Core particle electrical parameter curve test board and test device
By setting up multiple probe components and magnifying glasses on the core-particle electrical parameter curve test bench, combining vacuum suction cups and heating electrodes, the problem of low testing efficiency in the prior art is solved, and efficient core-particle electrical parameter curve testing is achieved.
Patent Information
- Application Number
- CN202420035457.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-08
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2034-01-08
AI Technical Summary
In the prior art, the efficiency of testing the core-particle electrical parameter curve is low, especially when multiple core-particle electrodes are required to contact at the same time. The operation is complex and inefficient, and multiple people usually require cooperation.
A core-particle electrical parameter curve test bench was designed, including multiple probe assemblies installed on the support ring, which enables efficient contact between the probe and the core-particle electrode through the support frame and magnifying glass, and is equipped with a vacuum suction cup and heating electrode to simplify operation. process.
It realizes that a person can contact multiple core-grain electrodes at the same time, significantly improves the testing efficiency of core-grain electrical parameter curves, simplifies the operation process, and reduces manpower demand.
Smart Images
Figure CN222233570U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of chip electrical parameter testing, and in particular to a chip electrical parameter curve testing platform and testing device. Background Art
[0002] During the manufacturing process of semiconductor wafers, it is necessary to analyze the electrical parameter curves of the core particles. Sometimes the core particles need to be heated while being tested. Sometimes the core particles have been cracked and can no longer be tested using a probe station. Analyzing the parameter curves of these core particles is very cumbersome.
[0003] In the prior art, a test lead is used to manually touch the electrode of the chip, and then the knob on the transistor tracer is adjusted to observe the electrical parameter characteristic curve of the chip. Sometimes there are many electrodes on the chip, and one person cannot complete the operation of contacting different electrodes of the chip with multiple test leads at the same time, and it is not convenient to observe the electrical parameter characteristic curve of the chip. In this case, multiple people are needed to operate together.
[0004] It can be seen that the efficiency of testing the electrical parameter curve of the core particle in the prior art is relatively low. Utility Model Content
[0005] The main purpose of the present application is to provide a chip electrical parameter curve test bench and a test device, aiming to solve the technical problem of low efficiency in testing the electrical parameter curve of the chip in the prior art.
[0006] In order to solve the above technical problems, the present application provides a core particle electrical parameter curve test bench, the test bench comprising:
[0007] A pad, the pad being used for placing the core particles;
[0008] A support ring, the support ring is installed above the pad through a support frame;
[0009] The probe assembly is multiple in number and each of the multiple probe assemblies is mounted on the support ring, and the probe assembly is in electrical contact with the electrode of the core particle.
[0010] In some possible implementations, the test bench further includes a magnifying bracket mounted on the support ring, a magnifying glass is mounted on the magnifying bracket, and the magnifying glass is used to magnify the electrodes of the core particles.
[0011] In some possible implementations, the magnifying bracket includes a first section and a second section, the first section is mounted on the support ring, the magnifying glass is mounted on the second section, a threaded hole is opened on the first section, and the second section is threadedly connected to the first section through the threaded hole.
[0012] In some possible implementations, a blind hole is opened on the support ring, one end of the first section is located in the blind hole, and the first section can rotate in the blind hole.
[0013] In some possible implementations, the probe assembly includes a support mounted on the support ring, an extension arm mounted on the support, and a probe mounted on the extension arm.
[0014] In some possible implementations, the extension arm includes a first extension portion and a second extension portion, the first extension portion is mounted on the support, and the probe is mounted on the second extension portion;
[0015] The first extension portion is provided with a sliding hole and a first fixing hole which are interconnected, the second extension portion passes through the sliding hole, and the first extension portion and the second extension portion are fixed by fixing bolts extending into the first fixing hole.
[0016] In some possible implementations, the first extension portion is provided with a plurality of adjustment holes along its extension direction, the support is provided with a plurality of second fixing holes, and the first extension portion is fixed to the support by fixing screws passing through the second fixing holes and the adjustment holes.
[0017] In some possible implementations, a vacuum suction cup is further installed on the pad, and a vacuum hole is opened on the vacuum suction cup, and the vacuum hole is used to place the core particle.
