Quartz cylinder filling device

Abstract

The utility model provides a quartz cylinder filling device. The quartz cylinder filling device comprises a filling mechanism, a quartz cylinder transfer mechanism and a feeding mechanism. The filling mechanism comprises a rack, a filling part and a rotary driving part, a filling station is arranged below the filling part, and a blanking port is formed in the bottom of the filling part. The quartz cylinder transfer mechanism comprises a walking part and a bearing support, and the bearing support is installed on the walking part and used for fixedly holding a quartz cylinder; the walking part is used for transferring a quartz cylinder to a filling station, and the rotary driving part is used for being in butt joint with the bearing support and driving the bearing support to rotate, so that the quartz cylinder is aligned to a blanking opening of the filling part; the feeding mechanism is used for feeding a silicon material into the filling part, so that the silicon material falls into the quartz cylinder from the blanking opening; the rotary driving part is also used for driving the bearing bracket to rotate in the filling process, so that the quartz cylinder arranges the silicon material. According to the quartz cylinder filling device provided by the invention, automatic filling of the quartz cylinder is realized, so that the filling efficiency is improved, and the crystal growth cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of single crystal furnaces, and in particular to a quartz tube packing device. Background Art

[0002] The quartz cylinder is a commonly used mechanism for continuously supplying silicon materials to the single crystal furnace. Before the crystal growth is implemented, the silicon materials need to be filled into the quartz cylinder first, and then the quartz cylinder is transferred to the crystal growth furnace. At present, the silicon materials are generally filled into the quartz cylinder manually, which has low production efficiency and increases production costs. Utility Model Content

[0003] In view of the above problems existing in the traditional quartz tube packing method, the present application provides a quartz tube packing device, and its detailed technical solution is as follows:

[0004] A quartz cylinder packing device comprises a packing mechanism, a quartz cylinder transport mechanism and a feeding mechanism, wherein:

[0005] The filling mechanism comprises a frame, a filling part and a rotating driving part, wherein the filling part and the rotating driving part are both mounted on the frame, a filling station is provided below the filling part, and a blanking port is provided at the bottom of the filling part;

[0006] The quartz tube transport mechanism comprises a running part and a bearing bracket, wherein the bearing bracket is rotatably mounted on the running part, and the bearing bracket is used to hold the quartz tube to be filled;

[0007] The walking part is used to transport the quartz tube to the filling station, and the rotating driving part is used to dock with the bearing bracket and drive the bearing bracket to rotate so that the quartz tube is aligned with the blanking opening of the filling part in an inclined state;

[0008] The feeding mechanism is used to put the silicon material into the filling part, so that the silicon material falls into the quartz cylinder from the feeding port; the rotary drive part is also used to drive the supporting bracket to rotate during the filling process, so that the quartz cylinder switches from an inclined state to an upright state to organize the silicon material.

[0009] Through the cooperation of the filling mechanism, the quartz tube transport mechanism and the feeding mechanism, the quartz tube filling device provided by the present application realizes automatic filling of the quartz tube, thereby improving the filling efficiency and reducing the crystal growth cost. In addition, during the filling process, the quartz tube can also switch from an inclined state to an upright state to implement the arrangement of the silicon material, thereby improving the uniformity of the filling.

[0010] In some embodiments, the filling part includes a funnel and a material guiding channel, one end of which is open to form a downwardly inclined material drop opening; the loading mechanism puts the silicon material into the funnel, and the silicon material falls from the funnel into the material guiding channel and falls into the quartz cylinder through the material drop opening.

[0011] The cooperation of the funnel and the material guiding channel can ensure that the silicon material in the packing part can fall into the quartz cylinder accurately and uniformly.

[0012] In some embodiments, at least two funnels are provided, and a material guiding channel is correspondingly provided under each funnel, and one end of the material guiding channel closest to the filling station is opened to form a material drop opening; two adjacent material guiding channels are connected, wherein the bottom of the material guiding channel farther from the filling station is higher than the bottom of the material guiding channel closer to the filling station, and the loading mechanism drops the silicon material into each funnel; or, among the two adjacent funnels, the material drop opening of the material guiding channel corresponding to the funnel farther from the filling station is located above the funnel closer to the filling station, and the silicon material in the funnel farther from the filling station falls into the funnel closer to the filling station through the corresponding material guiding channel, and the loading mechanism drops the silicon material into the funnel farthest from the filling station.

[0013] By arranging multiple funnels and arranging the connection mode of the multiple funnels, the silicon materials in the multiple funnels all fall into the quartz cylinder through the drop opening. Such arrangement can increase the storage amount of silicon material in the packing part and reduce the feeding frequency of the feeding mechanism.

[0014] In some embodiments, the filling portion further includes a vibration component disposed below the material guiding channel, and the vibration component is used to drive the material guiding channel to vibrate during the filling process.

