Lifting device for heater of single crystal furnace

Abstract

The utility model provides a single crystal furnace heater lifting device, which relates to the technical field of monocrystalline silicon growth and comprises a working frame, a single crystal furnace is mounted at the top of the working frame, a motor is mounted at the bottom of the working frame, a hydraulic rod is mounted at the output end of the motor, and a switching component is mounted at the top of the hydraulic rod. The device can solve the problems that in the monocrystalline silicon growth process, due to the fact that the bottom connecting position is prone to loosening and slipping when the crucible supporting rod rotates, monocrystalline silicon cannot grow in an equal-diameter mode, the crucible supporting rod is fractured due to too much bearing force, and the growth quality of the monocrystalline silicon is affected.

Description

Technical Field

[0001] The utility model belongs to the field of single crystal silicon growth, and more specifically, particularly relates to a single crystal furnace heater lifting device. Background Art

[0002] The process of pulling single crystal silicon is to melt polycrystalline silicon at high temperature and then stretch it into single crystal silicon. This is because the grains of polycrystalline silicon are large, which hinders the movement of electrons between grains and affects the electrical properties of silicon wafers. The grains of single crystal silicon are smaller, and the electrons move more freely, which has better electrical properties. Single crystal silicon is a relatively active non-metallic element and an important component of crystalline materials. It is at the forefront of the development of new materials. With the progress of the integrated circuit industry, higher requirements are placed on the quality of single crystal silicon.

[0003] The Czochralski method is the main method for preparing electronic-grade single-crystal silicon. In the Czochralski single-crystal silicon growth system, the growth interface (also called the solid-liquid interface) is the interface where silicon changes from liquid to solid. The shape of the growth interface directly affects the quality of Czochralski single-crystal silicon. A straight interface shape is conducive to improving the quality of single-crystal silicon. In the existing single-crystal furnace technology, the crucible support rod rotates too hard during the single-crystal growth process, which is prone to loosening, resulting in the inability of single-crystal silicon to grow with equal diameter, thus affecting the quality of single-crystal silicon.

[0004] Based on the above, the inventors found the following problems: the bottom connection of the crucible support rod is prone to loosening and slipping when rotating, resulting in the inability of single crystal silicon to grow with equal diameter, and the crucible support rod is subjected to excessive load and force, resulting in breakage, thereby affecting the growth quality of single crystal silicon.

[0005] Therefore, in view of this, the existing structure and defects are studied and improved, and a single crystal furnace heater lifting device is provided, in order to achieve a more practical purpose. Utility Model Content

[0006] In order to solve the above technical problems, the utility model provides a single crystal furnace heater lifting device to solve the problems of looseness and slippage at the bottom connection of the current single crystal silicon growth crucible support rod, and breakage of the support rod due to excessive load, thereby affecting the quality of single crystal silicon growth.

[0007] The purpose and effect of the single crystal furnace heater lifting device of the utility model are achieved by the following specific technical means:

[0008] A single crystal furnace heater lifting device comprises a work frame, a single crystal furnace is installed on the top of the work frame, a motor is installed on the bottom of the work frame, a hydraulic rod is installed on the output end of the motor, and a switching assembly is installed on the top of the hydraulic rod.

[0009] Furthermore, the adapter assembly includes a sleeve, a circular groove is formed on the top of the sleeve, square grooves are formed on both sides of the top of the circular groove, and a crucible support rod is inserted into the inside of the circular groove, and the top of the crucible support rod passes through the bottom of the single crystal furnace and extends to the inside.

[0010] Furthermore, a crucible tray is installed on the top of the crucible support rod, a graphite crucible is installed on the top of the crucible tray, and a quartz crucible is installed inside the graphite crucible.

[0011] Furthermore, a pin hole is provided on the bottom side wall of the crucible support rod, a pin is inserted into the pin hole, the pin is embedded in the square groove, and first graphite bolts are respectively installed on both sides of the pin, and the first graphite bolts are connected to the top of the sleeve.

[0012] Furthermore, a second graphite bolt is installed at the bottom of the crucible support rod, and the crucible support rod and the latch are fixedly connected by the second graphite bolt.

[0013] Furthermore, electrodes are respectively installed at the bottom of the single crystal furnace, heaters are installed on the tops of the electrodes, and a crucible support rod protective cover is installed at the center of the bottom of the single crystal furnace.

