Heat insulation structure, heat insulation sheet group and reaction furnace

Abstract

The utility model is applicable to the technical field of heat insulation sheet structures, and provides a heat insulation structure, a heat insulation sheet group and a reaction furnace, the heat insulation structure is applied to the reaction furnace, the heat insulation structure comprises a plurality of first heat insulation plates which are arranged in sequence, and each first heat insulation plate is provided with one or more airflow holes. The heat insulation structure is formed by sequentially arranging the multiple first heat insulation plates, each first heat insulation plate is provided with one or more airflow holes, when the heat insulation structure is applied to the reaction furnace, airflow in the reaction furnace can circulate through the airflow holes, and therefore the temperature uniformity in the reaction furnace is improved, and the heat insulation effect is improved. Therefore, the situation that the upper, middle and lower process effects are not uniform due to airflow turbulence in the furnace mouth area of the reaction furnace is improved, and the sheet resistance of the battery piece located in the furnace mouth area can be effectively reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of heat insulation sheet structures, and in particular relates to a heat insulation structure, a heat insulation sheet group and a reaction furnace. Background Art

[0002] Solar energy is a clean energy source, and crystalline silicon solar cells are the main force of the photovoltaic industry. Whether it is PERC (Passivated Emitter and Rear Cell, emitter back passivated cell) cell, TOPCon (Tunnel Oxide Passivated Contact solar cell, tunnel oxide passivated contact solar cell) cell or XBC cell technology with metallization on the full back, XBC cell is a new type of high-efficiency cell derived from IBC (Interdigitated back contact, full back electrode contact crystalline silicon photovoltaic cell technology) cell structure, and its core is the preparation of pn junction.

[0003] The mainstream technology for preparing pn junctions is diffusion doping, and the concentration and gradient distribution of diffusion are key factors affecting battery performance. The diffusion machines for industrial mass production are mainly tubular furnaces. In order to increase production capacity, the number of wafers carried by a single tube of the diffusion machine has gradually expanded from hundreds to thousands. The consistency of the diffusion effect in the tube has become a key research direction for equipment and processes in the diffusion section. In order to achieve the output share of high-efficiency batteries, it is necessary to improve the uniformity of the square resistance in the tube during the diffusion process, especially the areas near the furnace mouth and the furnace tail at both ends of the tube, which are greatly affected by the temperature field and airflow field on both sides.

[0004] In order to maintain the temperature of silicon wafers in the furnace mouth area, a heat insulation board is usually added between the furnace door and the silicon wafer or auxiliary heat compensation is used in the area near the furnace mouth to reduce the temperature gradient, thereby improving the non-uniformity of the square resistance. However, the design of using heat insulation boards / sheet groups or auxiliary heat compensation in the area near the furnace mouth only considers the influence of the thermal field temperature gradient, and does not involve the analysis and improvement of the influence on the airflow, especially in the vacuum furnace tube at the bottom of the furnace mouth, the square resistance of the silicon wafer in the boat near the furnace mouth is much higher. Utility Model Content

[0005] The embodiment of the utility model provides a heat insulation structure, which aims to solve the problem of uneven temperature distribution in the existing reactor, resulting in uneven square resistance of some battery cells.

[0006] The embodiment of the utility model is implemented as follows: a heat insulation structure is applied to a reaction furnace, the heat insulation structure comprises a plurality of first heat insulation boards arranged in sequence, and each first heat insulation board is provided with one or more air flow holes.

[0007] Furthermore, the number of air flow holes on any two first heat insulation boards gradually decreases from the end far from the furnace opening to the end close to the furnace opening.

[0008] Furthermore, the apertures of the air flow holes on any two first heat insulation plates gradually decrease from the end far from the furnace opening to the end close to the furnace opening.

[0009] Furthermore, the air flow holes on two adjacent first heat insulation boards are staggeredly distributed.

[0010] Furthermore, a second heat insulation board without holes is provided at one end of the heat insulation structure close to the furnace opening.

[0011] Furthermore, the total number of the first heat insulation boards and the second heat insulation boards is 9 to 30.

[0012] Furthermore, the first heat insulation board and the second heat insulation board are provided with avoidance grooves for avoiding the paddles in the reaction furnace.

