Evaporator with detection device

Abstract

The utility model discloses an evaporator with a detection device, which comprises a vacuum plating chamber, an unwinding mechanism, a winding mechanism, a cooling rotary drum and the detection device for detecting the thickness of a film are respectively arranged in the vacuum plating chamber, and the detection device is arranged between the cooling rotary drum and the winding mechanism. The detection device comprises a light emitting part, a light sensing part, a control module and a rack, the light sensing part and the control module are both arranged on the rack, a mounting box is arranged in the vacuum plating chamber, the mounting box comprises a box body, and an opening groove is formed in the upper surface of the box body; the box body is provided with an open slot, the screw rod is arranged in the open slot and is arranged along the length direction of the box body, the lower end of the light-emitting component is in threaded fit with the screw rod, and the rack and the light-emitting component are respectively positioned on the front side and the back side of the film.

Description

Technical Field

[0001] The utility model relates to the technical field of vapor deposition machines, in particular to a vapor deposition machine with a detection device. Background Art

[0002] Vacuum coating products have high requirements on film thickness. The uniformity of the coating process is directly related to the quality of the coated products. Therefore, the film thickness detection during the coating process is very important.

[0003] According to the prior art, there is a coating device for capacitor film, with publication number CN205874524U, comprising a housing, a plating drum, a winding device and an evaporating device, the winding device comprising a unwinding mechanism and a rewinding mechanism, the unwinding mechanism being provided with an unwinding shaft, the rewinding mechanism being provided with a rewinding shaft, the unwinding shaft and the rewinding shaft being respectively arranged in parallel with the plating drum, the evaporating device comprising an aluminum evaporating mechanism and a zinc evaporator, the plating drum being placed in the middle of the housing, shielding belts being respectively arranged on both sides of the radial direction of the plating drum, the winding device being placed in the housing at an upper position corresponding to the shielding belt, the evaporating device being placed in the housing at a lower position corresponding to the shielding belt, the unwinding shaft and the rewinding shaft being respectively placed on both sides above the plating drum, the aluminum evaporating mechanism being placed below the plating drum at a position corresponding to one side of the unwinding shaft, and the zinc evaporator being placed below the plating drum at a position corresponding to one side of the rewinding shaft. In the process of coating, it is necessary to detect the film thickness in real time, so a vacuum coating online thickness gauge is used. There is a vacuum coating online thickness gauge, publication number CN203587061U. The vacuum coating online thickness gauge is directly fixed in the vacuum coating chamber. Since the sheet materials of vacuum coating are generally wide, multiple light-emitting components and multiple photosensitive components are required to be combined to more comprehensively detect the film thickness and uniformity of the sheet materials. However, for films of different widths, the number of light-emitting components needs to be increased or decreased each time, which is inconvenient to use. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the defects of the above-mentioned prior art and provide a convenient-to-use vapor deposition machine with a detection device.

[0005] In order to achieve the above-mentioned purpose, the technical solution of the utility model is: a vapor deposition machine with a detection device, comprising a vacuum deposition chamber, wherein the vacuum deposition chamber is respectively provided with an unwinding mechanism, a winding mechanism, a cooling drum and a detection device for detecting the thickness of a film, wherein the detection device is arranged between the cooling drum and the winding mechanism, wherein the detection device comprises a light-emitting component, a photosensitive component, a control module and a frame, wherein the photosensitive component and the control module are both arranged on the frame, wherein the vacuum deposition chamber is provided with an installation box, wherein the installation box comprises:

[0006] A box body, wherein an opening groove is provided on the upper surface of the box body;

[0007] A screw rod, wherein the screw rod is arranged in the open groove and along the length direction of the box body, the lower end of the light-emitting component is matched with the screw thread, and the frame and the light-emitting component are respectively located on the front and back sides of the film;

[0008] A motor, wherein the motor is arranged in the box body, and the motor drives the screw to rotate and fits in the box body; when the motor drives the screw to rotate, the light-emitting component moves left and right on the screw;

[0009] At least one guide rod is provided in the box body, the guide rod and the screw rod are parallel to each other, and the light emitting component is slidably matched on the guide rod.

