Target material
By designing specific backplane and target structures, and using assembly and welding, the target binding process is simplified, the cumbersome problems of traditional binding are solved, and the production efficiency is improved.
Patent Information
- Application Number
- CN202420894075.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-04-28
AI Technical Summary
The binding process of traditional target materials is cumbersome and time-consuming and labor-intensive, and needs to be improved to improve efficiency.
A target structure is designed, including a back plate and a target body, with mounting grooves, grooves and threaded rods on the back plate, and an L-shaped limiting groove and projecting thread grooves on the target body, through assembly and Welding realizes the close binding of the target material and the back plate, and uses solder fill layer and electron beam bombardment to achieve rapid welding.
The target binding process is simplified, labor time is saved, processing efficiency is improved, and a faster production process is achieved.
Smart Images
Figure CN222250946U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of target materials, in particular to a target material. Background Art
[0002] Target material is an important coating material, among which sputtering coating is the most commonly used method. It has a wide range of applications in integrated circuits, flat panel displays, solar energy, optical devices and other fields.
[0003] At present, in semiconductor manufacturing, it is generally necessary to bind the target material and the backing plate to prevent the target material from being unevenly heated and broken in subsequent applications.
[0004] In order to ensure a tight bond between the two, a common bonding method is welding. By adding a layer of 4-series aluminum alloy between the target and the back plate, the 4-series aluminum alloy is first welded to the back plate, and then the target is welded to the 4-series aluminum alloy. The target and the back plate are welded twice.
[0005] This shows that traditional target material binding is very troublesome, time-consuming and labor-intensive, and therefore needs to be improved. Summary of the invention
[0006] The purpose of the utility model is to provide a target material to solve the problems raised in the above background technology.
[0007] To achieve the above object, the utility model provides the following technical solutions: a target material, comprising a back plate and a target material body, the back plate is provided with a mounting groove, the mounting groove is further provided with a groove, a threaded rod is provided in the middle of the groove, and a plurality of limit blocks are provided on the inner wall of the mounting groove;
[0008] A plurality of L-shaped limiting grooves are arranged on the outer wall of the target body, a protrusion is arranged at the bottom of the target body, and a thread groove is arranged in the middle of the protrusion.
[0009] Preferably, a solder filling layer is laid in the groove.
[0010] Preferably, after the target body and the back plate are assembled, the protrusion is embedded in the groove, the threaded rod is inserted into the threaded groove, and the limit block is snapped into the limit groove.
[0011] Preferably, a mounting ring is further provided on the outer wall of the back plate, and a plurality of mounting holes are provided on the mounting ring.
[0012] Compared with the prior art, the utility model has the following beneficial effects: the utility model has a simple structure, a novel design, and a specially designed back plate structure and a target body structure, which can be assembled first and then welded to bind the targets, thereby saving labor time and improving processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 It is a top view schematic diagram of the overall structure of the utility model;
[0014] Figure 2 This is a top view of the structure of the back plate of the utility model
[0015] Figure 3 This is a schematic diagram of the structure of the target material of the utility model.
[0016] Figure 4 It is a front cross-sectional schematic diagram of the overall structure of the utility model. DETAILED DESCRIPTION
[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0018] See also Figure 1 The utility model provides a technical solution: a target material, comprising a back plate 1 and a target body 2,
[0019] A mounting groove 11 is formed on the back plate 1, and a groove 12 is formed in the mounting groove 11. A threaded rod 13 is arranged in the middle of the groove 12. A plurality of limit blocks 14 are arranged on the inner wall of the mounting groove 11. Finally, a solder filling layer 15 is laid in the groove 12.
[0020] A plurality of L-shaped limiting grooves 24 are provided on the outer wall of the target body 2 , and a protrusion 22 is provided at the bottom of the target body 1 , and a thread groove 23 is provided in the middle of the protrusion 22 .
[0021] The target body 2 and the back plate 1 are bound together in the following manner: align the L-shaped limiting groove 24 on the target body 2 with the limiting block 14 of the back plate 1, and then insert the target body 2 into the back plate 1 for assembly.
[0022] After the target body and the back plate are assembled, the target body 2 is embedded in the back plate 1, and the protrusion 22 is embedded in the groove 12 to fit tightly with the solder filling layer 15, and the threaded rod 13 is inserted into the thread groove 23, and then the target body is rotated so that the limit block 14 is completely inserted into the limit groove 24, and the threaded rod 13 and the thread groove 23 are also tightened, so that the target body 2 and the back plate 1 are preliminarily bound;
[0023] Then, the target body 2 and the back plate 1 that have been preliminarily bound are bombarded with an electron beam so that the solder filling layer 15 melts quickly and is filled between the target and the back plate to achieve welding, thereby further binding the target base.
[0024] In addition, a mounting ring 16 may be further provided on the outer wall of the back plate 1 , and a plurality of mounting holes 17 may be provided on the mounting ring 16 , so as to facilitate subsequent installation in the coating system.
[0025] In summary, the specially designed back plate structure and target body structure can be assembled first and then welded to bind the targets, thereby saving work time and improving processing efficiency.
[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A target material, comprising a backing plate (1) and a target material body (2), characterized in that: The back plate (1) is provided with a mounting groove (11), a groove (12) is further provided in the mounting groove (11), a threaded rod (13) is provided in the middle of the groove (12), and a plurality of limit blocks (14) are provided on the inner wall of the mounting groove (11); A plurality of L-shaped limiting grooves (24) are provided on the outer wall of the target body (2), a protrusion (22) is provided at the bottom of the target body (2), and a thread groove (23) is provided in the middle of the protrusion (22).
2. A target material according to claim 1, characterized in that: A solder filling layer (15) is laid in the groove (12).
3. A target material according to claim 1, characterized in that: After the target body (2) and the back plate (1) are assembled, the protrusion (22) is embedded in the groove (12), the threaded rod (13) is inserted into the threaded groove (23), and the limit block (14) is snapped into the limit groove (24).
4. A target material according to claim 1, characterized in that: A mounting ring (16) is also provided on the outer wall of the back plate (1), and a plurality of mounting holes (17) are provided on the mounting ring (16).