[0015] The vibration component drives the material guide channel to vibrate during the filling process, which promotes the silicon material to pass through the material guide channel faster and fall into the quartz tube, thereby preventing the silicon material from being blocked in the material guide channel.

[0016] In some embodiments, the rotational driving part includes a translational driving member, a rotational driving member and a first rotational docking member, wherein the rotational driving member is connected to the driving end of the translational driving member, and the first rotational docking member is connected to the driving end of the rotational driving member; a second rotational docking member matching the first rotational docking member is provided on the supporting bracket; the translational driving member is used to drive the first rotational docking member to translate toward the second rotational docking member so that the first rotational docking member docks with the second rotational docking member, and the rotational driving member is used to drive the first rotational docking member to rotate, so as to drive the supporting bracket to rotate.

[0017] By configuring the rotary drive unit to include a translation drive unit, a rotary drive unit and a first rotary docking unit, and arranging a second rotary docking unit matching the first rotary docking unit on the supporting bracket, the rotary drive unit can achieve docking and locking of the supporting bracket, as well as drive the supporting bracket to rotate, and finally adjust the posture of the quartz tube to organize the filled material blocks.

[0018] In some embodiments, the loading mechanism includes a robotic arm and a clamping assembly connected to the end of the robotic arm, the robotic arm is used to drive the clamping assembly to move so as to drive the clamping assembly to clamp a material box containing silicon material and to put the silicon material in the material box into the filling part; the clamping assembly includes a clamping drive, a first clamping plate and a second clamping plate, wherein the clamping drive is connected to the end of the robotic arm, the first clamping plate and the second clamping plate are connected in pairs to two driving ends of the clamping drive, and the clamping drive is used to drive the first clamping plate and the second clamping plate to clamp and release the material box.

[0019] A feeding mechanism with a simple structure is provided, which drives a clamping assembly to move by a mechanical arm, so as to drive the clamping assembly to clamp a material box containing silicon material, and accurately put the silicon material in the material box into a filling part.

[0020] In some embodiments, the filling mechanism also includes a guide portion arranged on the frame and located on the side of the filling station, the guide portion includes a blocking member, a translation drive assembly and a clamping member, wherein: the blocking member is installed on the frame, and when the walking part transfers the quartz tube to the filling station, the blocking member is used to block the walking part; the translation drive assembly is installed on the frame, and the clamping member is connected to the movable part of the translation drive assembly, and when the walking part transfers the quartz tube to the filling station, the clamping member clamps the walking part; the translation drive assembly is used to push the walking part out of the filling station after completing the filling.

[0021] By providing the guide part, it can be ensured that the quartz tube can be accurately moved to the filling station under the drive of the walking part, so as to ensure that the quartz tube is aligned with the blanking opening of the filling part. In addition, the guide part can lock the walking part at the filling station during the filling process to prevent the walking part from accidentally sliding and causing the quartz tube to deviate from the blanking opening.

[0022] In some embodiments, the translation drive assembly includes a slide rail, a mounting plate and a drive motor, wherein: the slide rail is installed on a frame, and a rack is provided on the side of the slide rail along the extension direction of the slide rail; the mounting plate is slidably connected to the slide rail, the clamping member and the drive motor are both installed on the mounting plate, and a gear meshing with the rack is provided on the driving end of the drive motor, and the drive motor is used to drive the gear to rotate to drive the mounting plate to slide along the slide rail.

[0023] A translation driving assembly with a simple structure is provided, which realizes stable driving of a clamping member.

[0024] In some embodiments, the guide part also includes a first guide wheel group and a second guide wheel group, wherein: the first guide wheel group is arranged on the frame along the extension direction of the slide rail and is located on the first side of the filling station, the first guide wheel group is arranged on the frame along the extension direction of the slide rail and is located on the second side of the filling station, and a guide channel for the walking part to pass through is formed between the first guide wheel group and the second guide wheel group; after the walking part enters the guide channel, the first guide wheel group and the second guide wheel group respectively roll against one side wall of the walking part.

[0025] By providing the first guide wheel group and the second guide wheel group, the movement of the walking part is guided to prevent the walking part from going off track.

[0026] In some embodiments, the quartz tube filling device also includes a conveying mechanism; the conveying mechanism is configured to convey the material box filled with silicon material toward the loading mechanism, and the loading mechanism is used to pick up the material box filled with silicon material from the conveying mechanism; the loading mechanism is also used to put the empty material box back onto the conveying mechanism after the filling is completed, and the conveying mechanism is also configured to convey the empty material box away from the loading mechanism.

[0027] By providing a conveying mechanism, the material box containing silicon material can be automatically loaded, thereby ensuring that the loading mechanism can obtain the material box containing silicon material nearby, thereby improving the filling efficiency. In addition, the conveying mechanism also realizes the automatic unloading of the emptied material box.