[0010] After adopting the above structure, the utility model has the following advantages compared with the prior art: an installation box is arranged in the vacuum plating chamber, and a screw, a guide rod and a motor are respectively arranged in the installation box, the light-emitting component cooperates with the screw thread to form a screw structure, and the motor is used to drive the screw to rotate, so that the light-emitting component can move left and right on the screw, so that the light-emitting component can move along the width direction of the film; and the photosensitive component and the light-emitting component are respectively located on the front and back sides of the film. During the movement of the light-emitting component, one light-emitting component can emit light toward multiple photosensitive components. In this way, a light-emitting component can realize the detection of the thickness of films of different specifications, and it is easy to use.

[0011] Preferably, the number of the guide rods is two, and the screw rod is located between the two guide rods, so that the light-emitting component moves more smoothly and has high reliability.

[0012] Preferably, it also includes a slide seat, the outer side of the slide seat is respectively provided with a threaded through hole and a guide through hole, the light-emitting component is arranged on the upper surface of the slide seat, the threaded through hole cooperates with the screw thread, and the guide through hole cooperates with the guide rod in a sliding manner, and the structure is simple.

[0013] Preferably, the box body is further provided with a drag chain for protecting the circuit of the light-emitting component, one end of the drag chain is fixed on the light-emitting component, and the other end of the drag chain is arranged in the open groove, so as to facilitate the protection of the circuit and have high reliability.

[0014] Preferably, the number of the drag chains is two, and the drag chains are respectively located on the front and rear inner sides of the opening slot, which does not take up space and is convenient for arranging more lines.

[0015] Preferably, a baffle plate for limiting the position of the drag chain is provided on the upper surface of the rear side of the box body, and the baffle plate is arranged along the length direction of the box body to limit the position of the drag chain and prevent the drag chain from detaching from the box body.

[0016] Preferably, a support plate is provided on the slide seat, the light-emitting component is arranged on the support plate, and the front and rear ends of the support plate respectively extend to the drag chain so that the upper end of the drag chain is located on the upper surface of the support plate, thereby supporting the drag chain and facilitating the movement of the drag chain.

[0017] Preferably, one end of the support plate away from the baffle is bent upward to form a bent portion to prevent the drag chain from detaching from the box body, thereby achieving high reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of a vapor deposition machine with a detection device according to the utility model.

[0019] Figure 2 It is a three-dimensional diagram of a vapor deposition machine installation box with a detection device according to the utility model.

[0020] Figure 3 It is a three-dimensional diagram of a slide seat of a vapor deposition machine with a detection device according to the utility model.

[0021] Among them, 1. vacuum plating chamber, 2. unwinding mechanism, 3. winding mechanism, 4. cooling drum, 5. detection device, 510. light-emitting component, 520. frame, 6. installation box, 7. box body, 710. opening groove, 720. baffle, 8. screw, 9. guide rod, 10. slide seat, 11. threaded through hole, 12. guide through hole, 13. drag chain, 14. support plate, 15. bending part. DETAILED DESCRIPTION

[0022] The utility model is further described below in conjunction with the accompanying drawings and specific implementation methods.

[0023] like Figure 1As shown, the utility model provides a vapor deposition machine with a detection device, including a vacuum deposition chamber 1, in which an unwinding mechanism 2, a rewinding mechanism 3, a cooling drum 4 and a detection device 5 are respectively arranged, the unwinding mechanism 2 and the rewinding mechanism 3 are respectively located on the left and right sides of the cooling drum 4, and the cooling drum 4 is located below the unwinding mechanism 2 and the rewinding mechanism 3, the film passes through the cooling drum 4 and the rewinding mechanism 3 from the unwinding mechanism 2 in sequence, the detection device 5 is arranged between the cooling drum 4 and the rewinding mechanism 3, and the detection device 5 is used to perform real-time detection on the rear end of the film, so that the coating quality can be timely understood and the coating process can be timely adjusted according to the quality problems. Specifically, the detection device 5 includes a light-emitting component 510, multiple photosensitive components, a control module, a frame 520, a power interface and a communication interface. The control module, the photosensitive component, the power interface and the communication interface are all arranged on the frame 520. The control module is electrically connected to the light-emitting component 510, the multiple photosensitive components, the power interface and the communication interface respectively. The light-emitting component 510 and the photosensitive component are respectively located on the front and back sides of the film, that is, the light-emitting component 510 and the frame 520 are respectively located on the front and back sides of the film. The photosensitive component is arranged along the width direction of the film and the photosensitive component and the light-emitting component 510 are on the same horizontal plane. After the film is coated, it passes between the light-emitting component 510 and the frame 520. The film thickness of the sheet material can be detected and / or recorded in real time through a human-computer interaction device and / or a computer monitoring system connected to the communication interface of the detection device 5, so that the coating quality can be timely understood and the coating process can be adjusted in time according to quality problems.