[0013] Furthermore, the first heat insulation board and the second heat insulation board are provided with avoidance parts for avoiding the evacuation pipe in the reaction furnace.

[0014] In a second aspect, the present application also provides a thermal insulation sheet set, including the thermal insulation structure as described above.

[0015] In a third aspect, the present application also provides a reaction furnace, comprising the thermal insulation sheet assembly as described above.

[0016] The beneficial effect of the present application is that the present application forms an insulation structure by arranging a plurality of first insulation plates in sequence, and each first insulation plate is provided with one or more air flow holes. When the insulation structure is applied to a reactor, the air flow in the reactor can flow through the air flow holes, thereby improving the temperature uniformity in the reactor, thereby improving the uneven process effects in the upper, middle and lower parts caused by the turbulent air flow in the furnace mouth area of ​​the reactor, and can effectively reduce the square resistance of the battery cells located in the furnace mouth area. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of a structure in which an embodiment of the heat insulation structure provided by the present application is applied to a reaction furnace;

[0018] Figure 2 This is a schematic structural diagram of an embodiment of the heat insulation structure provided by the present application, in which two air flow holes are arranged on the first heat insulation board;

[0019] Figure 3 This is a schematic structural diagram of another embodiment of the heat insulation structure provided by the present application, in which the first heat insulation board is provided with two air flow holes;

[0020] Figure 4 This is a schematic structural diagram of an embodiment of the heat insulation structure provided by the present application, in which a first heat insulation board is provided with an air flow hole;

[0021] Figure 5 This is a structural schematic diagram of another embodiment of the heat insulation structure provided by the present application, in which the first heat insulation board is provided with two air flow holes;

[0022] Figure 6 This is a structural schematic diagram of another embodiment of the heat insulation structure provided by the present application, in which two air flow holes are arranged on the first heat insulation board;

[0023] Figure 7 This is a schematic structural diagram of a combination of the first heat insulation board A1 and B1 in one embodiment of the heat insulation structure provided by the present application;

[0024] Figure 8 This is a schematic structural diagram of a combination of a first heat insulation board A2 and a first heat insulation board B2 in one embodiment of a heat insulation structure provided by the present application;

[0025] Fig. 9 This is a schematic structural diagram of a combination of a first heat insulation board A3 and a first heat insulation board B3 in one embodiment of a heat insulation structure provided by the present application;

[0026] Fig.10 This is a schematic structural diagram of a combination of first insulation boards A1g and B1g in one embodiment of the insulation structure provided by the present application;

[0027] Fig.11 This is a schematic structural diagram of a combination of a first heat insulation board A2 and B2g in one embodiment of a heat insulation structure provided by the present application;

[0028] Fig.12 It is a schematic structural diagram of a combination of the first insulation boards A3g and B3g in one embodiment of the insulation structure provided in the present application. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of embodiments are shown in the accompanying drawings, in which the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. In addition, it should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.

[0030] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.

[0031] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0032] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0033] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0034] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the utility model. In addition, the utility model can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various embodiments and / or settings discussed in itself. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0035] The present application comprises a thermal insulation structure formed by arranging a plurality of first thermal insulation plates in sequence, and each first thermal insulation plate is provided with one or more air flow holes. When the thermal insulation structure is applied to a reaction furnace, the air flow in the reaction furnace can flow through the air flow holes, thereby improving the temperature uniformity in the reaction furnace, thereby improving the uneven process effects in the upper, middle and lower parts caused by the turbulent air flow in the furnace mouth area of ​​the reaction furnace, and can effectively reduce the square resistance of the battery cells located in the furnace mouth area.

[0036] Embodiment 1

[0037] like Figures 1 to 12 As shown, an embodiment of the present application provides a heat insulation structure 150 applied to a reaction furnace 100 , wherein the heat insulation structure 150 includes a plurality of first heat insulation plates 200 arranged in sequence, and each first heat insulation plate 200 is provided with one or more air flow holes 210 .

