Gas quantitative mixing system

Abstract

The utility model discloses a gas quantitative mixing system, which comprises a plurality of gas inlet sources, a plurality of gas outlet sources, a plurality of gas outlet sources and a plurality of gas outlet sources, each gas inlet control valve is communicated with the outlet of the corresponding gas inlet source; the gas mixing chamber is communicated with outlets of the multiple gas inlet control valves, and a uniform mixing assembly is arranged in the gas mixing chamber; the resistive buffer plate is arranged in the gas mixing chamber and is used for slowing down the gas flow speed; the multi-channel dispersion type infrared spectrometer is communicated with the outlet of the gas mixing chamber and is used for detecting the component concentration of the mixed gas in real time; the gas flow controller is communicated with an outlet of the multi-channel dispersion type infrared spectrometer and is used for quantitatively outputting the mixed gas according to a preset gas outlet flow; the control unit is electrically connected with each gas inlet control valve, the multi-channel dispersion type infrared spectrometer and the gas flow controller; the device has the advantages that the gas mixing proportion and flow can be accurately controlled, and the mixing efficiency and the system reliability are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas mixing, in particular to a gas quantitative mixing system. Background Art

[0002] Gas mixing technology plays an important role in many fields such as industrial production, scientific research, and environmental protection. Especially in industries such as semiconductor manufacturing, medical equipment, and chemical synthesis, the accuracy and stability of gas mixing are extremely high. Traditional gas mixing devices usually use multiple flow controllers to control the flow of different types of gases respectively, so as to achieve the purpose of controlling the proportion of mixed gas components.

[0003] However, this traditional structure has some obvious defects:

[0004] 1. High cost: Each channel needs to be equipped with a high-quality, high-precision gas flow controller, which not only increases the initial purchase cost of the equipment, but also increases the long-term operation and maintenance costs. Both the purchase cost and the long-term operation and maintenance cost will be higher;

[0005] 2. Increased system complexity: Multi-controller settings lead to complex equipment architecture, increasing maintenance difficulty and the number of potential failure points, affecting the overall reliability and service life of the equipment;

[0006] 3. Lack of real-time feedback and control mechanism: Traditional gas mixing devices only control the input gas flow rate and cannot ensure that the output gas mixing ratio is indeed in line with expectations. When the input gas flow controller fails, the device cannot quickly locate and correct it, resulting in unstable quality of the mixed gas;

[0007] 4. Slow mixing: Traditional gas mixing devices have a slow mixing speed and cannot achieve immediate mixing and use, resulting in additional preparation time for the mixed gas before use, reducing the overall efficiency of the system.

[0008] Therefore, it is particularly important to develop a gas quantitative mixing device with lower cost, simpler structure, more precise control and faster mixing speed. Such a device can not only improve production efficiency and product quality, but also reduce operating costs and improve the overall reliability and safety of the system. Summary of the invention

[0009] The utility model aims to provide a gas quantitative mixing system, which can realize accurate control of gas mixing ratio and flow rate, and improve mixing efficiency and system reliability.

[0010] To achieve the above purpose, the utility model provides the following technical solution: a gas quantitative mixing system, comprising:

[0011] Multiple gas inlet sources, used to provide different types of gases respectively;

[0012] A plurality of air intake control valves, each of the air intake control valves being connected to an outlet of a corresponding gas intake source;

[0013] A gas mixing chamber is connected to the outlets of the plurality of intake control valves, and a mixing component is also provided in the gas mixing chamber;

[0014] A resistive buffer plate, disposed in the gas mixing chamber, for slowing down the air flow speed;

[0015] A multi-channel dispersive infrared spectrometer is connected to the outlet of the gas mixing chamber and is used to detect the concentration of the mixed gas components in real time;

[0016] A gas flow controller, connected to the outlet of the multi-channel dispersive infrared spectrometer, for quantitatively outputting the mixed gas according to a preset outlet flow rate;

[0017] And a control unit, which is electrically connected to each of the intake control valves, the multi-channel dispersive infrared spectrometer and the gas flow controller, and is used to control the opening of each of the intake control valves according to the concentration of the mixed gas components detected by the multi-channel dispersive infrared spectrometer, and to control the gas outlet volume of the gas flow controller according to a preset gas outlet flow rate.

