Crystal bonding tool capable of reading and adjusting precision
By introducing reference plates, measuring instruments and adjustment seats into the crystal bonding tool, the problem of inaccurate bonding of silicon carbide substrates during the cutting process is solved, and high-precision crystal bonding and substrate cutting are achieved.
Patent Information
- Application Number
- CN202420071850.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-11
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-01-11
AI Technical Summary
In the prior art, due to the error of the bonding base and inaccurate relative position identification during the cutting process of the silicon carbide substrate, it is difficult to achieve high accuracy after crystal bonding, which affects the cutting of a substrate with high crystal phase accuracy.
A crystal bonding tool for reading and adjusting accuracy is designed, including a reference plate, measuring instrument, adjustment seat and U-shaped baffle. The relative position of the crystal and the tool base are read through the measuring instrument, and the adjustment seat is adjusted for accuracy adjustment. Ensure bonding accuracy.
It realizes high precision of crystal bonding, and thus makes it easier to cut out a substrate with high crystal phase accuracy, improving cutting accuracy and stability.
Smart Images
Figure CN222260971U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal processing devices, in particular to a crystal bonding tool capable of reading and adjusting precision. Background Art
[0002] Silicon carbide substrate is a base material composed of silicon carbide single crystal. It has excellent physical and chemical properties, such as high thermal conductivity, high electrical properties, good mechanical properties, high temperature resistance, and high voltage resistance.
[0003] Unlike other material substrates, silicon carbide substrates have very strict directionality, that is, precise "crystal phase data", and the direction / position of cutting has a great influence on this "crystal phase data". In the inventions similar to this scheme, the function of bonding after crystal fixation can be achieved. However, there are at least the following defects in the prior art:
[0004] There will be errors in the bonding base between different cutting equipment, and when the end face of the crystal is pressed against the reference surface, the relative position accuracy of the crystal and the bonding base cannot be directly identified, and the relative position between the two cannot be accurately adjusted. As a result, the crystal will not have stable high precision after bonding, and it will be difficult to cut a substrate with high crystal phase precision. Utility Model Content
[0005] The embodiment of the present application provides a crystal bonding tool that can read and adjust the precision to solve the technical problem of the lack of stable high precision after crystal bonding in the prior art, thereby making it easier to cut a substrate with high crystal phase precision.
[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions: a crystal bonding tool that can read and adjust the accuracy, including a tool base, a reference plate is installed at one end of the tool base, and one end face of the crystal can be pressed against the reference plate; the reference plate includes a left side plate fixed relatively to the tool base and a right side plate installed on one side of the left side plate, the corner positions of the left side plate and the right side plate are connected by a connecting component, and a measuring instrument is also fixed on the left side plate, which can detect the relative position of the crystal and the tool base; a U-shaped baffle is installed at the end of the tool base away from the reference plate, the U-shaped baffle can press one end of the crystal, and an adjustment seat is installed on the right side of the U-shaped baffle.
[0007] When the utility model is used, the position of the right side plate can be adjusted in advance to meet the accuracy requirements. Since the left side plate is relatively fixed to the tooling base and a measuring instrument is installed, when the left end of the crystal is pressed against the plate surface of the right side plate, the value of the measuring instrument will change. Therefore, the relative position of the crystal installed on the tooling base can be determined by reading the value of the measuring instrument. Then, the bonding accuracy of the crystal can be improved by adjusting the adjustment seat, so that it is easier to cut a substrate with high crystal phase accuracy.
[0008] Furthermore, the U-shaped baffle can press against the end of the crystal away from the reference plate.
[0009] Furthermore, an adjusting bolt is threadedly mounted on the adjusting seat, and one end of the adjusting bolt can fine-tune the position accuracy of the tightened crystal.
[0010] Furthermore, the connecting assembly includes a tightening screw and a tightening screw, wherein the tightening screw penetrates through a threaded connection to connect the left plate and the right plate as a whole, the tightening screw is threadedly installed on the left plate, and one end of the tightening screw abuts against the plate surface of the right plate; thereby, a gap can be maintained between the left plate and the right plate, thereby facilitating the adjustment of the right plate.
[0011] Furthermore, a plurality of measuring instruments are provided and are respectively located near the edge of the reference plate.
[0012] Furthermore, the measuring instrument is a micrometer, the measuring rod of the micrometer passes through the reference plate, and the measuring head of the micrometer can contact the end face of the crystal; thus, the installation accuracy of the crystal on the tooling base can be determined by comparing the readings of the micrometer.
[0013] Furthermore, a fastening screw is threadedly installed on the edge of the left side plate, and the front end of the fastening screw can tighten the measuring rod of the micrometer; thereby, the measurement deviation caused by the insecure installation of the micrometer can be avoided, and the accuracy of the measurement process is ensured.
