Basket guide groove jig
By designing an extended basket guide groove and angle member, the basket guide groove fixture combined with the rotating shaft and spring latch locking mechanism, the scratch problem caused by tilting or swinging of the wafer during placement is solved, and the convenience and accuracy of placement are improved improves the yield of semiconductor production.
Patent Information
- Application Number
- CN202420120099.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-17
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-01-17
AI Technical Summary
During semiconductor production, placing the wafer in the basket during manual operation can easily lead to tilt or swing up and down, causing wafer scratches and affecting yield.
设计了一种提篮导向槽治具,通过延长提篮导向槽的整体长度结构,并在其底部设置角度构件和转轴机构,结合弹簧插销锁定机构,确保晶圆放置时有角度倾斜,便于观察位置, And rotatable or fixed basket guide groove assembly.
It effectively avoids the problem of wafer scratches during placement, improves the convenience and accuracy of wafer transfer and placement, and improves yield.
Smart Images
Figure CN222168353U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor production, in particular to a basket guide groove fixture. Background Art
[0002] Wafers are silicon chips used in the manufacture of semiconductor integrated circuits. In the process of producing wafers, it is often necessary to transfer the wafers and place them in a basket, which can be applied to fully automatic cutting equipment and chip welding equipment. However, manual operation is required during the transfer and placement of the wafers. Since it is difficult to observe during manual operation, it is easy to tilt or swing up and down, causing scratches on the wafers, which in turn causes damage to the surface circuits or short circuits, affecting the yield.
[0003] Therefore, how to solve the above-mentioned problems encountered in the current placement of wafers is a technical problem that needs to be solved urgently by technical personnel in this field. Utility Model Content
[0004] In view of this, the purpose of the utility model is to provide a basket guide groove fixture, which can extend the overall length of the basket guide groove structure and facilitate the viewing of the placement position, thereby avoiding the problem of wafers being easily scratched when placed. The specific scheme is as follows:
[0005] A basket guide groove fixture, comprising:
[0006] Basket guide slot assembly;
[0007] A rotating shaft mechanism connected to the basket guide groove assembly;
[0008] a spring latch locking mechanism connected to the basket guide slot assembly;
[0009] A basket placement area located on one side of the basket guide slot assembly;
[0010] An angle member is located at the bottom of the basket guide channel assembly.
[0011] Preferably, in the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, the basket guide groove assembly includes two oppositely disposed sub-guide groove assemblies;
[0012] Each of the sub-guide groove assemblies comprises a guide groove bottom plate and a guide groove located on one side of the guide groove bottom plate and combinedly connected with the guide groove bottom plate.
[0013] Preferably, in the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, the rotating shaft mechanism and the spring latch locking mechanism are both arranged on the other side of the guide groove bottom plate away from the guide groove.
[0014] Preferably, in the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, when the spring latch locking mechanism is in an unlocked state, the guide groove bottom plate is rotated horizontally outward through the rotating shaft mechanism.
[0015] Preferably, in the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, the basket placement area includes a bottom support plate, two side positioning baffles located on the bottom support plate and a rear positioning baffle connected to the two side positioning plates.
[0016] Preferably, in the above basket guide groove fixture provided in the embodiment of the utility model, the side positioning baffle has an opening.
[0017] Preferably, in the above basket guide groove fixture provided in the embodiment of the utility model, the side positioning baffle corresponds to the position of the sub-guide groove assembly;
[0018] The distance between the two side positioning baffles is equal to the distance between the two sub-guide groove assemblies.
[0019] Preferably, in the above-mentioned basket carrying guide slot fixture provided in the embodiment of the utility model, the bottom support plate extends between the basket carrying guide slot assembly and the angle member.
[0020] Preferably, in the above basket guide groove fixture provided in the embodiment of the utility model, the bottom support plate is provided with a groove structure corresponding to the spring latch locking mechanism;
[0021] When the spring latch locking mechanism is in a locked state, the latch of the spring latch locking mechanism is inserted into the groove structure.
