Paddle rod assembly, boat pushing device and reaction furnace

Abstract

The utility model relates to the technical field of photovoltaic production equipment, in particular to a paddle rod assembly, a boat pushing device and a reaction furnace. The paddle rod assembly comprises the two paddle rods arranged side by side, each paddle rod comprises the top face, the bottom face and the two side walls located between the top face and the bottom face, an avoiding part is formed at the junction of the bottom face of each paddle rod and at least one side wall, the avoiding part enables the area of the cross section of each paddle rod to be reduced, and therefore the size of the paddle rod is reduced. At least part of the paddle rod is provided with an avoiding part in the length direction. The paddle rod assembly has the advantages of being high in bearing capacity, not prone to breakage and beneficial to flowing of gas in a furnace, and the manufacturing cost of the paddle can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic production equipment, in particular to a paddle assembly, a boat pushing device and a reaction furnace. Background Art

[0002] In the process of solar cell production, a cantilever paddle is used to deliver silicon wafers into the reactor. The cantilever silicon carbide paddle is a key component of the raw material cell loading system in photovoltaic equipment. It can ensure that the raw materials enter the constant temperature zone of the thermal field, thereby making the diffusion and oxidation more uniform. The paddle structures currently used include single-paddle and double-paddle structures. The double-paddle uses two paddles to support the quartz boat support. The existing paddle structures are mostly rectangular paddles, which are extremely easy to break during use. If the paddle breaks in the process tube, it will cause greater losses. In addition, due to the small distance between the paddle and the inner wall of the process tube, the flow of gas in the process tube is hindered.

[0003] Therefore, how to improve the load-bearing capacity of the paddle while ensuring uniform gas flow in the furnace at a large load is a technical problem that needs to be urgently solved by those skilled in the art. Utility Model Content

[0004] The utility model aims to provide an oar rod assembly, a boat pushing device and a reaction furnace, which are used to solve the technical problems that the existing cantilever oar has weak bearing capacity and is easy to break during use.

[0005] In a first aspect, the utility model provides a paddle rod assembly, comprising two paddle rods arranged side by side, characterized in that each paddle rod comprises a top surface, a bottom surface and two side walls located between the top surface and the bottom surface; an avoidance portion is formed at the junction of the bottom surface of each paddle rod and at least one side wall, and the avoidance portion reduces the cross-sectional area of ​​the paddle rod; wherein each paddle rod has the avoidance portion at least partially along the length direction.

[0006] In some embodiments, the ratio of the width of the top surface to the height of the side wall is in a range of 0.6 to 1.1, and the cross-sectional shape of the avoidance portion is chamfered or rounded.

[0007] In some embodiments, the paddle rod includes a paddle head disposed at one end thereof, and the paddle head has a connecting portion; the paddle rod assembly also includes a connecting member, one end of the connecting member is connected to one of the two paddle rods, and the other end of the connecting member is connected to the other of the two paddle rods.

[0008] In some embodiments, the connecting portion includes a receiving groove, and the connecting member is disposed in the receiving groove.

[0009] In some embodiments, the receiving groove is an oblique groove or a straight groove formed by a depression in the direction from the top surface to the bottom surface. When the receiving groove is an oblique groove, the angle between the receiving groove and the top surface is an acute angle or an obtuse angle. When the receiving groove is a straight groove, the angle between the receiving groove and the top surface is a right angle.

[0010] In some embodiments, the accommodating groove includes a connected horizontal groove and a vertical groove, the horizontal groove is formed by the end surface of the paddle head being recessed toward the paddle tail of the paddle rod, the vertical groove is arranged along a direction perpendicular to the length of the paddle rod, and the vertical groove is formed by the end of the horizontal groove away from the end surface being recessed toward the bottom surface.

[0011] In some embodiments, the connecting member has a shaft rod, both ends of the shaft rod have a clamping portion, and the receiving groove is used to receive the clamping portion.

[0012] In some embodiments, a limiting flange is provided on at least one side of the clamping portion, and the limiting flange is provided along the axial direction of the shaft.

