Flow control device for liquid mixing tank

Abstract

The utility model provides a liquid mixing tank flow control device which comprises a module control module which comprises an output gas pressure control unit and a liquid flow control unit which are respectively used for controlling gas flow and liquid flow of a liquid mixing tank; the input end of the cooling gas output module is used for inputting cooling gas, and the output end of the cooling gas output module faces the gas pressure control unit; and the cooling gas control module is arranged at the output end of the cooling gas output module, and circulation of cooling gas is controlled by the module control module. According to the utility model, the situation that the working stability of the output gas pressure control unit is reduced due to overhigh working temperature can be prevented, and the problem that the concentration of a mixed solution is further influenced due to unstable flow and flow deviation during liquid supplementation is avoided, so that the product quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a flow control device for a mixing tank. Background Art

[0002] In semiconductor production equipment, cleaning equipment is updated iteratively. Non-single chemicals need to be mixed and heated in the mixing tank first, and the temperature of the chemicals ranges from room temperature to more than 100 degrees.

[0003] When high-temperature chemicals are mixed, the temperature of the mixing tank is high and the heat is radiated to the surrounding electronic control equipment, which will cause unstable flow and flow deviation during refilling, further affecting the concentration of each mixed solution in the mixing tank and ultimately affecting product quality.

[0004] In order to solve the above problems, it is necessary to propose a new type of mixing tank flow control device. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of the utility model is to provide a mixing tank flow control device, which is used to solve the problem in the prior art that when high-temperature chemicals are mixed, the temperature of the mixing tank is high, and heat is radiated to the surrounding electronic control equipment, which will cause unstable flow and flow deviation during liquid replenishment, further affecting the concentration of each mixed solution in the mixing tank, and ultimately affecting the product quality.

[0006] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a flow control device for a mixing tank, comprising:

[0007] A module control module, including an output gas pressure control unit and a liquid flow control unit, which are used to control the gas flow and liquid flow of the mixing tank respectively;

[0008] A cooling gas output module, whose input end is used to input cooling gas and whose output end faces the gas pressure control unit;

[0009] A cooling gas control module is arranged at the output end of the cooling gas output module, and the circulation of the cooling gas is controlled by the module control module.

[0010] Preferably, the liquid flow control unit includes a liquid flow monitoring unit and a liquid flow regulating unit.

[0011] Preferably, the liquid flow monitoring unit comprises a flow meter and a flow converter, the flow meter is arranged on the liquid flow path, and the flow converter is electrically connected to the module control module and the flow meter respectively.

[0012] Preferably, the liquid flow regulating unit comprises a pneumatic valve arranged on the liquid flow path and a solenoid valve arranged on the pneumatic valve.

[0013] Preferably, the liquid flow control unit further comprises a temperature detection device arranged on the liquid flow path.

[0014] Preferably, the temperature detection device is a thermometer.

[0015] Preferably, the cooling gas is nitrogen.

[0016] Preferably, the input end of the cooling gas output module is a connecting pipe connected to a nitrogen pipeline in the machine.

[0017] Preferably, the cooling gas control module is a gas pressure control valve.

[0018] Preferably, the gas flow rate of the liquid mixing tank is controlled by a flow pneumatic regulating valve.

[0019] As described above, the flow control device of the mixing tank of the utility model has the following beneficial effects:

[0020] The utility model can prevent the working stability of the output gas pressure control unit from being reduced due to excessively high working temperature, avoids flow instability, and the flow deviation during liquid replenishment, which further affects the concentration of the mixed solution, thereby improving product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Shown is a schematic structural diagram of a flow control device for a mixing tank of the present utility model. DETAILED DESCRIPTION

[0022] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0023] See also Figure 1 The utility model provides a flow control device for a mixing tank, comprising:

[0024] The module control module 101 includes an output gas pressure control unit 102 and a liquid flow control unit, which are used to control the gas flow and liquid flow of the mixing tank respectively;

[0025] In some embodiments, the liquid mixing tank further includes a heating module for heating the liquid.

[0026] For example, DNH3OH is a mixture of H2O2:NH3 5:1, and the set temperature is 65℃.

