Crucible and electron beam evaporation coating system

Abstract

The utility model discloses a crucible and an electron beam evaporation coating system, and relates to the technical field of coating. The crucible comprises a crucible body, the crucible body is an anti-climbing crucible body, and a hole is formed in the crucible body; the conductive part is arranged in the hole, and the part of the conductive part is exposed out of the inner cavity of the crucible body. In the electronic evaporation process, coating liquid makes local contact with the conductive part, current can be transmitted through the conductive part, and charge gathering is avoided. Meanwhile, the crucible body is an anti-climbing crucible body and has the anti-climbing performance, that is, the coating material contained in the crucible body is poor in wettability on the surface of the crucible body or does not infiltrate the surface of the crucible body, and the coating material does not climb along the surface of the crucible body or climbs along the crucible body very slowly; therefore, the coating material can be prevented from overflowing out of the crucible.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a crucible and an electron beam evaporation film coating system. Background Art

[0002] Electron beam evaporation is a type of physical vapor deposition. Electron beam evaporation uses accelerated electrons to bombard the coating material. The kinetic energy of the electrons is converted into heat energy to heat and evaporate the coating material. After evaporation, the coating material adheres to the surface of the workpiece to form a film.

[0003] In the electron beam evaporation process, the coating material is in a molten state under high-speed evaporation conditions, the coating material temperature is relatively high, and the electron beam bombardment of the coating material requires the crucible to be conductive, so the crucible generally needs to meet technical requirements such as heat resistance and conductivity. The crucible needs to meet the conductive properties, which limits the choice of crucible materials. In addition, some crucibles made of conductive materials have a short lifespan and are prone to crucible creeping, which affects the crucible insulation effect, causes changes in the evaporation rate, and affects the film quality. Utility Model Content

[0004] The purpose of the present application is to provide a crucible and an electron beam evaporation coating system to ensure the electrical conductivity of the crucible body while preventing the coating material from creeping to the outside of the crucible.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] A crucible, comprising:

[0007] The crucible body is an anti-climbing crucible body, and the crucible body is provided with a hole;

[0008] The conductive member is arranged in the hole, and a part of the conductive member is exposed in the inner cavity of the crucible body.

[0009] When the crucible provided by the utility model is used, the coating material is placed inside the crucible body. During the electronic evaporation process, the liquid coating material partially contacts the conductive part, and the current can be transmitted through the conductive part to avoid charge accumulation. At the same time, since the crucible body is an anti-climbing crucible body, it has an anti-climbing performance, that is, the coating material placed in the crucible body has poor wettability or no wettability on the surface of the crucible body, and the coating material does not crawl along the surface of the crucible body or the coating material crawls very slowly along the crucible body, thereby preventing the coating material from overflowing the crucible.

[0010] In one implementation, a portion of the conductive member is exposed outside the crucible body, which makes it easier to electrically connect the conductive member to electrical components outside the crucible; and / or, one end of the conductive member extends into the inner cavity of the crucible body, and the other end of the conductive member extends to the outside of the crucible body, and the two ends of the conductive member are respectively located inside and outside the crucible body, so that the current inside the crucible body is transmitted to the outside of the crucible body through the conductive member to prevent charge accumulation.

[0011] In one implementation, the hole is opened on the side wall of the crucible body, and the setting of the hole and the assembly of the conductive part do not affect the height of the crucible, which is suitable for application scenarios with limited height and large circumferential installation space; or the hole is opened on the bottom wall of the crucible body, and the setting of the hole and the assembly of the conductive part do not affect the circumferential occupied space of the crucible, which is suitable for application scenarios with limited circumferential space and large height installation space.

[0012] In one implementation, a hole is opened in the side wall of the crucible body, a first end opening of the hole is located on the inner wall of the crucible body, and a second end opening of the hole is located on the outer wall of the crucible body. The conductive member passes through the side wall of the crucible body so that the current inside the crucible body is transmitted to the outside of the crucible body through the conductive member.

[0013] In one implementation, the angle between the center line of the hole and the side wall of the crucible body is 30°-120°, so as to facilitate the positioning of the conductive member during the assembly process while minimizing the installation space occupied by the entire crucible; and / or,

[0014] The opening of the first end of the hole is lower than the opening of the second end of the hole, which increases the difficulty of the coating liquid flowing to the outer wall of the crucible body, and further prevents the coating liquid from flowing to the outer wall of the crucible body;

[0015] And / or, the distance between the center of the opening at the first end of the hole and the bottom wall of the crucible body is 5 mm-10 mm, so as to ensure that the conductive part can be easily contacted with the coating solution.