[0013] In a second aspect, the utility model further provides a boat pushing device, including a paddle seat, on which the paddle shaft assembly as described above is mounted, and the paddle tail of the paddle shaft in the paddle shaft assembly is connected to the paddle seat.

[0014] In a third aspect, the utility model further provides a reaction furnace, comprising a process tube and the aforementioned boat pusher device, wherein the boat pusher device can enter and exit the process tube.

[0015] The beneficial effects of the paddle assembly of the utility model are:

[0016] The paddle of the paddle assembly of the utility model is provided with an avoidance portion, and the setting of the avoidance portion can improve the strength of the paddle, can improve the load-bearing capacity, and prevent the paddle break; at the same time, the setting of the avoidance portion increases the gap between the edge corner of the paddle and the process tube, on the one hand, it can improve the flow performance of the gas in the process tube, on the other hand, it reduces the probability of collision between the paddle and the process tube, and improves the safety during the operation of the push boat.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure is a schematic diagram of the overall structure of a paddle rod assembly provided in one embodiment of the present application;

[0019] Figure 2 The figure is a schematic structural diagram of a boat pushing device provided in one embodiment of the present application;

[0020] Figure 3 The figure shows a schematic diagram of a paddle rod assembly provided by an embodiment of the present application in a process pipe;

[0021] Figure 4 This application is shown Figure 2 a cross-sectional view of the paddle shaft assembly shown;

[0022] Figure 5The figure shows another paddle rod assembly provided by one embodiment of the present application in a process pipe;

[0023] Figure 6 This application is shown Figure 5 a cross-sectional view of the paddle shaft assembly shown;

[0024] Figure 7 The figure shows a connection state diagram of a paddle head of a paddle shaft assembly provided by an embodiment of the present application;

[0025] Figure 8 The figure shows a front view of a paddle head structure of a paddle rod assembly provided by an embodiment of the present application;

[0026] Fig. 9 Shown is a schematic structural diagram of a connecting member provided in an embodiment of the present application;

[0027] Fig.10 The figure shows a connection state diagram of another paddle head of a paddle shaft assembly provided by an embodiment of the present application;

[0028] Fig.11 Shown is a front view of a propeller head structure of another propeller shaft assembly provided in one embodiment of the present application;

[0029] Fig.12 The figure shows a connection state diagram of another paddle head of a paddle shaft assembly provided by an embodiment of the present application;

[0030] Fig.13 Shown is a front view of a propeller head structure of another propeller shaft assembly provided in one embodiment of the present application;

[0031] Fig.14 The figure shows a connection state diagram of another paddle head of a paddle shaft assembly provided by an embodiment of the present application;

[0032] Fig.15 Shown is a front view of a propeller head structure of another propeller shaft assembly provided in one embodiment of the present application;

[0033] Fig.16 Shown is a module schematic diagram of a process furnace provided in one embodiment of the present application. DETAILED DESCRIPTION

[0034] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0035] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0036] In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0037] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] Figure 1 Shown is a schematic diagram of the overall structure of a paddle shaft assembly provided in one embodiment of the present application. Figure 3 Shown is a schematic diagram of the state of a paddle rod assembly in a process pipe provided by an embodiment of the present application. Figure 4 This application is shown Figure 2 A cross-sectional view of a paddle shaft assembly is shown. Figure 5 Shown is a schematic diagram of another paddle assembly provided in an embodiment of the present application in a process pipe. Figure 6 This application is shown Figure 5 A cross-sectional view of a paddle shaft assembly is shown.

[0039] like Figure 1 , Figure 4 and Figure 6As shown, an embodiment of the present application provides a paddle shaft assembly 100, including two paddle shafts 10 arranged side by side, the paddle shaft 10 including a paddle head 20 and a paddle tail 40, the paddle head 20 to the paddle tail 40 being a first direction; the paddle shaft 10 is a rod-shaped structure arranged along the first direction, each paddle shaft 10 including a top surface 11, a bottom surface 13 and two side walls 12 located between the top surface 11 and the bottom surface 13; an avoidance portion 14 is formed at the junction of the bottom surface 13 of each paddle shaft 10 and at least one side wall 12, the avoidance portion 14 reduces the cross-sectional area of ​​the paddle shaft 10; wherein, each paddle shaft 10 has an avoidance portion 14 at least partially along the length direction.

