Ion implanter with vacuumizing device

Abstract

The utility model provides an ion implanter with a vacuumizing device. The ion implanter with the vacuumizing device comprises an ion implanter main body and a vacuumizing mechanism arranged on the ion implanter main body, the vacuumizing mechanism comprises a bottom plate, a vacuum pump, a gas discharging pipe, a connecting sleeve, a gas suction pipe, a telescopic hose and two limiting and fixing assemblies, the bottom plate is arranged on one side of the ion implanter main body, and the bottom plate is arranged on the other side of the ion implanter main body. The vacuum pump is fixedly mounted at the top of the bottom plate, the air discharging pipe is fixedly mounted on the ion implanter main body, the connecting sleeve is arranged above the top of the bottom plate, and one end of the air discharging pipe extends into the connecting sleeve. The ion implanter with the vacuumizing device provided by the utility model has the advantages that the operation is simple, the ion implanter can be vacuumized, and air can be prevented from leaking into the ion implanter when the ion implanter is evacuated from external connection.

Description

Technical Field

[0001] The utility model belongs to the technical field of ion implanters, in particular to an ion implanter provided with a vacuum pumping device. Background Art

[0002] The ion implanter is a type of high-voltage small accelerator with the largest number of applications. It obtains the required ions from an ion source and accelerates them to obtain an ion beam with an energy of several hundred kiloelectronvolts. The ion implanter needs to accelerate in a vacuum environment during the acceleration process.

[0003] An ion implanter needs to accelerate ions in a small high-voltage accelerator. The closer the accelerator is to vacuum, the more obvious the acceleration effect of the accelerator. When a vacuum environment is required, existing ion implanter accelerators are often connected to an external vacuum pump. The vacuum effect of the external vacuum pump is not obvious, and when the external vacuum pump is evacuated, air will leak into the ion implanter accelerator.

[0004] Therefore, it is necessary to provide a new ion implanter equipped with a vacuum pump to solve the above technical problems. Utility Model Content

[0005] The technical problem solved by the utility model is to provide an ion implanter with a vacuum device which is easy to operate and can not only perform vacuum work on the ion implanter but also prevent air from leaking into the ion implanter when the external connection is evacuated.

[0006] In order to solve the above technical problems, the utility model provides an ion implanter with a vacuum device, comprising: an ion implanter body and a vacuum mechanism arranged on the ion implanter body, the vacuum mechanism comprising a base plate, a vacuum pump, a vent pipe, a connecting sleeve, an exhaust pipe, a telescopic hose and two limit fixing components, the base plate is arranged on one side of the ion implanter body, the vacuum pump is fixedly installed on the top of the base plate, the vent pipe is fixedly installed on the ion implanter body, the connecting sleeve is arranged above the top of the base plate, one end of the vent pipe extends into the connecting sleeve, the exhaust pipe is fixedly installed on the exhaust port of the vacuum pump, the telescopic hose is sealed and connected to one end of the exhaust pipe away from the vacuum pump through a flange, and one end of the telescopic hose away from the exhaust pipe extends into the connecting sleeve and is slidably connected to the connecting sleeve.

[0007] As a further solution of the utility model, two limit fixing components are symmetrically arranged on the outer wall of the connecting sleeve in an upper and lower manner, and the limit fixing components include a mounting block, a round rod, a storage tube, a handle and an L-shaped rod. The mounting block is fixedly mounted on the connecting sleeve, the round rod is fixedly mounted on the mounting block, the storage tube is rotatably connected to one end of the round rod away from the mounting block, the handle is fixedly sleeved on the storage tube, the L-shaped rod is fixedly mounted on the telescopic hose, and one end of the L-shaped rod away from the telescopic hose extends into the storage tube and is threadedly connected to the storage tube.

[0008] As a further solution of the present invention, the vacuum pumping mechanism also includes a limiting sealing assembly, which includes a limiting ring, a sealing ring 1 and a sealing ring 2. The limiting ring is fixedly mounted on the telescopic hose, the sealing ring 1 is arranged on the limiting ring, the sealing ring 2 is fixedly installed in the connecting sleeve, and the sealing ring 2 is compatible with the telescopic hose and the sealing ring 1.

[0009] As a further solution of the utility model, a sealing ring three and a sealing ring four are provided in the connecting sleeve, the sealing ring three is adapted to the telescopic hose, and the sealing ring four is adapted to the venting pipe.

[0010] As a further solution of the utility model, a fixing ring is fixedly installed in the connecting sleeve, the fixing ring is fixedly connected to the venting pipe, and a valve is provided on the venting pipe.

[0011] As a further solution of the utility model, the vacuum pumping mechanism also includes an exhaust pipe, and the exhaust pipe is fixedly installed on the exhaust port of the vacuum pump.

