Coupling, sample table assembly and MPCVD device

Abstract

The utility model relates to the technical field of microwave plasma chemical vapor deposition, in particular to a coupler, a sample table assembly and an MPCVD device, the coupler comprises a connecting plate connected with a locking cylinder, a first notch is arranged between the locking cylinder and the connecting plate, the first notch extends along the radial direction of the locking cylinder, and a second notch is arranged between the locking cylinder and the connecting plate and extends along the radial direction of the locking cylinder. A first notch is formed in the end face of the locking cylinder, a second notch is formed in the end face of the locking cylinder, extends in the axial direction of the locking cylinder and penetrates through the first notch, a first through hole is formed in the locking cylinder in the axial direction, a fastener is arranged in the radial direction of the first through hole, and the diameter of the first through hole can be changed by rotating the fastener. The coupling is simple in structure, the sample table assembly comprises the coupling, and the MPCVD device comprises the sample table assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of microwave plasma chemical vapor deposition, in particular to a coupling, a sample stage component and an MPCVD device. Background Art

[0002] The coupling is an intermediate piece that connects the motor and the shaft, or the shaft and the shaft. It rotates with the shaft during the process of transmitting motion and power.

[0003] The coupling structure in the prior art is complicated, which brings great inconvenience to production. Utility Model Content

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a coupling with a simple structure.

[0005] Another object of the present invention is to provide a sample stage assembly, which adopts the above coupling.

[0006] Another object of the present invention is to provide an MPCVD device, which adopts the above-mentioned sample stage assembly.

[0007] The purpose of the utility model is achieved through the following technical solutions:

[0008] A coupling comprises a connecting plate connected to a locking cylinder, a first notch is arranged between the locking cylinder and the connecting plate, the first notch extends radially along the locking cylinder, a second notch is arranged on the end face of the locking cylinder, the second notch extends axially along the locking cylinder and passes through the first notch, a first through hole is arranged axially of the locking cylinder, a fastener is arranged radially of the first through hole, and the diameter of the first through hole can be changed by rotating the fastener.

[0009] Furthermore, the connecting plate is provided with a second through hole, the diameter of the second through hole is not equal to the diameter of the first through hole, and the second through hole and the first through hole are mutually interpenetrating and coaxial.

[0010] Furthermore, the diameter of the first through hole is smaller than the diameter of the second through hole.

[0011] Furthermore, a blind hole is provided on the lower surface of the connecting plate, and the blind hole is coaxial with the second through hole.

[0012] Furthermore, the hole wall of the first through hole is provided with anti-slip textures or key grooves.

[0013] Furthermore, a rubber pad for anti-slip is arranged in the first through hole.

[0014] A sample stage assembly comprises the coupling.

[0015] A MPCVD device comprises the sample stage assembly.

[0016] The utility model has the following advantages:

[0017] The coupling of the utility model has a simple structure and is easy to process and manufacture; the structure of the sample stage assembly using the coupling of the utility model is greatly simplified; and the MPCVD device using the sample stage assembly of the utility model has a sample stage rotatably arranged in the reaction chamber, so that the sample stage is heated more evenly, thereby improving the uniformity of deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the implementation of the utility model, the following is a brief introduction to the drawings required for use in the implementation. It should be understood that the following drawings only show certain embodiments of the utility model, and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can also be obtained based on these drawings without creative work.

[0019] Figure 1 It is a structural schematic diagram of the coupling of the utility model;

[0020] Figure 2 for Figure 1 Schematic cross-section diagram of

[0021] Figure 3 It is a structural schematic diagram of the sample stage assembly of the utility model;

[0022] Figure 4 for Figure 3 Schematic diagram of the motor structure in ;

[0023] In the figure: 1-locking cylinder, 2-connecting plate, 3-first notch, 4-second notch, 5-first through hole, 6-second through hole, 7-blind hole, 8-connecting hole, 9-threaded hole, 10-rotating axis, 11-rotating disk, 12-base, 13-sample table, 14-through hole. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the implementation of the utility model clearer, the technical solution in the implementation of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation of the utility model. Obviously, the described implementation is only a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0026] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] In the present utility model, unless otherwise clearly specified and limited, the first feature being above or below the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, the first feature being above, above, and above the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being below, below, and below the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] like Figure 1 and Figure 2As shown, a coupling comprises a locking cylinder 1 and a connecting plate 2, the lower end face of the locking cylinder 1 is connected to the upper surface of the connecting plate 2, a first notch 3 is arranged between the locking cylinder 1 and the connecting plate 2, the first notch 3 extends along the radial direction of the locking cylinder 1, and a second notch 4 is arranged on the upper end face of the locking cylinder 1, the second notch 4 extends along the axial direction of the locking cylinder 1 and passes through the first notch 3, and a first through hole 5 is arranged axially of the locking cylinder 1, and the first through hole 5 is used to be connected with the rotating shaft 10 of the sample stage assembly; the second notch 4 and the first through hole 5 make the cross-section of the upper end of the locking cylinder 1 present a "C" shape, so as to facilitate changing the diameter size of the first through hole 5; a fastener is arranged radially of the first through hole 5, and the diameter size of the first through hole 5 can be changed by rotating the fastener; in this embodiment, the locking cylinder 1 and the connecting plate 2 are integrally formed, and the connecting plate 2 is provided with a fastener for connecting with the rotating disk 11 of the motor. The first through hole 5 is provided with a connecting hole 8, in which a screw (not shown in the figure) is arranged; the first through hole 5 is provided with a threaded hole 9 in the radial direction, in which a bolt (not shown in the figure) is arranged. When the bolt is tightened, the opening size of the second notch 4 becomes smaller, so that the diameter of the first through hole 5 becomes smaller, so that the coupling can lock the rotating shaft 10. When the bolt is loosened, the diameter of the first through hole 5 becomes larger, so that the coupling can loosen the rotating shaft 10, which is convenient for installation and disassembly; the first notch 3 allows the connecting plate 2 and the locking cylinder 1 to be partially disconnected. When tightening or loosening the bolt, the opening size of the second notch 4 is more likely to become smaller or larger, so as to facilitate locking or loosening the rotating shaft 10; it should be particularly pointed out that the first notch 3 can be set at the intersection of the locking cylinder 1 and the connecting plate 2, or can be set between the upper and lower end faces of the locking cylinder 1, or can be set on the connecting plate 2.