[0038] In some embodiments, the reaction furnace 100 is a tube furnace of a diffusion machine for preparing a pn junction, such as Figure 1 As shown, the reactor 100 is a hollow tubular structure as a whole, one end of the reactor 100 is a furnace mouth, which is closed or opened by a furnace door 110, a paddle 120 extends into the reactor 100, a wafer boat 130 is used to load silicon wafers, and with the cooperation of the paddle 120, the silicon wafers can be delivered into the reactor 100 for processing, and the evacuation tube 140 is used to evacuate the reactor 100.

[0039] The heat insulation structure 150 can be arranged in the area near the furnace mouth to improve the non-uniformity of the square resistance. The heat insulation structure 150 is composed of a plurality of first heat insulation boards 200, and the number of the first heat insulation boards 200 can be 9 to 30. For example, the number of the first heat insulation boards 200 can be 10, 15, 20 or 25, etc., without limitation.

[0040] A plurality of first insulation boards 200 are arranged in sequence, and each first insulation board 200 is provided with one or more air flow holes 210. For example, the number of air flow holes 210 on each first insulation board 200 may be 2, 3, 5 or 10, etc., without limitation.

[0041] When the reactor 100 is heated to process the silicon wafers disposed in the reactor 100, if a conventional heat insulation plate without air flow holes 210 is used, in the furnace tube of the reactor 100 where the bottom of the furnace mouth is evacuated, the square resistance of the silicon wafers in the wafer boat 130 on the side near the furnace mouth is much higher.

[0042] When using the heat insulation structure 150 provided in the present application, since a number of airflow holes 210 are provided on the first heat insulation board 200, the airflow in the reactor 100 can flow through the airflow holes 210, and the high diffusion square resistance in the furnace mouth area is effectively improved. Comparing the square resistance of the silicon wafers in the area near the furnace mouth and the square resistance of the silicon wafers in the middle area, the deviation is reduced from 30% to less than 10%, the uniformity of the square resistance of the whole tube is improved, and the uneven process effects in the upper, middle and lower parts caused by the turbulent airflow in the furnace mouth area are greatly improved. Moreover, there is no need for auxiliary heat compensation design in the furnace mouth area, or there is an auxiliary heat compensation design in the furnace mouth area but the temperature of the auxiliary heat temperature zone of the furnace mouth can be reduced, thereby reducing the damage to the sealing ring of the furnace door 110 caused by the high temperature of the furnace mouth and increasing the service life of the furnace tube.

[0043] The present application arranges a plurality of first insulation plates 200 in sequence to form an insulation structure 150, and each first insulation plate 200 is provided with one or more air flow holes 210. When the insulation structure 150 is applied to the reactor 100, the air flow in the reactor 100 can flow through the air flow holes 210, thereby improving the temperature uniformity in the reactor 100, thereby improving the uneven process effects in the upper, middle and lower parts caused by the turbulent air flow in the furnace mouth area of ​​the reactor 100, and can effectively reduce the square resistance of the battery cells located in the furnace mouth area.

[0044] In some optional embodiments, the number of the air flow holes 210 on the first heat insulation board 200 gradually decreases from the end away from the furnace opening to the end close to the furnace opening.

[0045] Since each first heat insulation board 200 is provided with air flow holes 210, the number of these air flow holes 210 can be the same. For example, each first heat insulation board 200 is provided with two air flow holes 210. Figure 2 and Figure 3 As shown, Figure 2 and Figure 3 The number, position and size of the air flow holes 210 on the first heat insulation plate 200 are the same.

[0046] In some possible embodiments, the number of air flow holes 210 of the first heat insulation board 200 may also be different, such as Figure 2 and Figure 4 As shown, Figure 2 The first heat insulation board 200 shown is provided with two air flow holes 210. Figure 4 The first heat insulation board 200 shown is provided with an air flow hole 210. Since the first heat insulation board 200 has a plurality of sheets, the number of air flow holes 210 on the first heat insulation board 200 gradually decreases from the end away from the furnace opening to the end close to the furnace opening, wherein the plurality of first heat insulation boards 200 are arranged at the furnace opening area of ​​the furnace tube and along the length direction of the furnace tube (such as Figure 1 The first heat insulation board 200 at the end far from the furnace opening has more air holes 210 and a larger ventilation volume, while the first heat insulation board 200 at the end close to the furnace opening has fewer air holes 210 and a smaller ventilation volume. Through the above arrangement, on the one hand, the air flow stability can be ensured and the air flow turbulence in the furnace opening area can be reduced; on the other hand, the heat transfer to the furnace door 110 can be effectively reduced, thereby reducing the damage to the sealing ring of the furnace door 110 caused by the high temperature of the furnace opening, and improving the service life of the furnace tube.