[0012] Compared with the related art, the ion implanter provided with a vacuum pumping device provided by the utility model has the following beneficial effects:

[0013] 1. The utility model is easy to operate by arranging the valve and the vacuum pumping mechanism, which can not only vacuum the ion implanter, but also prevent air from leaking into the ion implanter when the external connection is evacuated. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0015] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0016] Figure 2 for Figure 1 A schematic diagram of the enlarged structure of part A;

[0017] Figure 3 It is a front view structural schematic diagram of the position limiting and fixing assembly in the utility model.

[0018] In the figure: 1. Ion implanter body; 2. Bottom plate; 3. Vacuum pump; 4. Vent pipe; 5. Connecting sleeve; 6. Exhaust pipe; 7. Telescopic hose; 8. Mounting block; 9. Round rod; 10. Storage tube; 11. Handle; 12. L-shaped rod; 13. Limiting ring; 14. Sealing ring 1; 15. Sealing ring 2; 16. Sealing ring 3; 17. Sealing ring 4; 18. Fixing ring; 19. Exhaust pipe. DETAILED DESCRIPTION

[0019] Please refer to Figure 1 , Figure 2 and Figure 3 ,in, Figure 1 It is a three-dimensional structural schematic diagram of the utility model; Figure 2 for Figure 1 A schematic diagram of the enlarged structure of part A; Figure 3 The front view structural diagram of the position-limiting fixing assembly in the utility model. The ion implanter provided with a vacuum pumping device comprises: an ion implanter body 1 and a vacuum pumping mechanism arranged on the ion implanter body 1, the vacuum pumping mechanism comprises a bottom plate 2, a vacuum pump 3, a venting pipe 4, a connecting sleeve 5, an exhaust pipe 6, a telescopic hose 7 and two position-limiting fixing assemblies, the bottom plate 2 is arranged on one side of the ion implanter body 1, the vacuum pump 3 is fixedly mounted on the top of the bottom plate 2, the venting pipe 4 is fixedly mounted on the ion implanter body 1, the connecting sleeve 5 is arranged above the top of the bottom plate 2, one end of the venting pipe 4 extends into the connecting sleeve 5, the exhaust pipe 6 is fixedly mounted on the exhaust port of the vacuum pump 3, the telescopic hose 7 is connected to the exhaust pipe 6 at one end away from the vacuum pump 3 through a flange seal, and the end of the telescopic hose 7 away from the exhaust pipe 6 extends into the connecting sleeve 5 and is slidably connected to the connecting sleeve 5.

[0020] The two limit fixing components are symmetrically arranged on the outer wall of the connecting sleeve 5, and the limit fixing components include a mounting block 8, a round rod 9, a storage tube 10, a handle 11 and an L-shaped rod 12. The mounting block 8 is fixedly mounted on the connecting sleeve 5, the round rod 9 is fixedly mounted on the mounting block 8, the storage tube 10 is rotatably connected to the end of the round rod 9 away from the mounting block 8, the handle 11 is fixedly sleeved on the storage tube 10, and the L-shaped rod 12 is fixedly mounted on the telescopic hose 7, and the end of the L-shaped rod 12 away from the telescopic hose 7 extends into the storage tube 10 and is threadedly connected to the storage tube 10.

[0021] The vacuum pumping mechanism also includes a limiting sealing component, which includes a limiting ring 13, a sealing ring 14 and a sealing ring 2 15. The limiting ring 13 is fixedly sleeved on the telescopic hose 7, the sealing ring 14 is arranged on the limiting ring 13, and the sealing ring 2 15 is fixedly installed in the connecting sleeve 5. The sealing ring 2 15 is adapted to the telescopic hose 7 and the sealing ring 14.

[0022] A sealing ring 3 16 and a sealing ring 4 17 are arranged in the connecting sleeve 5 . The sealing ring 3 16 is matched with the telescopic hose 7 , and the sealing ring 4 17 is matched with the vent pipe 4 .

[0023] A fixing ring 18 is fixedly installed in the connecting sleeve 5 , and the fixing ring 18 is fixedly connected to the vent pipe 4 , and a valve is provided on the vent pipe 4 .

[0024] The vacuum pumping mechanism further includes an exhaust pipe 19 , which is fixedly mounted on the exhaust port of the vacuum pump 3 .

