Drainage device

Abstract

The utility model discloses a drainage device which is composed of a device shell, a liquid distribution plate, a through hole plate and a flow guide plate, the through hole plate and the liquid distribution plate are sequentially and fixedly arranged in the device shell from top to bottom, the flow guide plate is connected with a hook of a hook-shaped structure at the lower end of a side plate of the device shell in a clamped mode, and the drainage device can be arranged at any position through a hanging plate. And the input port is connected to the cooling liquid conveying pipe through a guide pipe. During use, cooling liquid is conveyed through the cooling liquid conveying pipe to be input to the layer where the through hole plate is located along the guide pipe, after the layer is filled with the cooling liquid, the cooling liquid flows to the lower-layer liquid distribution plate through the through holes formed in the layer, and after flow distribution is completed through the finer through holes in the liquid distribution plate, the cooling liquid is evenly and stably guided to a wafer cutting line through the flow guide plate. Therefore, vibration of the wafer cutting line caused by dripping of the cooling liquid is effectively reduced, and the stability of wafer cutting is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor material manufacturing, in particular to a drainage device. Background Art

[0002] Multi-wire cutting technology is the most advanced wafer processing technology in the world. Its principle is to use thousands of high-speed moving steel wires to drive the cutting blades attached to them to slice semiconductor crystals.

[0003] During the cutting process, the crystal rod can be cut simultaneously by multiple cutting lines, and multiple wafers can be cut out at one time. A large amount of heat will be generated due to friction during the cutting process. In order to improve the cutting quality and protect the cutting line, during the cutting process, it is necessary to continuously spray coolant on the contact point between the cutting line and the crystal rod to cool down the cutting line and the crystal rod while washing away the chips.

[0004] In the prior art, coolant is usually dripped directly onto the cutting line through a flow pipe for cooling. However, since the cutting line will vibrate when the slurry drips onto the cutting line, it is easy to cause the cutting thickness deviation of the chip to increase and the slicing stability to decrease. Utility Model Content

[0005] The utility model discloses a drainage device, which solves the technical problem that in the prior art, coolant is usually dripped directly onto the cutting line through a flow pipe for cooling, but the cutting line will vibrate when the mud drips onto the cutting line, which easily leads to an increase in the cutting thickness deviation of the chip and a decrease in the stability of the slice.

[0006] The embodiment of the utility model provides a drainage device, including a device housing, a through-hole plate and a liquid distribution plate;

[0007] An input port is fixedly connected to the top of the device housing;

[0008] The through-hole plate and the liquid distribution plate are fixedly arranged in the device housing in sequence, and are used to divert the cooling liquid flowing in from the input port to the crystal cutting line.

[0009] In one example of the present invention, a guide plate is also included;

[0010] The lower end of the side plate of the device housing is a hook-shaped structure;

[0011] The guide plate is detachably mounted on the hook structure, and is used to guide the diverted cooling liquid to the crystal cutting line according to the current angle of the guide plate.

[0012] In an example of the present utility model, the through-hole plate is provided with a plurality of first through-holes of a first size;

[0013] The liquid distribution plate is provided with a plurality of second through holes of a second size;

[0014] The first size is larger than the second size, and the number of the first through holes is smaller than the number of the second through holes.

[0015] In one example of the present invention, a guide tube and an adapter are also included;

[0016] The input port is connected to the guide tube via the adapter;

[0017] The guide pipe is connected to the coolant delivery pipe through a first three-way adapter.

[0018] In one example of the present invention, it also includes a guide tube, a first adapter and a second adapter;

[0019] The input port is connected to the guide tube via the first adapter;

[0020] The guide tube is connected to the coolant delivery tube through the second adapter.

[0021] Further, the coolant delivery pipe is threadedly connected to the second adapter through a second three-way adapter;

[0022] The input port is connected to the first adapter via a threaded connection;

[0023] The guide tube is connected to the second adapter via threads.

[0024] Furthermore, a sealing gasket is provided inside the connection between the second adapter and the coolant delivery pipe, and is fixed outside by a clamp.

[0025] In one example of the present invention, it also includes a hanging plate;

[0026] The hanging plate is fixedly connected to the top of the device housing;

[0027] The hanging plate is provided with a plurality of hanging holes for hanging the drainage device at a target position.

[0028] Furthermore, the guide plate is a plate having convex structures on both sides;

[0029] The protruding structure is engaged with the hook of the hook-shaped structure, and the angle is adjustable.

[0030] In one example of the present invention, the inner cross-section of the device housing is rectangular.