[0018] In some possible implementations, a heating electrode and a terminal are further installed on the vacuum chuck, and the heating electrode is used to heat the vacuum chuck.
[0019] In some possible implementations, the present application further provides a device for testing a core particle electrical parameter curve, the device comprising:
[0020] A core particle electrical parameter curve test bench as described in the present application;
[0021] A transistor tracer is electrically connected to the terminals of the chip electrical parameter curve test bench through a connecting wire, and the transistor tracer is also electrically connected to the probes of the chip electrical parameter curve test bench through a connecting wire.
[0022] Compared with the prior art, this application has the following beneficial effects:
[0023] The embodiment of the present application proposes a core particle electrical parameter curve test bench and test device. By arranging multiple probe assemblies on a support ring, only one person is needed to make the probe assemblies contact with multiple electrodes of the core particle, and there is no need for multiple people to operate simultaneously, thereby improving the test efficiency of the core particle's electrical parameter curve. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0025] Figure 1 A schematic diagram of the front cross-sectional structure of a core particle electrical parameter curve test bench provided in an embodiment of the present application;
[0026] Figure 2 A schematic diagram of a top view of the structure of the amplifying bracket, the probe assembly, etc. provided in an embodiment of the present application installed on a supporting ring;
[0027] Figure 3 A partial cross-sectional schematic diagram of the connection between the first extension portion and the second extension portion provided in an embodiment of the present application;
[0028] Figure 4 A partial cross-sectional schematic diagram of the connection between the first extension portion and the support provided in an embodiment of the present application;
[0029] Figure 5 A schematic top view of a vacuum suction cup provided in an embodiment of the present application installed on a pad;
[0030] Figure 6 A schematic diagram of the front structure of a core particle electrical parameter curve testing device provided in an embodiment of the present application.
[0031] Figure numerals: 1. pad; 2. terminal; 3. support frame; 4. probe assembly; 41. first extension; 411. sliding hole; 412. first fixing hole; 413. adjustment hole; 42. support; 421. second fixing hole; 43. probe; 44. second extension; 45. fixing screw; 46. fixing bolt; 5. support ring; 51. blind hole; 6. magnifying bracket; 61. first section; 611. threaded hole; 62. second section; 63. magnifying glass; 7. vacuum suction cup; 71. vacuum hole; 8. heating electrode; 9. core particle electrical parameter curve test bench; 10. connecting wire; 11. transistor diagram instrument. DETAILED DESCRIPTION
[0032] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.
[0033] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.
[0034] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0035] In the description of the present application, it should be noted that the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0036] See also Figure 1 and Figure 2 The present application provides a core particle electrical parameter curve test bench, which includes a pad 1, a support ring 5 and a probe assembly 4.
[0037] The pad 1 is used to place the core particles. The pad 1 may be made of PVC insulating material and may be square in shape. The placement position of the core particles may be set on the pad 1 to facilitate fixing the core particles on the pad 1 .
[0038] The support ring 5 is installed above the pad 1 through the support frame 3. The material of the support ring 5 can be white steel, and the orthographic projection shape of the support ring 5 on the pad 1 can be circular, so that the user can more easily observe the core particles through the support ring 5. The support frame 3 is installed between the pad 1 and the support ring 5, so that the support ring 5 and the pad 1 have a certain distance in the vertical direction. For example, the support frame 3 can include a plurality of long screws, and a plurality of screw holes are opened at corresponding positions of the pad 1 and the support ring 5, such as four screw holes are opened respectively, and the long screws pass through the screw holes on the support ring 5 and the pad 1 in turn, and the support ring 5 can be suspended by using the self-locking function of the thread of the long screw.
[0039] There are multiple probe assemblies 4, and the multiple probe assemblies 4 are all installed on the support ring 5. The probe assemblies 4 are in electrical contact with the electrodes of the core particle. The upper surface of the support ring 5 is protected by an insulating plastic coating, and the probe assembly 4 is installed at a position coated with the insulating plastic coating on the support ring 5. For example, there can be four probe assemblies 4, and the four probe assemblies 4 can contact multiple different electrodes of the core particle at the same time.