[0016] In one implementation, the hole is arranged along the height direction of the side wall of the crucible body, the first end of the hole is located at the top of the side wall of the crucible body, the second end of the hole is located inside the side wall of the crucible body, and the inner wall of the crucible body is provided with a connecting hole and a through groove of the inner cavity of the crucible body, and the conductive part is accommodated inside the side wall of the crucible body, so that the overall volume can be minimized and the installation space can be saved.

[0017] In one implementation, the bottom wall of the crucible body includes an annular wall and a mounting tube, the opening of the mounting tube is communicated with the hollow hole of the annular wall, and the top end of the mounting tube is fixedly connected to the inner edge of the annular wall;

[0018] The inner cavity of the mounting tube forms a hole, and the conductive part is inserted into the mounting tube. During the electronic evaporation process, the coating material in the crucible body flows into the hole, and the contact area with the conductive part is larger, which improves the current transmission efficiency, and the coating material near the bottom of the hole will solidify due to the low temperature, so that the gap between the inner wall of the hole and the conductive part is sealed, preventing leakage of the coating material.

[0019] In one implementation, the inner diameter of the crucible body is larger than the inner diameter of the mounting tube, ensuring that the crucible body has a larger volume; and / or, the height of the conductive part above the annular wall is 0mm-15mm, and the portion of the conductive part above the annular wall can be wrapped by the plating liquid to increase the contact area between the conductive part and the plating liquid and improve the current transmission efficiency; and / or, the side wall, annular wall and mounting tube of the crucible body are fixed by integral molding, bonding, interference fit, clamping and / or threaded connection to facilitate processing and manufacturing.

[0020] In one implementation, the conductive member includes a conductive rod and a base, the base is abutted against or fixedly connected to the bottom end of the mounting tube, the conductive rod extends into the mounting tube, which is more convenient for placing and positioning the crucible, and the bottom wall of the base is a plane, which makes the crucible more stable;

[0021] The conductive rod comprises a first section and a second section connected in sequence along its length direction, wherein the first section is closer to the inner cavity of the crucible body than the second section; the first section is a conductive ceramic section and the second section is a metal section, which can ensure the conductive function of the conductive rod while reducing costs.

[0022] In one implementation, the length of the conductive rod is 1mm-150mm to ensure the contact area between the coating material and the conductive rod while saving the raw material of the conductive rod as much as possible; and / or the spacing between the conductive rod and the inner wall of the mounting tube is 0mm-2mm; and / or a cooling plate is provided on the lower side of the base and / or around the mounting tube to reduce the temperature around the base and / or the mounting tube, so that the coating material solidifies between the conductive rod and the inner wall of the mounting tube, thereby sealing the gap between the conductive rod and the mounting tube.

[0023] In one implementation, the conductive member and the crucible body are sealed and matched by thermal expansion, so that the conductive member and the crucible body can be sealed during the use of the crucible, simplifying the processing technology;

[0024] The thermal expansion coefficient of the conductive part is greater than that of the crucible body, and the difference between the thermal expansion coefficient of the conductive part and the thermal expansion coefficient of the crucible body is greater than 1E-6 / K. The thermal expansion effect of the conductive part is greater than that of the crucible body, ensuring that the conductive part is in close contact with the inner wall of the hole in a high temperature environment.

[0025] In one implementation, the conductive member and the crucible body are sealed by an adhesive, which has low cost and simplifies the processing technology;

[0026] Adhesives include inorganic adhesives;

[0027] Inorganic adhesives include phosphate coatings, silicate adhesives and / or alumina cement.

[0028] In one implementation, there is a gap between the conductive member and the crucible body, and the conductive member and the crucible body are sealed by solidifying the coating liquid that penetrates into the gap. In this embodiment, there is no need to use an additional adhesive to seal the conductive member and the crucible body, thereby avoiding contamination of the coating material by the adhesive and reducing the process cost. In addition, there is no need to limit the size of the thermal expansion coefficient, and the range of material selection is not limited.

[0029] In one implementation, the surface of the crucible body is insulated; or, the crucible body is an insulator; or, an insulating layer is provided on the surface of the crucible body;

[0030] The insulator or insulating layer is made of silicon nitride, titanium carbide, aluminum oxide and / or titanium oxide. The above materials have poor or no wettability with the coating material and are suitable for producing the crucible body.

[0031] In one implementation, the conductive member is a conductive ceramic member, which has a high melting point and is not easy to melt and mix with the coating material, thereby ensuring the efficiency of the electronic evaporation process; or,

[0032] The conductive part is a conductive metal part with low cost; or,

[0033] The material of the conductive member includes titanium oxide, conductive boron nitride, molybdenum, zirconium boride, titanium boride and / or titanium carbide; or,

[0034] The surface of the conductive part has a conductive layer, and the conductive layer is made of titanium oxide, conductive boron nitride, molybdenum, zirconium boride, titanium boride and / or titanium carbide. The above materials have good conductivity and are suitable for producing conductive parts.