[0031] It can be seen from the above technical solutions that the embodiments of the utility model have the following advantages:

[0032] The utility model provides a drainage device, which is composed of a device housing, a liquid separation plate, a through-hole plate and a guide plate. The through-hole plate and the liquid separation plate are fixedly arranged in the device housing from top to bottom in sequence. The guide plate is connected with the hook of the hook-shaped structure at the lower end of the side plate of the device housing. The drainage device can be set at any position through a hanging plate, and the input port is connected to a coolant delivery pipe through a guide pipe. When in use, the coolant is delivered through the coolant delivery pipe and input along the guide pipe to the layer where the through-hole plate is located. When the layer is filled with coolant, it flows to the lower liquid separation plate through the through holes opened therein. After the diversion is completed through the finer through holes on the liquid separation plate, the coolant is evenly and steadily guided to the wafer cutting line through the guide plate, thereby effectively reducing the vibration of the wafer cutting line caused by the dripping of coolant, and improving the stability of wafer cutting. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 This is a schematic structural diagram of a drainage device provided in an embodiment of the utility model without a side plate;

[0035] Figure 2 A front cross-sectional view of a drainage device provided in an embodiment of the utility model without a side plate;

[0036] Figure 3 A top view of the structure of a through-hole plate provided in an embodiment of the utility model;

[0037] Figure 4 A top view of the structure of a liquid separation plate provided in an embodiment of the utility model;

[0038] Figure 5 A top view of the structure of another through-hole plate provided in an embodiment of the utility model;

[0039] Figure 6 This is a schematic diagram of the structure of a drainage device provided in an embodiment of the utility model;

[0040] Figure 7 A front view and a top view of a guide plate provided in an embodiment of the utility model;

[0041] Figure 8 This is a schematic structural diagram of a drainage device provided in an embodiment of the utility model with a side plate;

[0042] Fig. 9 It is a structural schematic diagram of a side panel provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0043] The utility model discloses a drainage device for solving the technical problem that in the prior art, cooling is usually performed by directly dripping coolant onto a cutting line through a flow pipe, but the cutting line will vibrate when the mud drips onto the cutting line, which may easily lead to an increase in the cutting thickness deviation of the chip and a decrease in the stability of the slice.

[0044] See also Figure 1-Figure 2 , a structural block diagram of a drainage device without side panels provided in an embodiment of the utility model.

[0045] The utility model provides a drainage device, comprising a device housing 1, a through-hole plate 2 and a liquid distribution plate 3;

[0046] An input port 11 is fixedly connected to the top of the device housing 1;

[0047] The through-hole plate 2 and the liquid distribution plate 3 are fixedly disposed in the device housing 1 in sequence, and are used to divert the cooling liquid flowing in from the input port 11 to the crystal cutting line.

[0048] In this embodiment, the drainage device can be composed of components such as a device housing 1, a through-hole plate 2, and a liquid distribution plate 3. Among them, the top of the device housing 1 is provided with an input port for the liquid required for wafer cutting to enter, and is fixedly connected to an input port 11, and the through-hole plate 2 and the liquid distribution plate 3 are fixedly arranged in the device housing 1 in sequence from top to bottom, so as to divert the cooling liquid flowing in from the input port 11 and guide it to the crystal cutting line, thereby reducing the vibration of the cutting line and improving the stability of the crystal slice.

[0049] It should be noted that the input port 11 and the input port can be an integrated structure, and the input port 11 can be a pipe head protruding from the input port to facilitate connection with other pipes. The cooling liquid can be a liquid used for wafer cutting such as coolant or mud, and the embodiment of the utility model does not limit this.

[0050] See also Figure 3 and Figure 5 , which respectively show a top view of the structure of the through-hole plate, Figure 4 A top view of the structure of a liquid separation plate in an embodiment of the utility model is shown.

[0051] In an example of the present utility model, the through-hole plate 2 is provided with a plurality of first through-holes of a first size;

[0052] The liquid distribution plate 3 is provided with a plurality of second through holes of a second size;

[0053] The first size is larger than the second size, and the number of the first through holes is smaller than the number of the second through holes.

[0054] The through-hole plate 2 refers to a plate with multiple through-holes of the same size, and the size of the plate can be adapted to be installed inside the device housing 1. The liquid distribution plate 3 refers to a plate with dense small-sized through-holes, and its size can also be adapted to be installed inside the device housing 1. The number of through-holes in the liquid distribution plate 3 is much larger than the number of through-holes in the through-hole plate 2. For example, the number of through-holes in the through-hole plate 2 can be 5, and the size is 12 mm. The number of through-holes in the liquid distribution plate 3 can be spread all over the liquid distribution plate 3, such as forming a honeycomb structure, and the size is 1-2 mm, so as to achieve buffering and uniform distribution of the cooling liquid.

[0055] It should be noted that the number of through holes in the through-hole plate and the liquid distribution plate is not unique, and they only need to meet the requirements that the first size is larger than the second size and the number of the first through holes is smaller than the number of the second through holes.

