Transfer device for monocrystalline silicon wafer processing

Abstract

The utility model belongs to the technical field of monocrystalline silicon, and particularly relates to a transfer device for monocrystalline silicon wafer processing. Comprising a base, a storage battery is arranged in the base, and a movement control assembly and a transfer protection assembly are arranged on the base; the transfer protection assembly comprises a lifting stabilizing mechanism and a transfer mechanism. Through structural improvement, a certain amount of pressure can be provided by adding the spring, so that monocrystalline silicon wafers in the storage box I and the storage box II are more stable during storage and movement, and meanwhile, the monocrystalline silicon wafers can be fully protected more perfectly by adding the pressure sensor; the whole operation process is more convenient and smoother, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon, and in particular relates to a transfer device for processing single crystal silicon slices. Background Art

[0002] Monocrystalline silicon is a high-purity silicon material and is one of the commonly used materials in electronic devices such as solar cells and integrated circuits. In the past thirty years, solar energy utilization technology has made great progress in research and development, commercial production, and market development, becoming one of the world's fastest and most stable emerging industries.

[0003] Publication (Announcement) No.: CN214523863U. The utility model provides a transfer device for processing single crystal silicon wafers, which relates to the field of single crystal silicon. The transfer device for processing single crystal silicon wafers comprises a bottom plate, the upper surface of the bottom plate is fixedly connected with a fixed column, the right side of the fixed column is fixedly connected with a fixed rod, the right end of the fixed rod is fixedly connected with a transfer bucket, the number of the transfer buckets is two, the two transfer buckets are fixedly connected by a connecting rod, the interiors of the two transfer buckets are movably connected with movable plates, and the lower surfaces of the two movable plates are fixedly connected with movable rods. The transfer device for processing single crystal silicon wafers, through the mutual cooperation between the movable plate, the movable rod, the transfer bucket, the sealing plate, the spring, the cross plate and the handle, achieves more convenient placement and removal of single crystal silicon wafers, while avoiding damage to the silicon wafers, and solves the problem that the existing transfer device for processing single crystal silicon wafers is very inconvenient when placing and removing single crystal silicon wafers, and is also easy to damage the single crystal silicon wafers.

[0004] After analysis, it was found that when the solution is fully loaded with single crystal silicon wafers, since it is fixed by the elastic force of the spring, after it is pulled to the bottom, the elastic force of the spring will be very large, which will produce strong pressure on the single crystal silicon wafer at the bottom, easily causing damage to the single crystal silicon wafer; in view of the above problems, the solution needs to be optimized and improved. Utility Model Content

[0005] In order to solve the problems existing in the background technology, the utility model provides a transfer device for single crystal silicon wafer processing, which can effectively protect the bottom single crystal silicon wafer and make the whole process operation more convenient and smooth.

[0006] The utility model provides a transfer device for processing single crystal silicon wafers, comprising a base, wherein a storage battery is arranged inside the base, and a movement control component and a transfer protection component are arranged on the base; the transfer protection component comprises a lifting stabilization mechanism and a transfer mechanism.

[0007] Furthermore, the movement control assembly includes a push rod located on one side of the base and a wheel located on the lower side of the base, and a control panel is provided on the base.

[0008] Furthermore, the lifting and stabilizing mechanism includes a groove 1 located on the upper side of the base, a limit rod is symmetrically provided in the groove 1, a slider is symmetrically slidably provided on the limit rod, a connecting rod 1 is hingedly provided on the slider, a movable bottom plate is hingedly provided on the upper end of the connecting rod 1, a motor is provided between the limit rods in the groove 1, a screw is provided on the output end of the motor, a moving block is threadedly connected to the screw, a connecting rod 2 is hingedly provided on the moving block, the other end of the connecting rod 2 is hingedly connected to the movable bottom plate, and support rods are symmetrically provided on the side of the movable bottom plate.

