Monocrystalline silicon doping hoisting tool
By designing a stable connection of single crystal silicon doped lifting tool, the problem of unstable molybdenum wire connection is solved, the stable up and down movement of the doped cup is achieved and the operation simplified, and the quality of the single crystal silicon growth process is improved.
Patent Information
- Application Number
- CN202421197626.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-28
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-28
AI Technical Summary
During the growth of single crystal silicon, the stability of the molybdenum wire connection is uncertain, resulting in unstable up and down movement of the doped cup, complex operation, and affecting product quality.
A single crystal silicon doped lifting tool is designed, including a cylindrical mounting member and a hook. The mounting member and the heavy hammer are connected through a stable thread. The hook hangs the doped cup to ensure the stability of the up and down movement of the doped cup.
The stable lifting and movement of the doped cup is achieved, which simplifies operation, reduces the risk of failure during the doping process, and improves product quality.
Smart Images
Figure CN222273883U_ABST
Abstract
Description
Technical Field
[0001] The utility model generally relates to the field of single crystal silicon production, and in particular to a single crystal silicon doping hoisting tool. Background Art
[0002] The semiconductor properties of silicon, especially its band structure, allow it to be doped with different impurities to adjust its conductivity, which is crucial for modern electronic devices. Due to the chemical stability of silicon and the abundance of silicon-based materials, silicon rods have become the material of choice in the semiconductor industry. The outstanding performance of silicon rods lies not only in its electronic properties as a semiconductor material, but also in its high thermal conductivity, mechanical stability and ability to chemically react with many different elements.
[0003] During the growth of silicon single crystals, specific dopants such as phosphorus or boron can be added to adjust the conductivity of the silicon rod. The doping process needs to be precisely controlled to ensure that the conductive properties of the silicon rod meet the requirements of electronic devices.
[0004] During the growth of single crystal silicon, the doping cup is generally connected to a heavy hammer through a molybdenum wire, and then raised and lowered to carry out the growth process. However, the stability of the molybdenum wire connection is uncertain, which is prone to accidents and affects product quality. In addition, the operation of connecting through the molybdenum wire is relatively complicated and difficult to implement. Utility Model Content
[0005] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide a single crystal silicon doping lifting tool.
[0006] In a first aspect, a single crystal silicon doping lifting tool is provided, comprising:
[0007] A mounting member, the mounting member is cylindrical, and a first groove is provided at the end thereof, the first groove is provided with an opening portion, a threaded portion and a hole portion in sequence along the length direction of the mounting member, the opening portion is provided close to the end of the mounting member, and the threaded portion in the first groove is used for assembly and connection with a weight;
[0008] A hook is mounted on an end of the mounting member away from the first groove and is used for hanging the doping cup.
[0009] As an achievable manner, the diameter of the opening portion gradually decreases from one end of the mounting member to the other end.
[0010] As a feasible manner, the side wall of the opening is inclined, and the opening angle of the opening is 60°±10°.
[0011] As an achievable manner, the diameter of the first groove at the opening portion is greater than the diameter of the first groove at the threaded portion.
[0012] As an achievable manner, the mounting member is provided with a through hole penetrating through a side wall of the mounting member, and the through hole is located at the opening portion.
[0013] As an achievable manner, the diameter of the through hole is smaller than the height of the opening portion.
[0014] As an achievable manner, a second groove is provided on the outer wall of the mounting member, and the second groove is arranged at a position on the outer wall of the mounting member corresponding to the threaded portion.
[0015] As an achievable manner, a height of the second groove is smaller than a height of the threaded portion.
[0016] As an achievable manner, the second groove is arranged around the outer wall of the mounting member, or a plurality of second grooves are arranged symmetrically on the mounting member.
[0017] According to the technical solution provided in the embodiment of the present application, the mounting part is used to assemble and connect with the heavy hammer through the connected mounting part and the hook structure. This connection method is relatively stable, and the doping cup is directly suspended under the lifting tool through the hook. The doping cup is driven up and down by the lifting tool. The connection between the lifting tool and the heavy hammer is stable, and the lifting of the doping cup by the hook is also stable. The operation is simple and the up and down movement of the doping cup is more stable. Problems are not easy to occur during the movement of the doping cup. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:
[0019] Figure 1 This is a schematic diagram of a single crystal silicon doping lifting tool in this embodiment;
[0020] Figure 2 This is a cross-sectional schematic diagram of a single crystal silicon doping lifting tool in this embodiment;
[0021] Figure 3 Schematic diagram of the hook in this embodiment.
[0022] Reference numerals:
[0023] Mounting member-10, first groove-11, opening-12,
[0024] Threaded portion-13, opening portion-14, second groove-15,
[0025] Via holes - 16,
[0026] Hook - 20. DETAILED DESCRIPTION
[0027] The present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant utility model, rather than to limit the utility model. It is also necessary to explain that, for ease of description, only the parts related to the utility model are shown in the accompanying drawings.
