frame with an installation cavity and an electromagnet spaced in the installation cavity, and the magnet frame is installed on the rotating seat; the coil assembly includes a coil frame and a coil, the coil frame is installed between two electromagnets, and the coil is installed on the coil frame.
8. The die bonding device according to claim 4, It is characterized in that One end of the coil assembly is connected to the swing arm, and the other end of the coil assembly forms an arc surface, the center of the arc surface is located at the swing fulcrum of the swing arm, an arc-shaped grating scale is fitted on the arc surface, and a grating reader arranged at a distance from the grating scale is installed on the rotating seat.
9. The die bonding device according to any one of claims 1 to 3, It is characterized in that The swing arm comprises a swing arm body and a mounting seat fixedly connected to the end of the swing arm body, and the first end and the connection point are both located on the mounting seat.
10. A die bonding machine, It is characterized in that The invention comprises a die bonding device as claimed in any one of claims 1 to 9.