[0009] Furthermore, the transfer mechanism includes a support platform located on the upper side of the base, a connecting shaft 1 is provided on the support platform, a storage box 1 is provided on the connecting shaft 1, a plurality of connecting shafts 2 are provided on the other side of the storage box 1, a storage box 2 is provided on the connecting shaft 2, a movable plate is provided on the end of the support rod extending into the storage box 1 and the storage box 2, a plurality of springs 1 are provided on the movable plate, a push plate is provided on the spring 1, a pressure sensor is provided on the movable plate, the push plate is slidably connected to the inner walls of the storage box 1 and the storage box 2, and the support platform is provided with a rotating cover mechanism corresponding to the storage box 1 and the storage box 2.

[0010] Furthermore, the rotating cover mechanism includes a rotating shaft located on the support platform, a fixed disk is provided on the rotating shaft, a groove 2 is provided on the fixed disk, a spring 2 is provided in the groove 2, a latch is provided on the spring 2, a cover is rotatably provided on the rotating shaft, an arc-shaped groove is provided on the cover corresponding to the latch, a positioning groove is provided in the arc-shaped groove, and the positioning groove and the latch fit together.

[0011] Furthermore, a control handle is provided on the cover plate.

[0012] Furthermore, the control panel is electrically connected to the motor and the pressure sensor.

[0013] Furthermore, a hook is provided on the push rod, a limit plate is provided in the groove 1, and the limit plate is rotatably connected to the screw rod.

[0014] Furthermore, reinforcing rods are symmetrically arranged on the base, and the reinforcing rods are fixedly connected to the second storage box.

[0015] Beneficial effects of the utility model:

[0016] Through structural improvement, the utility model can provide a certain amount of pressure by adding a spring, so that the single crystal silicon wafers located in the storage box one and the storage box two are more stable when stored and moved. At the same time, the addition of pressure sensors can fully improve the protection of the single crystal silicon wafers; the overall operation process is more convenient and smooth, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The utility model is a front stereoscopic diagram of a transfer device for processing single crystal silicon wafers.

[0018] Figure 2 The utility model is a rear perspective view of a transfer device for processing single crystal silicon wafers.

[0019] Figure 3 It is a partial cross-sectional view of a front view groove 1 of a transfer device for processing single crystal silicon wafers of the utility model.

[0020] Figure 4 This is a partial cross-sectional view of a front view storage box 2 of a transfer device for processing single crystal silicon wafers of the utility model.

[0021] Figure 5 This is an exploded view of a fixed plate of a transfer device for processing single crystal silicon wafers according to the utility model.

[0022] Figure 6 The utility model is a top view of an exploded view of a fixed plate of a transfer device for processing single crystal silicon wafers.

[0023] Figure 7 This is a schematic diagram of region A of a transfer device for processing single crystal silicon wafers according to the present invention.

[0024] As shown in the figure:

[0025] 1. Base, 2. Wheel, 3. Control panel, 4. Groove 1, 5. Limit rod, 6. Slider, 7. Connecting rod 1, 8. Movable bottom plate, 9. Motor, 10. Screw, 11. Moving block, 12. Connecting rod 2, 13. Support rod, 14. Support table, 15. Connecting shaft 1, 16. Storage box 1, 17. Connecting shaft 2, 18. Storage box 2, 19. Movable plate, 20. Spring 1, 21. Push plate, 22. Pressure sensor, 23. Rotating shaft, 24. Fixed plate, 25. Groove 2, 26. Spring 2, 27. Latch, 28. Cover plate, 29. Arc groove, 30. Positioning groove, 31. Control handle, 32. Hook, 33. Limit plate, 34. Reinforcement rod, 35. Push rod. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] In the description of the utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the utility model can be understood according to specific circumstances.

[0028] Please see all instructions drawings:

[0029] A transfer device for processing single crystal silicon wafers includes a base 1, in which a battery is arranged, and the battery provides power for a motor 9 and a pressure sensor 22; a movement control component and a transfer protection component are arranged on the base 1; the transfer protection component includes a lifting stabilization mechanism and a transfer mechanism.