[0040] When in use, the core particle is fixed on the pad 1, and then multiple probe assemblies 4 are respectively contacted with different electrodes of the core particle. Since the probe assemblies 4 are installed on the support ring 5 and the core particle is also fixed on the pad 1, it is not necessary for multiple people to make the probe assemblies 4 contact with different electrodes of the core particle. One person can complete the operation of multiple probe assemblies 4 contacting different electrodes of the core particle and the operation of observing the electrical parameter characteristic curve of the core particle. In this way, the electrical parameter curve of the core particle can be more easily tested through the test bench, and the efficiency of testing the electrical parameter curve of the core particle can also be greatly improved.
[0041] Based on the above design, in this embodiment, by setting multiple probe assemblies 4 on the support ring 5, only one person is needed to make the probe assemblies 4 contact with multiple electrodes of the core particle, and multiple people are not needed to operate simultaneously, thereby improving the test efficiency of the electrical parameter curve of the core particle.
[0042] In some embodiments, please refer again to Figure 1 The test bench also includes an amplifying bracket 6 mounted on the supporting ring 5, and a magnifying glass 63 is mounted on the amplifying bracket 6, and the magnifying glass 63 is used to magnify the electrodes of the core particles.
[0043] The magnifying glass 63 can be used to more conveniently adjust the position of the probe assembly 4, thereby making it easier for the probe assembly 4 to contact the electrode of the core particle, thereby further improving the test efficiency of the electrical parameter curve of the core particle.
[0044] In some embodiments, please refer again to Figure 1 The magnifying bracket 6 includes a first section 61 and a second section 62. The first section 61 is installed on the supporting ring 5, and the magnifying glass 63 is installed on the second section 62. A threaded hole 611 is opened on the first section 61, and the second section 62 is threadedly connected to the first section 61 through the threaded hole 611.
[0045] The magnifying glass 63 may be installed on the second section 62 in a conventional manner. For example, the magnifying glass 63 may be embedded in the second section 62, or fixed to the second section 62 by screws, or fixed to the second section 62 by a fixing rope.
[0046] When the horizontal position of the magnifying glass 63 needs to be adjusted, the second section 62 can be rotated. Since the second section 62 is connected to the first section 61 through the threaded hole 611, when the second section 62 is rotated, the second section 62 will be displaced in the horizontal direction, and the second section 62 will drive the magnifying glass 63 to move in the horizontal direction, so that the magnifying glass 63 can magnify different positions of the core particles in the horizontal direction.
[0047] The number of threaded holes 611 on the first section 61 can be multiple, and the multiple threaded holes 611 are arranged in the vertical direction. When the vertical position of the magnifying glass 63 needs to be adjusted, the second section 62 can be connected to the first section 61 through the threaded holes 611 at different heights. When the second section 62 is electrically connected to the first section 61 through the threaded holes 611 located at different heights, the magnifying glass 63 can be located at different heights.
[0048] In this way, by adjusting the relative positions of the first section 61 and the second section 62, the magnifying glass 63 can be adjusted to different positions in the horizontal and vertical directions, so that it is easier to make the probe 43 of the probe assembly 4 contact with the electrode of the core particle through the magnifying glass 63, thereby further improving the test efficiency of the electrical parameter curve of the core particle.
[0049] In some embodiments, please refer again to Figure 1 A blind hole 51 is formed on the support ring 5 , one end of the first section 61 is located in the blind hole 51 , and the first section 61 can rotate in the blind hole 51 .
[0050] The blind hole 51 can be opened on the top surface of the support ring 5, and the blind hole 51 can be transitionally matched with the first section 61, so that the first section 61 can not only be fixed in the blind hole 51, but also rotate around the axis of the blind hole 51. When the first section 61 rotates around the axis of the blind hole 51, it will drive the second section 62 and the magnifying glass 63 to adjust their positions in turn, so that it is more convenient to adjust the magnifying glass 63 to different positions.
[0051] In some embodiments, please refer again to Figure 1 The probe assembly 4 includes a support 42 mounted on the support ring 5, an extension arm mounted on the support 42, and a probe 43 mounted on the extension arm.
[0052] The probe 43 is a conventional product, and the probe 43 can be set on the extension arm in a conventional manner. For example, a small hole is opened on the extension arm so that the probe 43 can just pass through the small hole. The probe 43 can also be directly fixed to the extension arm by a fixing rope, etc. The support 42 can be fixed to the support ring 5 by screws. The support 42 and the extension arm can make it easier for the probe 43 to contact the electrode of the core particle.