[0028] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.
[0029] Please refer to Figure 1 and Figure 2 As shown, this embodiment provides a monocrystalline silicon doping hoisting tool, including: a mounting member 10, the mounting member 10 is cylindrical, and a first groove 11 is provided at the end thereof, the first groove 11 is provided with an opening portion 12, a threaded portion 13 and a hole portion 14 in sequence along the length direction of the mounting member 10, the opening portion 12 is provided close to the end of the mounting member 10, and the threaded portion 13 in the first groove 11 is used for assembly and connection with a heavy hammer;
[0030] The hook 20 is mounted on an end of the mounting member 10 away from the first groove 11 and is used for hanging the doping cup.
[0031] This embodiment provides a lifting tool, which is configured as a connected mounting part 10 and a hook 20 structure. The mounting part 10 is used for assembly connection with a heavy hammer. This connection method is relatively stable, and the doping cup is directly suspended below the lifting tool through the hook 20. The lifting tool drives the doping cup to move up and down. The connection between the lifting tool and the heavy hammer is stable, and the lifting of the doping cup by the hook 20 is also stable. The operation is simple, and the up and down movement of the doping cup is more stable, and problems are less likely to occur during the movement of the doping cup.
[0032] The lifting tool provided in this embodiment is composed of two parts, namely a mounting member 10 and a hook 20. A first groove 11 is provided at one end of the mounting member 10, and a third groove is provided at the other end. A thread is provided on the inner wall of the third groove. The hook 20 is threadedly connected to the mounting member 10 through the thread, so that the connection between the hook 20 and the mounting member 10 is relatively stable. Figure 3 As shown, the length of the hook 20 is related to the lifting height of the doping cup, and hooks 20 of different lengths can be switched according to different application environments. The inner wall of the first groove 11 provided on the mounting member 10 is provided with threads, and the mounting member 10 is assembled and connected with the weight through the provided threads, so that the connection between the mounting member 10 and the weight is also relatively stable, and it is not easy to fall or become unstable. Figure 2As shown, the first groove 11 of the mounting member 10 has an opening 12, a threaded portion 13 and a hole 14 from top to bottom, wherein the thread on the inner wall of the first groove 11 is arranged at the position of the threaded portion 13, and the thread of the threaded portion 13 is provided with at least three turns of thread, and generally three turns are selected, so that the connection between the mounting member 10 and the weight is simpler, and the number of turns of thread is less, and the connection between the mounting member 10 and the weight is faster. In this embodiment, the thread is preferably set to be a left-hand thread.
[0033] Optionally, the diameter of the opening 12 gradually decreases from one end of the mounting member 10 to the other end.
[0034] In this embodiment, an opening is set on the first groove 11 of the mounting piece 10, and when the opening extends from the inside of the first groove 11 to the outside of the first groove 11, the diameter gradually increases, so that the opening position of the first groove 11 forms an outward trumpet shape. This structure facilitates the connection between the mounting piece 10 and the weight, and the connecting part of the weight extends into the first groove 11 for more convenient operation.
[0035] Optionally, the side wall of the opening 12 is inclined, and the opening angle of the opening 12 is 60°±10°.
[0036] In this embodiment, the side wall of the opening 12 is preferably set to an inclined structure, and the opening angle is at least 60°. A larger opening can facilitate the connection of a heavy hammer.
[0037] Furthermore, the diameter of the first groove 11 at the opening portion 14 is greater than the diameter of the threaded portion 13. Figure 1 As shown, this embodiment also requires drilling a hole on the mounting member 10 so that the inside of the mounting member 10 is connected to the outside, wherein the hole is drilled at the position of the opening portion 14 , and the diameter of the opening portion 14 is preferably set to be larger than the diameter of the threaded portion 13 .
[0038] Optionally, the mounting member 10 is provided with a through hole 16 penetrating through a side wall of the mounting member 10 , and the through hole 16 is located at the opening portion 14 .
[0039] refer to Figure 1 and Figure 2 As shown, in this embodiment, a through hole 16 is provided on the side wall of the mounting member 10, and the connection between the inside and the outside of the mounting member 10 is achieved through the through hole 16. The diameter of the through hole 16 is preferably set to 3 mm, and the through hole 16 is provided at the position of the opening portion 14 to achieve separation from the threaded portion 13, and the opening will not affect the thread.
[0040] Optionally, the diameter of the through hole 16 is smaller than the height of the opening 14. In this embodiment, the height of the opening 14 is preferably set to 5 mm, and the through hole 16 is set to a through hole 16 with a diameter of 3 mm. The through hole 16 is separated from the thread and will not affect each other.
[0041] Furthermore, a second groove 15 is provided on the outer wall of the mounting member 10 , and the second groove 15 is arranged at a position on the outer wall of the mounting member 10 corresponding to the threaded portion 13 .