[0014] Furthermore, the upper part of the crucible support rod protection cover located inside the single crystal furnace is conical.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] Through the coordinated use of the adapter assembly, the crucible support rod protection cover, the motor and the hydraulic rod, the motor can be used to drive the hydraulic rod to rotate, and the hydraulic rod can push the adapter assembly to rise and fall and rotate while rotating. The adapter assembly then pushes the crucible support rod to rise and fall and rotate, so that the crucible can be lifted and lowered smoothly and at a uniform speed. The adapter assembly fixes the crucible in an embedded installation manner, which can avoid the loosening and slipping of the traditional crucible support rod installation method during rotation and the lifting and lowering of the crucible, so that the single crystal silicon can grow with equal diameter, thereby improving the growth quality of the single crystal silicon. At the same time, the upper part of the crucible support rod protection cover uses a cone, and the cone can be used to support the crucible support rod and share part of the load-bearing of the crucible support rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The utility model is a partial cross-sectional schematic diagram of the main body of a single crystal furnace heater lifting device.

[0018] Figure 2 The utility model is a front view schematic diagram of a single crystal furnace heater lifting device adapter assembly.

[0019] Figure 3The utility model is a front view schematic diagram of a single crystal furnace heater lifting device adapter assembly.

[0020] Figure 4 The utility model is a front view schematic diagram of a crucible support rod of a single crystal furnace heater lifting device.

[0021] Figure 5 The utility model is a side view schematic diagram of a single crystal furnace heater lifting device adapter assembly.

[0022] Figure 6 It is an enlarged schematic diagram of position A of a single crystal furnace heater lifting device of the utility model.

[0023] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:

[0024] 1. Work stand; 2. Hydraulic rod; 3. Sleeve; 4. Circular groove; 5. Square groove; 6. Crucible support rod; 7. Pin hole; 8. Pin; 9. First graphite bolt; 10. Motor; 11. Single crystal furnace; 12. Crucible support rod protective cover; 13. Electrode; 14. Heater; 15. Crucible tray; 16. Graphite crucible; 17. Quartz crucible; 18. Second graphite bolt. DETAILED DESCRIPTION

[0025] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0026] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] Example:

[0029] As attached Figure 1 To Attachment Figure 6 As shown:

[0030] The utility model provides a single crystal furnace heater lifting device, comprising a work frame 1, a single crystal furnace 11 is installed on the top of the work frame 1, and a motor 10 is installed on the bottom of the work frame 1, a hydraulic rod 2 is installed on the output end of the motor 10, and a switching assembly is installed on the top of the hydraulic rod 2.

[0031] Among them, the adapter assembly includes a sleeve 3, a circular groove 4 is opened on the top of the sleeve 3, square grooves 5 are opened on both sides of the top of the circular groove 4, and a crucible support rod 6 is inserted inside the circular groove 4, and the top of the crucible support rod 6 passes through the bottom of the single crystal furnace 11 and extends to the inside.

[0032] A crucible tray 15 is installed on the top of the crucible support rod 6 , a graphite crucible 16 is installed on the top of the crucible tray 15 , and a quartz crucible 17 is installed inside the graphite crucible 16 .

[0033] Among them, a pin hole 7 is opened on the bottom side wall of the crucible support rod 6, and a pin 8 is inserted in the pin hole 7. The pin 8 is embedded and installed in the square groove 5. The crucible support rod 6 can be driven to rotate by embedding the pin 8 in the square groove 5, and at the same time, loosening and slipping of the connection of the crucible support rod 6 can be avoided. First graphite bolts 9 are respectively installed on both sides of the pin 8, and the first graphite bolts 9 are connected to the top of the sleeve 3. The first graphite bolts 9 can fix the crucible support rod 6 and the sleeve 3 to prevent the pin 8 from falling off from the sleeve 3.

[0034] A second graphite bolt 18 is installed at the bottom of the crucible support rod 6, and the crucible support rod 6 and the latch 8 are fixedly connected by the second graphite bolt 18 to prevent the crucible support rod 6 and the latch 8 from being separated, thereby achieving a fixing effect.

[0035] The bottom of the single crystal furnace 11 is respectively provided with electrodes 13 , the top of the electrodes 13 is provided with heaters 14 , and a crucible support rod protective cover 12 is provided at the center of the bottom of the single crystal furnace 11 .