[0035] In one implementation, the conductive member includes a conductive rod, a conductive block and / or a conductive sheet, which has a regular shape and is easy to process and manufacture.

[0036] An electron beam evaporation coating system comprises any one of the above crucibles. Compared with the prior art, the electron beam evaporation coating system provided by the embodiment of the utility model has the same beneficial effects as the above crucibles, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0038] Figure 1A cross-sectional view of a crucible provided in Example 1 of the present application;

[0039] Figure 2 A cross-sectional view of a crucible provided in Example 2 of the present application;

[0040] Figure 3 A cross-sectional view of a crucible provided in Example 3 of the present application;

[0041] Figure 4 This is a cross-sectional view of another crucible provided in Example 3 of the present application.

[0042] Reference numerals:

[0043] 1-crucible body, 1a-inner cavity, 1b-hole, 1c-through groove, 1d-side wall, 1e-annular wall, 1f-mounting cylinder, 2-conductive member, 2a-conductive rod, 2a1-first section, 2a2-second section, 2b-base. DETAILED DESCRIPTION

[0044] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0045] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0046] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0047] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc., indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present application.

[0048] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0049] At present, in the process of electron beam evaporation, the coating material is generally placed in a crucible, and the crucible needs to have conductive and heat-resistant properties. However, the conductive crucible material generally has good wettability with the coating material, and the liquid coating material, i.e., the coating liquid, easily climbs up from the bottom of the crucible, resulting in a "climbing crucible" phenomenon. If you want to avoid the "climbing crucible" phenomenon, you need to choose a material that is both conductive and has poor wettability with the coating material to prepare the crucible. At the same time, the crucible material also needs to have heat resistance, which limits the choice of crucible materials, and places higher requirements on the crucible preparation process and higher costs.

[0050] In view of the above, please refer to Figure 1-4 The present application provides a crucible, which includes a crucible body 1 and a conductive member 2. The crucible body 1 is an anti-climbing crucible body, and the crucible body 1 has an anti-climbing performance, that is, the coating material contained in the crucible body 1 has poor wettability or no wettability on the surface of the crucible cover.

[0051] The crucible body 1 is provided with a hole 1b, the conductive member 2 is disposed in the hole 1b of the crucible body 1, and a portion of the conductive member 2 is exposed in the inner cavity 1a of the crucible body 1. Specifically, a portion of the surface of the conductive member 2 is exposed inside the crucible body 1, and the liquid contained in the crucible body 1 can contact a portion of the conductive member 2.

[0052] When the crucible provided by the utility model is used, the coating material is placed inside the crucible body 1. During the electronic evaporation process, the coating liquid is partially in contact with the conductive member 2, and the current can be transmitted through the conductive member 2 to avoid charge accumulation. At the same time, since the crucible body 1 is an anti-climbing crucible body, it has an anti-climbing performance, that is, the coating material placed in the crucible body 1 has poor wettability or no wettability on the surface of the crucible body 1, and the coating material does not climb along the surface of the crucible body 1 or the coating material crawls very slowly along the crucible body 1, thereby preventing the coating material from overflowing the crucible.

[0053] like Figure 1 and Figure 2As shown, the hole 1b of the crucible body 1 can be provided on the side wall 1d of the crucible body 1, and the hole 1b can penetrate the thickness of the side wall 1d of the crucible body 1 or not penetrate the thickness of the side wall 1d of the crucible body 1. In this way, the setting of the hole 1b and the assembly of the conductive member 2 do not affect the height of the crucible, and are suitable for application scenarios with limited height and large circumferential installation space. In addition, the hole 1b of the crucible body 1 is provided on the side wall 1d of the crucible body 1, which does not affect the bottom wall structure of the crucible body 1, nor does it affect the placement and positioning of the crucible body 1, thereby ensuring that the crucible is suitable for more application scenarios and improving the versatility of the crucible.

[0054] like Figure 3 As shown, the hole 1b of the crucible body 1 can also be set on the bottom wall of the crucible body 1. In this way, the setting of the hole 1b and the assembly of the conductive member 2 do not affect the circumferential space occupied by the crucible, and are suitable for application scenarios with limited circumferential space and large height installation space.

[0055] In a specific embodiment, the conductive member 2 is partially exposed outside the crucible body 1, that is, a portion of the conductive member 2 is exposed outside the crucible body 1. This makes it easier to electrically connect the conductive member 2 to the electrical components outside the crucible, thereby realizing the transmission of current inside the crucible and preventing charge accumulation.

[0056] Among them, one end of the conductive member 2 can extend into the inner cavity 1a of the crucible body 1, and the other end of the conductive member 2 can extend to the outside of the crucible body 1. That is, the conductive member 2 passes through the wall of the crucible body 1, so that the two ends of the conductive member 2 are respectively located inside and outside the crucible body 1, so that the current inside the crucible body 1 is transmitted to the outside of the crucible body 1 through the conductive member 2, so as to prevent charge accumulation.