[0018] Preferably, the gas mixing chamber includes a shell, the shell has an air cavity running through it from front to back, the resistive buffer plate is installed in the air cavity and close to the inlet of the shell, a plurality of air flow channels are arranged on the resistive buffer plate, the mixing assembly is installed in the air cavity and close to the outlet of the shell, for promoting gas mixing, and delivering the mixed gas to the multi-channel dispersive infrared spectrometer.

[0019] Preferably, the air flow channels are arranged in a honeycomb shape, and the length of the air flow channels accounts for 20%-40% of the length of the air cavity.

[0020] Preferably, the mixing assembly comprises a driving motor and a plurality of spiral blades, the driving motor is installed in the air cavity, and the plurality of spiral blades are fixed on an output shaft of the driving motor and are distributed at intervals along the axis direction of the shell.

[0021] Preferably, a one-way valve for preventing gas backflow is provided between each of the gas intake sources and the corresponding intake control valve.

[0022] Preferably, a balancing valve for adjusting the intake air flow rate is provided between each one-way valve and the corresponding intake control valve.

[0023] Preferably, the number of the gas intake sources is three.

[0024] Preferably, the air intake control valve is a proportional valve.

[0025] Preferably, the control unit includes a storage module, a calculation module and a driving module, the storage module is electrically connected to the calculation module, and the storage module stores a preset mixed gas target component ratio and a preset outlet gas flow rate and transmits the two to the calculation module, the calculation module is electrically connected to the driving module, and is used to calculate the expected flow rate of each gas according to the mixed gas component concentration fed back by the multi-channel dispersive infrared spectrometer, and output the corresponding valve opening control instruction, the driving module is used to receive the valve opening control instruction output by the calculation module, and drive each of the intake control valves and the gas flow controller to operate according to the valve opening control instruction.

[0026] Compared with the prior art, the advantages of the utility model are: the system realizes accurate mixing and quantitative output of multiple gases through precise control. The system uses multiple gas intake sources to provide different types of gases, each of which is connected to an intake control valve for adjusting the gas flow rate. These gases enter the gas mixing chamber through the intake control valve and are fully mixed in the gas mixing chamber. The multi-channel dispersive infrared spectrometer detects the concentration of the mixed gas components in real time and feeds the data back to the control unit. The control unit compares the detected concentration data with the preset target component ratio of the mixed gas, and adjusts the opening of each intake control valve in real time to control the flow rate of each gas entering the mixing chamber, thereby realizing accurate control of the ratio of the mixed gas components. At the same time, the control unit controls the gas flow controller according to the preset outlet flow rate, and quantitatively outputs the mixed gas. The entire system ensures that the component ratio and flow rate of the mixed gas meet the preset requirements through real-time detection and control, and realizes accurate gas mixing and quantitative output. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below. It is obvious that the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0028] Figure 1 This is a principle block diagram of the utility model;

[0029] Figure 2 This is a principle block diagram of the control unit in the utility model;

[0030] Figure 3 It is a three-dimensional structural schematic diagram of the gas mixing chamber in the utility model;

[0031] Figure 4 It is a cross-sectional view of the gas mixing chamber in the utility model;

[0032] Figure 5 It is a three-dimensional structural schematic diagram of the mixing component in the utility model;

[0033] In the figure, 1. gas intake source; 2. intake control valve; 3. gas mixing chamber; 4. multi-channel dispersive infrared spectrometer; 5. gas flow controller; 6. control unit; 7. shell; 8. resistive buffer plate; 9. mixing component; 10. air flow channel; 11. drive motor; 12. spiral blade; 13. one-way valve; 14. balancing valve; 15. storage module; 16. operation module; 17. drive module. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] Embodiment 1: Figure 1-Figure 5 As shown, a gas quantitative mixing system includes:

[0036] A plurality of gas inlet sources 1, for respectively providing different types of gases;

[0037] A plurality of air intake control valves 2, each of which is connected to an outlet of a corresponding gas intake source 1;

[0038] The gas mixing chamber 3 is connected to the outlets of the plurality of air intake control valves 2, and a mixing component 9 is also provided in the gas mixing chamber 3;