[0027] In some embodiments, the gas flow rate of the liquid mixing tank is controlled by a flow pneumatic regulating valve 104 .

[0028] In some embodiments, the liquid flow control unit includes a liquid flow monitoring unit and a liquid flow regulating unit.

[0029] In some embodiments, the liquid flow monitoring unit includes a flow meter 107 and a flow converter 106 . The flow meter 107 is disposed on the liquid flow path. The flow converter 106 is electrically connected to the module control module 101 and the flow meter 107 , respectively.

[0030] In some embodiments, the liquid flow regulating unit includes a pneumatic valve 109 disposed on the liquid flow path and a solenoid valve 108 disposed on the pneumatic valve 109 .

[0031] In some embodiments, the liquid flow control unit further includes a temperature detection device 105 disposed on the liquid flow path.

[0032] In some embodiments, the temperature detection device 105 is a thermometer.

[0033] A cooling gas output module 110, whose input end is used to input cooling gas and whose output end faces the gas pressure control unit;

[0034] In some embodiments, the cooling gas is nitrogen.

[0035] In some embodiments, the input end of the cooling gas output module 110 is a connecting pipe (eg, a three-way pipe) connected to a nitrogen pipeline in the machine.

[0036] The inventor found that the output gas pressure control unit 102 is close to the mixing tank and the ambient temperature is high. As a result, the flow control is unstable during operation. Multiple alarms were given, and the flow rate was too high or too low within the set time, exceeding the set range. Therefore, a cooling gas output module 110 is provided, and a cooling gas control module 103 is provided at the output end of the cooling gas output module 110, which controls the circulation of the cooling gas by the module control module 101.

[0037] In some embodiments, the cooling gas control module 103 is a gas pressure control valve.

[0038] After replacing the new output gas pressure control unit 102 and testing it many times, the alarm still occurred. A three-way pipe was connected to the nitrogen pipeline inside the machine, and the outlet was installed on the front of the output gas pressure control unit 102. The temperature of the output gas pressure control unit 102 was reduced by N2 purging. The cooling gas pressure was adjusted by the cooling gas control module 103, and the machine no longer alarmed.

[0039] It should be noted that the illustrations provided in this embodiment are only used to schematically illustrate the basic concept of the present invention. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0040] In summary, the utility model can prevent the working stability of the output gas pressure control unit from being reduced due to excessively high working temperature, avoid the problem of unstable flow rate, flow deviation during liquid replenishment, and further affect the concentration of the mixed solution, thereby improving product quality. Therefore, the utility model effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0041] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A flow control device for a mixing tank, It is characterized in that include: A module control module, including an output gas pressure control unit and a liquid flow control unit, which are used to control the gas flow and liquid flow of the mixing tank respectively; A cooling gas output module, whose input end is used to input cooling gas and whose output end faces the gas pressure control unit; A cooling gas control module is arranged at the output end of the cooling gas output module, and the circulation of the cooling gas is controlled by the module control module.

2. The mixing tank flow control device according to claim 1, Features: The liquid flow control unit includes a liquid flow monitoring unit and a liquid flow regulating unit.

3. The mixing tank flow control device according to claim 2, Features: The liquid flow monitoring unit includes a flow meter and a flow converter. The flow meter is arranged on the liquid flow path. The flow converter is electrically connected to the module control module and the flow meter respectively.

4. The mixing tank flow control device according to claim 2, Features: The liquid flow regulating unit comprises a pneumatic valve arranged on the liquid flow path and a solenoid valve arranged on the pneumatic valve.

5. The mixing tank flow control device according to claim 1, Features: The liquid flow control unit also includes a temperature detection device arranged on the liquid flow path.

6. The mixing tank flow control device according to claim 5, Features: The temperature detection device is a thermometer.

7. The mixing tank flow control device according to claim 1, Features: The cooling gas is nitrogen.

8. The mixing tank flow control device according to claim 7, Features: The input end of the cooling gas output module is a connecting pipe connected to the nitrogen pipeline in the machine.

9. The mixing tank flow control device according to claim 1, Features: The cooling gas control module is a gas pressure control valve.

10. The mixing tank flow control device according to claim 1, Features: The gas flow rate of the mixing tank is controlled by a flow pneumatic regulating valve.

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