[0057] like Figure 1-Figure 3 As shown, during the electron evaporation process, the electron beam hits the coating material through the opening of the crucible body 1, and the coating material in the inner cavity 1a of the crucible body 1 is liquid. At this time, the liquid coating material may leak from the gap between the conductive member 2 and the inner wall of the hole 1b. In view of the above situation, the conductive member 2 and the inner wall of the hole 1b can be sealed. Specifically, the conductive member 2 is fixedly connected to the crucible body 1, and the conductive member 2 and the inner wall of the hole 1b are sealed, so that the liquid in the crucible body 1 can be prevented from leaking from the gap between the conductive member 2 and the inner wall of the hole 1b.

[0058] Along the extension direction of the hole 1b, the farther the hole 1b is from the inner cavity 1a of the crucible body 1, the lower the temperature. The coating material in the hole 1b that is farther away from the inner cavity 1a of the crucible body 1 has a lower temperature and may solidify. The solidified coating material can block the gap between the conductive part 2 and the inner wall of the hole 1b, thereby preventing leakage of the coating liquid. In view of the above situation, if Figure 3As shown, there may also be a gap between the conductive part 2 and the inner wall of the hole 1b, and a portion of the coating material in the gap between the inner wall of the hole 1b and the conductive part 2 is in liquid state, so as to increase the contact area between the liquid coating material and the conductive part 2, improve the current transmission efficiency, and further avoid charge accumulation; at the same time, another portion of the coating material in the gap between the inner wall of the hole 1b and the conductive part 2, which is farther away from the inner cavity 1a of the crucible body 1, solidifies at a lower temperature, thereby blocking the gap between the conductive part 2 and the inner wall of the hole 1b, thereby preventing leakage of the liquid coating material while realizing current transmission.

[0059] like Figure 1 As shown, in a specific embodiment, a hole is opened in the side wall 1d of the crucible body 1, the first end opening of the hole is located on the inner side wall of the crucible body 1, and the second end opening of the hole is located on the outer side wall of the crucible body 1. The hole extends from the first end opening to the second end opening, that is, the hole extends from the inner side wall of the crucible body 1 to the outer side wall, and penetrates the thickness of the side wall 1d of the crucible body 1. In this way, one end of the conductive member 2 can extend into the inner cavity 1a of the crucible body 1 through the first end opening, and the other end of the conductive member 2 can extend to the outside of the crucible body 1 through the second end opening. That is, the conductive member 2 passes through the side wall 1d of the crucible body 1, so that the current inside the crucible body 1 is transmitted to the outside of the crucible body 1 through the conductive member 2 to prevent charge accumulation. In this embodiment, the inner wall of the hole and the conductive member 2 can be sealed by adhesive or thermal expansion. The inner wall of the hole and the conductive part 2 can also be sealed by solidification of the coating material. Specifically, since the side wall temperature of the crucible body 1 is lower than the temperature of the coating liquid inside the crucible body, the coating material that penetrates into the gap between the inner wall of the hole and the conductive part 2 solidifies at a low temperature, thereby sealing the gap between the inner wall of the hole and the conductive part 2 to prevent leakage of the coating liquid. In this solution, a mounting part can be provided on the outside of the crucible body 1, and the mounting part can clamp or support the conductive part 2 to fix the conductive part.

[0060] In the above embodiment, the angle between the center line of the hole and the side wall 1d of the crucible body 1 is 30°-120°. If the angle between the center line of the hole and the side wall 1d of the crucible body 1 is too small, the inclination angle of the conductive part 2 in the hole relative to the crucible body 1 is large, and the conductive part 2 is easy to slide along the hole during assembly, which is not convenient for positioning the conductive part 2; if the angle between the center line of the hole and the side wall 1d of the crucible body 1 is too large, the conductive part 2 in the hole is nearly horizontally arranged, which will cause the installation space occupied by the entire crucible to be larger. Therefore, the angle between the center line of the hole and the side wall 1d of the crucible body 1 is set within a reasonable range of 30°-120°, so as to facilitate the positioning of the conductive part 2 during assembly while minimizing the installation space occupied by the entire crucible.

[0061] Specifically, the angle between the center line of the hole and the side wall 1d of the crucible body 1 is 30°, 40°, 50°, 60°, 70°, 80°, 90°, 100°, 110° or 120°, preferably 30°-80°.