[0036] The upper part of the crucible support rod protective cover 12 located inside the single crystal furnace 11 is conical with a wide bottom, which plays a force-supporting role. The conical part can share part of the load-bearing of the crucible support rod 6 to avoid the crucible support rod 6 from breaking due to excessive load.

[0037] The specific usage and function of this embodiment are as follows:

[0038] First, check the integrity of the equipment and use it only after confirming that it is correct. When the single crystal furnace 11 is working, the electrode 13 transmits heat to the heater 14. At this time, the heater 14 heats the polysilicon raw material in the quartz crucible 17. After the heating is completed, the crystal pulling work is carried out. At this time, the motor 10 drives the hydraulic rod 2 to rotate, and the hydraulic rod 2 drives the sleeve 3 to rise and fall. At the same time, the hydraulic rod 2 drives the sleeve 3 to rotate under the action of the motor 10. At this time, the pin 8 and the square groove 5 are embedded and installed to connect the crucible support rod 6 and the sleeve 3 together. The sleeve 3 can drive the crucible support rod 6 to rotate and rise and fall, and at the same time avoid the loosening and slipping of the connection of the crucible support rod 6. The crucible can be fixed by the first graphite bolt 9. The crucible support rod 6 is fixed to the sleeve 3 to prevent the pin 8 from falling off the sleeve 3. The crucible support rod 6 is fixed to the pin 8 by the second graphite bolt 18 to prevent the crucible support rod 6 from being separated from the pin 8. The crucible support rod 6 can be smoothly lifted and rotated, and the traditional crucible support rod 6 installation method can be avoided from loosening and slipping during rotation and the lifting and lowering of the crucible. At the same time, the upper part of the crucible support rod protective cover 12 uses a cone with a wide cone bottom to play a force supporting role. The cone can be used to support the crucible support rod 6 and share part of the load-bearing of the crucible support rod 6 to avoid the crucible support rod 6 from bearing too much load and breaking. The overall design of this device is novel and the structure is simple, so it is worthy of wide promotion and use.

[0039] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A single crystal furnace heater lifting device, comprising a work frame (1), characterized in that: A single crystal furnace (11) is installed on the top of the working frame (1), and a motor (10) is installed on the bottom of the working frame (1); a hydraulic rod (2) is installed on the output end of the motor (10), and a switching assembly is installed on the top of the hydraulic rod (2).

2. A single crystal furnace heater lifting device as claimed in claim 1, characterized in that: The adapter assembly comprises a sleeve (3), a circular groove (4) is provided at the top of the sleeve (3), square grooves (5) are provided on both sides of the top of the circular groove (4), and a crucible support rod (6) is inserted into the inside of the circular groove (4), and the top of the crucible support rod (6) passes through the bottom of the single crystal furnace (11) and extends into the inside.

3. A single crystal furnace heater lifting device as claimed in claim 2, characterized in that: A crucible tray (15) is installed on the top of the crucible support rod (6), a graphite crucible (16) is installed on the top of the crucible tray (15), and a quartz crucible (17) is installed inside the graphite crucible (16).

4. A single crystal furnace heater lifting device as claimed in claim 2, characterized in that: A latch hole (7) is provided on the bottom side wall of the crucible support rod (6), a latch (8) is inserted into the latch hole (7), the latch (8) is embedded in the square groove (5), and first graphite bolts (9) are respectively installed on both sides of the latch (8), and the first graphite bolts (9) are connected to the top of the sleeve (3).

5. A single crystal furnace heater lifting device as claimed in claim 4, characterized in that: A second graphite bolt (18) is installed at the bottom of the crucible support rod (6), and the crucible support rod (6) and the latch pin (8) are fixedly connected via the second graphite bolt (18).

6. A single crystal furnace heater lifting device as claimed in claim 1, characterized in that: Electrodes (13) are respectively installed at the bottom of the single crystal furnace (11), a heater (14) is installed on the top of the electrode (13), and a crucible support rod protection cover (12) is installed at the center of the bottom of the single crystal furnace (11).

7. A single crystal furnace heater lifting device as claimed in claim 6, characterized in that: The upper half of the crucible support rod protection cover (12) located inside the single crystal furnace (11) is conical.

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