[0014] Furthermore, a bonding base is installed on the tooling base, and a glass strip or a resin strip is bonded to the bonding base.
[0015] Furthermore, a U-shaped baffle is installed on the tooling base, which can press the end of the crystal away from the reference plate; when the bottom of the crystal is bonded to the glass strip or resin strip, the U-shaped baffle can press the right end of the crystal.
[0016] It can be seen from the above technical solutions that the utility model has at least the following technical effects or advantages:
[0017] When the utility model is used, the position of the right side plate can be adjusted in advance to meet the accuracy requirements. Since the left side plate is relatively fixed to the tooling base and a measuring instrument is installed, when the left end of the crystal is pressed against the plate surface of the right side plate, the value of the measuring instrument will change. Therefore, the relative position of the crystal installed on the tooling base can be determined by reading the value of the measuring instrument. Then, the bonding accuracy of the crystal can be improved by adjusting the adjustment seat, so that it is easier to cut a substrate with high crystal phase accuracy. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solution of the utility model, the following is a brief introduction to the drawings required for the description. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:
[0019] Figure 1 It is a schematic diagram of the structure of the utility model when in use;
[0020] Figure 2 It is a schematic diagram of the installation of the connection components and the micrometer on the reference plate;
[0021] Figure 3 It is a partial structural schematic diagram of the utility model.
[0022] Explanation of the reference numerals: 1. Connecting assembly, 101. Tightening screw, 102. Tensioning screw, 2. Measuring instrument, 3. Fastening screw, 4. Crystal, 5. Reference plate, 501. Left side plate, 502. Right side plate, 6. Adjusting bolt, 7. U-shaped baffle, 8. Adjusting seat, 9. Adhesive base, 10. Resin strip. DETAILED DESCRIPTION
[0023] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments in this patent, other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this patent.
[0024] The utility model discloses a crystal bonding tool capable of reading and adjusting the precision. Figures 1 to 3 As shown, it includes a tooling base, one end of which is equipped with a reference plate 5 so that one end face of the crystal 4 can be in close contact with it. The other end of the tooling base is equipped with an adjustment seat 8, which cooperates with the adjustment bolt 6 to fine-tune the accuracy of the crystal 4 on the tooling base.
[0025] In this embodiment, if Figure 1 As shown, the reference plate 5 includes a left plate 501 and a right plate 502, and the left plate 501 and the right plate 502 are connected by an adjustable connection component 1 to achieve precision adjustment. In addition, a measuring instrument 2 is also installed on the left plate 501, and the measuring instrument 2 is used to measure the relative position of the crystal 4 and the tooling base to ensure the accuracy of bonding.
[0026] Specifically in this embodiment, Figure 2 As shown, the connection assembly 1 is provided with four groups, which are respectively located at the positions of the four corners of the reference plate 5. Each group of the connection assembly 1 is composed of a tightening screw 101 and a tightening screw 102, wherein the threaded portion of the tightening screw 102 passes through the right side plate 502 and is screwed into the threaded hole on the left side plate 501, thereby connecting the left side plate 501 with the right side plate 502. At the same time, the thread of the tightening screw 101 is screwed into the corresponding threaded hole of the left side plate 501, and the front end of the tightening screw 101 presses against the surface of the right side plate 502, thereby maintaining a gap between the left side plate 501 and the right side plate 502, thereby facilitating the adjustment of the right side plate 502. In other embodiments, the adjustment assembly can be a screw and a nut that cooperate with each other, and the screw is driven by a servo motor, wherein the screw and the servo motor can be installed on the left side plate 501, and the nut can be installed on the right side plate 502, so that more precise adjustment can be achieved by connecting the servo motor to the control system.
[0027] In this embodiment, four measuring instruments 2 are provided, and the four measuring instruments 2 are respectively located near the edge of the reference plate 5. Specifically in this embodiment, Figure 2 As shown, the measuring instrument is a micrometer, the measuring rod of the micrometer passes through the left plate 501 and the right plate 502, and the side head of the micrometer can contact the end face of the crystal 4. When the tool is in use, since the micrometer is located at four different positions, the installation accuracy of the crystal 4 on the tool base can be determined by comparing the readings of the micrometer. In other embodiments, the measuring instrument 2 can be a high-precision infrared detector or a pressure sensor.