[0062] Preferably, the first end opening of the hole is lower than the second end opening of the hole 1b. Specifically, the second end opening of the hole is closer to the opening of the crucible body 1 than the first end opening. The second end opening of the hole 1b is arranged along the oblique downward direction to the first end opening. After the conductive member 2 is inserted into the hole, the end of the conductive member 2 located in the crucible body 1 is lower, so that the conductive member 2 can be easily contacted with the coating material in the crucible. Of course, the first end opening of the hole 1b can also be higher than the second end opening of the hole 1b, or the first end opening of the hole 1b can be arranged flush with the second end opening of the hole, all of which are within the protection scope of the present application.

[0063] In addition, the distance between the center of the first end hole opening and the bottom wall of the crucible body 1 is set within a reasonable range of 5mm-10mm to ensure that the conductive member 2 can be easily in contact with the liquid coating material. Exemplarily, the distance between the center of the first end hole opening and the bottom wall of the crucible body 1 is 5mm, 6mm, 7mm, 8mm, 9mm or 10mm.

[0064] like Figure 2 As shown, the hole 1b can also be arranged along the height direction of the side wall 1d of the crucible body 1, the first end of the hole 1b is located at the top of the side wall 1d of the crucible body 1, and the second end of the hole 1b is located inside the side wall 1d of the crucible body 1. Specifically, the first end of the hole 1b extends downward from the top of the side wall 1d of the crucible body 1 to the inside of the side wall 1d of the crucible body 1. After the conductive member 2 is inserted into the hole 1b, one end of the conductive member 2 is exposed at the first end of the hole 1b, and the second end of the conductive member 2 is located inside the side wall 1d of the crucible body 1. The conductive member 2 is accommodated inside the side wall 1d of the crucible body 1, so that the overall volume can be minimized and the installation space can be saved. In addition, in this embodiment, the inner side wall of the crucible body 1 is provided with a through groove 1c connecting the above-mentioned hole 1b and the inner cavity 1a of the crucible body 1, and the coating material in the crucible body 1 can flow into the through groove 1c, so that the coating material contacts the conductive member 2, thereby transmitting current through the conductive member 2 to prevent charge accumulation.

[0065] In the above embodiment, since the first end of the hole 1b extends downward from the top of the side wall 1d of the crucible body 1 to the inside of the side wall 1d of the crucible body 1, the conductive part 2 and the inner wall of the hole 1b in this embodiment can be sealed by solidification of the coating material. Specifically, after the coating liquid penetrates into the gap between the conductive part 2 and the inner wall of the hole 1b, since the temperature of the side wall 1d of the crucible body 1 is lower than the temperature of the coating liquid inside the crucible body, the coating liquid will solidify in the gap between the conductive part 2 and the inner wall of the hole 1b, thereby sealing the gap between the conductive part 2 and the inner wall of the hole 1b.

[0066] like Figure 3 and Figure 4 As shown, the bottom wall of the crucible body 1 includes an annular wall 1e and a mounting tube 1f, the opening of the mounting tube 1f is connected to the hollow hole of the annular wall 1e, and the top of the mounting tube 1f is fixedly connected to the inner edge of the annular wall 1e. Specifically, the annular wall 1e can be arranged along a horizontal plane, the center line of the mounting tube 1f can be arranged along a vertical direction, and the center line of the mounting tube 1f can coincide with the center line of the hollow hole of the annular wall 1e. The mounting tube 1f and the annular wall 1e can be an integral structure, or the mounting tube 1f and the annular wall 1e can be connected by snap-fit, threaded connection or interference fit. The top of the mounting tube 1f is connected to the inner edge of the annular wall 1e so that the interior of the mounting tube 1f is connected to the inner cavity 1a of the crucible body 1.

[0067] The inner cavity 1a of the mounting tube 1f forms a hole 1b, and the conductive member 2 is inserted into the mounting tube 1f, that is, the conductive member 2 is inserted into the hole 1b, and the coating material in the crucible body 1 contacts the conductive member 2, thereby preventing charge accumulation. In this embodiment, the conductive member 2 and the inner wall of the hole 1b can be sealed or have a gap. Considering that the hole 1b is located at the bottom of the crucible body 1 and is farther away from the inner cavity 1a of the crucible body 1 along the extension direction of the hole 1b, it is preferred that the inner wall of the hole 1b and the conductive member 2 have a gap, so that during the electronic evaporation process, the coating material in the crucible body 1 flows into the hole 1b and the contact area with the conductive member 2 is larger, thereby improving the current transmission efficiency, and the coating material near the bottom of the hole 1b will solidify due to the low temperature, thereby sealing the gap between the inner wall of the hole 1b and the conductive member 2, thereby preventing the coating material from leaking and climbing into the pot.