[0022] Preferably, in the above basket guide groove fixture provided in the embodiment of the utility model, the angle member has an inclined surface inclined relative to the horizontal plane, and the inclined surface has a highest point and a lowest point;
[0023] The direction in which the highest point of the inclined surface points to the lowest point is the same as the direction in which the basket guide groove assembly points to the basket placement area.
[0024] It can be seen from the above technical scheme that the utility model provides a basket guide groove fixture, including: a basket guide groove assembly; a rotating shaft mechanism connected to the basket guide groove assembly; a spring latch locking mechanism connected to the basket guide groove assembly; a basket placement area located on one side of the basket guide groove assembly; and an angle member located at the bottom of the basket guide groove assembly.
[0025] The above-mentioned basket guide groove fixture provided by the utility model is provided with a basket guide groove assembly and a basket placement area, which can extend the overall length structure of the basket guide groove, and guides the production line wafers to be transferred and placed in the basket in the basket placement area through the basket guide groove assembly, and an angle component is provided, so that the wafers are placed at an angle, which is convenient for checking the placement position and avoiding the problem of easy scratches when placing the wafers; in addition, a rotating shaft mechanism and a spring latch locking mechanism are provided, which are convenient for rotating or fixing the position of the basket guide groove assembly, further improving the convenience of wafer transfer and placement. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.
[0027] Figure 1 A schematic structural diagram of a basket guide groove fixture provided in an embodiment of the utility model. DETAILED DESCRIPTION
[0028] The existing basket is usually placed on a table. During the wafer production process of the production line, it is often necessary to manually transfer the wafers and place them in the basket. However, it is not easy to observe during manual operation. In addition, the existing guide groove of the basket is short, which makes it easy for the wafers to be tilted, overlapped or swing up and down, causing scratches on the wafers and affecting the yield.
[0029] In order to solve the problem that wafers are easily scratched during transfer and placement, the utility model provides a basket guide groove fixture, which can avoid the problem that wafers are easily scratched when placed.
[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0031] The utility model provides a basket guide groove fixture, such as Figure 1 As shown, including:
[0032] Basket guide slot assembly 1;
[0033] A rotating shaft mechanism 2 connected to the basket guide groove assembly 1;
[0034] A spring latch locking mechanism 3 connected to the basket guide slot assembly 1;
[0035] A basket placement area 4 located on one side of the basket guide groove assembly 1;
[0036] An angle member 5 is located at the bottom of the basket guide groove assembly 1.
[0037] In the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, a basket guide groove assembly 1 and a basket placement area 4 are provided, which can extend the overall length structure of the basket guide groove. The production line wafers are guided to be transferred and placed in the basket in the basket placement area 4 through the basket guide groove assembly 1, and an angle component 5 is provided, so that the wafers are placed at an angle, which is convenient for checking the placement position and avoiding the problem of easy scratches when placing the wafers; in addition, a rotating shaft mechanism 2 and a spring latch locking mechanism 3 are provided to facilitate the rotation or fixing of the position of the basket guide groove assembly 1, further improving the convenience of wafer transfer and placement.
[0038] It should be noted that the basket placement area 4 is used to place the basket. The basket itself has a basket guide groove, but the length of the groove is short, and the wafer is easy to swing up and down when it is placed. The basket guide groove assembly 1 of the basket guide groove fixture of the utility model increases the length of the entire guide groove, and there is no swing space when the wafer is placed into the basket through the guidance of the basket guide groove assembly 1.
[0039] In the specific implementation, in the above basket guide groove fixture provided in the embodiment of the utility model, as Figure 1 As shown, the basket guide groove assembly 1 may include two oppositely disposed sub-guide groove assemblies;
[0040] Each sub-guide groove assembly includes a guide groove bottom plate 11 and a guide groove 12 located on one side of the guide groove bottom plate 11 and combined and connected with the guide groove bottom plate 11 .
[0041] In practice, the basket guide groove assembly 1 is composed of two oppositely disposed sub-guide groove assemblies. Each sub-guide groove assembly is composed of a guide groove bottom plate 11 and a guide groove 12. Preferably, the guide groove bottom plate 11 and the guide groove 12 can be set to be the same in size.