[0040] In some embodiments, the cross-sectional shape of the avoidance portion 14 is rounded or chamfered. By making the cross-sectional shape of the avoidance portion 14 rounded or chamfered, the cross-sectional area of ​​the paddle shaft 10 can be reduced. Figure 4 , Figure 6 As shown, the existing paddle with a rectangular cross-section is improved by providing a chamfer or a rounding at a lower corner, thereby changing the structure of the paddle shaft 10, forming a new force node at the junction of the chamfer or the rounding and the side wall 12 and the bottom surface 13, changing the center of mass of the paddle shaft 10, further improving the moment of inertia of the paddle shaft 10, and improving the load-bearing capacity of the paddle shaft 10.

[0041] At the same time, since the lower corner of the existing rectangular paddle is a right angle, the distance from the inner wall of the process tube is small. However, when the silicon wafer is processed, the gas in the process tube 300 needs to flow evenly and fully. The traditional rectangular paddle hinders the flow of air, causing the reaction between the gas and the surface of the silicon wafer to be uneven, affecting the processing quality of the battery cell. Figure 3 and Figure 5 As shown, by setting chamfers or roundings, the gap between the lower part of the paddle rod 10 and the inner wall of the process tube 300 is increased, which is more conducive to the uniformity of gas flow in the process tube 300, improves the uniformity of silicon wafer surface reaction, and improves the processing quality of silicon wafers.

[0042] It can be understood that in some other embodiments, the cross-sectional shape of the avoidance portion 14 can also be other arc shapes or irregular polygons, and the embodiments of the present application are not limited to this.

[0043] In some embodiments, avoidance portions 14 may also be provided at both lower corners, thereby better improving the force-bearing performance of the paddle rod 10 , while further reducing material usage and lowering manufacturing costs.

[0044] In some embodiments, in order to further optimize the load-bearing capacity of the paddle shaft 10, the ratio of the width of the top surface 11 to the height of the side wall 12 is in the range of 0.6 to 1.1. In addition, when the avoidance portion 14 is chamfered, the size of the chamfer is not greater than 2 / 3 of the width of the bottom surface 13 and the side wall 12, and the radius of the chamfer is 1 / 2 of the width of the bottom surface 13, so that the setting of the avoidance portion 14 can ensure that the improvement of the load-bearing capacity of the paddle shaft 10 is within the optimal range.

[0045] Figure 7 The figure shows a connection state diagram of a paddle head of a paddle shaft assembly provided in one embodiment of the present application. Figure 8 Shown is a front view of a paddle head structure of a paddle shaft assembly provided in one embodiment of the present application. Fig. 9 Shown is a schematic structural diagram of a connecting member provided in one embodiment of the present application.

[0046] like Figures 7 to 9 As shown, in some embodiments, one end of the paddle rod 10 is a paddle head 20. Due to the long length of the paddle rod 10, the paddle head 20 part swings more, and the silicon wafer is usually placed on the paddle rod 10 through a silicon wafer carrier. If the paddle head 20 part shakes too much, the silicon wafer carrier has the risk of falling. In order to ensure that the silicon wafer carrier placed on the paddle rod 10 will not fall, the paddle rod assembly 100 also includes a connector 50, the first end of the connector 50 is connected to the paddle head 20 of one of the two paddle rods 10, and the second end of the connector 50 is connected to the paddle head 20 of the other of the two paddle rods 10. The paddle head 20 of each paddle rod 10 is provided with a connecting portion 30, and the connecting member 50 is connected to the connecting member 50 through the connecting portion 30. It can be understood that the two paddle rods 10 are connected by the connecting member 50, thereby limiting the shaking of the paddle rod 10 near the paddle head 20, and realizing stable support for the silicon wafer carrier.

[0047] In some embodiments, the connecting portion 30 includes a receiving groove 31, and the connecting member 50 is disposed in the receiving groove 31. In this way, the connecting member 50 can be prevented from being separated from the connecting portion 30 while limiting the position of the paddle head 20. Of course, in other cases, the connecting portion 30 can also include a protruding clamping block disposed on the paddle head 20, and connected to the connecting member 50 through the clamping block.