[0042] This embodiment also sets a second groove 15 on the outer wall of the mounting member 10. The second groove 15 is convenient for users to hold and rotate during use, making the connection between the weight and the mounting member 10 more convenient. The second groove 15 on the outer wall of the mounting member 10 needs to thin the outside of the mounting member 10. Therefore, the second groove 15 is set at the position of the threaded portion 13. The wall thickness of the mounting member 10 of the corresponding threaded portion 13 is relatively large, and the setting of the second groove 15 will not affect the structure of the lifting tool. In addition, the setting of the second groove 15 needs to be able to meet the convenience of users during installation. Therefore, the length of the second groove 15 along the height direction of the mounting member 10, that is, the height of the second groove 15, needs to be set long enough.
[0043] In addition, the height of the second groove 15 is less than the height of the threaded portion 13. In this embodiment, the height of the second groove 15 is generally set to be about half of the height of the threaded portion 13. For example, the height of the threaded portion 13 provided in this embodiment is 40 mm, and the height of the second groove 15 is preferably set to be 20 mm.
[0044] Optionally, the second groove 15 is arranged around the outer wall of the mounting member 10 , or a plurality of second grooves 15 are arranged symmetrically on the mounting member 10 .
[0045] The second groove 15 in this embodiment can be set to different structures according to the process and production conditions. For example, two second grooves 15 are set symmetrically on the mounting member 10 to form a structure as shown in FIG. Figure 1 When using the structure shown, pinch the second grooves 15 on the opposite sides to operate;
[0046] Alternatively, the second groove 15 is set as an annular structure and arranged around the outer wall of the mounting member 10, so that the second groove 15 is provided at any position on the ring line of the outer wall of the mounting member 10, and the mounting member 10 can be grabbed at any position during installation, which is more convenient.
[0047] The lifting tool provided in the above embodiment is divided into two parts, one part is a mounting part 10, which is used to connect with a heavy hammer, and the other part is a hook 20, which is used to hang the doping cup. The two parts are connected by threads, wherein the mounting part 10 is a columnar structure, preferably a cylindrical structure, and chamfers are provided at the two ends of the mounting part 10 to avoid dangerous situations caused by sharp edges during use.
[0048] When carrying out the doping process of single crystal silicon, after the silicide material is completed, first raise the weight to the position of the observation window of the auxiliary furnace chamber, assemble the mounting part 10 and the hook 20 together, and then assemble the entire lifting tool to the weight, and then hang the doping cup on the hook 20, and then lower the entire device to a position close to the liquid surface through a tungsten wire rope. After the dopant in the doping cup is sublimated, raise the doping cup to the position of the observation window of the auxiliary furnace chamber, remove the doping component, and the doping operation is completed.
[0049] It should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like used above to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention; the orientation words "inside" and "outside" refer to the inside and outside relative to the contours of the components themselves. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.
[0050] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.
[0051] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the concept of the utility model. For example, the above features are replaced with the technical features with similar functions disclosed in the present application (but not limited to) by each other to form a technical solution.
Claims
1. A single crystal silicon doping hoisting tool, characterized in that: include: A mounting member, the mounting member is cylindrical, and a first groove is provided at the end thereof, the first groove is provided with an opening portion, a threaded portion and a hole portion in sequence along the length direction of the mounting member, the opening portion is provided close to the end of the mounting member, and the threaded portion in the first groove is used for assembly and connection with a weight; A hook is mounted on an end of the mounting member away from the first groove and is used for hanging the doping cup.
2. The single crystal silicon doping hoisting tool according to claim 1, characterized in that: The diameter of the opening portion gradually decreases from the end of the mounting member toward the other end.
3. The single crystal silicon doping hoisting tool according to claim 2, characterized in that: The side wall of the opening is inclined, and the opening angle of the opening is 60°±10°.
4. The single crystal silicon doping hoisting tool according to claim 1, characterized in that: The diameter of the first groove at the opening portion is greater than the diameter of the first groove at the threaded portion.
5. The single crystal silicon doping hoisting tool according to claim 4, characterized in that: The mounting member is provided with a through hole penetrating through the side wall of the mounting member, and the through hole is located at the opening portion.
6. The single crystal silicon doping hoisting tool according to claim 5, characterized in that: The diameter of the through hole is smaller than the height of the opening portion.
7. The single crystal silicon doping hoisting tool according to claim 1, characterized in that: A second groove is provided on the outer wall of the mounting piece, and the second groove is arranged at a position on the outer wall of the mounting piece corresponding to the threaded portion.
8. The single crystal silicon doping hoisting tool according to claim 7, characterized in that: A height of the second groove is smaller than a height of the threaded portion.
9. The single crystal silicon doping hoisting tool according to claim 7, characterized in that: The second groove is arranged around the outer wall of the mounting member, or a plurality of second grooves are arranged symmetrically on the mounting member.