[0047] It should be noted that the number of airflow holes 210 on the first heat insulation board 200 described above gradually decreases from the end away from the furnace opening to the end close to the furnace opening, which can be applied to all first heat insulation boards 200 or to some first heat insulation boards 200. For example, all first heat insulation boards 200 are divided into two parts, the number of airflow holes 210 on the first heat insulation board 200 of the first part is the same, the number of airflow holes 210 on the first heat insulation board 200 of the second part is the same, and the number of airflow holes 210 on the first heat insulation board 200 of the first part is greater than the number of airflow holes 210 on the first heat insulation board 200 of the second part. For example, all first heat insulation boards 200 can be divided into two parts or three parts, without limitation, and the number of airflow holes 210 on the first heat insulation board 200 of each part gradually decreases from the end away from the furnace opening to the end close to the furnace opening. For example, taking the case where all the first heat insulation panels 200 are divided into two parts, when viewed from the end away from the furnace mouth to the end close to the furnace mouth, the number of air flow holes 210 on these first heat insulation panels 200 changes from more → less → more → less, which can effectively reduce the heat transferred to the furnace door 110 and protect the furnace tubes.

[0048] In some possible embodiments, the apertures of the air flow holes 210 on two adjacent first heat insulation boards 200 may be designed to be the same, for example, Figure 2 and Figure 3 As shown, taking the first heat insulation board 200 having two air flow holes 210 as an example, Figure 2 and Figure 3 The airflow holes 210 of the first heat insulation board 200 shown in the figure have the same aperture. The apertures of the airflow holes 210 on two adjacent first heat insulation boards 200 may also be designed to be different, such as Figure 2 and Figure 5 As shown, Figure 2 The aperture ratio of the air flow holes 210 of the first heat insulation board 200 is shown as Figure 5 The air flow holes 210 of the first heat insulation board 200 shown have a small hole diameter.

[0049] In some optional embodiments, the aperture of the airflow hole 210 on the first heat insulation board 200 gradually decreases from the end away from the furnace opening to the end close to the furnace opening, wherein the aperture of the airflow hole 210 on the first heat insulation board 200 at the end away from the furnace opening is larger, and the ventilation volume is larger, and the aperture of the airflow hole 210 on the first heat insulation board 200 at the end close to the furnace opening is smaller, and the ventilation volume is smaller. Through the above arrangement, on the one hand, the airflow stability can be ensured and the airflow turbulence in the furnace opening area can be reduced, and on the other hand, the heat transfer to the furnace door 110 can be effectively reduced, thereby reducing the damage to the sealing ring of the furnace door 110 caused by the high temperature of the furnace opening, and improving the service life of the furnace tube.

[0050] It should be noted that the aperture of the airflow holes 210 on the first heat insulation board 200 gradually decreases from the end away from the furnace opening to the end close to the furnace opening, which can be applied to all the first heat insulation boards 200, or to part of the first heat insulation boards 200. For example, all the first heat insulation boards 200 are divided into two parts, the apertures of the airflow holes 210 on the first heat insulation boards 200 of the first part are the same, the apertures of the airflow holes 210 on the first heat insulation boards 200 of the second part are the same, and the apertures of the airflow holes 210 on the first heat insulation boards 200 of the first part are larger than the apertures of the airflow holes 210 on the first heat insulation boards 200 of the second part. For example, taking the case where all the first heat insulation boards 200 are divided into three parts, the aperture of the air flow holes 210 on the first heat insulation boards 200 of each part gradually decreases from the end far from the furnace mouth to the end close to the furnace mouth. From the overall point of view, the aperture of the air flow holes 210 on all the first heat insulation boards 200 changes from large → small → large → small → large → small, which can effectively reduce the heat transferred to the furnace door 110 and protect the furnace tube.