[0028] In some embodiments, the conveying mechanism includes a first conveying part, an intermediate conveying part and a second conveying part, wherein: the intermediate conveying part includes a first conveying line and a second conveying line, and the second conveying line is arranged above the first conveying line; the first conveying part includes a first lifting module and a first transition conveying line, and the first lifting module is used to drive the first transition conveying line to rise and fall, so as to drive the first transition conveying line to dock with the first conveying line or the second conveying line; the second conveying part includes a second lifting module and a second transition conveying line, and the second lifting module is used to drive the second transition conveying line to rise and fall, so as to drive the second transition conveying line to dock with the first conveying line or the second conveying line. The conveyor lines are connected; the second transition conveyor line is used to receive the material box containing silicon material, and convey the material box containing silicon material to the first conveyor line connected to the second transition conveyor line, the first conveyor line is used to convey the material box containing silicon material to the first transition conveyor line connected to the first conveyor line, and the loading mechanism picks up the material box containing silicon material from the first transition conveyor line; the loading mechanism places the empty material box on the first transition conveyor line, the first transition conveyor line is used to convey the empty material box back to the second conveyor line connected to the first transition conveyor line, and the second conveyor line is used to convey the empty material box to the second transition conveyor line connected to the second conveyor line.

[0029] A conveying mechanism with a simple structure and small footprint is provided, which realizes automatic loading of a material box filled with silicon material and automatic unloading of an emptied material box through the cooperation of a first conveying part, an intermediate conveying part and a second conveying part.

[0030] In some embodiments, the conveying mechanism also includes a cover removal assembly arranged on a firmware component of the first lifting module, and the cover removal assembly includes a translation drive member and an adsorption member connected to the driving end of the translation drive member; the first lifting module is also used to drive the first transition conveyor line to rise, so that the box cover of the material box containing silicon material on the first transition conveyor line is adsorbed by the adsorption member, and the translation drive member is used to drive the adsorption member to translate relative to the material box containing silicon material, so that the box cover adsorbed on the adsorption member is separated from the material box; the first lifting module is also used to drive the first transition conveyor line to rise, so that the box cover adsorbed on the adsorption member is closed onto the empty material box on the first transition conveyor line.

[0031] By providing the cover removal assembly, the automatic cover removal of the material box filled with silicon material is realized, and the automatic cover closing of the returned empty material box is realized.

[0032] In some embodiments, there are two groups of conveying mechanisms and two groups of filling mechanisms, wherein: the loading mechanism picks up silicon material from one of the two groups of conveying mechanisms and puts the picked up silicon material into the filling part of one of the two groups of filling mechanisms.

[0033] The two groups of conveying mechanisms carry out the conveying of the material box in parallel, and the two groups of filling mechanisms carry out the filling operation of the quartz cylinder in parallel, which greatly improves the filling efficiency of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a structural schematic diagram of a quartz cylinder packing device in an embodiment of the present application;

[0035] Figure 2 It is a structural schematic diagram of the packing mechanism and the quartz cylinder transport mechanism in the embodiment of the present application;

[0036] Figure 3 This is a schematic structural diagram of a filling mechanism in an embodiment of the present application;

[0037] Figure 4 This is a schematic diagram of the funnel installation structure in one embodiment of the present application;

[0038] Figure 5 This is a schematic diagram of the funnel installation structure in another embodiment of the present application;

[0039] Figure 6 for Figure 3 A schematic diagram of the local enlarged structure of region A;

[0040] Figure 7It is a structural schematic diagram of the quartz cylinder transport mechanism in the embodiment of the present application;

[0041] Figure 8 It is a structural schematic diagram of the quartz cylinder transport mechanism and the rotation drive unit in the embodiment of the present application;

[0042] Fig. 9 for Figure 5 A schematic diagram of the local enlarged structure of region B;

[0043] Fig.10 It is a schematic diagram of the clamping effect of the middle clamping assembly on the material box in the embodiment of the present application;

[0044] Fig.11 It is a structural schematic diagram of the middle clamping assembly in the embodiment of the present application;

[0045] Fig.12 It is a structural schematic diagram of the conveying mechanism in the application embodiment;

[0046] Figures 1 to 12 Included:

[0047] Filling mechanism 1: frame 11 filling part 12: funnel 121, material guide channel 122, material drop port 123, vibration assembly 124; rotation drive part 13: translation drive member 131, rotation drive member 132, first rotation docking member 133; guide part 14: blocking member 141, translation drive assembly 142, clamping member 143, first guide wheel group 144, second guide wheel group 145; quartz tube transport mechanism 2: walking part 21; bearing bracket 22; second rotation docking Part 23; feeding mechanism 3: mechanical arm 31 clamping assembly 32: clamping drive member 321, first clamping plate 322, second clamping plate 323; conveying mechanism 4: first conveying part 41: first lifting module 411, first transition conveying line 412; intermediate conveying part 42: first conveying line 421, second conveying line 422; second conveying part 43: second lifting module 431, second transition conveying line 432; capping assembly 44: translation drive member 441, adsorption member 442. DETAILED DESCRIPTION

[0048] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0049] Before crystal growth is implemented, silicon materials need to be filled into a quartz tube first, and then the quartz tube is transferred to a crystal growth furnace. Currently, silicon materials are generally filled into a quartz tube manually, which has low production efficiency and increases production costs.