[0030] As a technical optimization solution of the utility model, the mobile control component includes a push rod 35 located on one side of the base 1 and a wheel 2 located on the lower side of the base 1. The push rod 35 and the wheel 2 cooperate with each other to drive the base 1 to move flexibly; a control panel 3 is provided on the base 1, and the control panel 3 can control the start and stop of the motor 9.

[0031] As a technical optimization scheme of the utility model, the lifting and stabilizing mechanism includes a groove 4 located on the upper side of the base 1, and a limit rod 5 is symmetrically arranged in the groove 4. A slider 6 is symmetrically slidably arranged on the limit rod 5, and the limit rod 5 makes the sliding of the slider 6 more stable; a connecting rod 7 is hinged on the slider 6, and a movable bottom plate 8 is hinged on the upper end of the connecting rod 7. A motor 9 is arranged between the limit rods 5 in the groove 4, and a screw 10 is arranged on the output end of the motor 9. A moving block 11 is threadedly connected on the screw 10, and a connecting rod 2 12 is hinged on the moving block 11. The other end of the connecting rod 2 12 is hingedly connected to the movable bottom plate 8, and support rods 13 are symmetrically arranged on the side surface of the movable bottom plate 8. Through the operation of the motor 9, the screw 10 is driven to rotate, and the moving block 11 is driven to move, so that the connecting rod 2 12 can drive the movable bottom plate 8 to lift and lower, and the connecting rods 7 on both sides can make the lifting and lowering of the movable bottom plate 8 more stable.

[0032] As a technical optimization scheme of the utility model, the transfer mechanism includes a support platform 14 located on the upper side of the base 1, a connecting shaft 15 is provided on the support platform 14, a storage box 16 is provided on the connecting shaft 15, a plurality of connecting shafts 17 are provided on the other side of the storage box 16, a storage box 18 is provided on the connecting shaft 2 17, a movable plate 19 is provided at one end of the support rod 14 extending into the storage box 16 and the storage box 2 18, a plurality of springs 20 are provided on the movable plate 19, a push plate 21 is provided on the spring 120, and the spring 120 can continuously apply pressure to the push plate 121, so that the single crystal silicon wafers stored above are more stable, and can also provide a certain buffer; a pressure sensor 22 is provided on the movable plate 19, and the push plate 21 is slidably connected to the inner walls of the storage box 16 and the storage box 2 18, and the support platform 14 is provided with a rotating cover mechanism corresponding to the storage box 16 and the storage box 2 18. When the pressure sensor 22 senses the rated pressure value, it can feedback a signal to the control panel 3 to remind the staff that the pressure is too high, thereby adjusting the operation of the motor 9.

[0033] As a technical optimization scheme of the utility model, the rotating cover mechanism includes a rotating shaft 23 located on the support platform 14, a fixed disk 24 is provided on the rotating shaft 23, a groove 25 is provided on the fixed disk 24, a spring 26 is provided in the groove 25, a latch 27 is provided on the spring 26, a cover 28 is rotatably provided on the rotating shaft 23, an arc-shaped groove 29 is provided on the cover 28 corresponding to the latch 27, a positioning groove 30 is provided in the arc-shaped groove 29, the positioning groove 30 and the latch 27 fit each other, the angle between the two positioning grooves 30 is 90°, which can meet the 90° rotation of the cover 28, and the cover 28 is level with the openings of the storage box 1 16 and the storage box 2 18, and can effectively seal their openings.

[0034] As a technical optimization solution of the present invention, a control handle 31 is provided on the cover plate 28 to facilitate the control of the flipping of the cover plate 28 .

[0035] As a technical optimization solution of the present invention, the control panel 3 is electrically connected to the motor 9 and the pressure sensor 22 .

[0036] As a technical optimization solution of the utility model, a hook 32 is provided on the push rod 35, and a limit plate 33 is provided in the groove 4. The limit plate 33 is rotatably connected to the screw rod 10. The hook 32 can hang the control panel 3, and the limit plate 33 can limit the moving distance of the moving block 11.

