Square target material leveling device

Abstract

The utility model relates to the technical field of target material production, in particular to a square target material leveling device which comprises a leveling platform, a leveling groove is formed in the middle position of the top face of the leveling platform, a portal frame is installed on the top face of the leveling platform, and a first telescopic motor is installed in the middle position of the top face of the portal frame. And a flattening plate is installed at the output end of the first telescopic motor and located over the leveling groove, positioning angle seats capable of doing reciprocating motion are installed at the four corners in the leveling groove correspondingly, and the four positioning angle seats are all in a right angle shape. The utility model has the advantages that: the calibration platform is used as a device main body, the middle position of the top surface of the calibration platform is provided with the leveling groove, the four corners in the leveling groove are respectively provided with the positioning angle seat which can reciprocate, the positioning angle seats are right-angle-shaped, the flattening plate which can reciprocate up and down is arranged above the calibration platform, and a deformed target material is placed in the leveling groove, so that the target material can be leveled; the target material is placed in the center through the four positioning angle seats, the flattening plate moves downwards, and the target material can be leveled.

Description

Technical Field

[0001] The utility model relates to the technical field of target material production, in particular to a square target material leveling device. Background Art

[0002] The target material is mainly composed of a target blank, a back plate and other parts, wherein the target blank is a sputtering source that forms various functional films on a substrate through magnetron sputtering, multi-arc ion plating or other types of coating systems under appropriate process conditions, that is, a target material bombarded by a high-speed ion beam, and is the core part of the sputtering target material. During the sputtering coating process, after the target blank is hit by ions, its surface atoms are sputtered and scattered and deposited on the substrate to form an electronic film. At present, after the square target material is produced, multiple target materials will be packaged and hoisted multiple times. During the hoisting process, it is inevitable that the target material will be bent and deformed due to reasons such as handling or stress, which affects the use of the target material. Based on this, the present application proposes a square target leveling device that can solve the above problems. Utility Model Content

[0003] The utility model aims to overcome the shortcomings of the prior art and provide a square target leveling device.

[0004] The purpose of the utility model is achieved through the following technical solutions: a square target material leveling device, comprising a leveling platform, a leveling groove is provided in the middle of the top surface of the leveling platform, a gantry is installed on the top surface of the leveling platform, a first telescopic motor is installed in the middle of the top surface of the gantry, a pressure plate is installed on the output end of the first telescopic motor, which is located directly above the leveling groove, and reciprocating positioning angle seats are installed at the four corners inside the leveling groove, and the four positioning angle seats are all right-angled, and reciprocating wedge seats are installed on both sides of the leveling groove, and stepped platforms are provided on both sides of the leveling platform away from the two sides of the top surface of the wedge seat, and reciprocating moving seats are installed on the top surfaces of the four stepped platforms, and U-shaped seats that can reciprocate up and down are installed above the four moving seats, and conveyor belts are installed inside the four U-shaped seats, and shock-absorbing pads are installed at the four corners of the bottom surface of the leveling platform.

[0005] Optionally, placement grooves are provided at the four corners of the top surface of the calibration platform, the inner walls of the four placement grooves are installed with second telescopic motors, and the four positioning angle seats are respectively installed at the output ends of the four second telescopic motors.

[0006] Optionally, placement grooves are provided on both sides of the top surface of the calibration platform, and the inner walls of the two placement grooves are installed with third telescopic motors, and the two wedge seats are respectively installed at the output ends of the two third telescopic motors.

[0007] Optionally, the top surfaces of the four step platforms are each provided with a sliding groove, the outer sides of the four sliding grooves are each installed with a fourth telescopic motor, the four moving seats are respectively slidably installed inside the four sliding grooves, and are respectively installed together with the output ends of the four fourth telescopic motors.

[0008] Optionally, a fifth telescopic motor is installed under each of the four movable seats, and the four U-shaped seats are respectively installed at output ends of the four fifth telescopic motors.

[0009] The utility model has the following advantages:

[0010] The square target leveling device uses a leveling platform as the main body of the device. A leveling groove is opened in the middle of the top surface of the leveling platform. Reciprocating positioning angle seats are installed at the four corners inside the leveling groove. The positioning angle seats are in a right-angle shape. A pressing plate that can reciprocate up and down is installed above the leveling platform. The deformed target is placed in the leveling groove, and the four positioning angle seats place the target at the center. The pressing plate moves down to level the target.

