Liftable cavity for cleaning single wafer

Abstract

The utility model discloses a liftable cavity for cleaning a single piece, which relates to the technical field of processing equipment and comprises a fixing plate, a lifting cylinder is arranged below the fixing plate, a cylinder seat is fixed at the telescopic end of the lifting cylinder, and first guide rods are fixed at two ends of the top of the cylinder seat. First fixing cylinders are fixed to the positions, located on the first guide rods, of the fixing plate, a cavity is formed in the upper portion of the fixing plate, the tops of the first guide rods are fixedly connected with the bottom of the cavity, first corrugated pipes are arranged between the first guide rods and the cavity, second corrugated pipes are arranged between the second guide rods and the cavity, and the first guide rods and the second guide rods can be subjected to sealing protection when the first guide rods and the second guide rods ascend and descend. And meanwhile, the top end of the first corrugated pipe and the top end of the second guide rod are fixed to the bottom of the cavity through a first pressing block and a second pressing block correspondingly, the bottom end of the first corrugated pipe and the bottom end of the second corrugated pipe are fixed to a first fixing cylinder correspondingly, and therefore the sealing performance is improved, and the leakage situation is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of processing equipment, in particular to a liftable cavity for single-chip cleaning. Background Art

[0002] When cleaning a single wafer, it is in a high-speed rotating state for cleaning, and the process needs to be carried out in a limited space to prevent strong acid and alkali cleaning solvents from splashing out and causing pollution. It also prevents the wafer from flying out during high-speed rotation, causing damage to equipment and personnel. At the same time, the waste liquid after cleaning can be discharged through various discharge ports at the bottom of the chamber. The significance of the chamber lifting is that when the process is being carried out, the chamber is raised and higher than the upper surface of the wafer to prevent the cleaning solvent from splashing out during high-speed rotation, causing pollution and harm. Lowering: The chamber is lowered below the lower surface of the wafer, which is convenient for the arm to place the wafer and the arm to take the wafer after the process is completed.

[0003] In the process of implementing the solution, the inventors found that the following problems in the prior art have not been well solved: the traditional cavity is lifted and lowered by lifting cylinders, and the number of cylinders is 2-4. However, due to the large number of cylinders and relatively more operating programs, the accuracy of starting and stopping between cylinders is relatively poor, and the lifting and lowering between cylinders are often inconsistent, resulting in unstable lifting of the cavity. In addition, the traditional components that conduct the lifting are exposed, which leads to leakage of corrosive gases, thereby causing damage to other components. Utility Model Content

[0004] The main purpose of the utility model is to provide a liftable cavity for single-wafer cleaning, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] The cam body is provided with a plurality of guide rails, and a plurality of guide rails are provided on the top of the plurality of guide rails, and a plurality of guide rails are provided on the top of the plurality of guide rails.

[0007] Preferably, the coupling block is connected to the bottom of the second guide rod.

[0008] Preferably, the guide rod 1 is respectively penetrated by a fixed cylinder 1 and then slidably connected thereto, the bottom of the bellows 1 is respectively fixedly connected to a fixed cylinder 1 whose position matches that of the fixed cylinder 1, and the clamping block 1 is respectively fixedly connected to the bottom of the cavity.

[0009] Preferably, the second pressing block is fixedly connected to the bottom of the cavity, the bottom of the second bellows is fixedly connected to the second fixing tube, and the second guide rod is slidably connected to the second fixing tube after penetrating the second guide rod.

[0010] Preferably, the positions of the induction plates respectively match the positions of the sensors, the induction plates are respectively connected to the sensor signals, and the sensors are connected to the lifting cylinder signals.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] 1. The bellows 1 and bellows 2 arranged between the guide rods 1 and 2 and the cavity can provide sealing protection for the guide rods 1 and 2 when they are raised and lowered to avoid corrosion. At the same time, the top of the bellows 1 and the top of the guide rod 2 are fixed to the bottom of the cavity through the clamping blocks 1 and 2, respectively, and the bottom ends of the bellows 1 and the bellows 2 are fixed to the fixing tube 1, respectively, so that the sealing is increased to avoid leakage.

