Intelligent positioning and clamping device for graphite boat

Abstract

The utility model relates to the technical field of solar silicon wafer manufacturing, in particular to an intelligent graphite boat positioning and clamping device which comprises a base, side plates are installed on the two sides of the top end of the outer wall of the base, a graphite boat piece and a silicon wafer are arranged on the opposite sides of the side plates, and a clamping assembly for positioning and clamping the graphite boat piece is arranged between the side plates. The clamping assembly comprises a positioning bottom plate, a positioning part and an adsorption part, and the positioning bottom plate is installed at the top end of the outer wall of the base and located below the graphite boat piece. And then the hydraulic cylinder drives the moving plate and the graphite boat sheets to move, so that the graphite boat sheets to be placed and the well placed graphite boat sheets are aligned and placed in the horizontal direction, friction generated when the graphite boat sheets are placed in the vertical direction is reduced, and the influence on the subsequent sintering effect of the graphite boat sheets and silicon wafers is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of solar silicon wafer manufacturing, in particular to an intelligent positioning and clamping device for a graphite boat. Background Art

[0002] Graphite boat is a kind of graphite mold. The graphite mold itself is a carrier. It can place the raw materials and parts that we need to position or shape together in the graphite mold for high-temperature sintering. The graphite boat is made of high-purity graphite and is widely used in rare earth smelting, electric light sources, chemicals, medical equipment, metallurgical machinery, smelting equipment, petroleum, aerospace, electronic equipment, papermaking, material welding, etc.

[0003] During the processing of solar silicon wafers, personnel usually need to use two graphite boats to clamp the two sides of the silicon wafer to prevent the silicon wafer from deformation during subsequent sintering. Before sintering, personnel need to use a mold to neatly arrange the graphite boat and silicon wafer, and then fix the graphite boat with nuts and through rods. Then the graphite boat and silicon wafer can be transported together to the sintering equipment for sintering.

[0004] However, during the placement of the graphite boat, personnel usually insert the graphite boat directly into the mold from top to bottom. Although this makes it convenient for personnel to position and place the graphite boat neatly, it is easy for the graphite boat to rub against the silicon wafer, causing wear between the two, which is not conducive to the subsequent sintering process. Therefore, there are still certain shortcomings.

[0005] In summary, it is necessary to invent an intelligent positioning and clamping device for a graphite boat. Utility Model Content

[0006] To this end, the utility model provides a graphite boat intelligent positioning and clamping device to solve the problem that personnel directly insert the graphite boat sheet into the mold from top to bottom. Although this is convenient for personnel to position and place the graphite boat sheet neatly during placement, it is easy for the graphite boat sheet to rub against the silicon wafer, resulting in wear between the two.

[0007] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a graphite boat intelligent positioning and clamping device, comprising a base, side plates are installed on both sides of the top of the outer wall of the base, a graphite boat sheet and a silicon sheet are arranged on the opposite side of the side plate, and a clamping assembly for positioning and clamping the graphite boat sheet is arranged between the side plates;

[0008] The clamping assembly includes a positioning base plate, a positioning component and an adsorption component. The positioning base plate is installed on the top of the outer wall of the base and is located below the graphite boat. The positioning component is installed above the top of the outer wall of the base and is located at the front and rear sides of the graphite boat. The adsorption component is arranged on a side plate.

[0009] Preferably, the top of the outer wall of the positioning base plate is provided with a slot, and a plurality of the slots are evenly arranged in a strip array, and the bottom end of the graphite boat is slidably connected to the inner wall of the slot.

[0010] Preferably, the positioning component includes a limiting column, the bottom end of which is fixed to the top of the outer wall of the base, the limiting column is arranged at the front and rear ends of the opposite side of the side plate, and a mounting plate is fixed to one end of two adjacent limiting columns away from the side plate.

[0011] Preferably, two adjacent mounting plates are rotatably connected to one another on one side with a screw rod, and a driving motor for driving the screw rod is installed at a position on the outer wall of any mounting plate corresponding to the screw rod. A guide rod is fixed to the outer wall on the opposite side of the mounting plate and on one side of the screw rod, and a threaded moving block is threadedly connected to the outer wall of the screw rod, and the outer wall of the threaded moving block is slidably connected to the guide rod via a through hole.