[0050] In order to solve the problem of low production efficiency in the existing manual filling method, the present application provides a quartz cylinder filling device to implement automatic filling of the quartz cylinder.

[0051] like Figures 1 to 3 As shown, the quartz cylinder packing device in the embodiment of the present application includes a packing mechanism 1, a quartz cylinder transport mechanism 2 and a feeding mechanism 3, wherein:

[0052] The filling mechanism 1 comprises a frame 11 , a filling part 12 and a rotating driving part 13 , wherein the filling part 12 and the rotating driving part 13 are both mounted on the frame 11 , a filling station is provided below the filling part 12 , and a material drop opening 123 is provided at the bottom of the filling part 12 .

[0053] The quartz tube transport mechanism 2 includes a walking part 21 and a supporting bracket 22, wherein the supporting bracket 22 is rotatably mounted on the walking part 21 and is used to hold the quartz tube 100 to be filled. The walking part 21 can be, for example, an AGV or a material rack carried by the AGV.

[0054] The walking part 21 is used to transport the quartz cylinder 100 to the filling station, and the rotating driving part 13 is used to dock with the supporting bracket 22 and drive the supporting bracket 22 to rotate so that the quartz cylinder 100 is aligned with the drop opening 123 of the filling part 12 in an inclined state.

[0055] The feeding mechanism 3 is used to put silicon materials into the filling part 12, so that the silicon materials fall into the quartz cylinder 100 from the drop opening 123. The rotation driving part 13 is also used to drive the supporting bracket 22 to rotate during the filling process, so that the quartz cylinder 100 switches from the inclined state to the upright state to arrange the silicon materials.

[0056] The working process of the quartz tube packing device in the embodiment of the present application is as follows:

[0057] First, the quartz tube 100 to be filled is fixed on the supporting bracket 22, and the walking unit 21 transports the quartz tube 100 to the filling station.

[0058] Next, the rotary drive unit 13 docks the support bracket 22 and drives the support bracket 22 to rotate, so that the quartz cylinder 100 is aligned with the drop opening 123 of the filling unit 12 in an inclined state. Alternatively, the support bracket 22 has been pre-fixed to the inclined state, and the rotary drive unit 13 does not need to be driven.

[0059] Subsequently, the feeding mechanism 3 puts the silicon material into the filling part 12, so that the silicon material falls into the quartz cylinder 100 from the drop opening 123 of the filling part 12. During the filling process, the rotary drive part 13 drives the supporting bracket 22 to rotate at regular intervals, so that the quartz cylinder 100 switches from the inclined state to the upright state, so as to arrange the silicon material in the quartz cylinder 100.

[0060] It can be seen that, through the cooperation of the filling mechanism 1, the quartz cylinder transfer mechanism 2 and the feeding mechanism 3, the quartz cylinder filling device in the embodiment of the present application realizes automatic filling of the quartz cylinder 100, thereby improving the filling efficiency and reducing the crystal growth cost. In addition, during the filling process, the quartz cylinder 100 can also switch from the inclined state to the upright state to implement the arrangement of the silicon material, thereby improving the uniformity of the filling.

[0061] In order to allow the silicon material to fall into the quartz cylinder 100 at a uniform speed, the filling part 12 optionally includes a funnel 121 and a material guide channel 122, wherein one end of the material guide channel 122 is open to form a downwardly inclined material drop opening 123. After the feeding mechanism 2 puts the silicon material into the funnel 21, the silicon material falls from the funnel 21 into the material guide channel 122, and falls into the quartz cylinder 100 through the material drop opening 123.

[0062] In order to increase the storage amount of silicon material in the filling part 12, the feeding frequency of the feeding mechanism 2 is reduced, such as Figure 4 and Figure 5 As shown, optionally, the funnel 121 is provided with at least two (such as Figure 4 and Figure 5 There are two of them), and a material guiding channel 122 is correspondingly arranged under each funnel 121, wherein one end of the material guiding channel 122 closest to the filling station is opened to form a material drop opening 123.

[0063] like Figure 4 As shown, an optional implementation is that two adjacent material guide channels 122 are connected, wherein the bottom of the material guide channel 122 farther from the filling station is higher than the bottom of the material guide channel 122 closer to the filling station. In this way, the material guide channels 122 of each funnel 121 are connected in sequence to form a connected silicon material flow channel with a gradient inclination toward the drop port 123. The feeding mechanism 2 puts the silicon material into each funnel 121, and the silicon material dropped from each funnel 121 flows along the silicon material flow channel to the drop port 123, and falls into the quartz cylinder 100 through the drop port 123.

