Horizontal measuring tool for MOCVD graphite disc

Abstract

The utility model relates to the technical field of laser chip manufacturing, in particular to an MOCVD graphite disc horizontal measuring tool. The utility model provides an MOCVD graphite disc horizontal measuring tool, which comprises a measuring part and a horizontal positioning part, the measuring part is detachably connected with the horizontal positioning part, the horizontal positioning part comprises a positioning part body and a plurality of positioning point positions, and the plurality of positioning point positions are arranged at intervals along the extension direction of the positioning part body; and the measuring part comprises a mounting piece and a measuring piece, the mounting piece is connected to the positioning point position, and the measuring piece is used for measuring the distance between the reference surface and the horizontal plane of the ink disc. According to the technical scheme, the measuring piece can be firstly fixed for zero comparison and then measured, and the depth gauge does not generate any displacement relative to the horizontal shaft in the measuring process, so that the measuring error is reduced.

Description

Technical Field

[0001] The present disclosure relates to the technical field of laser chip manufacturing, and in particular to a MOCVD graphite disk level measurement tool. Background Art

[0002] MOCVD is a key device in the manufacturing process of laser chips. Its function is to provide the necessary reaction environment for group III metal organic compounds, group V hydrides and doping sources to produce epitaxial wafers through precise temperature and pressure control. This process is also called epitaxial growth. The growth process is to place the substrate on the graphite disk in the reaction chamber and heat it at the bottom of the graphite disk. The temperature is generally 500-1400℃, and the graphite disk is in a rotating state. If the rotating graphite disk has a large height difference, it will affect the uniformity of the product produced in this process. Therefore, it is necessary to adjust the level of the graphite disk, which is generally controlled within ±0.1mm. The existing solution is to place a horizontal axis horizontally on the cavity and measure it with a depth gauge. This solution has the defects that the measurement position is not fixed and the depth gauge is different from the zero position. This tool is designed to address the above defects. Utility Model Content

[0003] The present disclosure aims to solve at least one of the technical problems existing in the prior art or related art.

[0004] To this end, the present disclosure provides a MOCVD graphite disk level measurement tool, comprising a measuring part and a horizontal positioning part, wherein the measuring part is detachably connected to the horizontal positioning part, wherein:

[0005] The horizontal positioning portion includes a positioning portion body and a plurality of positioning points, and the plurality of positioning points are arranged at intervals along the extending direction of the positioning portion body;

[0006] The measuring part comprises a mounting part and a measuring part, wherein the mounting part is connected to the positioning point, and the measuring part is used to measure the distance between the reference plane and the horizontal plane of the ink tray.

[0007] In a feasible implementation manner, the positioning point is configured as a positioning groove, and an extension direction of the positioning groove is configured to be perpendicular to an extension direction of the positioning portion body.

[0008] In a feasible implementation manner, the plurality of positioning grooves correspond to a plurality of positioning depths.

[0009] In a feasible implementation manner, the extension direction of the mounting member is perpendicular to the extension direction of the measuring member, and the mounting member is embedded in the positioning groove, and when the mounting member is embedded in the positioning groove, the measuring member is arranged outside the positioning groove.

[0010] In a feasible implementation manner, the mounting member is connected to the positioning groove, and a through hole for the measuring end of the measuring member to pass through is provided in the positioning groove.

[0011] In a feasible implementation manner, a reference surface positioning portion is provided on a side of the positioning portion body that contacts the reference surface, wherein:

[0012] The reference surface positioning portion includes a first positioning plate and a second positioning plate, the first positioning plate and the second positioning plate are spaced apart along the extension direction of the positioning portion body, and the distance between the first positioning plate and the second positioning plate is the diameter length of the reference surface.

[0013] In a feasible implementation manner, a reference surface positioning portion is provided on a side of the positioning portion body that contacts the reference surface, wherein:

[0014] The reference surface positioning portion includes a first positioning plate and a second positioning plate, wherein the first positioning plate is arranged at one side of the positioning point, and the second positioning plate can move along the extension direction of the positioning portion body.

[0015] In a feasible implementation manner, a fixing member is further included, and the fixing member is used to fix the relative position of the second positioning plate on the positioning portion body.

[0016] In a feasible embodiment, it also includes a reference ruler, and two accommodating positions are provided on the reference ruler, and the two accommodating positions are used to respectively accommodate the first positioning plate and the second positioning plate, and when the first positioning plate and the second positioning plate are placed in the accommodating positions, the bottom surface of the positioning part body is in contact with the top surface of the reference ruler, and the positioning part body and the reference ruler form a table surface for the measuring piece to contact.