[0051] In some optional embodiments, the air flow holes 210 on two adjacent first heat insulation boards 200 are staggered. Figure 2 and Figure 6 As shown, taking the first heat insulation board 200 having two air flow holes 210 as an example, Figure 2 and Figure 6The airflow holes 210 of the first heat insulation board 200 are staggered. The staggered distribution of the airflow holes 210 makes it impossible for the airflow holes 210 to be connected into a straight airflow channel, and the airflow can still flow through the airflow holes 210. Through the above arrangement, on the one hand, the airflow stability can be ensured and the airflow turbulence in the furnace mouth area can be reduced. On the other hand, the heat transfer to the furnace door 110 can be effectively reduced, thereby reducing the damage to the sealing ring of the furnace door 110 caused by the high temperature of the furnace mouth, and improving the service life of the furnace tube.

[0052] Optionally, the staggered distribution of the airflow holes 210 and airflow holes 210 on the two adjacent first heat insulation boards 200 can be applicable to all the first heat insulation boards 200, or to part of the first heat insulation boards 200. For example, all the first heat insulation boards 200 are divided into two parts, the distribution positions of the airflow holes 210 on the first heat insulation boards 200 of the first part are the same, the distribution positions of the airflow holes 210 on the first heat insulation boards 200 of the second part are the same, and the distribution positions of the airflow holes 210 on the first heat insulation boards 200 of the first part are different from the distribution positions of the airflow holes 210 on the first heat insulation boards 200 of the second part. For example, all the first heat insulation boards 200 can be divided into two parts or three parts, without limitation, and the airflow holes 210 on the first heat insulation boards 200 of each part are staggered. For example, taking the case where all the first insulation boards 200 are divided into two parts, the air flow holes 210 on the first insulation boards 200 of the first part are staggered, and at the same time, the air flow holes 210 on the first insulation boards 200 of the second part are staggered, which can effectively reduce the heat transferred to the furnace door 110 and protect the furnace tubes.

[0053] It should be noted that the above-mentioned first insulation board 200 is provided with two air flow holes 210, the aperture of the air flow holes 210 and the arrangement of the air flow holes 210 are examples of the embodiments of the present application, and are not specific limitations of the present application. In some other embodiments, the number, aperture and arrangement of the air flow holes 210 on the first insulation board 200 can also be other without limitation.

[0054] In some optional embodiments, the thermal insulation structure 150 provided in the present application also includes a second thermal insulation board, which is a non-porous thermal insulation board. Compared with the first thermal insulation board 200, the second thermal insulation board is located closest to the furnace mouth, which can effectively improve the insulation of heat transferred to the furnace door 110, thereby protecting the furnace door 110 and the furnace tube.

[0055] During implementation, several first heat insulation boards 200 can be used separately, and in other embodiments, the first heat insulation boards 200 and the second heat insulation boards can be used together. For example, taking the maximum temperature of the furnace tube in the reactor 100 as 900-1050°C as an example, the heat insulation sheets used in the traditional solution are a single group of 17 sheets, and the embodiment of the present application increases to two groups of 9 to 30 sheets in total. In other words, the total number of the first heat insulation board 200 and the second heat insulation board is 9 to 30 sheets, for example, the first heat insulation board 200 and the second heat insulation board are 26 sheets or 28 sheets, and the first heat insulation board 200 and the second heat insulation board adopt the following combination scheme:

[0056] Optionally, the first heat insulation board 200 includes: Figure 7 A1 and B1 are shown, wherein A1 and B1 are used in combination alternately, and the combination effect is as follows Figure 7 The A1+B1 shown, or A1 and B1 are alternately used 1 to 8 times in combination with a second non-porous heat insulation board.

[0057] Optionally, the first heat insulation board 200 includes: Figure 8 A2 and B2 are shown, wherein A2 and B2 are used in combination alternately, and the combined effect is as follows Figure 8 A2+B2, or A2 and B2 are alternately used 1 to 8 times in combination with a second non-porous heat insulation board.

[0058] Optionally, the first heat insulation board 200 includes: Fig. 9 A3 and B3 are shown, wherein A3 and B3 are used in combination alternately, and the combined effect is as follows Fig. 9 The A3+B3 shown, or A3 and B3 are alternately used 1 to 8 times in combination with a second non-porous heat insulation board.