[0064] like Figure 5As shown, another optional implementation is that, among the two adjacent funnels 121, the material outlet of the material guide channel 122 corresponding to the funnel 121 far from the filling station is located above the funnel 121 near the filling station, so that the silicon material in the funnel 121 far from the filling station can fall into the funnel 121 near the filling station through the corresponding material guide channel 122. In this way, each funnel 121, in series with the corresponding material guide channel 122, sequentially forms a silicon material flow channel with a gradient inclination toward the material outlet 123. The feeding mechanism 2 only needs to put the silicon material into the funnel 121 farthest from the filling station. After flowing through the remaining funnels 121, the silicon material finally enters the material guide channel 122 corresponding to the funnel 121 closest to the filling station, and falls into the quartz cylinder 100 through the material outlet 123 of the material guide channel 122.

[0065] like Figure 4 and Figure 5 As shown, optionally, the filling part 12 further includes a vibration component 124 disposed below the material guiding channel 122, and the vibration component 124 is used to drive the material guiding channel 122 to vibrate during the filling process, thereby promoting the silicon material to pass through the material guiding channel 122 faster and fall into the quartz cylinder 100, and preventing the silicon material from being blocked in the material guiding channel 122. The vibration component 124 can be, for example, a vibration motor.

[0066] like Figures 6 to 9 As shown, optionally, the rotation driving part 13 includes a translation driving member 131, a rotation driving member 132 and a first rotation docking member 133, wherein the rotation driving member 132 is connected to the driving end of the translation driving member 131, and the first rotation docking member 133 is connected to the driving end of the rotation driving member 132. Correspondingly, the supporting bracket 22 is provided with a second rotation docking member 23 matching the first rotation docking member 133.

[0067] When the walking part 21 is used to transport the quartz tube 100 to the filling station, the translation driving member 131 first drives the first rotating docking member 132 to translate toward the second rotating docking member 23, so that the first rotating docking member 133 docks with the second rotating docking member 23. Then, the rotation driving member 132 is used to drive the first rotating docking member 133 to rotate, thereby driving the supporting bracket 22 to rotate, and finally implementing the rotation adjustment of the quartz tube 100 held on the supporting bracket 22, so that the quartz tube 100 is aligned with the drop opening 123 of the filling part 12 in an inclined state.

[0068] Similarly, during the filling process, the rotary drive member 132 drives the supporting bracket 22 to rotate at regular intervals, so that the quartz tube 100 switches from the inclined state to the upright state, so as to arrange the silicon material in the quartz tube 100 .

[0069] like Fig. 9As shown, optionally, the first rotating docking member 133 includes a locking block with a slot thereon, and correspondingly, the second rotating docking member 23 includes a block matching the slot. The translation drive member 131 drives the first rotating docking member 132 to translate toward the second rotating docking member 23, and the block is inserted into the slot, thereby achieving the docking of the first rotating docking member 133 with the second rotating docking member 23. The translation drive member 131 can adopt various existing linear drive modules that can drive the first rotating docking member 132 to translate, such as a linear drive module composed of a cylinder, a slide rail and a slider. The rotation drive member 132 can adopt various existing rotation drive modules that can drive the first rotating docking member 133 to rotate, such as a rotation drive motor.

[0070] like Figure 1 As shown, the loading mechanism 3 includes a robot arm 31 and a clamping assembly 32 connected to the end of the robot arm 31 . The robot arm 31 is used to drive the clamping assembly 32 to move, so as to drive the clamping assembly 32 to clamp the material box 200 containing silicon material, and to put the silicon material in the material box 200 into the filling part 12 .

[0071] like Fig.10 and Fig.11 As shown, optionally, the clamping assembly 32 includes a clamping drive 321, a first clamping plate 322 and a second clamping plate 323, wherein the clamping drive 321 is connected to the end of the robot arm 21, the first clamping plate 322 and the second clamping plate 323 are connected in pairs to the two driving ends of the clamping drive 321, and the clamping drive 321 is used to drive the first clamping plate 322 and the second clamping plate 323 to clamp and release the material box 200.

[0072] like Figure 6 As shown, optionally, the filling mechanism 1 further includes a guide portion 14 disposed on the frame 11 and located at the side of the filling station, and the guide portion 14 includes a blocking member 141, a translation drive assembly 142 and a clamping member 143, wherein: the blocking member 141 is mounted on the frame 11, and when the walking portion 21 transfers the quartz tube 100 to the filling station, the blocking member 141 is used to block the walking portion 21. The translation drive assembly 142 is mounted on the frame 11, and the clamping member 143 is connected to the movable part of the translation drive assembly 142, and when the walking portion 21 transfers the quartz tube 100 to the filling station, the clamping member 143 clamps the walking portion 21.

[0073] It can be seen that, through the cooperation of the blocking member 141 and the clamping member 143, the quartz cylinder 100 can be accurately moved to the filling station under the drive of the walking part 21 and locked at the filling station, thereby ensuring that the quartz cylinder can be aligned with the blanking port of the filling part after rotation, and ensuring that the stone walking part 21 remains fixed during the filling process to prevent the walking part 21 from accidentally sliding and causing the quartz cylinder 100 to deviate from the blanking port.