[0017] In a possible implementation manner, the measuring element is configured as a depth gauge.

[0018] Compared with the prior art, the present disclosure includes at least the following beneficial effects: the present disclosure places the horizontal positioning part on the reference plane of the reaction chamber, and fixes the relative position of the horizontal positioning part and the reference plane of the reaction chamber, so that the horizontal positioning part will not be displaced relative to the reference plane of the reaction chamber during the measurement process, and then the mounting part of the measuring part is connected to the positioning point, so that the mounting part and the positioning part body will not be displaced, so that the measuring part will not be displaced relative to the horizontal positioning part during the measurement process, so as to reduce the measurement error. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0021] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the exemplary embodiments below. The accompanying drawings are only for the purpose of illustrating exemplary embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0022] Figure 1 It is a schematic diagram of the structure in which the measuring part, the horizontal positioning part and the reference ruler of the present invention are separated;

[0023] Figure 2 It is a schematic diagram of the structure of the measuring part and the horizontal positioning part of the present invention;

[0024] Figure 3 It is a schematic diagram of the structure of the combination of the measuring part, the horizontal positioning part and the reference ruler disclosed in the present invention;

[0025] Figure 4 It is a schematic structural diagram of the reaction chamber reference plane and the ink tray horizontal plane disclosed in the present invention.

[0026] in, Figures 1 to 4 The corresponding relationship between the reference numerals and the component names is as follows:

[0027] 100- measurement reference plane; 200- ink pan horizontal plane;

[0028] 1-measuring part; 11-installing part; 12-measuring part; 2-horizontal positioning part; 21-positioning part body; 22-positioning point; 23-first positioning plate; 24-second positioning plate; 3-reference ruler; 31-accommodating position; 32-table top. DETAILED DESCRIPTION

[0029] In order to more clearly understand the above-mentioned objectives, features and advantages of the present disclosure, the scheme of the present disclosure will be further described below. It should be noted that the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0030] In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure, but the present disclosure may also be implemented in other ways different from those described herein; it is obvious that the embodiments in the specification are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0031] The existing measurement method is to place a horizontal axis on the reference plane of the reaction chamber, and then move the depth gauge to the middle position of the ink disk horizontal plane for measurement. After each height measurement, the ink disk horizontal plane is rotated by an angle, and then the second point is measured until 360 degrees are measured. In this process, the depth gauge can only be fixed on the horizontal axis by hand, which is prone to displacement and shaking, causing measurement errors. This tool is designed to address the above two points.

[0032] Based on this, an embodiment of the present disclosure provides a MOCVD graphite disk horizontal measurement tool. The present disclosure places a horizontal positioning part on a reference plane of a reaction chamber, and fixes the relative position of the horizontal positioning part and the reference plane of the reaction chamber, so that the horizontal positioning part will not be displaced relative to the reference plane of the reaction chamber during the measurement process, and then the mounting part of the measuring part is connected to the positioning point, so that the mounting part and the positioning part body will not be displaced, so that the measuring part will not be displaced relative to the horizontal positioning part during the measurement process, so as to reduce the measurement error.

[0033] The MOCVD graphite disk level measurement tool is described in detail below through a specific embodiment:

[0034] Reference Figures 1 to 4 As shown, the present disclosure provides a MOCVD graphite disk horizontal measurement tool, including a measuring part 1 and a horizontal positioning part 2, the measuring part 1 and the horizontal positioning part 2 are detachably connected, the horizontal positioning part 2 includes a positioning part body 21 and a plurality of positioning points 22, and the plurality of positioning points 22 are arranged at intervals along the extension direction of the positioning part body 21; the measuring part 1 includes a mounting part 11 and a measuring part 12, the mounting part 11 is connected to the positioning points 22, and the measuring part 12 is used to measure the distance between the reference plane 100 and the horizontal plane 200 of the ink disk.

[0035] The horizontal positioning part 2 of the present disclosure includes a positioning part body 21 and a plurality of positioning points 22, wherein the positioning part body 21 of the present disclosure can be set to a rectangular or elliptical shape, and the present disclosure specifically selects a rectangular parallelepiped. It can be understood that because the positioning part body 21 needs to be placed on the reference surface 100, the length of the positioning part body 21 should be greater than the diameter of the reference surface 100.