[0068] In the above embodiment, the inner diameter of the crucible body 1 is preferably greater than the inner diameter of the mounting tube 1f, so as to ensure that the crucible body 1 has a larger volume. In addition, in order to increase the contact area between the conductive member 2 and the coating material, the height of the conductive member 2 above the annular wall 1e is 0mm-15mm, so that the portion of the conductive member 2 above the annular wall 1e can be wrapped by the coating liquid to increase the contact area between the conductive member 2 and the coating liquid and improve the current transmission efficiency. Specifically, the height of the conductive member 2 above the annular wall 1e is 1mm, 2mm, 4mm, 5mm, 6mm, 8mm, 10mm, 12mm, 14mm or 15mm, preferably 0mm-5mm.

[0069] In order to facilitate processing and manufacturing, the side wall 1d, the annular wall 1e and the mounting tube 1f of the crucible body 1 can be fixed by integral molding, bonding, interference fit, clamping and / or screw connection. Among them, the annular wall 1e can be a circular ring or a square ring, the mounting tube 1f can be a cylinder or a square cylinder, and the side wall 1d of the crucible body 1 can be cylindrical, conical, etc. as a whole.

[0070] like Figure 3 As shown, the conductive member 2 includes a conductive rod 2a and a base 2b, the base 2b is abutted against or fixedly connected to the bottom end of the mounting tube 1f, and the conductive rod 2a extends into the mounting tube, which makes it easier to place and position the crucible. The bottom wall of the base 2b is a plane, which makes the crucible more stable. The conductive rod 2a and the base 2b can be an integral structure, or the conductive rod 2a and the base 2b can also be fixed by means of snap connection, threaded connection or interference fit. The conductive rod 2a can be arranged perpendicular to the base 2b to prevent the conductive rod 2a from abutting against the inner side wall 1d of the mounting tube 1f when the base 2b and the mounting tube 1f are assembled and positioned.

[0071] In the above embodiment, a cooling plate may be provided on the lower side of the base 2b and / or around the mounting tube 1f to reduce the temperature around the base 2b and / or the mounting tube 1f, so that the coating material solidifies between the conductive rod 2a and the inner wall of the mounting tube 1f, thereby sealing the gap between the conductive rod 2a and the mounting tube 1f. The cooling plate may be made of a highly thermally conductive material such as copper, aluminum, graphite and / or carbon fiber.

[0072] like Figure 4 As shown, the conductive rod 2a includes a first section 2a1 and a second section 2a2 connected in sequence along its length direction, and the first section 2a1 is closer to the inner cavity 1a of the crucible body 1 than the second section 2a2. Since the first section 2a1 is closer to the inner cavity 1a of the crucible body 1, the first section 2a1 is easily melted due to high temperature, and the material of the conductive rod 2a will be mixed with the coating material after melting, affecting the normal operation of the electronic evaporation process. Therefore, the first section 2a1 of the conductive rod 2a is preferably a conductive ceramic section, which has a high melting point and is not easy to melt. In addition, the second section 2a2 is far away from the inner cavity 1a of the crucible body 1, and its surrounding temperature is low. Therefore, the second section 2a2 of the conductive rod 2a can be selected from a material with a lower melting point, and the second section 2a2 is preferably a metal section, so that the conductive function of the conductive rod 2a is ensured while reducing costs.

[0073] like Figure 3 and Figure 4 As shown, the length L of the conductive rod 2a is 1mm-150mm. If the length L of the conductive rod 2a is too short, the contact area between the coating material and the conductive rod 2a will be too small, affecting the current transmission efficiency. If the length L of the conductive rod 2a is too long, the raw material of the conductive rod 2a will be wasted. Therefore, the length L of the conductive rod 2a is set within a reasonable range of 1mm-150mm to ensure the contact area between the coating material and the conductive rod 2a while saving the raw material of the conductive rod 2a as much as possible. Specifically, the length L of the conductive rod 2a is 1mm, 10mm, 20mm, 30mm, 40mm, 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm, 120mm, 130mm, 140mm or 150mm, preferably 10mm-50mm.

[0074] In addition, if the distance D between the conductive rod 2a and the inner wall of the mounting tube 1f is too large, the coating liquid cannot solidify between the conductive rod 2a and the mounting tube 1f, and the sealing between the conductive rod 2a and the mounting tube 1f cannot be achieved. Therefore, the distance D between the conductive rod 2a and the inner wall of the mounting tube 1f is set within a reasonable range of 0mm-2mm. Specifically, the distance D between the conductive rod 2a and the inner wall of the mounting tube 1f is 0mm, 0.2mm, 0.5mm, 0.8mm, 1mm, 1.2mm, 1.5mm, 1.8mm or 2mm, preferably 0.2mm-1mm.