[0053] In some embodiments, see Figure 1 and Figure 3 The extension arm includes a first extension portion 41 and a second extension portion 44. The first extension portion 41 is mounted on a support 42, and the probe 43 is mounted on the second extension portion 44. The first extension portion 41 is provided with a sliding hole 411 and a first fixing hole 412 which are interconnected. The second extension portion 44 passes through the sliding hole 411. The first extension portion 41 and the second extension portion 44 are fixed by a fixing bolt 46 which extends into the first fixing hole 412.
[0054] When the position of the probe 43 in the vertical direction needs to be adjusted, the fixing bolt 46 can be rotated so that the fixing bolt 46 no longer presses the second extension portion 44, and then the second extension portion 44 is slid along the sliding hole 411. When the probe 43 is adjusted to a suitable position, the fixing bolt 46 is rotated again so that the fixing bolt 46 presses the second extension portion 44. In this way, it is not only convenient to adjust the position of the probe 43 in the vertical direction, but also more convenient to fix the second extension portion 44 on the first extension portion 41.
[0055] In some embodiments, see Figure 1 and Figure 4 The first extension portion 41 has a plurality of adjustment holes 413 along its extension direction, the support 42 has a plurality of second fixing holes 421 , and the first extension portion 41 is fixed to the support 42 by fixing screws 45 passing through the second fixing holes 421 and the adjustment holes 413 .
[0056] When it is necessary to further adjust the position of the probe 43 in the vertical direction, the fixing screw 45 can be rotated out from the adjustment hole 413 and the second fixing hole 421, and then the position of the first extension 41 in the vertical direction can be adjusted. When the position of the probe 43 in the vertical direction is appropriate, the fixing screw 45 is passed through the adjustment hole 413 and the second fixing hole 421 to fix the first extension 41 on the support 42. In this way, it is not only convenient to adjust the position of the probe 43 in the vertical direction, but also more convenient to fix the first extension 41 on the support 42.
[0057] In some embodiments, see Figure 1 and Figure 5 A vacuum suction cup 7 is also installed on the pad 1, and a vacuum hole 71 is opened on the vacuum suction cup 7. The vacuum hole 71 is used to place the core particles.
[0058] The suction cup is a conventional product, and the vacuum hole 71 can absorb the core particle. The vacuum suction cup 7 can more easily fix the core particle, thereby making it easier to test the electrical parameter curve of the core particle.
[0059] In some embodiments, please refer again to Figure 1 and Figure 5 A heating electrode 8 and a terminal 2 are also installed on the vacuum suction cup 7, and the heating electrode 8 is used to heat the vacuum suction cup 7.
[0060] The terminal 2 and the heating electrode 8 are both conventional products. The terminal 2 is electrically connected to the electrode on the back of the core particle. The heating electrode 8 can heat the vacuum suction cup 7. After the vacuum suction cup 7 is heated, the core particle can be heated, thereby making it easier to perform electrical parameter curve testing on core particles at different temperatures.
[0061] Based on the same inventive concept, in some embodiments, the present application also provides a device for testing the electrical parameter curve of a core particle, see Figure 6 The test device includes: a core electrical parameter curve test bench 9 and a transistor graphing instrument 11 as in the present application, the transistor graphing instrument 11 is electrically connected to the terminal 2 of the core electrical parameter curve test bench 9 through a connecting line 10, and the transistor graphing instrument 11 is also electrically connected to the probe 43 of the core electrical parameter curve test bench 9 through a connecting line 10.
[0062] The connecting wire 10 is a conventional connecting wire, and the transistor diagram 11 is a conventional product. When testing the electrical parameter curve of the core particle, the vacuum is turned on to fix the core particle on the vacuum suction cup 7, and then the heating function of the vacuum suction cup 7 is turned on to heat the surface of the vacuum suction cup 7 to the specified temperature. The terminal 2 of the vacuum suction cup 7 is connected to the socket of the transistor diagram 11 with the connecting wire 10, and then the probe 43 is placed on the support ring 5 with insulation protection, and the position of the tip of the probe 43 is adjusted through the magnifying glass 63 so that the tip of the probe 43 contacts the electrode of the core particle. The other end of the probe 43 is connected to the socket of the transistor diagram 11 through the connecting wire 10. After completing the line connection part between the transistor diagram 11 and the core particle electrode, the tester observes the electrical parameter characteristic curve of the core particle by adjusting the various parameter knobs of the transistor diagram 11.