[0074] After the filling is completed, the blocking member 141 is unblocked, the clamping member 143 keeps clamping the walking part 21, and the translation drive assembly 142 drives the clamping member 143 to translate out of the filling station, thereby pushing the walking part 21 out of the filling station. Finally, the clamping member 143 releases the walking part 21.

[0075] Optionally, the translation drive assembly 142 includes a slide rail, a mounting plate and a drive motor, wherein: the slide rail is mounted on the frame 11, and a rack is provided on the side of the slide rail along the extension direction of the slide rail. The mounting plate is slidably connected to the slide rail, the clamping member 143 and the drive motor are both mounted on the mounting plate, and a gear meshing with the rack is provided on the driving end of the drive motor, and the drive motor is used to drive the gear to rotate, thereby driving the mounting plate to slide along the slide rail. Of course, the translation drive assembly 142 can also adopt a linear drive module with other structures that can drive the clamping member 143 to translate.

[0076] The blocking member 141 can be a blocking cylinder. In the initial state, the telescopic rod of the blocking cylinder is located at the avoidance position, which will not hinder the walking part 21. When the walking part 21 moves to the filling station, the telescopic rod of the blocking cylinder extends toward the walking part 21, thereby blocking the walking part 21.

[0077] Continue to refer Figure 6 As shown, optionally, the guide portion 14 further includes a first guide wheel group 144 and a second guide wheel group 145, wherein: the first guide wheel group 144 is arranged on the frame 11 along the extension direction of the slide rail and is located at the first side of the filling station, and the second guide wheel group 145 is arranged on the frame 11 along the extension direction of the slide rail and is located at the second side of the filling station. A guide channel for the walking portion 21 to pass through is formed between the first guide wheel group 144 and the second guide wheel group 145. After the walking portion 21 enters the guide channel, the first guide wheel group 144 and the second guide wheel group 145 respectively roll against one side wall of the walking portion 21 to realize the movement guidance of the walking portion 21 and prevent the walking portion 21 from going off.

[0078] like Figure 1 As shown, the quartz cylinder filling device in the embodiment of the present application further includes a conveying mechanism 4. The conveying mechanism 4 is configured to convey the material box 200 filled with silicon material toward the loading mechanism 3, and the loading mechanism 3 is used to pick up the material box 200 filled with silicon material from the conveying mechanism 4. The loading mechanism 3 is also used to put the empty material box back on the conveying mechanism 4 after the filling is completed, and the conveying mechanism 4 is also configured to convey the empty material box away from the loading mechanism 3.

[0079] By setting the conveying mechanism 4, the present application realizes automatic loading of the material box filled with silicon material, thereby ensuring that the loading mechanism 3 can obtain the material box filled with silicon material nearby, thereby improving the filling efficiency. In addition, the conveying mechanism 4 also realizes automatic unloading of the emptied material box.

[0080] like Fig.12 As shown, optionally, the conveying mechanism 4 includes a first conveying portion 41, an intermediate conveying portion 42 and a second conveying portion 43, wherein:

[0081] The intermediate conveying section 42 includes a first conveying line 421 and a second conveying line 422 , and the second conveying line 422 is disposed above the first conveying line 421 .

[0082] The first conveying part 41 includes a first lifting module 411 and a first transition conveying line 412 . The first lifting module 411 is used to drive the first transition conveying line 412 to rise and fall, so as to drive the first transition conveying line 412 to dock with the first conveying line 421 or the second conveying line 422 .

[0083] The second conveying section 43 includes a second lifting module 431 and a second transition conveying line 432 . The second lifting module 431 is used to drive the second transition conveying line 432 to rise and fall, so as to drive the second transition conveying line 432 to dock with the first conveying line 421 or the second conveying line 422 .

[0084] The second transition conveyor line 432 is used to receive the material box containing silicon material, and to convey the material box containing silicon material to the first conveyor line 421 connected to the second transition conveyor line 432. The first conveyor line 421 is used to convey the material box containing silicon material to the first transition conveyor line 412 connected to the first conveyor line 421. The loading mechanism 3 picks up the material box containing silicon material from the first transition conveyor line 412.

[0085] The loading mechanism 3 places the empty material box on the first transition conveyor line 412. The first transition conveyor line 412 is used to convey the empty material box back to the second conveyor line 422 connected to the first transition conveyor line 412. The second conveyor line 422 is used to convey the empty material box to the second transition conveyor line 432 connected to the second conveyor line 422.

[0086] It can be seen that, through the cooperation of the first conveying part 41 , the middle conveying part 42 and the second conveying part 43 , the conveying mechanism 4 realizes automatic loading of the material box filled with silicon material and automatic unloading of the emptied material box.