[0028] like Figure 1 , Figure 2 As shown, a fastening screw 3 is also installed at the edge of the left side plate 501, and the fastening screw 3 is threadedly installed at the position corresponding to the micrometer on the left side plate 501. When the fastening screw 3 is tightened, the front end of the fastening screw 3 can be tightly pressed against the outer periphery of the micrometer rod, ensuring the accuracy during the measurement process and avoiding the measurement deviation caused by the unreliable installation. Thus, the micrometer has a high measurement accuracy.
[0029] On the other hand, an adhesive base 9 and a U-shaped baffle 7 are also installed on the tooling base, wherein a glass strip or resin strip 10 is bonded to the adhesive base 9, and the U-shaped baffle 7 is located at one end close to the adjustment seat 8 and fixed to the adhesive base 9 by screws.
[0030] When the utility model is used, the operation method is as follows: first install the micrometer, and read the error of the micrometer by attaching a flat quartz plate to the plate surface of the right side plate 502, and adjust the position of the right side plate 502 by the error of the micrometer read to meet the accuracy requirements. After the accuracy adjustment of the right side plate 502 is completed, install the bonding base 9 on the tooling, bond the glass strip or resin strip 10 on the bonding base 9, and then apply glue to the lower side of the crystal 4 (or apply glue to the upper side of the glass strip / resin strip), and then bond the crystal 4 to the top of the glass strip or resin strip 10. After the bonding of the crystal 4 is completed, make the left end face of the crystal 4 contact the right side plate 502, and at the same time, use the U-shaped baffle 7 to tighten the right end face of the crystal 4. After the right end of the crystal 4 is tightened by the U-shaped baffle 7, the relative error is determined by reading the values of the four micrometers. Then install the adjustment seat 8, and use the adjustment bolt 6 to push against the right end of the crystal 4 according to the error direction for fine adjustment.
[0031] In the description of the present invention, the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "vertical", "horizontal", etc. (if any) indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the purpose of describing the present invention and do not require that the present invention must be constructed or operated in a specific position, and therefore cannot be understood as a limitation on the present invention. The terms "connected" and "connected" in the present invention should be understood in a broad sense, for example, it can be connected or detachably connected; it can be directly connected or indirectly connected through an intermediate component. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0032] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in their embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novelties disclosed herein.
Claims
1. A crystal bonding tool capable of reading and adjusting precision, comprising a tool base, a reference plate (5) being mounted on one end of the tool base, and an end face of a crystal (4) being capable of pressing against the reference plate (5); characterized in that: The reference plate (5) comprises a left side plate (501) fixed relative to the tooling base and a right side plate (502) mounted on one side of the left side plate (501); the left side plate (501) and the right side plate (502) are connected at their corners via a connecting assembly (1); a measuring instrument (2) is also fixed on the left side plate (501); the measuring instrument (2) is capable of detecting the relative position of the crystal (4) and the tooling base; a U-shaped baffle (7) is mounted on the end of the tooling base away from the reference plate (5); an adjustment seat (8) is mounted on the right side of the U-shaped baffle.
2. A crystal bonding tool capable of reading and adjusting precision according to claim 1, characterized in that: The U-shaped baffle (7) can press against one end of the crystal (4) away from the reference plate (5).
3. The crystal bonding tool capable of reading and adjusting precision according to claim 1, characterized in that: An adjusting bolt (6) is threadedly mounted on the adjusting seat (8), and one end of the adjusting bolt (6) can be used to tighten the crystal (4) to fine-tune the position accuracy.
4. The crystal bonding tool capable of reading and adjusting precision according to claim 1, characterized in that: The connection assembly (1) comprises a tightening screw (101) and a tensioning screw (102), wherein the tensioning screw (102) penetrates through a threaded connection to connect the left side plate (501) and the right side plate (502) into one body, the tightening screw (101) is threadedly mounted on the left side plate (501), and one end of the tightening screw (101) abuts against the plate surface of the right side plate (502).
5. The crystal bonding tool capable of reading and adjusting precision according to claim 4, characterized in that: A plurality of measuring instruments (2) are provided, and are respectively located near the edge of the reference plate (5).
6. The crystal bonding tool capable of reading and adjusting precision according to claim 5, characterized in that: The measuring instrument (2) is a micrometer, the measuring rod of the micrometer passes through the reference plate (5), and the measuring head of the micrometer can contact the end face of the crystal (4).
7. A crystal bonding tool capable of reading and adjusting precision according to claim 6, characterized in that: A fastening screw (3) is threadedly mounted on the edge of the left side plate (501), and the front end of the fastening screw (3) can be pressed against the measuring rod of the micrometer.
8. A crystal bonding tool capable of reading and adjusting precision according to any one of claims 1 to 7, characterized in that: A bonding base (9) is installed on the tooling base, and a glass strip or a resin strip (10) is bonded to the bonding base (9).