[0037] As a technical optimization solution of the utility model, reinforcing rods 34 are symmetrically provided on the base 1 , and the reinforcing rods 34 are fixedly connected to the storage box 18 to improve the stability of the storage box 18 .

[0038] Working principle:

[0039] The single crystal silicon wafers are placed in storage box 1 16 and storage box 2 18 according to the required storage capacity. After placement, the cover plate 28 is closed and the power supply of the motor 9 is turned on to make the motor 9 work, thereby driving the movable bottom plate 8 to rise and driving the internal push plate 21 to rise. Under the control of the push plate 21 and the cover plate 28, the single crystal silicon wafers are slowly squeezed and the real-time pressure is fed back through the pressure sensor 22 to avoid excessive pressure.

[0040] The above describes the utility model and its implementation methods, which are not restrictive. The specific implementation method is only one of the implementation methods of the utility model, and the actual structure is not limited thereto. In short, if ordinary technicians in this field are inspired by it, without departing from the purpose of the invention of the utility model, they can design a structure and embodiment similar to the technical solution without creativity, which should belong to the protection scope of the utility model.

Claims

1. A transfer device for processing single crystal silicon wafers, comprising a base, wherein a battery is provided in the base, characterized in that: The base is provided with a movement control component and a transfer protection component; the transfer protection component includes a lifting and stabilizing mechanism and a transfer mechanism; The mobile control assembly includes a push rod located on one side of the base and a wheel located on the lower side of the base, and a control panel is provided on the base; The lifting and stabilizing mechanism comprises a groove 1 located on the upper side of the base, a limiting rod is symmetrically arranged in the groove 1, a slider is symmetrically slidably arranged on the limiting rod, a connecting rod 1 is hingedly arranged on the slider, a movable bottom plate is hingedly arranged on the upper end of the connecting rod 1, a motor is arranged between the limiting rods in the groove 1, a screw is arranged on the output end of the motor, a moving block is threadedly connected on the screw, a connecting rod 2 is hingedly arranged on the moving block, the other end of the connecting rod 2 is hingedly connected to the movable bottom plate, and support rods are symmetrically arranged on the side of the movable bottom plate; The transfer mechanism includes a support platform located on the upper side of the base, a connecting shaft 1 is provided on the support platform, a storage box 1 is provided on the connecting shaft 1, a plurality of connecting shafts 2 are provided on the other side of the storage box 1, a storage box 2 is provided on the connecting shaft 2, a movable plate is provided on one end of the support rod extending into the storage box 1 and the storage box 2, a plurality of springs 1 are provided on the movable plate, a push plate is provided on the spring 1, a pressure sensor is provided on the movable plate, the push plate is slidably connected to the inner walls of the storage box 1 and the storage box 2, and a rotating cover mechanism is provided on the support platform corresponding to the storage box 1 and the storage box 2; The rotating cover mechanism includes a rotating shaft located on a support platform, a fixed disk is provided on the rotating shaft, a second groove is provided on the fixed disk, a second spring is provided in the second groove, a latch is provided on the second spring, a cover is rotatably provided on the rotating shaft, an arc-shaped groove is provided on the cover corresponding to the latch, a positioning groove is provided in the arc-shaped groove, and the positioning groove and the latch fit together.

2. The transfer device for processing single crystal silicon wafers according to claim 1, characterized in that: A control handle is arranged on the cover plate.

3. The transfer device for processing single crystal silicon wafers according to claim 2, characterized in that: The control panel is electrically connected to the motor and the pressure sensor.

4. The transfer device for processing single crystal silicon wafers according to claim 3, characterized in that: A hook is arranged on the push rod, a limit plate is arranged in the groove 1, and the limit plate is rotatably connected with the screw rod.

5. The transfer device for processing single crystal silicon wafers according to claim 4, characterized in that: The base is symmetrically provided with reinforcing rods, and the reinforcing rods are fixedly connected to the second storage box.

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