[0087] Since the material box containing silicon material is covered with a material cover, in order to ensure that the loading mechanism 3 can pick up the material cover after the material cover is removed, so as to facilitate the silicon material to be directly filled into the quartz cylinder 100, optionally, the conveying mechanism 4 also includes a cover removal assembly 44 arranged on the firmware component of the first lifting module 411, and the cover removal assembly 44 includes a translation drive member 441 and an adsorption member 442 connected to the driving end of the translation drive member 441.

[0088] When the material box containing silicon material enters the first transition conveyor line 412 from the first conveyor line 421, the first lifting module 411 is also used to drive the first transition conveyor line 412 to rise, so that the box cover of the material box containing silicon material on the first transition conveyor line 412 is adsorbed by the adsorption member 442. Then, the first lifting module 411 drives the first transition conveyor line 412 to descend, and the translation drive member 4 drives the adsorption member 442 to translate relative to the material box containing silicon material, so that the box cover is separated from the material box. The adsorption member 442 can generate adsorption force on the box cover, so a suction cup or an electromagnet can be used for adsorption.

[0089] After the loading mechanism places the empty material box on the first transition conveyor line 412, the first lifting module 411 is also used to drive the first transition conveyor line 412 to rise, so that the box cover adsorbed on the adsorption member 442 is closed onto the empty material box.

[0090] Optionally, in order to improve the filling efficiency, the conveying mechanism 4 is divided into two groups, and the filling mechanism 1 is correspondingly divided into two groups, wherein: the loading mechanism 3 picks up silicon material from one of the two conveying mechanisms 4 and puts the picked up silicon material into the filling part 12 of one of the two filling mechanisms 1.

[0091] The present application is described in sufficient detail above with certain particularity. It should be understood by those skilled in the art that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, rather than by the above description in the embodiments.

Claims

1. A quartz cylinder packing device, characterized in that: The quartz tube packing device comprises a packing mechanism, a quartz tube transport mechanism and a feeding mechanism, wherein: The filling mechanism comprises a frame, a filling part and a rotating driving part, wherein the filling part and the rotating driving part are both mounted on the frame, a filling station is provided below the filling part, and a material drop opening is provided at the bottom of the filling part; The quartz tube transport mechanism comprises a walking part and a bearing bracket, wherein the bearing bracket is rotatably mounted on the walking part, and the bearing bracket is used to hold the quartz tube to be filled; The walking part is used to transport the quartz tube to the filling station, and the rotating driving part is used to dock with the supporting bracket and drive the supporting bracket to rotate so that the quartz tube is aligned with the drop opening of the filling part in an inclined state; The feeding mechanism is used to put the silicon material into the filling part, so that the silicon material falls into the quartz cylinder from the drop opening; the rotary drive part is also used to drive the supporting bracket to rotate during the filling process, so that the quartz cylinder switches from the inclined state to the upright state to organize the silicon material.

2. The quartz tube packing device according to claim 1, characterized in that: The filling part comprises a funnel and a material guiding channel, one end of the material guiding channel is open to form the material dropping opening inclined downward; The feeding mechanism puts the silicon material into the hopper, and the silicon material falls from the hopper into the material guiding channel and falls into the quartz cylinder through the material dropping opening.

3. The quartz tube packing device according to claim 2, characterized in that: At least two funnels are provided, and a material guide channel is correspondingly provided under each funnel, and one end of the material guide channel closest to the filling station is opened to form the material drop opening; Two adjacent material guide channels are connected, wherein the bottom of the material guide channel farther from the filling station is higher than the bottom of the material guide channel closer to the filling station, and the feeding mechanism puts the silicon material into each of the funnels; or, Among the two adjacent funnels, the material drop opening of the material guide channel corresponding to the funnel farther from the filling station is located above the funnel closer to the filling station, and the silicon material in the funnel farther from the filling station falls into the funnel closer to the filling station through the corresponding material guide channel, and the feeding mechanism puts the silicon material into the funnel farthest from the material drop opening.

4. The quartz tube packing device according to claim 2, characterized in that: The filling part further comprises a vibration component arranged below the material guiding channel, and the vibration component is used for driving the material guiding channel to vibrate during the filling process.

5. The quartz tube packing device according to claim 1, characterized in that: The rotation driving part comprises a translation driving member, a rotation driving member and a first rotation docking member, wherein the rotation driving member is connected to the driving end of the translation driving member, and the first rotation docking member is connected to the driving end of the rotation driving member; The bearing bracket is provided with a second rotating docking piece matching the first rotating docking piece; The translation driving member is used to drive the first rotating docking member to translate toward the second rotating docking member so that the first rotating docking member docks with the second rotating docking member, and the rotation driving member is used to drive the first rotating docking member to rotate so as to drive the supporting bracket to rotate.