[0039] A resistive buffer plate 8 is arranged in the gas mixing chamber 3 to slow down the air flow speed;

[0040] A multi-channel dispersive infrared spectrometer 4 is connected to the outlet of the gas mixing chamber 3 and is used to detect the concentration of the mixed gas components in real time;

[0041] The gas flow controller 5 is connected to the outlet of the multi-channel dispersive infrared spectrometer 4 and is used to quantitatively output the mixed gas according to a preset outlet flow rate;

[0042] And a control unit 6 is electrically connected to each intake control valve 2, the multi-channel dispersive infrared spectrometer 4 and the gas flow controller 5, and is used to control the opening of each intake control valve 2 according to the concentration of the mixed gas components detected by the multi-channel dispersive infrared spectrometer 4, and to control the gas outlet volume of the gas flow controller 5 according to a preset gas outlet flow rate.

[0043] The working principle of the gas quantitative mixing system is to achieve accurate mixing and quantitative output of multiple gases through real-time detection and control. The system uses multiple gas intake sources 1 to provide different types of gases. Each gas intake source 1 is connected to an intake control valve 2 for adjusting the gas flow rate. These gases enter the gas mixing chamber 3 through the intake control valve 2 and are fully mixed in the mixing chamber. The multi-channel dispersive infrared spectrometer 4 detects the concentration of the mixed gas components in real time and sends its data to the control unit 6.

[0044] The control unit 6 receives the data fed back by the multi-channel dispersive infrared spectrometer 4, and compares it with the preset target component ratio of the mixed gas. If there is a deviation between the actual concentration and the target concentration, the control unit 6 will calculate the opening of each intake control valve 2 that needs to be adjusted according to the deviation value. The control unit 6 sends the adjustment instruction to each intake control valve 2, and the control valve adjusts the opening according to the instruction, thereby changing the flow rate of each gas entering the mixing chamber, and finally realizing the precise control of the ratio of the mixed gas components. At the same time, the control unit 6 controls the gas flow controller 5 according to the preset outlet flow rate, and quantitatively outputs the mixed gas.

[0045] Embodiment 2: Figure 1-Figure 5 As shown, different from the first embodiment, the gas mixing chamber 3 includes a shell 7, the shell 7 has an air cavity running through the front and back, the resistive buffer plate 8 is installed in the air cavity and close to the inlet of the shell 7, a plurality of air flow channels 10 are arranged on the resistive buffer plate 8, and a mixing component 9 is installed in the air cavity and close to the outlet of the shell 7, which is used to promote gas mixing and transport the mixed gas to the multi-channel dispersive infrared spectrometer 4.

[0046] In the above structure, the resistive buffer plate 8 is installed at the entrance of the air cavity, and multiple air flow channels 10 are arranged on it. The design of these channels avoids the incoming air flow speed from being too fast, plays the role of reducing the air flow speed, and is conducive to the mixing of different gas components.

[0047] The mixing component 9 is installed in the air cavity, and the mixed gas is transported to the multi-channel dispersive infrared spectrometer 4 through the airflow generated by rotation. This design not only ensures the uniformity of gas mixing, but also effectively improves the gas transportation efficiency, and provides a stable and uniform gas sample for subsequent infrared spectral analysis, thereby improving the analysis accuracy. In addition, the mixing component 9 can further promote the uniformity of gas mixing, ensuring that the gas sample entering the infrared spectrometer has a high degree of uniformity, thereby improving the accuracy of infrared spectral analysis and obtaining more accurate analysis results.

[0048] In this embodiment, the air flow channels 10 are arranged in a honeycomb shape, and the length of the air flow channels 10 accounts for 20%-40% of the length of the air cavity.

[0049] The honeycomb-shaped airflow channel 10 can evenly distribute the incoming airflow therein and reduce the airflow velocity to avoid the impact of excessively fast airflow velocity, thereby promoting the mixing of different gas components.

[0050] The length ratio of the air flow channel 10 is controlled at 20%-40%, which can not only ensure that the gas is fully mixed in the channel, but also avoid the channel being too long, resulting in excessive gas flow resistance, which affects the gas delivery efficiency. This design effectively balances the relationship between gas mixing and delivery efficiency, ensures the uniformity of gas mixing and the stability of delivery, and provides a stable and uniform gas sample for subsequent infrared spectroscopy analysis, thereby improving the analysis accuracy.

