Ceramic ring for precise environment-friendly equipment

Abstract

The utility model relates to the technical field of ceramic ring equipment, and discloses a ceramic ring for precise environment-friendly equipment, which comprises a main body structure, a ceramic stabilizing ring is mounted in a mounting groove of a ceramic base, when the ceramic stabilizing ring is mounted, a fixing block in a fixing groove is extruded to retract into the fixing groove, and the ceramic stabilizing ring is rotated to fix the ceramic stabilizing ring into the ceramic base. The fixing grooves are aligned with the positioning grooves, the reset springs apply outward acting force to the fixing blocks, the fixing blocks are separated from the fixing grooves and clamped into the positioning grooves, the ceramic stabilizing ring and the pressing edge are fixed to the ceramic base, and the mounting fixing ring is fixed to the bottom of the ceramic stabilizing ring through the mounting adapting holes in the bottom of the ceramic base. In this way, installation of the ceramic stabilizing ring is completed, when the pressing edge is damaged in the using process of the ceramic ring, the pressing edge is replaced by detaching the ceramic stabilizing ring, the situation that after the pressing edge of the pressing ring of the ceramic ring is damaged, the whole ceramic ring is scrapped is avoided, and the equipment replacement cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic ring equipment, in particular to a ceramic ring used for precision environmental protection equipment. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor integrated circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and then mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. At present, domestic wafer production lines are mainly 8 inches and 12 inches. The main processing methods of wafers are sheet processing and batch processing, that is, processing one or more wafers at the same time. As the feature size of semiconductors becomes smaller and smaller, the processing and measurement equipment becomes more and more advanced, resulting in new data characteristics in wafer processing. At the same time, the reduction in feature size increases the impact of the number of particles in the air on the quality and reliability of the wafer after processing during wafer processing. As the cleanliness improves, the number of particles also shows new data characteristics. Ceramic rings are fixed clamping devices used to fix semiconductor wafers.

[0003] The pressing edge of the pressing ring in the prior art is often fixedly mounted with the pressing ring base, but the pressing edge of the pressing ring is often damaged before the pressing ring base during use, resulting in the pressing ring base having to be scrapped before reaching the end of its service life due to damage to the pressing edge of the pressing ring, which not only affects the overall service life of the equipment, but also increases the cost of equipment replacement;

[0004] To this end, we propose a ceramic ring for precision environmental protection equipment to solve the problem that after the pressing edge of the ceramic ring is damaged, the entire ceramic ring will be scrapped, thereby increasing the cost of equipment replacement. Utility Model Content

[0005] The purpose of the utility model is to provide a ceramic ring for precision environmental protection equipment to solve the problems raised in the above background technology.

[0006] In order to solve the above technical problems, the utility model provides the following technical solutions: a ceramic ring for precision environmental protection equipment, comprising a main structure, the main structure comprising a ceramic base, a mounting groove is provided at the bottom of the ceramic base, a ceramic stabilizing ring is arranged inside the mounting groove; a pressing edge is fixedly connected to the outer wall of the ceramic stabilizing ring, and an installation fixing ring is provided at the bottom of the ceramic base.

[0007] Preferably, a mounting adapter hole is provided at the bottom of the ceramic base, a threaded hole is provided on the outer surface of the mounting fixing ring, and the size and shape of the mounting adapter hole are adapted to the threaded hole.

[0008] Preferably, a fixing groove is provided on the outer wall of the ceramic stabilizing ring, and a fixing block is arranged inside the fixing groove.

[0009] Furthermore: the top of the fixing block is semicircular, and the semicircular fixing block is more convenient to be inserted into and disengaged from the positioning groove, so as to facilitate the installation and removal of the ceramic stabilizing ring.

[0010] Preferably, a return spring is fixedly connected to the inner bottom wall of the fixing groove, and the top of the return spring is fixedly connected to the bottom of the fixing block.

[0011] Preferably, the inner wall of the ceramic base is provided with equidistant positioning grooves, and the size and shape of the positioning grooves are adapted to the fixing block.

[0012] Preferably, the outer wall of the ceramic base is annularly and fixedly connected with mounting ears, and the number of the mounting ears is three.

[0013] Preferably, a rubber pad is fitted on the inner wall of the installation groove, and a through hole with a size and shape matching the positioning groove is opened on the outer surface of the rubber pad.