[0024] As an example, Figure 2 In order to measure the thickness of films of different widths, a mounting box 6 for mounting a light-emitting component 510 is provided in the vacuum coating chamber 1. The mounting box 6 includes a box body 7, a screw 8, a motor, and at least one guide rod 9. The screw 8, the motor, and the guide rod 9 are all arranged in the box body 7. An opening groove 710 with an opening upward is provided on the upper surface of the box body 7. The screw 8 is rotatably fitted in the opening groove 710, and the screw 8 is distributed along the length direction of the box body 7. The lower end of the light-emitting component 510 is threadedly matched with the screw 8, and the gear shaft of the motor is meshed with the gear of the screw 8, so that the light-emitting component 510 can be driven. The optical component 510 moves left and right on the screw 8. The light-emitting component 510 corresponds to the photosensitive components respectively during the movement. One light-emitting component 510 can correspond to multiple photosensitive components. In this way, only one light-emitting component 510 needs to be set to realize the illumination of multiple photosensitive components. For films of different widths, there is no need to increase or decrease the number of light-emitting components 510, which is easy to use. The guide rod 9 is parallel to the screw 8, and the light-emitting component 510 is slidably fitted on the guide rod 9 to guide the movement of the light-emitting component 510.

[0025] As an embodiment, there are two guide rods 9, which are respectively located at the front and rear sides of the screw rod 8, so that the light-emitting component 510 moves more smoothly and has a good guiding effect.

[0026] As an example, Figure 3 In order to facilitate the cooperation between the light-emitting component 510 and the screw rod 8 and the guide rod 9, it also includes a slide seat 10. The light-emitting component 510 is arranged on the slide seat 10. To facilitate the installation of the light-emitting component 510, the outer side of the slide seat 10 is respectively provided with a threaded through hole 11 and a guide through hole 12. The screw rod 8 cooperates with the threaded through hole 11 to achieve threaded cooperation with the slide seat 10, and the guide rod 9 slides with the guide through hole 12 to guide the slide seat 10.

[0027] As an embodiment, in order to protect the circuit of the light-emitting component 510, a drag chain 13 is provided in the open groove 710, one end of the drag chain 13 is provided on the slide 10, and the other end of the drag chain 13 is located at the bottom of the open groove 710, and the circuit of the light-emitting component 510 is arranged on the drag chain 13. Specifically, there are two drag chains 13, and the drag chains 13 are respectively located at the front and rear sides of the open groove 710, which does not occupy space and is convenient for arranging more circuits. Specifically, in order to prevent the drag chain 13 from running out of the box body 7, a baffle 720 is provided on the upper surface of the rear side of the box body 7, and the drag chain 13 on the rear side of the open groove 710 is located below the baffle 720, so that the baffle 720 blocks the drag chain 13. At the same time, a support plate 14 is also provided on the slide seat 10, and the light-emitting component 510 is arranged on the support plate 14. The rear end of the support plate 14 is abutted against the rear inner wall of the opening groove 710, and the upper end of the drag chain 13 on the rear side of the opening groove 710 is located on the rear end of the support plate 14, which supports the drag chain 13 and can drive the drag chain 13 to move left and right, with high reliability; the front end of the support plate 14 is bent upward to form a bending portion 15, and the drag chain 13 on the front side of the opening groove is located on the front end of the support plate 14, which supports the drag chain 13 and facilitates the drag chain 13 to move left and right, and the bending portion 15 prevents the drag chain 13 from running out from the front side of the box body 7, with high reliability.

[0028] Specifically, the optical component 510, multiple photosensitive components, control module, rack 520, power interface and communication interface of the utility model are all selected from the patent name of a vacuum coating online thickness gauge, with a publication number of CN203587061U.

[0029] Specifically, the box body 7 is fixed in the vacuum coating chamber 1 by bolts.

[0030] Specifically, the principle of the utility model is to set an installation box 6 in the vacuum plating chamber 1, and to respectively set a screw 8, a guide rod 9 and a motor in the installation box 6, the light-emitting component 510 and the screw 8 are threadedly matched to form a screw structure, and the motor is used to drive the screw 8 to rotate, so that the light-emitting component 510 can move left and right on the screw 8, so that the light-emitting component 510 can move along the width direction of the film; and the photosensitive component and the light-emitting component 510 are respectively located on the front and back sides of the film. During the movement of the light-emitting component 510, one light-emitting component 510 can emit light toward multiple photosensitive components, so that one light-emitting component 510 can detect the thickness of films of different specifications, which is easy to use.