[0013] 2. After the lifting cylinder works, it drives guide rod 1 to lift through the cylinder seat, and guide rod 1 drives the cavity to lift, so that this application only needs to use one lifting device to complete the lifting work required for cleaning, avoiding the unstable lifting caused by the asynchronous start and stop of multiple lifting devices. At the same time, the cavity will be lifted and lowered through guide rod 2. The sensor plate arranged on guide rod 2 can slide stably during lifting through the guide rail slider connected to the coupling block, and sense with the sensor on the mounting plate, thereby completing the lifting control of the lifting cylinder and ensuring the accuracy of lifting. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a partial structural schematic diagram of a liftable cavity for single-wafer cleaning of the utility model;

[0015] Figure 2 This is a side view structural diagram of a liftable cavity for single-wafer cleaning of the utility model;

[0016] Figure 3 The utility model is a schematic diagram of the split structure among the induction sheet, the mounting plate, the coupling block and the guide rail slider of a liftable cavity for single-piece cleaning.

[0017] In the figure: 1. fixed plate; 2. lifting cylinder; 3. cylinder seat; 4. guide rod 1; 5. fixed cylinder 1; 6. clamping block 1; 7. bellows 1; 8. cavity; 9. guide rod 2; 10. bellows 2; 11. fixed cylinder 2; 12. clamping block 2; 13. mounting plate; 14. coupling block; 15. guide rail slider; 16. sensor; 121. induction sheet. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0019] like Figure 1-3As shown, a liftable chamber for single-chip cleaning includes a fixed plate 1, a lift cylinder 2 is provided below the fixed plate 1, a cylinder seat 3 is fixed to the telescopic end of the lift cylinder 2, guide rods 4 are fixed to both ends of the top of the cylinder seat 3, a fixed tube 5 is fixed to the position of the fixed plate 1 located at the guide rod 4, a chamber 8 is provided above the fixed plate 1, the top of the guide rod 4 is fixedly connected to the bottom of the chamber 8, a guide rod 2 9 is fixed to the end of the bottom of the chamber 8 away from the guide rod 4, the outer wall of the guide rod 4 is sleeved with a bellows 7, and the outer wall of the guide rod 9 is sleeved with a bellows 7. A bellows 10 is provided, the top of the bellows 7 is connected with a clamping block 6, the top of the bellows 10 is fixed with a clamping block 12, a fixing plate 1 is located at the position of the guide rod 9 and a fixing tube 11 is fixed thereon, a mounting plate 13 is provided on one side of the fixing plate 1 below the guide rod 9, sensors 16 are provided at the top and bottom of the side wall of the mounting plate 13, a guide rail slider 15 is provided at the position of the mounting plate 13 between the sensors 16, a coupling block 14 is slidably connected to the guide rail slider 15, and a sensing sheet 121 is installed on the coupling block 14.

[0020] Specifically, the coupling block 14 is connected to the bottom of the guide rod 2 9 .

[0021] Specifically, guide rod 1 4 is respectively penetrated with fixed cylinder 1 5 and then slidably connected, the bottom of bellows 1 7 is respectively fixedly connected with fixed cylinder 1 5 of matching position, clamping block 1 6 is respectively fixedly connected with the bottom of cavity 8, clamping block 2 12 is fixedly connected with the bottom of cavity 8, the bottom of bellows 2 10 is fixedly connected with fixed cylinder 2 11, guide rod 2 9 is penetrated with fixed cylinder 2 11 and then slidably connected, so as to ensure the sealing of guide rod 1 4 and guide rod 2 9 when they are raised or lowered.

[0022] Specifically, the positions of the sensing sheets 121 match the positions of the sensors 16, the sensing sheets 121 are respectively connected to the signals of the sensors 16, the sensors 16 are respectively connected to the signals of the lifting cylinder 2, when the sensing sheets 121 descend to the position of the lower sensor 16, the sensor 16 sends a signal to close the descent to the lifting cylinder 2, when the sensing sheets 121 rise to the position of the upper sensor 16, the sensor 16 sends a signal to close the ascent to the lifting cylinder 2.