[0042] The guide grooves 12 of the two sub-guide groove assemblies are arranged opposite to each other, and the guide grooves 12 correspond to the basket, thereby increasing the length of each groove of the basket.
[0043] Preferably, the number of guide grooves in the basket guide groove assembly 1 of the utility model can be less than the number of guide grooves in the basket itself, which increases the spacing between wafers and further avoids scratches on the wafers. In practical applications, the basket guide grooves of the basket itself are generally 25 grooves, and the guide grooves in the basket guide groove assembly 1 of the utility model can be set to 13 grooves. The number of guide grooves in the basket guide groove assembly 1 can be adjusted according to actual conditions and is not limited here.
[0044] In the specific implementation, in the above basket guide groove fixture provided in the embodiment of the utility model, as Figure 1 As shown, the rotating shaft mechanism 2 and the spring latch locking mechanism 3 can both be arranged on the other side of the guide groove bottom plate 11 away from the guide groove 12 .
[0045] In practice, the shaft mechanism 2 and the spring latch locking mechanism 3 can both be located on the back of the guide groove bottom plate 11, and the guide groove 12 can be located on the front of the guide groove bottom plate 11. Preferably, the shaft mechanism 2 can be specifically arranged at the edge of the back of the guide groove bottom plate 11, so that when the spring latch locking mechanism 3 is opened, the basket guide groove assembly 1 can be rotated as a whole. The spring latch locking mechanism 3 can be specifically arranged in the middle area of the back of the guide groove bottom plate 11, so that when the spring latch locking mechanism 3 is locked, the basket guide groove assembly 1 can be fixed more stably.
[0046] Furthermore, in a specific implementation, in the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, when the spring latch locking mechanism 3 is in an unlocked state, the guide groove bottom plate 11 can be rotated horizontally outward through the shaft mechanism 2.
[0047] In the specific implementation, in the above basket guide groove fixture provided in the embodiment of the utility model, as Figure 1 As shown, the basket placement area 4 may include a bottom support plate 41, two side positioning baffles 42 located on the bottom support plate 41, and a rear positioning baffle 43 connected to the two side positioning plates.
[0048] In practice, the basket placement area 4 may be similar to a drawer structure, consisting of a bottom support plate 41, side positioning baffles 42 and a rear positioning baffle 43, and the basket is placed in this area.
[0049] Furthermore, in a specific implementation, in the above basket guide groove fixture provided in the embodiment of the utility model, as Figure 1 As shown, the side positioning baffle 42 has an opening A.
[0050] It should be noted that the opening A provided on the side gear baffle 42 can facilitate the taking of the basket guide groove fixture and facilitate the transfer and use.
[0051] In the specific implementation, in the above basket guide groove fixture provided in the embodiment of the utility model, as Figure 1 As shown, the side positioning baffle 42 corresponds to the position of the sub-guide slot assembly; the distance between the two side positioning baffles 42 is equal to the distance between the two sub-guide slot assemblies.
[0052] In implementation, among the two side positioning baffles 42 and the two sub-guide groove assemblies, when the spring latch locking mechanism 3 is in a locked state, one of the side positioning baffles 42 and one of the sub-guide groove assemblies can be on the same first plane, and the other side positioning baffle 42 and the other sub-guide groove assembly can be on the same second plane. The first plane and the second plane are parallel to each other. This facilitates the transfer of the wafer.
[0053] In the specific implementation, in the above basket guide groove fixture provided in the embodiment of the utility model, as Figure 1 As shown, the bottom support plate 41 can extend between the basket guide slot assembly 1 and the angle member 5. This provides good support for the basket guide slot assembly 1.
[0054] In specific implementation, in the above-mentioned basket guide groove fixture provided in the embodiment of the utility model, the bottom support plate 41 can be provided with a groove structure B corresponding to the spring latch locking mechanism 3; when the spring latch locking mechanism 3 is in a locked state, the latch of the spring latch locking mechanism 3 is inserted into the groove structure B.