[0059] Optionally, the first heat insulation board 200 includes: Fig.10 A1g and B1g are shown, wherein A1g and B1g are used in combination alternately, and the combined effect is as follows Fig.10 The A1g+B1g shown, or A1g and B1g are alternately used 1 to 8 times in combination with a second heat insulation board without holes.

[0060] Optionally, the first heat insulation board 200 includes: Fig.11 A2 and B2g are shown, wherein A2 and B2g are used in combination alternately, and the combined effect is as follows Fig.11 A2+B2g, or A2 and B2g are alternately used 1 to 8 times in combination with a second non-porous heat insulation board.

[0061] Optionally, the first heat insulation board 200 includes: Fig.12 A3g and B3g are shown, wherein A3g and B3g are used in combination alternately, and the combined effect is as follows Fig.12A3g+B3g, or A3g and B3g are alternately used 1 to 8 times and then combined with a second non-porous heat insulation board.

[0062] In some possible embodiments, the above embodiments are illustrative of the embodiments of the present application, rather than specific limitations of the present application. In some other embodiments, other combinations may also be used, such as alternating combination of A1g and B2g, or alternating A1g and B2g 1 to 8 times and then combining with a second non-porous insulation board, without limitation.

[0063] In other embodiments, taking the maximum temperature of the furnace tube of the reaction furnace 100 as 800-900° C. as an example, the first heat insulation board 200 and the second heat insulation board are 9-15 pieces in total, and the first heat insulation board 200 and the second heat insulation board adopt the following combination scheme:

[0064] Optionally, the first heat insulation board 200 includes: Figure 7 A1 and B1 are shown, wherein A1 and B1 are used in combination alternately, and the combination effect is as follows Figure 7 The A1+B1 shown, or A1 and B1 are alternately used 1 to 3 times in combination with a second non-porous heat insulation board.

[0065] Optionally, the first heat insulation board 200 includes: Figure 8 A2 and B2 are shown, wherein A2 and B2 are used in combination alternately, and the combined effect is as follows Figure 8 A2+B2, or A2 and B2 alternately 1 to 3 times, are used in combination with a second non-porous heat insulation board.

[0066] Optionally, the first heat insulation board 200 includes: Fig. 9 A3 and B3 are shown, wherein A3 and B3 are used in combination alternately, and the combined effect is as follows Fig. 9 The A3+B3 shown, or A3 and B3 are alternately used 1 to 3 times in combination with a second non-porous heat insulation board.

[0067] Optionally, the first heat insulation board 200 includes: Fig.10 A1g and B1g are shown, wherein A1g and B1g are used in combination alternately, and the combined effect is as follows Fig.10 The A1g+B1g shown, or A1g and B1g are alternately used 1 to 3 times and then combined with a second heat insulation board without holes.

[0068] Optionally, the first heat insulation board 200 includes: Fig.11 A2 and B2g are shown, wherein A2 and B2g are used in combination alternately, and the combined effect is as follows Fig.11 A2+B2g, or A2 and B2g are alternately used 1 to 3 times in combination with a second non-porous heat insulation board.

[0069] Optionally, the first heat insulation board 200 includes: Fig.12 A3g and B3g are shown, wherein A3g and B3g are used in combination alternately, and the combined effect is as follows Fig.12 A3g+B3g, or A3g and B3g are alternately used 1 to 3 times and then combined with a second non-porous heat insulation board.

[0070] In some possible embodiments, the above embodiments are illustrative of the embodiments of the present application, rather than specific limitations of the present application. In some other embodiments, other combinations may also be used, such as alternating combination of A1g and B2g, or alternating A1g and B2g 1 to 3 times and then combining with a second non-porous insulation board, without limitation.

[0071] It should be noted that the air flow hole 210 can be a circular hole, an elliptical hole, a square hole, a triangular hole or other special-shaped holes, without limitation.

[0072] Optionally, when the air flow hole 210 is a circular hole, the aperture of the air flow hole 210 can be designed to be 0.5 to 15 cm. For example, the aperture of the air flow hole 210 can be 5 cm, 8 cm or 10 cm, etc. The first insulation board 200 can be set or selected according to the actual use environment, and the aperture, number and position arrangement of the air flow hole 210 are not limited.