[0011] Among them, reciprocating wedge seats are installed on both sides of the leveling groove. The two wedge seats move inward at the same time, which can lift the target material from the bottom, making it convenient for the staff to take the target material.

[0012] Among them, stepped platforms are provided on the other two sides of the leveling platform away from the top surface of the wedge seat, and sliding grooves are provided on the top surfaces of the two stepped platforms. Moving seats that can move back and forth are installed inside the four sliding grooves, and telescopic motors are installed under the four moving seats, and U-shaped seats are installed at their output ends. Conveyor belts are installed inside the four U-shaped seats. When in use, the U-shaped seat is extended under the target material, and the target material can be moved out of the leveling groove by lifting and lowering the U-shaped seat, rotating the conveyor belt and moving the moving seat, thereby realizing the loading and unloading of workpieces to meet the needs of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the overall structure of the utility model from a first viewing angle;

[0014] Figure 2 This is a schematic diagram of the overall structure of the utility model from a second viewing angle;

[0015] Figure 3 For the utility model Figure 1 Schematic diagram of the internal structure;

[0016] Figure 4 This is a schematic diagram of the overall structure of the utility model's lieutenant colonel platform;

[0017] Figure 5 This is a schematic diagram of the overall structure of the positioning angle seat in the utility model;

[0018] Figure 6 It is a schematic diagram of the overall structure of the wedge seat in the utility model.

[0019] In the figure: 1-calibration platform, 2-second telescopic motor, 3-third telescopic motor, 4-positioning angle seat, 5-wedge seat, 6-first telescopic motor, 7-pressing plate, 8-moving seat, 9-U-shaped seat, 10-conveyor belt, 11-fourth telescopic motor, 12-shock-absorbing pad, 13-fifth telescopic motor, 14-gantry, 15-placing slot, 16-placing slot, 17-step platform, 18-sliding slot, 19-leveling slot. DETAILED DESCRIPTION

[0020] The utility model is further described below in conjunction with the accompanying drawings, but the protection scope of the utility model is not limited to the following description.

[0021] like Figures 1 to 6 As shown, a square target leveling device comprises a leveling platform 1, a leveling groove 19 is provided in the middle of the top surface of the leveling platform 1, a gantry 14 is installed on the top surface of the leveling platform 1, a first telescopic motor 6 is installed in the middle of the top surface of the gantry 14, a pressing plate 7 is installed on the output end of the first telescopic motor 6, which is located directly above the leveling groove 19, and reciprocating positioning angle seats 4 are installed at the four corners inside the leveling groove 19, and the four positioning angle seats 4 are all right-angled, and reciprocating wedge seats 5 are installed on both sides of the leveling groove 19, stepped platforms 17 are provided on both sides of the leveling platform 1 away from the two sides of the top surface of the wedge seat 5, and reciprocating moving seats 8 are installed on the top surfaces of the four stepped platforms 17, and U-shaped seats 9 that can reciprocate up and down are installed above the four moving seats 8, and conveyor belts 10 are installed inside the four U-shaped seats 9, and shock-absorbing pads 12 are installed at the four corners of the bottom surface of the leveling platform 1.

[0022] As an optional technical solution of the utility model, placement grooves 15 are opened at the four corners of the top surface of the calibration platform 1, and the inner walls of the four placement grooves 15 are installed with second telescopic motors 2. Four positioning angle seats 4 are respectively installed at the output ends of the four second telescopic motors 2. This facilitates the installation of the second telescopic motor 2, and drives the positioning angle seats 4 to perform reciprocating motion.

[0023] As an optional technical solution of the utility model, placement grooves 16 are opened on both sides of the top surface of the calibration platform 1, and the inner walls of the two placement grooves 16 are installed with third telescopic motors 3, and the two wedge seats 5 are respectively installed at the output ends of the two third telescopic motors 3.

[0024] As an optional technical solution of the utility model, the top surfaces of the four step platforms 17 are provided with sliding grooves 18, and the outer sides of the four sliding grooves 18 are installed with fourth telescopic motors 11. The four movable seats 8 are respectively slidably installed in the four sliding grooves 18, and are respectively installed together with the output ends of the four fourth telescopic motors 11. The sliding grooves 18 can limit the movable seats 8 to prevent them from shaking, and the fourth telescopic motor 11 can drive them to move, so that the conveyor belt 10 can extend to the bottom of the target material.