[0023] Working principle: The bellows 17 and bellows 210 arranged between the guide rod 14, the guide rod 29 and the cavity 8 can provide sealing protection for the guide rod 14 and the guide rod 29 when they are lifted and lowered to avoid corrosion. At the same time, the top of the bellows 17 and the top of the guide rod 29 are fixed to the bottom of the cavity 8 through the clamping block 16 and the clamping block 212 respectively, and the bottom ends of the bellows 17 and the bellows 210 are fixed to the fixing cylinder 15 respectively, so that the sealing is increased to avoid leakage. After the lifting cylinder 2 works, it drives the guide rod 14 to move up and down through the cylinder seat 3. Lifting and lowering, the guide rod 1 4 drives the cavity 8 to be lifted and lowered, so that the present application only needs to use one lifting device to complete the lifting work required for cleaning, avoiding the lifting instability caused by the asynchronous start and stop of multiple lifting devices. At the same time, the cavity 8 will be lifted and lowered through the guide rod 2 9. The sensor sheet 121 provided on the guide rod 2 9 can slide stably during lifting and lowering through the guide rail slider 15 connected to the coupling block 14, and sense with the sensor 16 on the mounting plate 13, thereby completing the lifting and lowering control of the lifting cylinder 2 and ensuring the accuracy of lifting.

[0024] The circuits, electronic components and control modules involved are all prior art and can be fully implemented by those skilled in the art. Needless to say, the content protected by the utility model does not involve improvements to software and methods.

[0025] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A liftable chamber for single-wafer cleaning, comprising a fixed plate (1), characterized in that: A lifting cylinder (2) is provided below the fixed plate (1), a cylinder seat (3) is fixed to the telescopic end of the lifting cylinder (2), guide rods (4) are fixed to both ends of the top of the cylinder seat (3), a fixing tube (5) is fixed to the position of the fixed plate (1) located at the guide rod (4), a cavity (8) is provided above the fixed plate (1), the top of the guide rod (4) is fixedly connected to the bottom of the cavity (8), a guide rod (9) is fixed to the end of the bottom of the cavity (8) away from the guide rod (4), the outer wall of the guide rod (4) is sleeved with a bellows (7), and the outer wall of the guide rod (9) is sleeved with a bellows (10), The top of the bellows 1 (7) is connected to a clamping block 1 (6), the top of the bellows 2 (10) is fixed with a clamping block 2 (12), the fixing plate (1) is located at the position of the guide rod 2 (9) and is fixed with a fixing tube 2 (11), the fixing plate (1) is provided with a mounting plate (13) on one side below the guide rod 2 (9), the top and bottom ends of the side wall of the mounting plate (13) are both provided with sensors (16), the mounting plate (13) is provided with a guide rail slider (15) at a position between the sensors (16), the guide rail slider (15) is slidably connected with a coupling block (14), and the coupling block (14) is installed with a sensing sheet (121).

2. The liftable chamber for single-wafer cleaning according to claim 1, characterized in that: The coupling block (14) is connected to the bottom of the second guide rod (9).

3. The liftable chamber for single-wafer cleaning according to claim 1, characterized in that: The guide rods 1 (4) are respectively connected to the fixed cylinders 1 (5) through which they penetrate and are slidably connected, the bottoms of the bellows 1 (7) are respectively connected to the fixed cylinders 1 (5) whose positions match, and the clamping blocks 1 (6) are respectively connected to the bottoms of the cavities (8).

4. The liftable chamber for single-wafer cleaning according to claim 1, characterized in that: The second pressing block (12) is fixedly connected to the bottom of the cavity (8), the bottom of the second bellows (10) is fixedly connected to the second fixing tube (11), and the second guide rod (9) is slidably connected to the second fixing tube (11) after penetrating.

5. The liftable chamber for single-wafer cleaning according to claim 1, characterized in that: The positions of the induction plates (121) respectively match the positions of the sensors (16); the induction plates (121) are respectively connected to the sensors (16) by signal; and the sensors (16) are respectively connected to the lifting cylinders (2) by signal.

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