[0012] Preferably, an outer wall of the threaded moving block and one end close to the graphite boat are hinged with a hinged positioning plate, and a gasket for protecting the graphite boat is arranged on one side of the outer wall of the hinged positioning plate.

[0013] Preferably, the adsorption component comprises a hydraulic cylinder, the hydraulic cylinder is installed on the side of the side plate away from the side where the graphite boat sheet is placed, and the number of the hydraulic cylinders is four.

[0014] Preferably, the output end of the hydraulic cylinder passes through the side wall of the side plate and is fixed with a movable plate, and the movable plate is arranged at the same horizontal position as the graphite boat sheet.

[0015] Preferably, vacuum suction cups for adsorbing the side wall of the graphite boat are evenly arranged at one end of the movable plate away from the hydraulic cylinder, and a vacuum pump is installed at one end of the movable plate away from the vacuum suction cups, and the vacuum pump is connected to the vacuum suction cups through a hose.

[0016] The beneficial effects of the utility model are:

[0017] In the utility model, the graphite boat to be placed can be adsorbed on the movable plate through the cooperation of the vacuum pump and the vacuum suction cup, and then the hydraulic cylinder drives the movable plate and the graphite boat to move, so that the graphite boat to be placed is aligned with the placed graphite boat in the horizontal direction, reducing the friction generated when the graphite boat is placed in the vertical direction, avoiding affecting the subsequent sintering effect of the graphite boat and the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model in the front view direction;

[0019] Figure 2For this utility model Figure 1 The enlarged structural diagram at A in the middle;

[0020] Figure 3 It is a schematic diagram of the connection structure of the threaded moving plate and the hinged positioning plate in the utility model in a top view;

[0021] Figure 4 It is a schematic diagram of the three-dimensional structure of the hinged positioning plate in the utility model.

[0022] In the figure: 100, base; 110, side plate; 120, limit column; 130, positioning bottom plate; 131, slot; 200, mounting plate; 210, screw; 220, guide rod; 230, drive motor; 240, threaded moving block; 241, hinged positioning plate; 300, hydraulic cylinder; 310, moving plate; 320, vacuum pump; 321, vacuum suction cup. DETAILED DESCRIPTION

[0023] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0024] See attached Figure 1-4 The utility model provides a graphite boat intelligent positioning and clamping device, including a base 100, and side plates 110 are installed on both sides of the top of the outer wall of the base 100. The side plates 110 are mainly used to position the placed graphite boat sheets so that they can be neatly placed on the base 100. The graphite boat sheets and silicon sheets are arranged on the opposite side of the side plates 110. A clamping assembly for positioning and clamping the graphite boat sheets is arranged between the side plates 110. The clamping assembly includes a positioning bottom plate 130, a positioning component and an adsorption component. The positioning bottom plate 130 is installed on the bottom The top of the outer wall of the seat 100 is located below the graphite boat. The top of the outer wall of the positioning base plate 130 is provided with a slot 131. The multiple slots 131 are evenly arranged in a strip array. The bottom end of the graphite boat is slidably connected to the inner wall of the slot 131. When the graphite boat is clamped and neatly placed, the bottom end of the graphite boat is just aligned with the slot 131, and the bottom end of the graphite boat falls into the slot 131. The positioning base plate 130 and the slot 131 are used to support the bottom of the graphite boat and also play a positioning role.