[0073] Optionally, different types of first insulation boards 200 may be used in alternating combinations in the order of ABABAB..., or AABAAB..., or ABBABB..., etc., wherein A may be A1, A2, A3, A1g and A3g, etc., and B may be B1, B2, B3, B1g, B2g and B3g, etc., without limitation.

[0074] In some optional embodiments, such as Figure 2 As shown, the first heat insulation board 200 and the second heat insulation board are provided with avoidance grooves 220 for avoiding the paddle 120 in the reaction furnace 100 .

[0075] During implementation, the avoidance groove 220 is a groove provided on the first insulation board 200 and the second insulation board. When the first insulation board 200 and the second insulation board are installed in the reaction furnace 100, the paddle 120 can be embedded in the avoidance groove 220 for installation and fixation.

[0076] In some optional embodiments, such as Figure 2 As shown, the first heat insulation board 200 and the second heat insulation board are provided with a avoiding portion 230 for avoiding the evacuation pipe 140 in the reaction furnace 100 .

[0077] During implementation, the evacuation pipe 140 is disposed at the bottom of the furnace tube of the reaction furnace 100 . When the first insulation board 200 and the second insulation board are installed in the reaction furnace 100 , the avoidance portion 230 can avoid the evacuation pipe 140 .

[0078] Embodiment 2

[0079] In some optional embodiments, the present application also provides a thermal insulation sheet set, including the thermal insulation structure 150 as described above.

[0080] Those skilled in the art can clearly understand that, for the convenience and simplicity of description, the structure and implementation principle of the reactor 100 described above can refer to the corresponding structure and implementation principle in the aforementioned embodiment 1, and will not be repeated here.

[0081] Embodiment 3

[0082] In some optional embodiments, the present application also provides a reaction furnace 100, comprising the above-mentioned heat insulation sheet group.

[0083] Those skilled in the art can clearly understand that, for the convenience and simplicity of description, the structure and implementation principle of the reactor 100 described above can refer to the corresponding structures and implementation principles in the aforementioned embodiments one and two, and will not be repeated here.

[0084] The present application arranges a plurality of first insulation plates 200 in sequence to form an insulation structure 150, and each first insulation plate 200 is provided with a plurality of air flow holes 210. When the insulation structure 150 is applied to the reactor 100, the air flow in the reactor 100 can flow through the air flow holes 210, thereby improving the temperature uniformity in the reactor 100, thereby improving the uneven process effects in the upper, middle and lower parts caused by the turbulent air flow in the furnace mouth area of ​​the reactor 100, and can effectively reduce the square resistance of the battery cells located in the furnace mouth area.

[0085] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A heat insulation structure, used in a reaction furnace, characterized in that: The heat insulation structure includes a plurality of first heat insulation boards arranged in sequence, and each of the first heat insulation boards is provided with one or more air flow holes.

2. The thermal insulation structure according to claim 1, characterized in that: The number of the air flow holes on the first heat insulation board gradually decreases from the end away from the furnace opening to the end close to the furnace opening.

3. The thermal insulation structure according to claim 1 or 2, characterized in that: The apertures of the air flow holes on the first heat insulation board gradually decrease from an end away from the furnace opening to an end close to the furnace opening.

4. The thermal insulation structure according to claim 3, characterized in that: The air flow holes on two adjacent first heat insulation boards are staggeredly distributed.

5. The thermal insulation structure according to claim 1, characterized in that: A second heat insulation board without holes is also arranged at one end of the heat insulation structure close to the furnace opening.

6. The thermal insulation structure according to claim 5, characterized in that: The total number of the first heat insulation boards and the second heat insulation boards is 9 to 30.

7. The thermal insulation structure according to claim 5 or 6, characterized in that: The first heat insulation plate and the second heat insulation plate are provided with avoidance grooves for avoiding the paddle in the reaction furnace.

8. The thermal insulation structure according to claim 5 or 6, characterized in that: The first heat insulation board and the second heat insulation board are provided with avoidance parts for avoiding the evacuation pipe in the reaction furnace.

9. A heat insulation sheet assembly, characterized in that: The invention comprises the thermal insulation structure according to any one of claims 1 to 8.

10. A reactor, characterized in that: It comprises the heat insulation sheet assembly as claimed in claim 9.

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