[0036] The multiple positioning points 22 of the present disclosure can be set on the positioning part body 21 as needed. When in use, the horizontal positioning part 2 is placed on the reference plane 100 of the reaction chamber, and the relative position of the horizontal positioning part 2 and the reference plane of the reaction chamber is fixed. The specific fixing method can be a buckle, a bolt, etc., so that the horizontal positioning part 2 will not be displaced relative to the reference plane 100 of the reaction chamber during the measurement process. Then the mounting part 11 of the measuring part 2 is connected to the positioning point 22. The specific connection method can be a positioning pin or a clamping method. The present disclosure specifically uses a positioning pin so that the mounting part 11 and the positioning part body 21 do not displace, so that the measuring part will not be displaced relative to the horizontal positioning part during the measurement process, so as to reduce the measurement error. Specifically, the measuring part 12 of the present disclosure can use a laser distance measuring device or a depth gauge. The present disclosure specifically uses a depth gauge.

[0037] In some embodiments, the positioning point 22 is configured as a positioning groove, and an extension direction of the positioning groove is perpendicular to an extension direction of the positioning portion body 21 .

[0038] In this embodiment, the positioning point 22 is set as a positioning groove, which can be set as a groove with four side walls or as a through groove. The present disclosure specifically sets the positioning groove as a through groove, and the extension direction of the groove body is perpendicular to the extension direction of the positioning part body 21, and the two sides are connected to the side of the positioning part body 21. The vertical setting can reduce the error of the measuring piece 12 during measurement, and the positioning groove is more conducive to the fixed connection of the mounting piece 11. Furthermore, multiple positioning grooves correspond to multiple positioning depths to adapt to more detection requirements.

[0039] In some embodiments, the extension direction of the mounting member 11 is perpendicular to the extension direction of the measuring member 12, and the mounting member 11 is embedded in the positioning groove. When the mounting member 11 is embedded in the positioning groove, the measuring member 12 is arranged outside the positioning groove.

[0040] In this embodiment, in order to facilitate rapid switching of the measuring position of the measuring member 12, as shown in FIG. Figure 2 and 3 As shown, when the mounting member 11 is connected to the positioning member 22, the measuring member 12 is outside the positioning body 21, and the position of the measuring end of the measuring member can be clearly seen, which is convenient for the operator to find measurement problems.

[0041] In some embodiments, the mounting member 11 is connected to the positioning groove, and a through hole is provided in the positioning groove for the measuring end of the measuring member 12 to pass through.

[0042] In this embodiment, a through hole is provided in the positioning groove for the measuring end of the measuring member 12 to pass through. During assembly, the measuring end of the measuring member 12 is directly inserted into the through hole, and then the relative position between the mounting member 11 and the positioning groove is locked for measurement. Specifically, the through hole can be set at the center of the positioning groove. This setting method can simplify the connection and fixation of the mounting member 11, and the measurement accuracy is higher.

[0043] In some embodiments, a reference plane positioning portion is provided on one side of the positioning portion body 21 that contacts the reference plane 100, and the reference plane positioning portion includes a first positioning plate 23 and a second positioning plate 24. The first positioning plate 23 and the second positioning plate 24 are spaced apart along the extension direction of the positioning portion body 21, and the distance between the first positioning plate 23 and the second positioning plate 24 is the diameter length of the reference plane.

[0044] In this embodiment, the external fixing device is eliminated, so that the positioning body 21 is directly fixed relative to the reference plane 100 through the reference plane positioning part, which reduces the probability of position change during installation and fixation, and further improves the measurement accuracy.

[0045] In some embodiments, a reference plane positioning portion is provided on one side of the positioning portion body 21 that contacts the reference plane 100 , and the reference plane positioning portion includes a first positioning plate 23 and a second positioning plate 24 . The first positioning plate 23 is provided on one side of the positioning point 22 , and the second positioning plate 24 can move along the extension direction of the positioning portion body 21 .

[0046] In this embodiment, the first positioning plate 23 is arranged on the bottom surface of one side of the positioning part body 21 where the positioning point 22 is arranged, and the first positioning plate 23 can be fixedly connected to the position or can be movably arranged at the position. The present disclosure specifically adopts the solution that the first positioning plate 23 is fixedly connected to the position, so that the positioning point on one side is more accurate and the variables are reduced. The second positioning plate 24 of the present disclosure can move along the extension direction of the positioning part body 21, and its movement mode can be to adopt the sliding connection of the slide groove arranged on the positioning part body 21, or to adopt the point position clamping mode to change the relative position, for example, a clamping groove is provided on the positioning part body 21, and the second positioning plate 24 is provided with a convex card that can be clamped with the clamping groove. Further, when the sliding connection mode is selected, a fixing member is also included, and the fixing member is used to fix the relative position of the second positioning plate 24 on the positioning part body 21. Further, the first positioning plate 23 and the second positioning plate 24 can be set to a structure with changeable curvature, such as a memory alloy material or a component hinged by multiple single plates, so as to adapt to various shapes of the outer wall of the reaction chamber to ensure the fixing effect.