[0048] like Figure 7 and Figure 8 As shown, in some embodiments, the receiving groove 31 is a straight groove formed by the top surface 11 being recessed toward the bottom surface 13. When the receiving groove 31 is a straight groove, the angle between the receiving groove 31 and the top surface 11 is a right angle, that is, the angle between the central axis of the receiving groove 31 and the first direction is a right angle.

[0049] Fig.10 The figure shows the connection state of the paddle head of another paddle shaft assembly provided in one embodiment of the present application. Fig.11Shown is a front view of a propeller head structure of another propeller shaft assembly provided in an embodiment of the present application. Fig.12 The figure shows the connection state of the paddle head of another paddle shaft assembly provided in one embodiment of the present application. Fig.13 Shown is a front view of a propeller head structure of another propeller shaft assembly provided in an embodiment of the present application.

[0050] like Figures 10 to 13 As shown, in other embodiments, the receiving groove 31 is an oblique groove formed by the top surface 11 being recessed toward the bottom surface 13. When the receiving groove 31 is an oblique groove, the angle between the receiving groove 31 and the top surface 11 is an acute angle or an obtuse angle, that is, the angle between the central axis of the receiving groove 31 and the first direction is an acute angle or an obtuse angle. It can be understood that the oblique groove is provided on the paddle head 20 to facilitate the clamping of the connecting member 50 and prevent the connecting member 50 from falling off.

[0051] Fig.14 The figure shows the connection state of the paddle head of another paddle shaft assembly provided in one embodiment of the present application. Fig.15 Shown is a front view of a propeller head structure of another propeller shaft assembly provided in an embodiment of the present application.

[0052] In some embodiments, in order to prevent the connecting member 50 from falling off from the oblique groove or the straight groove when the propeller 10 vibrates greatly, the position of the receiving groove 31 in the propeller head 20 is changed. Fig.14 and Fig.15 As shown, the receiving groove 31 includes a connected horizontal groove and a vertical groove. The horizontal groove is formed by the end surface 15 of the paddle head 20 being recessed toward the paddle tail 40 of the paddle rod 10. The vertical groove is arranged along a length direction perpendicular to the paddle rod 10, and the vertical groove is formed by the end of the horizontal groove away from the end surface 15 being recessed toward the bottom surface 13. During operation, when the end of the connecting member 50 enters the horizontal groove, the connecting member 50 can be limited in the vertical direction. When the end of the connecting member 50 extends to the end of the horizontal groove away from the paddle rod 10, it can further fall into the vertical groove to limit the connecting member 50 in the horizontal direction. It can be understood that by providing horizontal grooves and vertical grooves with different extension directions, the connecting member 50 can be more firmly connected to the receiving groove 31.

[0053] Please refer again Fig. 9 In some embodiments, the connector 50 has a shaft 51, and both ends of the shaft 51 have a clamping portion 511, and the clamping portion 511 can be received in the receiving groove 31. In other words, the receiving groove 31 is used to receive the clamping portion 511. It can be understood that the connector 50 with the clamping portion 511 can be suitable for Fig.10 , Fig.12 , Fig.14 The receiving groove 31 is shown.

[0054] In some embodiments, at least one side of the clamping portion 511 is provided with a limiting flange 52, and the limiting flange 52 is arranged along the axial direction of the shaft 51, that is, the limiting flange 52 is arranged around the surface of the shaft 51. When the clamping portion 511 is received in the receiving groove 31, the limiting flange 52 can be supported on the side wall of the paddle rod 10.

[0055] It can be understood that the number of the limiting flange 52 of each clamping portion 511 can be one, which is arranged at the end of the shaft rod 51 , or arranged in the middle of the shaft rod 51 and located on one side of the clamping portion 511 .

[0056] The number of the limiting flanges 52 of each clamping portion 511 may also be two, one of which is arranged at the end of the shaft 51, and the other is arranged in the middle of the shaft 51 and located on one side of the clamping portion 511. Of course, the two limiting flanges 52 may also be arranged in the middle of the shaft 51 and located on both sides of the clamping portion 511. For example, Fig. 9 As shown, the clamping parts at both ends of the shaft rod 51 each have two spaced-apart limiting flanges 52 , and the two limiting flanges 52 are clamped on the two side walls 12 of the paddle rod 10 , further limiting the shaking of the paddle head 20 .