[0025] The positioning component is installed above the top of the outer wall of the base 100 and is located at the front and rear sides of the graphite boat sheet. The positioning component includes a limit column 120. The bottom end of the limit column 120 is fixed to the top of the outer wall of the base 100. The limit column 120 is arranged at the front and rear ends of the opposite side of the side plate 110. The ends of two adjacent limit columns 120 away from the side plate 110 are fixed with a mounting plate 200. The limit columns 120 are mainly used to support and install the mounting plates 200, and the opposite sides of the two adjacent mounting plates 200 are rotatably connected with screw rods 210. A driving motor 230 for driving the screw 210 is installed at a position corresponding to the screw rod 210 on the outer wall of any mounting plate 200. A guide rod 220 is fixed to the outer wall of the opposite side of the mounting plate 200 and located on one side of the screw 210. The outer wall of the screw 210 is threadedly connected with a threaded moving block 240. The outer wall of the threaded moving block 240 is slidably connected to the guide rod 220 through a through hole. The guide rod 220 is provided to guide the movement of the threaded moving block 240. The outer wall of the threaded moving block 240 and one end close to the graphite boat are hinged with a hinged positioning plate 241. A gasket for protecting the graphite boat is provided on one side of the outer wall of the hinged positioning plate 241. Specifically, the driving motor 230 is provided to drive the screw rod 210 to rotate forward and reverse after being energized, and the screw rod 210 is able to drive the threaded moving block 240 to move left and right when rotating, so that the threaded moving block 240 can drive the hinged positioning plate 241 to move, and the hinged positioning plate 241 can tighten the placed graphite boat through the gasket to prevent it from tipping over. The material of the gasket is rubber, which is mainly used to protect the graphite boat.

[0026] The adsorption component is arranged on one side of the side plate 110, and the adsorption component includes a hydraulic cylinder 300. The hydraulic cylinder 300 is installed on the side of the side plate 110 and away from the graphite boat. The number of hydraulic cylinders 300 is four. The output end of the hydraulic cylinder 300 passes through the side wall of the side plate 110 and is fixed with a moving plate 310. The moving plate 310 is arranged at the same horizontal position as the graphite boat. The end of the moving plate 310 away from the hydraulic cylinder 300 is evenly arranged with vacuum suction cups 321 for adsorbing the side wall of the graphite boat. The end of the moving plate 310 away from the vacuum suction cups 321 is installed with a vacuum pump 320. The air pump 320 is connected to the vacuum suction cup 321 through a hose. Specifically, the hydraulic cylinder 300 is arranged to drive the movable plate 310 to move left and right, so that the movable plate 310 can make the vacuum suction cup 321 contact the side wall of the graphite boat to be placed, and then the vacuum pump 320 is powered on to start, so that the vacuum pump 320 discharges the air in the vacuum suction cup 321, and at this time the vacuum suction cup 321 can adsorb the graphite boat, and the hydraulic cylinder 300 can adjust the position of the graphite boat through the movable plate 310, so that the graphite boat can clamp and protect the silicon wafer.

[0027] The use process of the utility model is as follows: first, the personnel need to move the device to a suitable position, and then connect one end of the silicon wafer to the graphite boat in advance, and the specific connection can be made by bonding or clamping. Then, a spare graphite boat is placed on the side wall of the side plate 110 away from the hydraulic cylinder 300, and then the graphite boat connected with the silicon wafer is transferred to the base 100 by using a handling device such as a mechanical claw, and the graphite boat is placed vertically, and one end of the silicon wafer faces the already placed graphite boat, and then the hydraulic cylinder 300 is started, so that The hydraulic cylinder 300 can drive the moving plate 310 and the vacuum suction cup 321 to move toward the graphite boat through the output end. When the vacuum suction cup 321 abuts against the end of the graphite boat away from the silicon wafer, the personnel can start the vacuum pump 320, so that the vacuum pump 320 extracts the air in the vacuum suction cup 321, and the vacuum suction cup 321 can fix the graphite boat. Then the mechanical claw releases the grip of the graphite boat and resets to grip the next graphite boat. The hydraulic cylinder 300 can move the moving plate 310 toward the graphite boat placed in advance. The silicon wafer is moved until it is aligned with the graphite boat, and then the drive motor 230 is started, so that the drive motor 230 can drive the screw 210 to rotate, and the screw 210 drives the threaded moving block 240 to move in the direction of the placed graphite boat. At this time, the personnel need to flip the hinged positioning plate 241 downward to align the gasket with the graphite boat, and then the hinged positioning plate 241 can be abutted against the graphite boat through the gasket, and the vacuum pump 320 is powered off to separate the vacuum suction cup 321 from the graphite boat, and then the hydraulic cylinder 300 is turned on. The contraction causes the movable plate 310 to reset, and the hinged positioning plate 241 will position the graphite boat. At this time, the bottom end of the graphite boat will be plugged into the slot 131. When placing the next graphite boat, the operator can flip the hinged positioning plate 241 upward to prevent the hinged positioning plate 241 from affecting the placement of the graphite boat. Through this step, the graphite boats can be placed in sequence. After completion, the graphite boats can be fixed by through rods and nuts, and then the graphite boats and silicon wafers are transferred to the sintering equipment together by the handling equipment for subsequent processing.