[0075] In order to facilitate processing and manufacturing, the conductive member 2 and the crucible body 1 can be sealed by thermal expansion, that is, under high temperature conditions, the conductive member 2 and the crucible body 1 have different thermal expansion coefficients, so that the conductive member 2 and the crucible body 1 have different thermal expansions, that is, the conductive member 2 and the crucible body 1 have different volume changes in a high temperature environment, so that the conductive member 2 and the crucible body 1 are in close contact and sealed. Figure 1 and Figure 2 As shown, in a high temperature environment, the thermal expansion effect of the conductive member 2 is greater than the thermal expansion effect of the crucible body 1, so that the conductive member 2 is in close contact with the inner wall of the hole 1b to achieve sealing.

[0076] In the above embodiment, preferably, the thermal expansion coefficient of the conductive member 2 is greater than the thermal expansion coefficient of the crucible body 1. Since the conductive member 2 is inserted into the hole 1b, the thermal expansion effect of the conductive member 2 is greater than the thermal expansion effect of the crucible body 1, ensuring that the conductive member 2 is in close contact with the inner wall of the hole 1b in a high temperature environment. Specifically, the difference between the thermal expansion coefficient of the conductive member 2 and the thermal expansion coefficient of the crucible body 1 is greater than 1E-6 / K, so that the sealing between the conductive member 2 and the inner wall of the hole 1b can be ensured. Specifically, the difference between the thermal expansion coefficient of the conductive member 2 and the thermal expansion coefficient of the crucible body 1 is 1E-6 / K, 2E-6 / K, 3E-6 / K, preferably 2E-6 / K-3E-6 / K.

[0077] Alternatively, the conductive member 2 and the crucible body 1 may be sealed by an adhesive, that is, the conductive member 2 and / or the crucible body 1 are coated with adhesive and then the conductive member 2 and the crucible body 1 are bonded together, which reduces the cost and simplifies the processing technology.

[0078] In the above embodiment, since the crucible has a high temperature during use, the adhesive should be a high temperature resistant adhesive. Preferably, the adhesive includes an inorganic adhesive. The inorganic adhesive has the advantages of good heat resistance, low cost, not easy to age, simple structure, high adhesion, etc., and is suitable for processing the crucible of the electron beam evaporation coating process. Specifically, the inorganic adhesive includes phosphate coating, silicate adhesive and / or alumina cement. The above materials have a certain blocking / isolating effect on the infiltration of the coating material, and are suitable for processing the crucible of the electron beam evaporation coating process.

[0079] In another embodiment, there is a gap between the conductive member 2 and the crucible body 1, and the conductive member 2 and the crucible body 1 are sealed by solidification of the liquid that penetrates into the above gap. Specifically, the farther the coating material in the infiltration hole 1b is from the inner cavity 1a of the crucible body 1, the lower the temperature. Therefore, a part of the coating material infiltrated into the hole 1b can solidify, thereby sealing the gap between the inner wall of the hole 1b and the conductive member 2. In this embodiment, there is no need to use an additional adhesive to seal the conductive member 2 and the crucible body 1, which avoids the contamination of the coating material by the adhesive and also reduces the process cost. In addition, there is no need to limit the size of the thermal expansion coefficient, and the range of material selection is not limited.

[0080] In the above-mentioned embodiments, the surface of the crucible body 1 is insulated; or, the crucible body 1 is an insulator; or, an insulating layer is provided on the surface of the crucible body 1, and the insulating layer can be provided on the surface of the crucible body 1 by coating, spraying, etc., to ensure the surface insulation of the crucible body 1. The insulating material has poor wettability or no wettability with the coating material, which can prevent the coating material from climbing along the surface of the crucible body 1, and is particularly suitable for metal coating materials, such as aluminum.

[0081] In the above embodiments, the materials of the insulator or the insulating layer include silicon nitride, silicon carbide, titanium carbide, aluminum oxide, aluminum nitride and / or titanium oxide. The above materials have poor wettability or no wettability with the coating material and are suitable for producing the crucible body 1.

[0082] In addition, the conductive member 2 can be a conductive ceramic member, which has a high melting point and is not easy to melt and mix with the coating material, thereby ensuring the efficiency of the electronic evaporation process. Alternatively, the conductive member 2 can also be a conductive metal member, which has a lower cost.

[0083] The material of the conductive part 2 includes titanium oxide, conductive boron nitride, molybdenum, zirconium boride, titanium boride and / or titanium carbide; or, the surface of the conductive part 2 has a conductive layer, and the material of the conductive layer includes titanium oxide, conductive boron nitride, molybdenum, zirconium boride, titanium boride and / or titanium carbide. The above materials have good conductivity and are suitable for producing the conductive part 2.

[0084] The conductive member 2 may include a conductive rod, a conductive block and / or a conductive sheet, and the shape is regular, which is convenient for processing and manufacturing. Of course, the conductive member 2 may also be any other shape.