[0014] Compared with the prior art, the beneficial effects achieved by the utility model are:

[0015] First, the utility model installs the ceramic stabilizing ring into the installation groove of the ceramic base. When the ceramic stabilizing ring is installed, the fixing block in the fixing groove is squeezed and retracted into the fixing groove. The ceramic stabilizing ring is rotated to align the fixing groove with the positioning groove. The reset spring gives the fixing block an outward force to make the fixing block disengage from the fixing groove and snap into the positioning groove, so that the ceramic stabilizing ring and the pressing edge are fixed on the ceramic base. The installation fixing ring is fixed to the bottom of the ceramic stabilizing ring through the installation adapter hole at the bottom of the ceramic base, thus completing the installation of the ceramic stabilizing ring. When the pressing edge of the ceramic ring is damaged during use, the pressing edge can be replaced by disassembling the ceramic stabilizing ring, thereby avoiding the entire ceramic ring being scrapped due to damage to the pressing edge of the pressing ring of the ceramic ring, thereby reducing the cost of equipment replacement.

[0016] Second, the utility model facilitates fixing the ceramic ring on the equipment through the mounting ears. The three mounting ears make the ceramic ring more stable on the equipment. The rubber pad reduces the shaking of the ceramic stabilizing ring in the ceramic base and reduces the squeezing force of the pressing edge, thereby reducing the damage of the pressing edge to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the internal structure of the utility model;

[0019] Figure 3 It is a schematic diagram of the overall cross-sectional structure of the utility model;

[0020] Figure 4 For the utility model Figure 3 A is an enlarged schematic diagram of the structure.

[0021] Among them: 1. Main structure; 101. Ceramic base; 102. Mounting groove; 103. Ceramic stabilizing ring; 104. Pressing edge; 105. Installing fixing ring; 106. Installing adapter hole; 107. Fixing groove; 108. Fixing block; 109. Reset spring; 110. Positioning groove; 111. Mounting ear; 112. Rubber pad. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The utility model provides the following technical solutions:

[0024] Embodiment 1

[0025] See also Figure 1-4 A ceramic ring for precision environmental protection equipment includes a main structure 1, which includes a ceramic base 101. A mounting groove 102 is provided at the bottom of the ceramic base 101, and a ceramic stabilizing ring 103 is arranged inside the mounting groove 102; a pressing edge 104 is fixedly connected to the outer wall of the ceramic stabilizing ring 103, and a mounting fixing ring 105 is arranged at the bottom of the ceramic base 101.

[0026] The bottom of the ceramic base 101 is provided with a mounting adapter hole 106 , and the outer surface of the mounting fixing ring 105 is provided with a threaded hole, and the size and shape of the mounting adapter hole 106 are adapted to the threaded hole.

[0027] A fixing groove 107 is formed on the outer wall of the ceramic stabilizing ring 103 , and a fixing block 108 is disposed inside the fixing groove 107 .

[0028] A return spring 109 is fixedly connected to the inner bottom wall of the fixing groove 107 , and the top of the return spring 109 is fixedly connected to the bottom of the fixing block 108 .

[0029] The inner wall of the ceramic base 101 is provided with equidistant positioning grooves 110 , and the size and shape of the positioning grooves 110 are adapted to the fixing block 108 .

[0030] The outer wall of the ceramic base 101 is annularly and fixedly connected with mounting ears 111 , and the number of mounting ears 111 is three.

[0031] Through the above technical solution, the ceramic stabilizing ring 103 is installed into the installation groove 102 of the ceramic base 101. When the ceramic stabilizing ring 103 is installed, the fixing block 108 in the fixing groove 107 is squeezed and retracted into the fixing groove 107. By rotating the ceramic stabilizing ring 103, the fixing groove 107 is aligned with the positioning groove 110, and the reset spring 109 exerts an outward force on the fixing block 108, so that the fixing block 108 is separated from the fixing groove 107 and is stuck in the positioning groove 110, so that the ceramic stabilizing ring 103 and the pressing edge 104 are fixed on the ceramic base 101, and the mounting fixing ring 105 is fixed to the bottom of the ceramic stabilizing ring 103 through the mounting adapter hole 106 at the bottom of the ceramic base 101, so that the installation of the ceramic stabilizing ring 103 is completed. When the pressing edge 104 of the ceramic ring is damaged during use, the pressing edge 104 is replaced by disassembling the ceramic stabilizing ring 103, thereby avoiding the entire ceramic ring being scrapped due to the pressing edge 104 of the ceramic ring being damaged, thereby reducing the equipment replacement cost.