[0028] The above is only a preferred embodiment of the utility model. Any person skilled in the art may modify the utility model by using the above technical solution or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement based on the technical solution of the utility model shall fall within the scope of protection claimed by the utility model.

Claims

1. A graphite boat intelligent positioning and clamping device, comprising a base (100), side plates (110) are installed on both sides of the top of the outer wall of the base (100), and a graphite boat sheet and a silicon sheet are arranged on the opposite side of the side plate (110), characterized in that: A clamping assembly for positioning and clamping the graphite boat is arranged between the side plates (110); The clamping assembly comprises a positioning base plate (130), a positioning component and an adsorption component. The positioning base plate (130) is installed at the top end of the outer wall of the base (100) and is located below the graphite boat sheet. The positioning component is installed above the top end of the outer wall of the base (100) and is located at the front and rear sides of the graphite boat sheet. The adsorption component is arranged on a side plate (110).

2. The intelligent positioning and clamping device for a graphite boat according to claim 1, characterized in that: The top of the outer wall of the positioning base plate (130) is provided with a slot (131), and a plurality of the slots (131) are evenly arranged in a strip array, and the bottom end of the graphite boat is slidably connected to the inner wall of the slot (131).

3. The graphite boat intelligent positioning and clamping device according to claim 1 is characterized in that: The positioning component comprises a limiting column (120), the bottom end of the limiting column (120) is fixed to the top end of the outer wall of the base (100), the limiting column (120) is arranged at the front and rear ends of the opposite side of the side plate (110), and the ends of two adjacent limiting columns (120) away from the side plate (110) are fixed with a mounting plate (200).

4. The graphite boat intelligent positioning and clamping device according to claim 3 is characterized in that: The opposite sides of two adjacent mounting plates (200) are rotatably connected with a screw rod (210); a driving motor (230) for driving the screw rod (210) is installed at a position corresponding to the screw rod (210) on the outer wall of any mounting plate (200); a guide rod (220) is fixed on the outer wall of the opposite side of the mounting plate (200) and located on one side of the screw rod (210); the outer wall of the screw rod (210) is threadedly connected with a threaded moving block (240); and the outer wall of the threaded moving block (240) is slidably connected to the guide rod (220) through a through hole.

5. The intelligent positioning and clamping device for a graphite boat according to claim 4 is characterized in that: An outer wall of the threaded moving block (240) and one end close to the graphite boat sheet are hingedly connected with a hinged positioning plate (241), and a gasket for protecting the graphite boat sheet is arranged on one side of the outer wall of the hinged positioning plate (241).

6. The intelligent positioning and clamping device for a graphite boat according to claim 1, characterized in that: The adsorption component comprises a hydraulic cylinder (300), the hydraulic cylinder (300) being installed on a side of the side plate (110) away from the side where the graphite boat sheet is placed, and the number of the hydraulic cylinders (300) is four.

7. The graphite boat intelligent positioning and clamping device according to claim 6, characterized in that: The output end of the hydraulic cylinder (300) passes through the side wall of the side plate (110) and is fixed with a movable plate (310), and the movable plate (310) is arranged at the same horizontal position as the graphite boat sheet.

8. The graphite boat intelligent positioning and clamping device according to claim 7 is characterized in that: Vacuum suction cups (321) for adsorbing the side wall of the graphite boat sheet are evenly arranged at one end of the movable plate (310) away from the hydraulic cylinder (300), and a vacuum pump (320) is installed at one end of the movable plate (310) away from the vacuum suction cups (321). The vacuum pump (320) is connected to the vacuum suction cups (321) through a hose.

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