[0025] The working principle of the ion implanter provided with a vacuum device provided by the utility model is as follows:

[0026] The first step: when in use, one end of the telescopic hose 7 is inserted into the connecting sleeve 5, and one end of the L-shaped rod 12 is inserted into the storage tube 10. The storage tube 10 is rotated by the handle 11, so that the L-shaped rod 12 can drive the telescopic hose 7 to move under the action of the thread, so that the L-shaped rod 12 enters the storage tube 10, and the telescopic hose 7 enters the connecting sleeve 5 until the limiting collar 13 contacts the connecting sleeve 5, and the telescopic hose 7 contacts the venting pipe 4. At the same time, the sealing ring 2 15 and the sealing ring 1 14 can play a sealing role, and the sealing ring 3 16 and the sealing ring 4 17 can also play a sealing role to prevent gas leakage. After that, the vacuum pump 3 is started, and the air in the ion implanter body 1 can be extracted through the cooperation of the exhaust pipe 6, the telescopic hose 7, the connecting sleeve 5 and the venting pipe 4, so that the ion implanter body 1 achieves a vacuum effect;

[0027] The second step: during disassembly, it is only necessary to close the valve on the vent pipe 4 to prevent outside air from entering the ion implanter body 1 through the vent pipe 4. During disassembly, the handle 11 is rotated in the opposite direction so that the L-shaped rod 12 drives the telescopic hose 7 to move away from the connecting sleeve 5, thereby making the telescopic hose 7 detached from the connecting sleeve 5, completing the disassembly work, making the operation simple, not only can the ion implanter be vacuumed, but also air can be prevented from leaking into the ion implanter when the external connection is evacuated.

[0028] It should be noted that the equipment structure and drawings of the utility model mainly describe the principle of the utility model. In terms of the technology of the design principle, the settings of the power mechanism, power supply system and control system of the device are not fully described. On the premise that the technical personnel in this field understand the principle of the above utility model, the details of the power mechanism, power supply system and control system can be clearly known. The control method of the application document is automatic control through a controller, and the control circuit of the controller can be realized by simple programming by the technical personnel in this field;

[0029] The standard parts used therein can all be purchased from the market and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art, and the structures and principles of the components known to technical personnel in this field can be known by these technical personnel through technical manuals or through conventional experimental methods.

[0030] Although the embodiments of the present invention have been shown and described, it is understood by those skilled in the art that various changes, modifications, substitutions and variations or direct or indirect applications may be made to these embodiments without departing from the principles and spirit of the present invention. In other related technical fields, the scope of the present invention is defined by the attached claims and their equivalents, which are equally included in the scope of patent protection of the present invention.

Claims

1. An ion implanter provided with a vacuum pump, characterized in that: include: An ion implanter body and a vacuum pumping mechanism arranged on the ion implanter body, the vacuum pumping mechanism includes a base plate, a vacuum pump, a vent pipe, a connecting sleeve, an exhaust pipe, a telescopic hose and two limit fixing components, the base plate is arranged on one side of the ion implanter body, the vacuum pump is fixedly installed on the top of the base plate, the vent pipe is fixedly installed on the ion implanter body, the connecting sleeve is arranged above the top of the base plate, one end of the vent pipe extends into the connecting sleeve, the exhaust pipe is fixedly installed on the exhaust port of the vacuum pump, the telescopic hose is sealed and connected to the exhaust pipe at one end away from the vacuum pump through a flange, and the end of the telescopic hose away from the exhaust pipe extends into the connecting sleeve and is slidably connected to the connecting sleeve.

2. The ion implanter provided with a vacuum pump according to claim 1, characterized in that: The two limit fixing components are symmetrically arranged on the outer wall of the connecting sleeve in an upper and lower manner, and the limit fixing components include a mounting block, a round rod, a storage tube, a handle and an L-shaped rod. The mounting block is fixedly mounted on the connecting sleeve, the round rod is fixedly mounted on the mounting block, the storage tube is rotatably connected to one end of the round rod away from the mounting block, the handle is fixedly sleeved on the storage tube, the L-shaped rod is fixedly mounted on the telescopic hose, and one end of the L-shaped rod away from the telescopic hose extends into the storage tube and is threadedly connected to the storage tube.

3. The ion implanter provided with a vacuum pump according to claim 1, characterized in that: The vacuum pumping mechanism also includes a limited position sealing component, which includes a limited position ring, a sealing ring 1 and a sealing ring 2. The limited position ring is fixedly sleeved on the telescopic hose, the sealing ring 1 is arranged on the limited position ring, and the sealing ring 2 is fixedly installed in the connecting sleeve. The sealing ring 2 is compatible with the telescopic hose and the sealing ring 1.

4. The ion implanter provided with a vacuum pump according to claim 1, characterized in that: The connecting sleeve is provided with a sealing ring three and a sealing ring four, the sealing ring three is matched with the telescopic hose, and the sealing ring four is matched with the venting pipe.

5. The ion implanter provided with a vacuum pump according to claim 1, characterized in that: A fixing ring is fixedly installed in the connecting sleeve, and the fixing ring is fixedly connected to the air release pipe, and a valve is arranged on the air release pipe.

6. The ion implanter provided with a vacuum pump according to claim 1, characterized in that: The vacuum pumping mechanism also includes an exhaust pipe, which is fixedly mounted on the exhaust port of the vacuum pump.

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