[0063] In this way, the line connection and switching between the multi-electrode core particle and the transistor diagram 11 can be operated by only one person. The high-power magnifying glass 63 on the test bench can be used to test small-sized core particles, and a heating device is added to the vacuum suction cup 7 to test the electrical parameter characteristic curve of the core particle under different temperature conditions. The test efficiency of the electrical parameter characteristic curve of the core particle can also be greatly improved.
[0064] The above are only various implementations of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.
Claims
1. A core particle electrical parameter curve test bench, characterized in that: The test bench comprises: A pad (1), the pad (1) being used for placing core particles; A support ring (5), wherein the support ring (5) is installed above the pad (1) via a support frame (3); A probe assembly (4), wherein the number of the probe assemblies (4) is plural, and the plural probe assemblies (4) are all mounted on the support ring (5), and the probe assembly (4) is in electrical contact with the electrode of the core particle.
2. The chip electrical parameter curve test bench according to claim 1, characterized in that: The test bench also includes an amplifying bracket (6) mounted on the supporting ring (5), and a magnifying glass (63) is mounted on the amplifying bracket (6), and the magnifying glass (63) is used to magnify the electrodes of the core particles.
3. The chip electrical parameter curve test bench according to claim 2, characterized in that: The magnifying bracket (6) comprises a first section (61) and a second section (62); the first section (61) is mounted on the supporting ring (5); the magnifying glass (63) is mounted on the second section (62); a threaded hole (611) is formed on the first section (61); and the second section (62) is threadedly connected to the first section (61) via the threaded hole (611).
4. The chip electrical parameter curve test bench according to claim 3, characterized in that: The support ring (5) is provided with a blind hole (51), one end of the first section (61) is located in the blind hole (51), and the first section (61) is capable of rotating in the blind hole (51).
5. The chip electrical parameter curve test bench according to claim 1, characterized in that: The probe assembly (4) comprises a support (42) mounted on the support ring (5), an extension arm mounted on the support (42), and a probe (43) mounted on the extension arm.
6. The chip electrical parameter curve test bench according to claim 5, characterized in that: The extension arm comprises a first extension portion (41) and a second extension portion (44), the first extension portion (41) is mounted on the support (42), and the probe (43) is mounted on the second extension portion (44); The first extension portion (41) is provided with a sliding hole (411) and a first fixing hole (412) which are interconnected, the second extension portion (44) passes through the sliding hole (411), and the first extension portion (41) and the second extension portion (44) are fixed by a fixing bolt (46) extending into the first fixing hole (412).
7. The chip electrical parameter curve test bench according to claim 6, characterized in that: The first extension portion (41) is provided with a plurality of adjustment holes (413) along its extension direction, the support (42) is provided with a plurality of second fixing holes (421), and the first extension portion (41) is fixed to the support (42) by fixing screws (45) passing through the second fixing holes (421) and the adjustment holes (413).
8. The chip electrical parameter curve test bench according to any one of claims 1 to 7, characterized in that: A vacuum suction cup (7) is also installed on the pad (1), and a vacuum hole (71) is opened on the vacuum suction cup (7), and the vacuum hole (71) is used to place the core particles.
9. The chip electrical parameter curve test bench according to claim 8, characterized in that: A heating electrode (8) and a terminal (2) are also mounted on the vacuum suction cup (7); the heating electrode (8) is used to heat the vacuum suction cup (7); and the terminal (2) is electrically connected to the electrode of the core particle.
10. A device for testing the electrical parameter curve of a core particle, characterized in that: The testing device comprises: The core particle electrical parameter curve test bench (9) as claimed in any one of claims 1 to 9; A transistor tracer (11), the transistor tracer (11) being electrically connected to a terminal (2) of the chip electrical parameter curve test bench (9) via a connecting line (10), and the transistor tracer (11) being also electrically connected to a probe (43) of the chip electrical parameter curve test bench (9) via a connecting line (10).