[0031] Action process: The motor is used to drive the screw 8 to rotate, thereby driving the slide 10 to move left and right in the installation box 6, thereby driving the light-emitting component 510 to move, and the light-emitting component 510 moves to the positions corresponding to the multiple photosensitive components in turn; at the same time, after the power interface is connected to the power supply, the detection device 5 starts to work, at this time, the control module controls the light-emitting component 510 to emit light, and controls the photosensitive component to sense the light intensity, and at the same time, the control module receives and processes the electrical signal transmitted by the photosensitive component in real time, and finally the control module can obtain the thickness of the film layer.

[0032] On the basis of the above scheme, if various changes or modifications to the utility model do not depart from the spirit and scope of the utility model, and if these changes and modifications fall within the claims and equivalent technical scope of the utility model, the utility model is also intended to include these changes and modifications.

Claims

1. A vapor deposition machine with a detection device, comprising a vacuum deposition chamber (1), wherein the vacuum deposition chamber (1) is provided with an unwinding mechanism (2), a winding mechanism (3), a cooling drum (4) and a detection device (5) for detecting the thickness of a film, wherein the detection device (5) is arranged between the cooling drum (4) and the winding mechanism (3), wherein the detection device (5) comprises a light emitting component (510), a photosensitive component, a control module and a frame (520), wherein the photosensitive component and the control module are both arranged on the frame, and wherein: The vacuum coating chamber (1) is provided with an installation box (6), and the installation box (6) comprises: A box body (7), wherein an upper surface of the box body (7) is provided with an opening groove (710); A screw (8), wherein the screw (8) is arranged in the open groove (710) and is arranged along the length direction of the box body (7), the lower end of the light-emitting component (510) is threadedly matched with the screw (8), and the frame (520) and the light-emitting component (510) are respectively located on the front and back sides of the film; A motor, wherein the motor is arranged in the box body (7), and the motor drives the screw rod (8) to rotate and is fitted in the box body (7); when the motor drives the screw rod (8) to rotate, the light-emitting component (510) moves left and right on the screw rod (8); At least one guide rod (9), the guide rod (9) is arranged in the box body (7), the guide rod (9) and the screw rod (8) are parallel to each other, and the light-emitting component (510) is slidably fitted on the guide rod (9).

2. The vapor deposition machine with a detection device according to claim 1, characterized in that: The number of the guide rods (9) is two, and the screw rod (8) is located between the two guide rods (9).

3. The vapor deposition machine with a detection device according to claim 1, characterized in that: It also includes a slide seat (10), the outer side surface of the slide seat (10) is respectively provided with a threaded through hole (11) and a guide through hole (12), the light-emitting component (510) is arranged on the upper surface of the slide seat (10), the threaded through hole (11) is threadedly matched with the screw rod (8), and the guide through hole (12) is slidingly matched with the guide rod (9).

4. The vapor deposition machine with a detection device according to claim 1, characterized in that: A drag chain (13) for protecting the circuit of the light-emitting component (510) is also provided in the box body (7); one end of the drag chain (13) is fixed on the light-emitting component (510), and the other end of the drag chain (13) is arranged in the open groove (710).

5. The vapor deposition machine with a detection device according to claim 4, characterized in that: The number of the drag chains (13) is two, and the drag chains (13) are respectively located on the front and rear inner sides of the opening groove (710).

6. The vapor deposition machine with a detection device according to claim 5, characterized in that: A baffle (720) for limiting the position of the drag chain (13) is provided on the upper surface of the rear side of the box body (7), and the baffle (720) is arranged along the length direction of the box body (7).

7. The vapor deposition machine with a detection device according to claim 3, characterized in that: A support plate (14) is provided on the slide seat (10), and the light-emitting component (510) is provided on the support plate (14). The front and rear ends of the support plate (14) respectively extend toward the drag chain (13) so that the upper ends of the drag chain (13) are both located on the upper surface of the support plate (14).

8. The vapor deposition machine with a detection device according to claim 7, characterized in that: One end of the support plate (14) away from the baffle (720) is bent upward to form a bent portion (15).

Images