[0055] In implementation, when the latch of the spring latch locking mechanism 3 is inserted into the groove structure B, the spring latch locking mechanism 3 can fix the basket guide groove assembly 1 .
[0056] Furthermore, in a specific implementation, in the above-mentioned basket guide groove fixture provided in an embodiment of the utility model, the angle member 5 has an inclined surface inclined relative to the horizontal plane, and the inclined surface has a highest point and a lowest point; at this time, the direction in which the highest point of the inclined surface points to the lowest point is the same as the direction in which the basket guide groove assembly 1 points to the basket placement area 4.
[0057] In implementation, Figure 1 As shown, the angle member 5 provided at the bottom of the basket guide groove assembly 1 can be provided in two, that is, there is an angle member 5 under each sub-guide groove assembly, and the angle member 5 has an inclined surface inclined relative to the horizontal plane, and the inclined surface has a highest point C and a lowest point D.
[0058] In practical applications, an angle member may also be provided at the bottom of the basket placement area 4, but this angle member is smaller than the angle member 5 provided at the bottom of the basket guide groove assembly 1, and the inclination angle is the same. Of course, the bottom of the basket placement area 4 may not be provided with an angle member, which is not limited here.
[0059] The angle component provided in the above-mentioned basket guide groove fixture provided by the utility model can make the bottom support plate 41 in an inclined state, which is higher near the basket guide groove assembly 1 and lower away from the basket guide groove assembly 1, thereby forming an angle of high front and low back, which is convenient for personnel to observe when the wafer is placed in the basket.
[0060] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.
[0061] The basket guide groove fixture provided by the utility model is introduced in detail above. Specific examples are used in this article to illustrate the principle and implementation method of the utility model. The description of the above embodiments is only used to help understand the method and core idea of the utility model; at the same time, for general technicians in this field, according to the idea of the utility model, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the utility model.
Claims
1. A basket guide groove fixture, characterized in that: include: Basket guide slot assembly; A rotating shaft mechanism connected to the basket guide groove assembly; a spring latch locking mechanism connected to the basket guide slot assembly; A basket placement area located on one side of the basket guide slot assembly; An angle member is located at the bottom of the basket guide channel assembly.
2. The basket guide groove fixture according to claim 1, characterized in that: The basket guide groove assembly includes two oppositely disposed sub-guide groove assemblies; Each of the sub-guide groove assemblies comprises a guide groove bottom plate and a guide groove located on one side of the guide groove bottom plate and combinedly connected with the guide groove bottom plate.
3. The basket guide groove fixture according to claim 2, characterized in that: The rotating shaft mechanism and the spring latch locking mechanism are both arranged on the other side of the guide groove bottom plate away from the guide groove.
4. The basket guide groove fixture according to claim 3, characterized in that: When the spring latch locking mechanism is in an unlocked state, the guide groove bottom plate rotates horizontally outward through the rotating shaft mechanism.
5. The basket guide groove fixture according to claim 2, characterized in that: The basket placement area includes a bottom support plate, two side positioning baffles located on the bottom support plate, and a rear positioning baffle connected to the two side positioning baffles.
6. The basket guide groove fixture according to claim 5, characterized in that: The side positioning baffle has an opening.
7. The basket guide groove fixture according to claim 5, characterized in that: The side positioning baffle corresponds to the position of the sub-guide slot assembly; The distance between the two side positioning baffles is equal to the distance between the two sub-guide groove assemblies.
8. The basket guide groove fixture according to claim 5, characterized in that: The bottom support plate extends between the basket guide channel assembly and the angle member.
9. The basket guide groove fixture according to claim 8, characterized in that: The bottom support plate is provided with a groove structure corresponding to the spring latch locking mechanism; When the spring latch locking mechanism is in a locked state, the latch of the spring latch locking mechanism is inserted into the groove structure.
10. The basket guide groove fixture according to claim 1, characterized in that: The angle member has an inclined surface inclined relative to a horizontal plane, and the inclined surface has a highest point and a lowest point; The direction in which the highest point of the inclined surface points to the lowest point is the same as the direction in which the basket guide groove assembly points to the basket placement area.