Gas reaction control transfer device and system and vacuum coating equipment

Abstract

The utility model discloses a gas reaction control transfer device, a gas reaction control transfer system and vacuum coating equipment, the transfer device comprises a PN communication module, the PN communication module is used for connecting a communication end of a PLC; the analog quantity input module is used for being connected with the analog quantity output end of the gas reaction controller; the first analog quantity output module is used for being connected with an analog signal input end of the gas reaction controller; the second analog quantity output module is used for being connected with a control end of a process gas flowmeter; and the MCU is respectively connected with the PN communication module, the analog quantity input module, the first analog quantity output module and the second analog quantity output module. And when the gas reaction controller goes wrong, the problem can be found and treated in time, so that the stability and reliability of vacuum coating operation are improved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a gas reaction control transfer device, system and vacuum coating equipment. Background Art

[0002] Gas flow meter is an essential component in vacuum coating equipment, which is used to control the flow of process gas (argon, nitrogen, oxygen, etc.). In some application scenarios that require high-precision control, it is often necessary to configure a specific gas reaction controller, such as the gas reaction controller speedflo, to improve the stability of the coating process. This type of gas reaction controller belongs to closed-loop control, refer to Figure 1 As shown, in the existing vacuum coating equipment, the gas reaction controller speedflo directly reads the voltage value of the target power supply through the feedback interface, and controls and adjusts the third-party process gas flow meter in real time through the output interface. Since the communication protocol of the gas reaction controller speedflo is private, the gas reaction controller speedflo needs to be enabled using special industrial computer software. The PLC of the vacuum coating equipment can only send start and stop signals to the gas reaction controller speedflo, and cannot read and determine whether the gas flow is normal. When there is a problem with the gas reaction controller speedflo, it cannot be fed back to the system of the vacuum coating equipment, resulting in poor stability and reliability of the vacuum coating operation. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a gas reaction control transfer device, system and vacuum coating equipment, which can timely discover and handle problems with the gas reaction controller, thereby improving the stability and reliability of vacuum coating operation.

[0004] According to the gas reaction control transfer device of the first aspect embodiment of the utility model, it includes: a PN communication module, the PN communication module is used to connect to the communication end of the PLC; an analog input module, the analog input module is used to connect to the analog output end of the gas reaction controller; a first analog output module, the first analog output module is used to connect to the analog signal input end of the gas reaction controller; a second analog output module, the second analog output module is used to connect to the control end of the process gas flowmeter; MCU, the MCU is respectively connected to the PN communication module, the analog input module, the first analog output module and the second analog output module.

[0005] According to some embodiments of the present invention, a digital output module is further included. The digital output module is used to connect to the start and stop end of the gas reaction controller, and the digital output module is connected to the MCU.

[0006] According to some embodiments of the present invention, a power module is also included, and the power module is used for supplying power.

[0007] According to some embodiments of the present invention, a display screen is further included, and the display screen is connected to the MCU.

[0008] According to some embodiments of the present utility model, the analog quantity input module includes a plurality of different types of analog quantity interfaces;

[0009] According to some embodiments of the present utility model, the first analog output module includes a plurality of analog interfaces of different types;

[0010] According to some embodiments of the present invention, the second analog output module includes a plurality of analog interfaces of different types.

[0011] According to the second aspect of the present invention, a gas reaction control system includes:

[0012] PLC;

[0013] A target power supply, the target power supply is connected to the PLC for feeding back a target voltage value;

[0014] A transfer device, wherein the transfer device is the gas reaction control transfer device mentioned above, and the PLC is connected to a PN communication module of the transfer device;

[0015] A gas reaction controller, wherein the first analog output module of the transfer device is connected to the analog signal input terminal of the gas reaction controller, and the analog input module of the transfer device is connected to the analog output terminal of the gas reaction controller;

[0016] A process gas flow meter, wherein the second analog output module of the transfer device is connected to the control end of the process gas flow meter.

[0017] The vacuum coating equipment according to the embodiment of the third aspect of the utility model includes the above-mentioned gas reaction control system.

[0018] According to the gas reaction control transfer device, system and vacuum coating equipment of the embodiment of the utility model, at least the following are provided:

[0019] Beneficial effects:

[0020] This embodiment connects the PLC via a PN communication module, and connects the analog signal input terminal of the gas reaction controller via a first analog output module. The MCU converts the target voltage feedback signal into an analog quantity and feeds it back to the gas reaction controller, and the MCU receives the control analog quantity signal output by the gas reaction controller via the analog input module. Then the MCU inputs the control analog quantity signal to the process gas flow meter via the second analog output module, thereby ensuring the closed-loop control function of the gas reaction controller. Since the PLC communicates with the MCU via the PN communication module, the gas reaction controller is equivalent to communicating with the PLC via the MCU. The PLC can obtain the working status of the gas reaction controller via the MCU. When a fault occurs in the gas reaction controller, it can respond and process in a timely manner, thereby improving the stability and reliability of the vacuum coating operation.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0023] Figure 1 It is a connection diagram of a gas reaction control system in an existing vacuum coating equipment;

[0024] Figure 2 It is a structural diagram of the gas reaction control transfer device in the embodiment of the utility model;

[0025] Figure 3 It is a connection diagram of the gas reaction control system in the embodiment of the utility model.

