Nitrogen-charging damping logistics vehicle suitable for semiconductors

Abstract

The utility model belongs to the technical field of semiconductor manufacturing and transporting devices, and particularly relates to a nitrogen charging and shock absorbing logistics vehicle suitable for semiconductors, which comprises a cabinet body, a cart handle fixedly arranged on the side wall of the cabinet body, and two universal shock absorbing wheels and two directional shock absorbing wheels which are correspondingly arranged at the bottom of the cabinet body, the cabinet body is sequentially provided with an isolation chamber, a nitrogen filling chamber and a nitrogen tank placing chamber from top to bottom, partition baffles are correspondingly arranged in the isolation chamber and the nitrogen filling chamber, a fixing clamping groove is formed in the nitrogen tank placing chamber, a nitrogen tank is placed on the fixing clamping groove, and the nitrogen tank is connected with the nitrogen filling chamber through a pipeline. According to the nitrogen-filled nitrogen storage cabinet, shock absorption can be achieved, wire collapse of products can be avoided, nitrogen can be filled, layering of the products can be avoided, and the nitrogen-filled nitrogen storage cabinet can be adjusted to be in a closed mode or an open mode according to needs.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing transportation devices, and in particular relates to a nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors. Background Art

[0002] It involves the transportation and storage of semiconductor products, and is applied to the semiconductor bonding process and plastic sealing process. The traditional operation method in the industry is to place the bonded products on an ordinary cart after the inspection by the inspector, and the inspector will place them at the transfer window of bonding and plastic sealing, and the plastic sealing material receiver will perform the material receiving action. The use of traditional carts has the following defects: 1. When using traditional carts, the cart has no shockproof function. If the employee pushes the cart fast, the cart will vibrate violently, which is easy to cause the gold and copper wire to collapse; 2. When using traditional carts, there is no distinction between each batch of products, which is easy to mix batches. At the same time, the inspectors and material receivers have to check the material box number to find the material, and the operation process is easy to cause the product to collapse; 3. When using traditional carts, the carts are completely open, and dust is easy to fall on the products, causing product contamination; 4. When using traditional carts, the carts are completely open, and the products are easy to absorb moisture in the air, causing the products to be stratified. Utility Model Content

[0003] In view of the above-mentioned deficiencies existing in the prior art, the utility model provides a nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors to solve the above-mentioned existing problems.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors comprises a cabinet, a cart handle fixedly arranged on the side wall of the cabinet, and two universal shock-absorbing wheels and two directional shock-absorbing wheels correspondingly installed on the bottom of the cabinet. The cabinet is provided with an isolation chamber, a nitrogen-filling chamber and a nitrogen tank placement chamber from top to bottom in sequence. The isolation chamber and the nitrogen-filling chamber are both provided with baffle plates correspondingly. The nitrogen tank placement chamber is provided with a fixed card slot, a nitrogen tank is placed on the fixed card slot, the nitrogen tank is connected to the nitrogen-filling chamber through a pipeline, the nitrogen-filling chamber and the nitrogen tank placement chamber are both provided with cabinet doors correspondingly for rotational connection, and the isolation chamber is provided with a cover plate correspondingly for rotational connection.

[0006] Furthermore, a hydraulic support rod is connected between the cover plate and the cabinet body, and the hydraulic support rod is located in the isolation chamber.

[0007] Furthermore, a cover plate handle is fixedly connected to the cover plate.

[0008] Furthermore, a flow regulator is fixedly connected to the outer wall of the nitrogen filling chamber.

[0009] Furthermore, anti-collision buffer strips are installed at the corners of the cabinet.

[0010] Compared with the prior art, the utility model has the following beneficial effects:

[0011] 1. The bottom of the utility model has a shock-absorbing function, which can prevent the product bonding wire from breaking due to the large vibration of the car, greatly improving the quality of the product;

[0012] 2. The utility model is provided with a baffle plate to avoid mixing of products of different batches. At the same time, the inspectors and plastic sealing material receiving personnel can take the products from the corresponding area according to the needs, without checking each material box one by one, which can avoid product collapse;

[0013] 3. The utility model has two modes, closed and open, which can be adjusted according to actual needs. The closed mode is used for special products to prevent dust from falling on the product and causing product contamination;

[0014] 4. The utility model has two modes, closed and open, which can be adjusted according to actual needs. The car has a nitrogen interface, which can fill the enclosed space with nitrogen to prevent the product from oxidation and stratification, greatly improving the product quality;

[0015] 5. The utility model is provided with an anti-collision buffer strip to prevent excessive vibration during a car collision, thereby preventing the product from breaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of an embodiment of a nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors according to the utility model;

[0017] The reference numerals in the drawings of the specification include:

[0018] Cabinet body 1, trolley handle 2, anti-collision buffer strip 3, universal shock-absorbing wheel 4, directional shock-absorbing wheel 5, nitrogen tank placement room 6, flow regulator 7, nitrogen filling room 8, cover plate 9, cover plate handle 10. DETAILED DESCRIPTION

[0019] In order to enable those skilled in the art to better understand the present invention, the technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0020] Among them, the drawings are only used for illustrative explanations, and they only represent schematic diagrams rather than actual pictures, and should not be understood as limitations on this patent; in order to better illustrate the embodiments of the utility model, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0021] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0022] In the description of the present invention, unless otherwise clearly specified and limited, if the term "connection" or the like appears to indicate the connection relationship between components, the term should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two components or the interaction relationship between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] Example:

[0024] like Figure 1 As shown, the utility model is a nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors, comprising a cabinet 1, a cart handle 2 fixedly arranged on the side wall of the cabinet 1, and two universal shock-absorbing wheels 4 and two directional shock-absorbing wheels 5 correspondingly installed on the bottom of the cabinet 1. The cabinet 1 is provided with an isolation chamber, a nitrogen-filling chamber 8 and a nitrogen tank placement chamber 6 from top to bottom, and the isolation chamber and the nitrogen-filling chamber 8 are respectively provided with baffle plates, and a fixed card slot is provided in the nitrogen tank placement chamber 6, and a nitrogen tank is placed on the fixed card slot. The nitrogen tank is connected to the nitrogen-filling chamber 8 by a pipeline, and the nitrogen-filling chamber 8 and the nitrogen tank placement chamber 6 are both correspondingly connected with cabinet doors, and the isolation chamber is correspondingly connected with a cover plate 9, and a hydraulic support rod is connected between the cover plate 9 and the cabinet 1, and the hydraulic support rod is located in the isolation chamber, and a cover plate handle 10 is fixedly connected to the cover plate 9, and a flow regulator 7 is fixedly connected to the outer wall of the nitrogen-filling chamber 8, and anti-collision buffer strips 3 are correspondingly installed at the corners of the cabinet 1.

[0025] Specifically, when in use, the working steps of the nitrogen-filled shock-absorbing logistics vehicle are as follows: 1. The bonding inspector places the inspected products into the logistics vehicle, which can be placed in an isolation room or a nitrogen-filled room 8 according to product requirements; 2. After the logistics vehicle is full of products, the logistics vehicle is sent to the next process; 3. The material worker of the next process receives the products in the logistics vehicle and arranges them for machine processing; 4. The material worker of the next process returns the material vehicle to the bonding process; 5. Repeat steps 1-4.

[0026] The nitrogen filling chamber 8 is mainly used to store vehicle-mounted power devices to prevent the products from absorbing moisture and oxidizing; the isolation chamber is mainly used to store ordinary devices to isolate dust and prevent contamination of products; the nitrogen tank placement chamber 6 is mainly used to store nitrogen cylinders to provide nitrogen for the nitrogen filling chamber 8.

[0027] The logistics vehicle is equipped with a nitrogen filling chamber 8 and an isolation chamber to facilitate the storage of products with different requirements. The isolation chamber is equipped with a cover plate 9 and a hydraulic strut to facilitate employees to take products. The logistics vehicle is equipped with double spring shock-absorbing wheels to absorb vibrations generated during transportation. The logistics vehicle is equipped with anti-collision buffer strips 3 around it to prevent bumps during transportation. The nitrogen filling chamber 8 of the logistics vehicle is equipped with a flow regulator 7, which can adjust the nitrogen flow rate and save nitrogen while ensuring the temperature and humidity in the nitrogen filling chamber 8. The nitrogen tank placement chamber 6 of the logistics vehicle is equipped with two four-liter nitrogen bottles, which can meet mobile gas supply and are easy to replace. The logistics vehicle can be used in multiple processes and can also be used as a temporary storage cabinet for products.

[0028] The above are only embodiments of the utility model. The common sense such as the known specific structures and characteristics in the scheme is not described in detail here. The ordinary technicians in the relevant field are aware of all the common technical knowledge in the technical field to which the utility model belongs before the application date or priority date, can obtain all the existing technologies in the field, and have the ability to apply the conventional experimental means before that date. The ordinary technicians in the relevant field can improve and implement the scheme in combination with their own abilities under the enlightenment given by this application. Some typical known structures or known methods should not become obstacles for the ordinary technicians in the relevant field to implement this application. It should be pointed out that for the technicians in this field, without departing from the structure of the utility model, several deformations and improvements can be made, which should also be regarded as the protection scope of the utility model, and these will not affect the effect of the implementation of the utility model and the practicality of the patent.

Claims

1. A nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors, characterized by: The utility model comprises a cabinet body, a trolley handle fixedly arranged on the side wall of the cabinet body, and two universal shock-absorbing wheels and two directional shock-absorbing wheels correspondingly installed on the bottom of the cabinet body. The cabinet body is provided with an isolation chamber, a nitrogen filling chamber and a nitrogen tank placement chamber in sequence from top to bottom. The isolation chamber and the nitrogen filling chamber are respectively provided with baffle plates. The nitrogen tank placement chamber is provided with a fixed card slot, a nitrogen tank is placed on the fixed card slot, the nitrogen tank is connected with a pipeline of the nitrogen filling chamber, the nitrogen filling chamber and the nitrogen tank placement chamber are respectively provided with cabinet doors for corresponding rotational connection, and the isolation chamber is provided with a cover plate for corresponding rotational connection.

2. A nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors as claimed in claim 1, characterized in that: A hydraulic support rod is connected between the cover plate and the cabinet body, and the hydraulic support rod is located in the isolation chamber.

3. A nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors as claimed in claim 2, characterized in that: A cover plate handle is fixedly connected to the cover plate.

4. A nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors as claimed in claim 3, characterized in that: A flow regulator is fixedly connected to the outer wall of the nitrogen filling chamber.

5. A nitrogen-filled shock-absorbing logistics vehicle suitable for semiconductors as claimed in claim 4, characterized in that: Anti-collision buffer strips are correspondingly installed at the corners of the cabinet.

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