[0025] As an optional technical solution of the utility model, a fifth telescopic motor 13 is installed under each of the four movable seats 8, and four U-shaped seats 9 are respectively installed at the output ends of the four fifth telescopic motors 13, which can raise the position of the target material so that the target material can be moved out from above the top surface of the calibration platform 1.

[0026] In summary, the features, assembly methods, use processes and functions realized by each component of the utility model are as follows: the calibration platform 1 is used as the main body of the device, and a leveling groove 19 is opened in the middle of the top surface of the calibration platform 1. Reciprocating positioning angle seats 4 are installed at the four corners inside the leveling groove 19, which are in a right angle shape. A pressing plate 7 that can reciprocate up and down is installed above the calibration platform 1. The deformed target material is placed in the leveling groove 19, and the four positioning angle seats 4 place the target material at the center. The pressing plate 7 moves down to level the target material. Reciprocating wedge seats 5 are installed on both sides of the leveling groove 19. The two wedge seats 5 move inward at the same time to move the target material from The bottom is lifted up to facilitate the staff to take the target material. Step platforms 17 are provided on the other two sides of the leveling platform 1 away from the top surface of the wedge seat 5. Sliding grooves 18 are provided on the top surfaces of the two step platforms 17. Reciprocating moving seats 8 are installed inside the four sliding grooves 18. Telescopic motors are installed below the four moving seats 8, and U-shaped seats 9 are installed at their output ends. Conveyor belts 10 are installed inside the four U-shaped seats 9. When in use, the U-shaped seat 9 is extended under the target material. The target material can be moved out of the leveling groove 19 by lifting and lowering the U-shaped seat 9, rotating the conveyor belt 10 and moving the moving seat 8, thereby realizing the loading and unloading of workpieces to meet the needs of use.

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A square target leveling device, characterized in that: The invention comprises a calibration platform (1), wherein a leveling groove (19) is provided at the middle of the top surface of the calibration platform (1), a gantry (14) is installed at the top surface of the calibration platform (1), a first telescopic motor (6) is installed at the middle of the top surface of the gantry (14), a pressing plate (7) is installed at the output end of the first telescopic motor (6), and the pressing plate (7) is located directly above the leveling groove (19), and reciprocating positioning angle seats (4) are installed at the four corners inside the leveling groove (19), and the four positioning angle seats (4) are all right-angled, and the calibration platform (1) is provided with a plurality of positioning angle seats (4) arranged on the top surface of the calibration platform (1). Wedge seats (5) capable of reciprocating movement are installed on both sides of the flat groove (19), and stepped platforms (17) are provided on both sides of the calibration platform (1) away from the top surface of the wedge seats (5). Reciprocating movable seats (8) are installed on the top surfaces of the four stepped platforms (17), and U-shaped seats (9) capable of reciprocating up and down movement are installed above the four movable seats (8). Conveyor belts (10) are installed inside the four U-shaped seats (9), and shock-absorbing pads (12) are installed at the four corners of the bottom surface of the calibration platform (1).

2. A square target leveling device according to claim 1, characterized in that: The four corners of the top surface of the calibration platform (1) are provided with placement grooves (15), the inner walls of the four placement grooves (15) are each installed with a second telescopic motor (2), and the four positioning angle seats (4) are respectively installed at the output ends of the four second telescopic motors (2).

3. A square target leveling device according to claim 1, characterized in that: Placement grooves (16) are provided on both sides of the top surface of the calibration platform (1), and the inner walls of the two placement grooves (16) are both installed with third telescopic motors (3), and the two wedge seats (5) are respectively installed at the output ends of the two third telescopic motors (3).

4. A square target leveling device according to claim 1, characterized in that: The top surfaces of the four step platforms (17) are each provided with a sliding groove (18), the outer sides of the four sliding grooves (18) are each installed with a fourth telescopic motor (11), and the four movable seats (8) are respectively slidably installed inside the four sliding grooves (18) and are respectively installed together with the output ends of the four fourth telescopic motors (11).

5. The square target leveling device according to claim 1, characterized in that: A fifth telescopic motor (13) is installed below each of the four movable seats (8), and the four U-shaped seats (9) are respectively installed at the output ends of the four fifth telescopic motors (13).

Images