[0026] Figure Number:

[0027] Transfer device 100, PN communication module 110, analog input module 120, first analog output module 130, second analog output module 140, digital output module 150, display screen 160, PLC200, target power supply 300, gas reaction controller 400, process gas flow meter 500. DETAILED DESCRIPTION

[0028] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present utility model, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0032] Reference Figure 2 and Figure 3 As shown, a gas reaction control transfer device includes: a PN communication module 110, an analog input module 120, a first analog output module 130, a second analog output module 140 and an MCU. Figure 3 As shown, the PN communication module 110 is used to connect to the communication end of the PLC 200, the analog input module 120 is used to connect to the analog output end of the gas reaction controller 400; the first analog output module 130 is used to connect to the analog signal input end of the gas reaction controller 400; the second analog output module 140 is used to connect to the control end of the process gas flow meter 500; and the MCU is respectively connected to the PN communication module 110, the analog input module 120, the first analog output module 130 and the second analog output module 140.

[0033] In this embodiment, PLC200 is connected via a PN communication module 110, and the analog signal input terminal of the gas reaction controller 400 is connected via a first analog output module 130. The MCU converts the target voltage feedback signal into an analog quantity and feeds it back to the gas reaction controller 400, and the MCU receives the control analog quantity signal output by the gas reaction controller 400 via the analog input module 120. Then, the MCU inputs the control analog quantity signal to the process gas flow meter 500 via the second analog output module 140, thereby ensuring the closed-loop control function of the gas reaction controller 400. Since PLC200 communicates with MCU via the PN communication module 110, the gas reaction controller 400 is equivalent to communicating with PLC200 via the MCU. PLC200 can obtain the working status of the gas reaction controller 400 via the MCU. When a fault occurs in the gas reaction controller 400, it can respond and process in a timely manner, thereby improving the stability and reliability of the vacuum coating operation.

[0034] The above-mentioned gas reaction controller 400 is a gas reaction controller speedflo, and can also be applied to other specific gas reaction controllers whose communication protocols are private. Since the communication protocol of the gas reaction controller speedflo is private, the state of the gas reaction controller speedflo cannot be directly read through the PLC. Since the control output and feedback input of the gas reaction controller speedflo are both analog quantities, the MCU in this application first communicates with the PLC200 through the PN communication module 110, obtains the voltage value fed back by the target power supply 300 from the PLC200, and then converts the voltage value fed back by the target power supply 300 into an analog quantity and inputs it to the gas reaction controller speedflo through the first analog quantity output module 130. The gas reaction controller speedflo outputs a control analog quantity at the control output end according to the voltage value of the target power supply. The control analog quantity is the control signal of the process gas flowmeter 500. After the MCU receives the control analog quantity through the analog quantity input module 120, it forwards it to the process gas flowmeter 500 through the analog quantity input module 120 to control the flow rate of the process gas.

[0035] Since PLC200 always communicates with the transfer device through the PN communication module, the gas reaction controller speedflo is equivalent to communicating with PLC200 through MCU. MCU can synchronously feedback the control analog quantity output by the gas reaction controller speedflo to PLC200. PLC200 can obtain the working status of the gas reaction controller speedflo according to the target voltage and the control analog quantity. When there is a problem with the gas reaction controller speedflo, it can respond and handle it in time.

[0036] At the same time, since the MCU directly forwards the control analog quantity to the process gas flow meter 500, the gas reaction controller speedflo can retain its closed-loop control function as the process gas, and its high-precision control function is not affected, thereby achieving an overall performance improvement of the vacuum coating equipment.

[0037] Among them, the gas reaction control transfer device in the present application also includes a digital output module 150, which is used to connect the start and stop end of the gas reaction controller 400. The digital output module 150 is connected to the MCU. The MCU can also receive the start and stop command sent by the PLC200 through the PN communication module 110, and then send the start and stop command to the start and stop end of the gas reaction controller 400 through the digital output module 150, thereby controlling the opening and closing of the gas reaction controller. The PLC200 does not need to be directly wired to the gas reaction controller 400, which improves the overall simplicity of the vacuum coating equipment.