[0057] Figure 2 Shown is a schematic structural diagram of a boat pushing device provided in one embodiment of the present application.

[0058] like Figure 2 As shown, the utility model further provides a boat pushing device 1, which includes a paddle shaft assembly 100 and a paddle seat 200, the paddle shaft assembly 100 is installed on the paddle seat 200, and the paddle tail 40 of the paddle shaft 10 in the paddle shaft assembly 100 is connected to the paddle seat 200.

[0059] Since the boat pushing device 1 includes the paddle rod assembly 100 , the boat pushing device 1 has the technical effects related to the paddle rod assembly 100 , which will not be described in detail herein.

[0060] Fig.16 Shown is a module schematic diagram of a process furnace provided in one embodiment of the present application.

[0061] like Fig.16 As shown, the utility model further provides a reaction furnace 2 , which includes a process tube 300 and the boat pusher device 1 as described above, and the boat pusher device 1 can enter and exit the process tube 300 .

[0062] Since the reaction furnace 2 includes the boat pusher device 1 and further includes the propeller assembly 100, the reaction furnace 2 has the technical effects related to the propeller assembly 100, which will not be repeated here.

[0063] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0064] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A paddle assembly, comprising two paddles arranged side by side, It is characterized in that Each of the paddle rods comprises a top surface, a bottom surface and two side walls located between the top surface and the bottom surface; A relief portion is formed at the junction of the bottom surface of each of the paddle rods and at least one of the side walls, and the relief portion reduces the cross-sectional area of ​​the paddle rod; Wherein, at least a portion of each of the paddle rods along the length direction has the avoidance portion.

2. The paddle shaft assembly according to claim 1, It is characterized in that The ratio of the width of the top surface to the height of the side wall is in a range of 0.6 to 1.1, and the cross-sectional shape of the avoidance portion is chamfered or rounded.

3. The paddle shaft assembly according to claim 1, It is characterized in that The paddle rod comprises a paddle head arranged at one end thereof, and the paddle head has a connecting portion; The paddle rod assembly further comprises a connecting member, one end of which is connected to one of the two paddle rods, and the other end of which is connected to the other of the two paddle rods.

4. The paddle shaft assembly according to claim 3, It is characterized in that The connecting portion comprises a receiving groove, and the connecting member is arranged in the receiving groove.

5. The paddle shaft assembly according to claim 4, It is characterized in that The receiving groove is an oblique groove or a straight groove formed by the top surface being recessed toward the bottom surface. When the receiving groove is an oblique groove, the angle between the receiving groove and the top surface is an acute angle or an obtuse angle. When the receiving groove is a straight groove, the angle between the receiving groove and the top surface is a right angle.

6. The paddle shaft assembly according to claim 4, It is characterized in that The accommodating groove includes a connected horizontal groove and a vertical groove, wherein the horizontal groove is formed by the end surface of the paddle head being recessed toward the paddle tail of the paddle rod, and the vertical groove is arranged along a length direction perpendicular to the paddle rod, and the vertical groove is formed by the end of the horizontal groove away from the end surface being recessed toward the bottom surface.

7. A propeller shaft assembly according to any one of claims 4 to 6, It is characterized in that The connecting member has a shaft rod, both ends of the shaft rod have a clamping portion, and the accommodating groove is used to accommodate the clamping portion.

8. The paddle shaft assembly according to claim 7, It is characterized in that A limiting flange is disposed on at least one side of the clamping portion, and the limiting flange is disposed along the axial direction of the shaft.

9. A boat pushing device, It is characterized in that It comprises a paddle seat, on which a paddle shaft assembly as claimed in any one of claims 1 to 8 is mounted, and the paddle tail of the paddle shaft in the paddle shaft assembly is connected to the paddle seat.

10. A reactor, It is characterized in that include: A process pipe and a boat pusher device as claimed in claim 9, wherein the boat pusher device can enter and exit the process pipe.

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