[0056] See also Figure 6 , Figure 6 It is a structural schematic diagram of a drainage device in an embodiment of the utility model.

[0057] In one example of the present utility model, the drainage device may further include a guide plate 4;

[0058] The lower end of the side plate 12 of the device housing 1 is a hook-shaped structure;

[0059] The guide plate 4 is detachably mounted on the hook structure, and is used to guide the diverted cooling liquid to the crystal cutting line according to the current angle of the guide plate 4 .

[0060] See also Figure 8-Figure 9 In this embodiment, side panels 12 are respectively provided at both ends of the device housing 1, and the lower ends of the side panels 12 are hook-shaped structures. In addition, the guide plate 4 is detachably arranged on the hook-shaped structure, and the guide direction of the guide plate 4 is fixed by the hook-shaped structure, and the guide angle of the guide plate 4 on the hook-shaped structure is adjustable.

[0061] When the cooling liquid is buffered and evenly diverted to the guide plate 4 through the through holes of the liquid distribution plate 3, the guide plate 4 guides the diverted cooling liquid according to the current angle set by the hook-shaped structure to guide the diverted cooling liquid to the crystal cutting line, thereby further reducing the vibration of the crystal cutting line to make the thickness of the chip cut uniform.

[0062] It should be noted that there is a certain distance between the guide plate 4 and the plane where the crystal cutting line is located, so as to avoid collision between the guide plate 4 and the plane and thus vibration of the crystal cutting line.

[0063] For further information, see Figure 7 , Figure 7 It is a front view and a top view of the structure of a guide plate in the utility model, and it can be seen that the guide plate 4 is a plate with convex structures on both sides;

[0064] The protruding structure is engaged with the hook of the hook-shaped structure, and the angle is adjustable.

[0065] In another example of the present invention, the guide plate 4 can be a plate structure with protruding structures on both sides, and the protruding structures are clamped with the hooks of the hook structure. At the same time, the angle of the guide plate 4 can be adjusted according to the clamping angle with the hook.

[0066] In one example of the present invention, the drainage device may further include a guide tube 62 and an adapter;

[0067] The input port 11 is connected to the guide tube 62 through the adapter;

[0068] The guide pipe 62 is connected to the coolant delivery pipe 6 via a first three-way adapter.

[0069] In order to facilitate the transportation of cooling liquid and the realization of industrial assembly line, the input port 11 and the guide tube 62 can be connected through an adapter, and the guide tube 62 is then connected to the cooling liquid delivery pipe 6 through the first three-way adapter. Each drainage device can be connected to the cooling liquid delivery pipe 6 through a three-way adapter, so that the drainage device can be set at any required position, and multiple drainage devices can be set at the same time to cool the crystal cutting line.

[0070] It should be noted that the first three-way adapter and the second three-way adapter 64 can be three-way adapters of the same type or different types. The three-way adapter is mainly used to change the direction of the fluid, and is used to divert the main pipeline to the branch pipe while maintaining the original flow direction of the main pipeline. Its forming is to flatten a tube blank larger than the diameter of the tee to about the size of the tee diameter, and open a hole at the position of the stretched branch pipe; the tube blank is heated and placed in a forming mold, and a punch for stretching the branch pipe is installed in the tube blank; the tube blank is radially compressed under the action of pressure, and in the process of radial compression, plastic materials such as metal or plastic flow in the direction of the branch pipe and form a branch pipe under the stretching of the punch.

[0071] In another example of the present invention, the drainage device may further include a guide tube 62, a first adapter 61 and a second adapter 63;

[0072] The input port 11 is connected to the guide tube 62 through the first adapter 61;

[0073] The guide pipe 62 is connected to the coolant delivery pipe 6 through the second adapter 63 .

[0074] In this embodiment, if the drainage device is set at the end of the coolant delivery pipe 6, or only a single drainage device is required, the guide pipe 62 and the input port 11 can be connected through the first adapter 61, and then the guide pipe 62 and the coolant delivery pipe 6 can be connected through the second adapter 63. Therefore, when the coolant delivery pipe 6 transports the coolant to the drainage device, the coolant is input into the drainage device along the second adapter 63, the guide pipe 62, the first adapter 61 and the input port 11.

[0075] The guide tube 62 may be a hose to adapt to the installation of drainage devices at different positions.

[0076] Further, the coolant delivery pipe 6 is threadedly connected to the second adapter 63 through a second three-way adapter 64;

[0077] The input port 11 is connected to the first adapter 61 via a threaded connection;

[0078] The guide tube 62 and the second adapter 63 are connected via threads.

[0079] Furthermore, in order to avoid leakage of the coolant, a sealing gasket may be provided inside the connection between the second adapter 63 and the coolant delivery pipe 6 and fixed outside with a clamp.