[0032] Embodiment 2

[0033] See also Figure 1-4 , and on the basis of Example 1, further obtained: a ceramic ring for precision environmental protection equipment, including a main structure 1, the main structure 1 includes a ceramic base 101, a mounting groove 102 is opened at the bottom of the ceramic base 101, and a ceramic stabilizing ring 103 is arranged inside the mounting groove 102; a pressing edge 104 is fixedly connected to the outer wall of the ceramic stabilizing ring 103, and a mounting fixing ring 105 is arranged at the bottom of the ceramic base 101.

[0034] The outer wall of the ceramic base 101 is annularly and fixedly connected with mounting ears 111 , and the number of mounting ears 111 is three.

[0035] A rubber pad 112 is fitted on the inner wall of the installation groove 102 , and a through hole having a size and shape matching that of the positioning groove 110 is formed on the outer surface of the rubber pad 112 .

[0036] Through the above technical solution, the ceramic ring can be conveniently fixed on the equipment through the mounting ears 111. The three mounting ears 111 make the ceramic ring more stable on the equipment. The rubber pad 112 can reduce the shaking of the ceramic stabilizing ring 103 in the ceramic base 101 and reduce the squeezing force of the pressing edge 104, thereby reducing the damage of the pressing edge 104 to a certain extent.

[0037] When in use: install the ceramic stabilizing ring 103 into the installation groove 102 of the ceramic base 101. When the ceramic stabilizing ring 103 is installed, the fixing block 108 in the fixing groove 107 is squeezed and retracted into the fixing groove 107. By rotating the ceramic stabilizing ring 103, the fixing groove 107 is aligned with the positioning groove 110. The return spring 109 exerts an outward force on the fixing block 108, so that the fixing block 108 is separated from the fixing groove 107 and is inserted into the positioning groove 110, so that the ceramic stabilizing ring 103 and The pressing edge 104 is fixed on the ceramic base 101, and the mounting fixing ring 105 is fixed to the bottom of the ceramic stabilizing ring 103 through the mounting adapter hole 106 at the bottom of the ceramic base 101, thereby completing the installation of the ceramic stabilizing ring 103. When the pressing edge 104 of the ceramic ring is damaged during use, the pressing edge 104 can be replaced by disassembling the ceramic stabilizing ring 103, thereby avoiding the entire ceramic ring being scrapped due to damage to the pressing edge 104 of the ceramic ring, thereby reducing the cost of equipment replacement.

[0038] Although specific embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these specific embodiments without departing from the principles and spirit thereof, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A ceramic ring for precision environmental protection equipment, comprising a main structure (1), characterized in that: The main structure (1) comprises a ceramic base (101), a mounting groove (102) is provided at the bottom of the ceramic base (101), a ceramic stabilizing ring (103) is arranged inside the mounting groove (102); a pressing edge (104) is fixedly connected to the outer wall of the ceramic stabilizing ring (103), and a mounting fixing ring (105) is arranged at the bottom of the ceramic base (101).

2. The ceramic ring for precision environmental protection equipment according to claim 1, characterized in that: The bottom of the ceramic base (101) is provided with a mounting adapter hole (106), and the outer surface of the mounting fixing ring (105) is provided with a threaded hole, and the size and shape of the mounting adapter hole (106) are adapted to the threaded hole.

3. The ceramic ring for precision environmental protection equipment according to claim 1, characterized in that: The outer wall of the ceramic stabilizing ring (103) is provided with a fixing groove (107), and a fixing block (108) is arranged inside the fixing groove (107).

4. The ceramic ring for precision environmental protection equipment according to claim 3, characterized in that: A return spring (109) is fixedly connected to the inner bottom wall of the fixing groove (107), and the top of the return spring (109) is fixedly connected to the bottom of the fixing block (108).

5. The ceramic ring for precision environmental protection equipment according to claim 1, characterized in that: The inner wall of the ceramic base (101) is provided with equidistant positioning grooves (110), and the size and shape of the positioning grooves (110) are adapted to the fixing block (108).

6. The ceramic ring for precision environmental protection equipment according to claim 1, characterized in that: The outer wall of the ceramic base (101) is annularly arranged and fixedly connected with mounting ears (111), and the number of the mounting ears (111) is three.

7. The ceramic ring for precision environmental protection equipment according to claim 1, characterized in that: A rubber pad (112) is fitted on the inner wall of the installation groove (102), and a through hole having a size and shape matching that of the positioning groove (110) is provided on the outer surface of the rubber pad (112).

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