[0029] Furthermore, the connecting plate 2 is provided with a second through hole 6 matching the rotating shaft 10, the diameter of the second through hole 6 is not equal to the diameter of the first through hole 5, the second through hole 6 and the first through hole 5 are mutually connected and coaxial; because the diameter of the second through hole 6 matches the diameter of the rotating shaft 10, when tightening or loosening the bolt, the second through hole 6 can prevent the opening size of the second notch 4 from changing, causing the cylindricity of the first through hole 5 to change, and then causing the axial position of the rotating shaft 10 to shift, that is, the second through hole 6 can play a role in locking the axial position of the rotating shaft 10.

[0030] Furthermore, the diameter of the first through hole 5 is smaller than the diameter of the second through hole 6. When the bolt is tightened, the opening size of the second notch 4 becomes smaller, which makes the diameter of the first through hole 5 smaller. At this time, a large radial force will be generated at the opening of the second notch 4, and the radial force may cause serious deformation of the rotating shaft 10. Therefore, the diameter of the first through hole 5 should not be too large. The inventor has learned through a large number of experiments that it is best to take the diameter of the first through hole 5 as smaller than the diameter of the second through hole 6; in addition, the setting of the large and small holes can also limit the rotating shaft 10 from falling downward along its own axial direction.

[0031] Furthermore, in order to facilitate positioning, a blind hole 7 is provided on the lower surface of the connecting plate 2 , the blind hole 7 matches the rotating disk 11 , and the blind hole 7 is coaxial with the second through hole 6 .

[0032] Furthermore, as an embodiment, in order to prevent the rotating shaft 10 from slipping in the first through hole 5 , anti-slip grooves or keyways (not shown in the figure) are provided on the hole wall of the first through hole 5 .

[0033] Furthermore, as another embodiment, in order to prevent the rotating shaft 10 from slipping in the first through hole 5 , a rubber pad (not shown in the figure) for anti-slip is arranged in the first through hole 5 .

[0034] like Figure 3 and Figure 4 As shown, a sample stage assembly includes the coupling, and also includes a rotating shaft 10, a sample stage 13 and a motor (the motor in this embodiment is an HR-170-50 DDR motor produced by Zhejiang Hechuan Technology Co., Ltd.), the motor includes a rotatable rotating disk 11 and a base 12 for fixing the motor on a frame, the upper end of the rotating shaft 10 is connected to the sample stage 13, the lower end of the rotating shaft 10 can be rotatably passed through the through hole 14 in the middle of the motor, inserted into the first through hole 5 and locked by the bolt in the threaded hole 9, the connecting plate 2 is mounted on the rotating disk 11 through the blind hole 7, and the connecting plate 2 and the rotating disk 11 are detachably connected by screws in the connecting hole 8.

[0035] An MPCVD device comprises the sample stage assembly and a frame, wherein the sample stage 13 is arranged in a reaction chamber of the MPCVD device, and the base 12 is connected to the frame.

[0036] The rotation principle of this sample stage is as follows:

[0037] When the motor is turned on, the rotating disk 11 rotates and drives the coupling to rotate, and the coupling drives the rotating shaft 10 to rotate, thereby realizing the rotation of the sample stage 13.

[0038] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A coupling, characterized in that: The invention comprises a connecting plate (2) connected to a locking cylinder (1), a first notch (3) being arranged between the locking cylinder (1) and the connecting plate (2), the first notch (3) extending in the radial direction of the locking cylinder (1), a second notch (4) being arranged on the end surface of the locking cylinder (1), the second notch (4) extending in the axial direction of the locking cylinder (1) and penetrating the first notch (3), a first through hole (5) being arranged in the axial direction of the locking cylinder (1), a fastener being arranged in the radial direction of the first through hole (5), and the diameter of the first through hole (5) being changeable by rotating the fastener.

2. The coupling according to claim 1, characterized in that: The connecting plate (2) is provided with a second through hole (6), the diameter of the second through hole (6) is not equal to the diameter of the first through hole (5), and the second through hole (6) and the first through hole (5) are mutually interpenetrating and coaxial.

3. The coupling according to claim 2, characterized in that: The diameter of the first through hole (5) is smaller than the diameter of the second through hole (6).

4. The coupling according to claim 2, characterized in that: The lower surface of the connecting plate (2) is provided with a blind hole (7), and the blind hole (7) is coaxial with the second through hole (6).

5. The coupling according to any one of claims 1 to 4, characterized in that: The hole wall of the first through hole (5) is provided with anti-slip patterns or key grooves.

6. The coupling according to any one of claims 1 to 4, characterized in that: An anti-slip rubber pad is arranged in the first through hole (5).

7. A sample stage assembly, characterized in that: The sample stage assembly comprises the coupling according to any one of claims 1 to 6.

8. An MPCVD device, characterized in that: The MPCVD apparatus comprises the sample stage assembly of claim 7.

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