[0080] In a specific implementation, sealing gaskets may be used to separate the connections of the adapter to avoid coolant leakage at each connection.

[0081] In addition, since the through hole size of the liquid distribution plate 3 is small, in order to avoid the risk of clogging, a filter can be set at the position of the three-way adapter to filter the coolant to reduce the possibility of clogging of the liquid distribution plate 3. At the same time, since the second adapter 63 and the second three-way adapter 64 are connected by threads and fixed with a clamp on the outside, they can be directly disassembled and cleaned without disassembling the liquid distribution plate 3, reducing the equipment maintenance cost.

[0082] In one example of the present utility model, the drainage device further includes a hanging plate 5;

[0083] The hanging plate 5 is fixedly connected to the top of the device housing 1;

[0084] The hanging plate 5 is provided with a plurality of hanging holes for hanging the drainage device at a target position.

[0085] In a specific implementation, the location of the drainage device is usually related to the location of the wafer cutting line, and the wafer cutting line may change due to the different cutting sizes of different wafers. Therefore, the drainage device is not suitable for being fixed at a certain location. For this reason, a device housing 1 of the drainage device can be adapted, and a hanging plate 5 is fixedly connected to the top thereof. By opening a plurality of hanging holes on the hanging plate 5, when the wafer cutting line changes, the target position of the drainage device can be adjusted by adjusting the hanging position of the hanging plate 5, so that the drainage device can adapt to wafer cutting lines at different locations, angles, and heights.

[0086] Optionally, the inner cross-section of the device housing 1 is rectangular.

[0087] In an embodiment of the utility model, a drainage device is provided, which is composed of a device housing, a liquid separation plate, a through-hole plate and a guide plate. The through-hole plate and the liquid separation plate are fixedly arranged in the device housing from top to bottom in sequence. The guide plate is engaged with the hook of the hook-shaped structure at the lower end of the side plate of the device housing. The drainage device can be set at any position through a hanging plate, and the input port is connected to the coolant delivery pipe through a guide pipe. When in use, the coolant is transported through the coolant delivery pipe and input along the guide pipe to the layer where the through-hole plate is located. When the layer is filled with coolant, it flows to the lower liquid separation plate through the through holes opened therein. After the diversion is completed through the finer through holes on the liquid separation plate, the coolant is evenly and steadily guided to the wafer cutting line through the guide plate, thereby effectively reducing the vibration of the wafer cutting line caused by the dripping of coolant, and improving the stability of wafer cutting.

[0088] The above is a detailed introduction to a drainage device provided by the present invention. For those skilled in the art, according to the idea of ​​the embodiments of the present invention, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A drainage device, characterized in that: It includes a device housing, a through-hole plate and a liquid distribution plate; An input port is fixedly connected to the top of the device housing; The through-hole plate and the liquid distribution plate are fixedly arranged in the device housing in sequence, and are used to divert the cooling liquid flowing in from the input port to the crystal cutting line.

2. The drainage device according to claim 1, characterized in that: Also included are deflectors; The lower end of the side plate of the device housing is a hook-shaped structure; The guide plate is detachably mounted on the hook structure, and is used to guide the diverted cooling liquid to the crystal cutting line according to the current angle of the guide plate.

3. The drainage device according to claim 1, characterized in that: The through-hole plate is provided with a plurality of first through-holes of a first size; The liquid distribution plate is provided with a plurality of second through holes of a second size; The first size is larger than the second size, and the number of the first through holes is smaller than the number of the second through holes.

4. The drainage device according to claim 1, characterized in that: Also included are guide tubes and adapters; The input port is connected to the guide tube via the adapter; The guide pipe is connected to the coolant delivery pipe through a first three-way adapter.

5. The drainage device according to claim 1, characterized in that: Also includes a guide tube, a first adapter and a second adapter; The input port is connected to the guide tube via the first adapter; The guide tube is connected to the coolant delivery tube through the second adapter.

6. The drainage device according to claim 5, characterized in that: The coolant delivery pipe is threadedly connected to the second adapter via a second three-way adapter; The input port is connected to the first adapter via a threaded connection; The guide tube is connected to the second adapter via threads.

7. The drainage device according to claim 5, characterized in that: A sealing gasket is provided inside the connection between the second adapter and the coolant delivery pipe, and is fixed outside by a clamp.

8. The drainage device according to claim 1, characterized in that: Also includes hanging boards; The hanging plate is fixedly connected to the top of the device housing; The hanging plate is provided with a plurality of hanging holes for hanging the drainage device at a target position.

9. The drainage device according to claim 2, characterized in that: The guide plate is a plate with convex structures on both sides; The protruding structure is engaged with the hook of the hook-shaped structure, and the angle is adjustable.

10. The drainage device according to claim 1, characterized in that: The inner cross-section of the device housing is rectangular.

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