[0051] In this embodiment, the mixing assembly 9 includes a driving motor 11 and a plurality of spiral blades 12 . The driving motor 11 is installed in the air cavity. The plurality of spiral blades 12 are fixed on the output shaft of the driving motor 11 and are spaced apart along the axial direction of the shell 7 .

[0052] In the above structure, the drive motor 11 is installed in the air cavity through a mounting bracket, and is used to drive the spiral blade 12 to rotate. This not only saves space, but also facilitates the coordinated operation of the drive motor 11 and other components in the air cavity.

[0053] The design of the spiral blade 12 can effectively convert the rotational motion of the drive motor 11 into airflow, and through the gap distribution of the spiral blade 12, the airflow is evenly delivered to the multi-channel dispersive infrared spectrometer 4. In addition, the airflow generated by the spiral blade 12 can further promote the uniform mixing of the gas in the air cavity, ensuring that the gas sample entering the infrared spectrometer has a high degree of uniformity.

[0054] Embodiment 3: Figure 1-Figure 5 As shown, what is different from the second embodiment is that a one-way valve 13 is provided between each gas intake source 1 and the corresponding intake control valve 2 to prevent gas backflow.

[0055] The design principle of the one-way valve 13 is that it only allows gas to flow from the gas intake source 1 to the intake control valve 2, and prevents gas from flowing from the intake control valve 2 back to the gas intake source 1. When the intake control valve 2 is opened, the gas can smoothly flow from the gas intake source 1 to the intake control valve 2 and enter the gas cavity for mixing and transportation. When the intake control valve 2 is closed, the one-way valve 13 can effectively prevent gas from flowing back from the gas cavity to the intake source, preventing gas reflux from causing uneven gas mixing or unstable gas pressure, thereby affecting the accuracy of infrared spectroscopy analysis.

[0056] In this embodiment, a balancing valve 14 for adjusting the intake air flow rate is provided between each one-way valve 13 and the corresponding intake control valve 2 .

[0057] A balancing valve 14 is arranged between each one-way valve 13 and the corresponding intake control valve 2. This design utilizes the characteristics of the balancing valve 14 to achieve fine adjustment of the intake air flow rate, ensure the accurate proportion of different gas components, and provide a guarantee for the accurate analysis of the multi-channel dispersive infrared spectrometer 4.

[0058] The design principle of the balancing valve 14 is that it can automatically adjust the intake flow rate according to the change of the gas pressure difference to ensure the accurate ratio of different gas components. When the intake control valve 2 is opened, the balancing valve 14 can automatically adjust the intake flow rate according to the change of the gas pressure difference to ensure that the ratio of each gas component entering the air cavity meets the preset value, thereby achieving precise control of gas mixing.

[0059] In this embodiment, the number of gas inlet sources 1 is three.

[0060] The design of three gas inlet sources 1 means that three different gases can be introduced at the same time, for example, nitrogen, oxygen and carbon dioxide can be introduced, and the precise control of the mixing ratio of different gases can be achieved by adjusting the flow rate of each gas inlet source. This design can meet the needs of multiple gas mixing analysis, for example, it can simulate different atmospheric environments, or conduct reaction studies of different gas mixing ratios.

[0061] In this embodiment, the air intake control valve 2 is a proportional valve.

[0062] The use of a proportional valve as the air intake control valve 2 provides a more precise flow control for the multi-channel dispersive infrared spectrometer 4, and can linearly adjust the gas flow rate according to the proportional change of the control signal, thereby achieving precise control of the gas mixing ratio and improving the accuracy and stability of the analysis.

[0063] The design principle of the proportional valve is that it can linearly adjust the valve opening according to the proportional change of the control signal, thereby linearly adjusting the gas flow. When the control signal increases, the valve opening increases, and the gas flow also increases; conversely, when the control signal decreases, the valve opening decreases, and the gas flow also decreases. This linear adjustment feature enables the proportional valve to accurately control the gas flow and achieve precise control of the gas mixing ratio.