[0047] In some embodiments, a reference ruler 3 is also included, and two accommodating positions 31 are provided on the reference ruler 3. The two accommodating positions 31 are used to accommodate the first positioning plate 23 and the second positioning plate 24 respectively. When the first positioning plate 23 and the second positioning plate 24 are placed in the accommodating positions, the bottom surface of the positioning part body 21 is in contact with the top surface of the reference ruler 3, and the positioning part body 21 and the reference ruler 3 form a table 32 for the measuring piece 12 to contact.

[0048] In this embodiment, the reference ruler 3 is used as a structure for zeroing the measuring member 12. Figure 4 As shown, because there is space between the reference plane 100 of the reaction chamber and the horizontal plane 200 of the ink tray, and the measuring point of the measuring member 22 needs to be the reference plane 100, when the first positioning plate 23 and the second positioning plate 24 are placed in the accommodating position 31, the excess surface of the reference ruler 3 formed by the bottom surface of the positioning body 21 and the top surface of the reference ruler 3 is the table 32, which is equivalent to the extension of the reference plane 100.

[0049] In the present disclosure, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance; the term "plurality" refers to two or more, unless otherwise expressly defined. The terms "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; "connected" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances.

[0050] In the description of the present disclosure, it is necessary to understand that the directions or positional relationships indicated by the terms "up", "down", "left", "right", "front", "back", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or unit referred to must have a specific direction, be constructed and operated in a specific orientation, and therefore, should not be understood as a limitation on the present disclosure.

[0051] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0052] The above are only preferred embodiments of the present disclosure and are not intended to limit the present disclosure. For those skilled in the art, the present disclosure may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A MOCVD graphite disk level measurement tool, characterized in that: It comprises a measuring part and a horizontal positioning part, wherein the measuring part and the horizontal positioning part are detachably connected, wherein: The horizontal positioning portion includes a positioning portion body and a plurality of positioning points, and the plurality of positioning points are arranged at intervals along the extending direction of the positioning portion body; The measuring part comprises a mounting part and a measuring part, wherein the mounting part is connected to the positioning point, and the measuring part is used to measure the distance between the reference plane and the horizontal plane of the ink tray.

2. The MOCVD graphite disk level measurement tool according to claim 1, characterized in that: The positioning point is arranged as a positioning groove, and an extending direction of the positioning groove is arranged perpendicular to an extending direction of the positioning portion body.

3. The MOCVD graphite disk level measurement tool according to claim 2, characterized in that: The plurality of positioning grooves correspond to a plurality of positioning depths.

4. The MOCVD graphite disk level measurement tool according to claim 2, characterized in that: The extension direction of the mounting member is perpendicular to the extension direction of the measuring member, and the mounting member is embedded in the positioning groove. When the mounting member is embedded in the positioning groove, the measuring member is arranged outside the positioning groove.

5. The MOCVD graphite disk level measurement tool according to claim 2, characterized in that: The mounting member is connected to the positioning groove, and a through hole is provided in the positioning groove for the measuring end of the measuring member to pass through.

6. The MOCVD graphite disk level measurement tool according to claim 1, characterized in that: A reference surface positioning portion is provided on a side of the positioning portion body that contacts the reference surface, wherein: The reference surface positioning portion includes a first positioning plate and a second positioning plate, the first positioning plate and the second positioning plate are spaced apart along the extension direction of the positioning portion body, and the distance between the first positioning plate and the second positioning plate is the diameter length of the reference surface.

7. The MOCVD graphite disk level measurement tool according to claim 1, characterized in that: A reference surface positioning portion is provided on a side of the positioning portion body that contacts the reference surface, wherein: The reference surface positioning portion includes a first positioning plate and a second positioning plate, wherein the first positioning plate is arranged at one side of the positioning point, and the second positioning plate can move along the extension direction of the positioning portion body.

8. The MOCVD graphite disk level measurement tool according to claim 7, characterized in that: It also includes a fixing member, which is used to fix the relative position of the second positioning plate on the positioning part body.

9. The MOCVD graphite disk level measurement tool according to any one of claims 6 to 8, characterized in that: It also includes a reference ruler, which is provided with two accommodating positions, and the two accommodating positions are used to respectively accommodate the first positioning plate and the second positioning plate. When the first positioning plate and the second positioning plate are placed in the accommodating positions, the bottom surface of the positioning part body is in contact with the top surface of the reference ruler, and the positioning part body and the reference ruler form a table surface for the measuring piece to contact.

10. The MOCVD graphite disk level measurement tool according to claim 1, characterized in that: The measuring member is configured as a depth gauge.

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