[0085] In addition, the embodiment of the utility model further provides an electron beam evaporation coating system, which includes the crucible provided by any of the above embodiments. Compared with the prior art, the beneficial effects of the electron beam evaporation coating system provided by the embodiment of the utility model are the same as the beneficial effects of the above crucible, which will not be described in detail here.

[0086] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0087] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A crucible, characterized in that: include: A crucible body, wherein the crucible body is an anti-climbing crucible body, and the crucible body is provided with a hole; A conductive member is disposed in the hole, and a portion of the conductive member is exposed in the inner cavity of the crucible body.

2. The crucible according to claim 1, characterized in that Part of the conductive member is exposed outside the crucible body; and / or one end of the conductive member extends into the inner cavity of the crucible body, and the other end of the conductive member extends to the outside of the crucible body.

3. The crucible according to claim 1, characterized in that The hole is opened on the side wall or the bottom wall of the crucible body.

4. The crucible according to claim 1, characterized in that The hole is opened on the side wall of the crucible body, a first end opening of the hole is located on the inner side wall of the crucible body, and a second end opening of the hole is located on the outer side wall of the crucible body.

5. The crucible according to claim 4, characterized in that The angle between the center line of the hole and the side wall of the crucible body is 30°-120°; and / or, The opening of the first end of the hole is lower than the opening of the second end of the hole; And / or, the distance between the center of the opening at the first end of the hole and the bottom wall of the crucible body is 5 mm-10 mm.

6. The crucible according to claim 1, characterized in that The hole is arranged along the height direction of the side wall of the crucible body, the first end of the hole is located at the top end of the side wall of the crucible body, the second end of the hole is located inside the side wall of the crucible body, and the inner wall of the crucible body is provided with a through groove connecting the hole and the inner cavity of the crucible body.

7. The crucible according to claim 1, characterized in that The bottom wall of the crucible body includes an annular wall and a mounting tube, the opening of the mounting tube is communicated with the hollow hole of the annular wall, and the top end of the mounting tube is fixedly connected to the inner edge of the annular wall; The inner cavity of the installation cylinder forms the hole, and the conductive member is inserted into the interior of the installation cylinder.

8. The crucible according to claim 7, characterized in that The inner diameter of the crucible body is larger than the inner diameter of the mounting tube; and / or the side wall, the annular wall and the mounting tube of the crucible body are fixed by integral molding, bonding, interference fit, clamping and / or threaded connection; And / or, the height of the conductive member above the annular wall is 0mm-15mm; and / or, the conductive member includes a conductive rod and a base, the base is abutted against or fixedly connected to the bottom end of the mounting tube, and the conductive rod extends into the mounting tube.

9. The crucible according to claim 8, characterized in that The conductive rod comprises a first section and a second section connected in sequence along the length direction thereof, the first section is closer to the inner cavity of the crucible body than the second section; the first section is a conductive ceramic section, and the second section is a metal section; And / or, the length of the conductive rod is 1mm-150mm; and / or, the distance between the conductive rod and the inner wall of the mounting tube is 0mm-2mm; and / or, a cooling plate is provided on the lower side of the base and / or around the mounting tube.

10. The crucible according to any one of claims 1 to 9, characterized in that The conductive member and the crucible body are sealed and matched by thermal expansion; The thermal expansion coefficient of the conductive member is greater than the thermal expansion coefficient of the crucible body, and the difference between the thermal expansion coefficient of the conductive member and the thermal expansion coefficient of the crucible body is greater than 1E-6 / K.

11. The crucible according to any one of claims 1 to 9, characterized in that The conductive member and the crucible body are sealed by an adhesive; The adhesive includes phosphate coating, silicate adhesive and / or alumina cement.

12. The crucible according to any one of claims 1 to 9, characterized in that A gap is provided between the conductive member and the crucible body, and the conductive member and the crucible body are sealed by solidification of the plating liquid infiltrating into the gap.

13. The crucible according to any one of claims 1 to 9, characterized in that The surface of the crucible body is insulated; or, the crucible body is an insulator; or, an insulating layer is provided on the surface of the crucible body; the material of the insulator or the insulating layer includes silicon nitride, titanium carbide, aluminum oxide and / or titanium oxide; And / or, the conductive part is a conductive ceramic part; or, the conductive part is a conductive metal part; or, the material of the conductive part includes titanium oxide, conductive boron nitride, molybdenum, zirconium boride, titanium boride and / or titanium carbide; or, the surface of the conductive part has a conductive layer, and the material of the conductive layer includes titanium oxide, conductive boron nitride, molybdenum, zirconium boride, titanium boride and / or titanium carbide.

14. The crucible according to any one of claims 1 to 6, characterized in that The conductive member includes a conductive rod, a conductive block and / or a conductive sheet.

15. An electron beam evaporation coating system, characterized in that: Comprising the crucible according to any one of claims 1-14.

Images