[0064] In this embodiment, the control unit 6 includes a storage module 15, a calculation module 16 and a drive module 17. The storage module 15 is electrically connected to the calculation module 16, and the storage module 15 stores a preset mixed gas target component ratio and a preset outlet gas flow rate and transmits the two to the calculation module 16. The calculation module 16 is electrically connected to the drive module 17, and is used to calculate the expected flow rate of each gas according to the mixed gas component concentration fed back by the multi-channel dispersive infrared spectrometer 4, and output the corresponding valve opening control instruction. The drive module 17 is used to receive the valve opening control instruction output by the calculation module 16, and drive each intake control valve 2 and the gas flow controller 5 to operate according to the valve opening control instruction.

[0065] The above structure combines real-time feedback with preset targets, enabling the system to automatically adjust the gas flow rate to ensure that the mixed gas always remains at the preset target component ratio, thereby improving the accuracy and efficiency of the analysis. In addition, the storage module 15 can store different preset values, making it convenient for users to make adjustments according to different experimental requirements, thereby improving the flexibility and adaptability of the system.

[0066] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A gas quantitative mixing system, characterized in that: include, Multiple gas inlet sources, used to provide different types of gases respectively; A plurality of air intake control valves, each of the air intake control valves being connected to an outlet of a corresponding gas intake source; A gas mixing chamber is connected to the outlets of the plurality of intake control valves, and a mixing component is also provided in the gas mixing chamber; A resistive buffer plate, disposed in the gas mixing chamber, for slowing down the air flow speed; A multi-channel dispersive infrared spectrometer is connected to the outlet of the gas mixing chamber and is used to detect the concentration of the mixed gas components in real time; A gas flow controller, connected to the outlet of the multi-channel dispersive infrared spectrometer, for quantitatively outputting the mixed gas according to a preset outlet flow rate; And a control unit, which is electrically connected to each of the intake control valves, the multi-channel dispersive infrared spectrometer and the gas flow controller, and is used to control the opening of each of the intake control valves according to the concentration of the mixed gas components detected by the multi-channel dispersive infrared spectrometer, and to control the gas outlet volume of the gas flow controller according to a preset gas outlet flow rate.

2. A gas quantitative mixing system according to claim 1, characterized in that: The gas mixing chamber includes a shell having an air cavity extending from front to back. The resistive buffer plate is installed in the air cavity and is close to the inlet of the shell. A plurality of air flow channels are provided on the resistive buffer plate. The mixing component is installed in the air cavity and is close to the outlet of the shell to promote gas mixing and transport the mixed gas to the multi-channel dispersive infrared spectrometer.

3. A gas quantitative mixing system according to claim 2, characterized in that: The air flow channels are arranged in a honeycomb shape, and the length of the air flow channels accounts for 20%-40% of the length of the air cavity.

4. A gas quantitative mixing system according to claim 3, characterized in that: The mixing component includes a driving motor and a plurality of spiral blades. The driving motor is installed in the air cavity. The plurality of spiral blades are fixed on the output shaft of the driving motor and are distributed at intervals along the axis direction of the shell.

5. A gas quantitative mixing system according to claim 1, characterized in that: A one-way valve for preventing gas backflow is arranged between each gas intake source and the corresponding intake control valve.

6. A gas quantitative mixing system according to claim 5, characterized in that: A balancing valve for adjusting the intake air flow rate is arranged between each one-way valve and the corresponding intake control valve.

7. A gas quantitative mixing system according to claim 1, characterized in that: The number of the gas inlet sources is three.

8. A gas quantitative mixing system according to claim 7, characterized in that: The air intake control valve is a proportional valve.

9. A gas quantitative mixing system according to claim 1, characterized in that: The control unit includes a storage module, a calculation module and a driving module. The storage module is electrically connected to the calculation module, and the storage module stores a preset mixed gas target component ratio and a preset outlet gas flow rate and transmits the two to the calculation module. The calculation module is electrically connected to the driving module, and is used to calculate the expected flow rate of each gas according to the mixed gas component concentration fed back by the multi-channel dispersive infrared spectrometer, and output the corresponding valve opening control instruction. The driving module is used to receive the valve opening control instruction output by the calculation module, and drive each of the intake control valves and the gas flow controller to operate according to the valve opening control instruction.

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