6. The quartz tube packing device according to claim 1, characterized in that: The feeding mechanism includes a mechanical arm and a clamping assembly connected to the end of the mechanical arm, wherein the mechanical arm is used to drive the clamping assembly to move, so as to drive the clamping assembly to clamp a material box containing silicon material, and to put the silicon material in the material box into the filling part; The clamping assembly includes a clamping drive, a first clamping plate and a second clamping plate, wherein the clamping drive is connected to the end of the robotic arm, the first clamping plate and the second clamping plate are connected in pairs to the two driving ends of the clamping drive, and the clamping drive is used to drive the first clamping plate and the second clamping plate to clamp and release the material box.

7. The quartz tube packing device according to claim 1, characterized in that: The filling mechanism further comprises a guide portion disposed on the frame and located at the side of the filling station, the guide portion comprising a blocking member, a translation drive assembly and a clamping member, wherein: The blocking member is installed on the frame, and when the walking part transports the quartz cylinder to the filling station, the blocking member is used to block the walking part; The translation drive assembly is installed on the frame, the clamping member is connected to the movable part of the translation drive assembly, and when the walking part transports the quartz cylinder to the filling station, the clamping member clamps the walking part; The translation drive assembly is used to push the walking part out of the filling station after filling is completed.

8. The quartz tube packing device according to claim 7, characterized in that: The translation drive assembly includes a slide rail, a mounting plate and a drive motor, wherein: The slide rail is installed on the frame, and a rack is provided on the side of the slide rail along the extension direction of the slide rail; The mounting plate is slidably connected to the slide rail, the clamping member and the drive motor are both mounted on the mounting plate, a gear meshing with the rack is provided on the driving end of the drive motor, and the drive motor is used to drive the gear to rotate so as to drive the mounting plate to slide along the slide rail.

9. The quartz tube packing device according to claim 8, characterized in that: The guide portion further comprises a first guide wheel group and a second guide wheel group, wherein: The first guide wheel group is arranged on the frame along the extension direction of the slide rail and is located at a first side of the filling station. The first guide wheel group is arranged on the frame along the extension direction of the slide rail and is located at a second side of the filling station. A guide channel for the walking part to pass through is formed between the first guide wheel group and the second guide wheel group. After the walking portion enters the guide channel, the first guide wheel group and the second guide wheel group respectively roll against a side wall of one side of the walking portion.

10. The quartz tube packing device according to claim 1, characterized in that: The quartz cylinder packing device also includes a conveying mechanism; The conveying mechanism is configured to convey the material box containing silicon material toward the loading mechanism, and the loading mechanism is used to pick up the material box containing silicon material from the conveying mechanism; The feeding mechanism is also used to put the empty material box back onto the conveying mechanism after filling is completed, and the conveying mechanism is also configured to convey the empty material box away from the feeding mechanism.

11. The quartz tube packing device according to claim 10, characterized in that: The conveying mechanism includes a first conveying portion, an intermediate conveying portion and a second conveying portion, wherein: The intermediate conveying part includes a first conveying line and a second conveying line, wherein the second conveying line is arranged above the first conveying line; The first conveying part includes a first lifting module and a first transition conveying line, wherein the first lifting module is used to drive the first transition conveying line to rise and fall, so as to drive the first transition conveying line to dock with the first conveying line or the second conveying line; The second conveying part includes a second lifting module and a second transition conveying line, and the second lifting module is used to drive the second transition conveying line to rise and fall, so as to drive the second transition conveying line to dock with the first conveying line or the second conveying line; The second transition conveyor line is used to receive a material box containing silicon materials, and convey the material box containing silicon materials to the first conveyor line docked with the second transition conveyor line, the first conveyor line is used to convey the material box containing silicon materials to the first transition conveyor line docked with the first conveyor line, and the loading mechanism picks up the material box containing silicon materials from the first transition conveyor line; The loading mechanism places the empty material box on the first transition conveyor line, the first transition conveyor line is used to convey the empty material box back to the second conveyor line connected to the first transition conveyor line, and the second conveyor line is used to convey the empty material box to the second transition conveyor line connected to the second conveyor line.

12. The quartz tube packing device according to claim 11, characterized in that: The conveying mechanism further comprises a cap removing assembly arranged on the fixing part of the first lifting module, wherein the cap removing assembly comprises a translation driving member and an adsorption member connected to the driving end of the translation driving member; The first lifting module is further used to drive the first transition conveyor line to rise, so that the box cover of the material box containing silicon material on the first transition conveyor line is adsorbed by the adsorbent, and the translation driving member is used to drive the adsorbent to translate relative to the material box containing silicon material, so that the box cover adsorbed on the adsorbent is separated from the material box; The first lifting module is also used to drive the first transition conveyor line to rise, so that the box cover adsorbed on the adsorption member is closed onto the empty material box located on the first transition conveyor line.

13. The quartz tube packing device according to claim 10, characterized in that: The conveying mechanism is divided into two groups, and the filling mechanism is divided into two groups, wherein: The loading mechanism picks up silicon material from one of the two groups of conveying mechanisms, and puts the picked up silicon material into the filling part of one of the two groups of filling mechanisms.

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