[0038] The present application also includes a power module, which is used for power supply. The transfer device adopts an independent built-in power supply, which can make the transfer device itself act as a signal amplifier, shorten the original analog feedback and output lines, avoid the influence of line voltage reduction, and further improve stability.

[0039] Of course, in addition to the built-in power module, external power supply or direct power supply from PLC can also be used.

[0040] The embodiment of the utility model further includes a display screen 160, which is connected to the MCU and can intuitively obtain the working status of each module.

[0041] Since the interface used by the gas reaction controller speedflo is special, the related technology needs to configure the target power supply 300 and the process gas flow meter 500 with the corresponding interface according to the interface of the gas reaction controller speedflo, and the model selection range is narrow, and the applicability and economy are low. In the embodiment of the utility model, the analog input module 120, the first analog output module 130 and the second analog output module 140 all include multiple different types of analog interfaces. Therefore, even if the interfaces between the target power supply 300, the gas reaction controller 400 and the process gas flow meter 500 do not match, they can be connected and communicated through the transfer device, which greatly expands the selection of the target power supply 300 and the process gas flow meter 500, and there is no need to use the target power supply 300 and the process gas flow meter 500 with specific interfaces, which improves the overall applicability and economy.

[0042] It should be noted that the first analog output module 130 and the second analog output module 140 can be respectively configured as two different areas on an overall analog output module, or can be respectively configured as two independent analog output modules.

[0043] refer to Figure 3 As shown, the embodiment of the utility model also relates to a gas reaction control system, including: PLC200, target power supply 300, transfer device 100 and gas reaction controller 400. Specifically, the target power supply 300 is connected to PLC200 for feedback of the target voltage value; the transfer device 100 is the gas reaction control transfer device of the above embodiment, and PLC200 is connected to the PN communication module 110 of the transfer device 100; the first analog output module 130 of the transfer device is connected to the analog signal input end of the gas reaction controller 400, and the analog input module 120 of the transfer device is connected to the analog output end of the gas reaction controller 400; the second analog output module 140 of the transfer device is connected to the control end of the process gas flow meter 500.

[0044] Specifically, in this embodiment, each module in the transfer device 100 is installed in the form of a sub-control box.

[0045] The embodiment of the utility model also relates to a vacuum coating device, including the above-mentioned gas reaction control system.

[0046] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A gas reaction control transfer device, characterized in that: include: A PN communication module (110), the PN communication module (110) being used to connect to a communication terminal of a PLC (200); An analog quantity input module (120), wherein the analog quantity input module (120) is used to connect to an analog quantity output terminal of a gas reaction controller (400); A first analog output module (130), the first analog output module (130) being used to connect to an analog signal input terminal of a gas reaction controller (400); A second analog output module (140), the second analog output module (140) being used to connect to a control end of a process gas flow meter (500); MCU, wherein the MCU is respectively connected to the PN communication module (110), the analog quantity input module (120), the first analog quantity output module (130) and the second analog quantity output module (140).

2. The gas reaction control transfer device according to claim 1, characterized in that: It also comprises a digital quantity output module (150), wherein the digital quantity output module (150) is used to connect to the start and stop terminal of the gas reaction controller (400), and the digital quantity output module (150) is connected to the MCU.

3. The gas reaction control transfer device according to claim 1, characterized in that: It also includes a power supply module, which is used for supplying power.

4. The gas reaction control transfer device according to claim 1, characterized in that: It also includes a display screen, which is connected to the MCU.

5. The gas reaction control transfer device according to claim 1, characterized in that: The analog quantity input module (120) comprises a plurality of analog quantity interfaces of different types.

6. The gas reaction control transfer device according to claim 1, characterized in that: The first analog output module (130) includes a plurality of analog interfaces of different types.

7. The gas reaction control transfer device according to claim 1, characterized in that: The second analog output module (140) includes a plurality of analog interfaces of different types.

8. A gas reaction control system, characterized in that: include: PLC(200); A target power supply (300), the target power supply (300) being connected to the PLC (200) for feeding back a target voltage value; A transfer device (100), wherein the transfer device (100) is the gas reaction control transfer device according to any one of claims 1 to 7, and the PLC (200) is connected to a PN communication module (110) of the transfer device (100); A gas reaction controller (400), wherein the first analog output module (130) of the transfer device is connected to an analog signal input end of the gas reaction controller (400), and the analog input module (120) of the transfer device is connected to an analog output end of the gas reaction controller (400); A process gas flow meter (500), wherein the second analog output module (140) of the transfer device is connected to the control end of the process gas flow meter (500).

9. A vacuum coating device, characterized in that: Includes the gas reaction control system as described in claim 8.

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