Mounting structure and electric arc striking mechanism
By designing an arc arc-initiating mechanism in a vacuum coating machine, dust is scraped off with conical ports and silicone rings, and plasma adsorbing with activated carbon, the dust accumulation problem is solved and the service life and production efficiency of the equipment are improved.
Patent Information
- Application Number
- CN202420791050.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-17
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-04-17
AI Technical Summary
The dust accumulated in the gaps of the bellows in the vacuum coating machine is not easy to clean, which affects the expansion and contraction length of the cylinder rod and the service life of the equipment.
An arc arc-initiating mechanism is designed, including a cylinder, a telescopic rod, a storage barrel and activated carbon. The dust is scraped away by using a conical port and a silicone ring, and plasma is adsorbed through activated carbon to prevent dust from entering the cylinder, while improving the stability of the telescopic rod. sex.
It effectively cleans up dust, extends the service life of the cylinder, and improves the stability and production efficiency of the telescopic rod.
Smart Images

Figure CN222274667U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of coating equipment, in particular to a mounting structure and an arc striking mechanism. Background Art
[0002] The arc-starting needle mechanism of the vacuum coating machine is usually sealed with an O-ring. The cylinder moves back and forth, which will bring dust into the sealed space.
[0003] For example, a patent named "A kind of arc striking mechanism" (patent application number: CN201821738431.8) discloses the use of a bellows seal to isolate the cylinder rod from the vacuum environment. The cylinder rod is in the atmosphere and is not affected by dust. It can work continuously for a long time, which greatly improves the production efficiency. However, the dust generated during operation will accumulate in the gap of the bellows, which is not easy to clean and will affect the telescopic length of the cylinder rod.
[0004] Therefore, it is necessary to propose an installation structure and an arc striking mechanism to solve the above problems. Utility Model Content
[0005] The utility model aims to provide a mounting structure and an arc striking mechanism to solve the problem that dust generated during operation accumulates in the gap of the bellows, is difficult to clean, and affects the telescopic length of the cylinder rod.
[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an arc striking mechanism, comprising a cylinder, a telescopic rod connected to the bottom end of the telescopic rod, an arc striking rod connected to the bottom end of the telescopic rod, an arc striking needle fixedly connected to one side of the arc striking rod, a material storage barrel is provided on the outside of the arc striking rod, the bottom end of the material storage barrel is connected to a tapered mouth, the bottom end of the tapered mouth is for the telescopic rod to pass through, the radius of the bottom end of the tapered mouth is smaller than the radius of the top end, and the inner circle of the bottom end of the tapered mouth is fitted to the outside of the arc striking rod, an insulating top cover is fixed to the top end of the material storage barrel, a through hole is provided on the top end of the insulating top cover for the arc striking rod to pass through, and the interior of the material storage barrel is filled with activated carbon.
[0007] Preferably, a silicone ring is fixedly connected to the bottom end of the conical mouth, and the silicone ring is sleeved on the outside of the telescopic rod. A threaded opening is opened at the top end of the arc-starting rod, and the bottom end thread of the telescopic rod is fitted into the inside of the threaded opening.
[0008] The utility model also discloses an installation structure, including a fixed seat and an insulating seat, the bottom end of the cylinder is fixed on the fixed seat, the insulating seat is fixed to the bottom end of the fixed seat, and the four corners of the top end of the fixed seat and the insulating seat are connected by fixing bolts, a mounting opening is opened in the middle of the insulating seat, and the outer side of the storage barrel is engaged with the inside of the mounting opening.
[0009] Preferably, connecting blocks are fixed on both sides of the storage barrel, the two connecting blocks and the bottom end of the insulating seat are connected by fixing screws, and the two connecting blocks and the insulating seat are provided with fixing holes for connection with the fixing screws.
[0010] Preferably, a protruding end is fixed to the middle of the bottom end of the fixing seat, and the protruding end is engaged with the top end inside the installation opening.
[0011] Preferably, one end of the arc starting needle is attached to a target material.
[0012] Technical effects and advantages of the utility model:
[0013] 1. When the telescopic rod retracts, the outside of the telescopic rod will come into contact with the silicone ring and the tapered mouth. The silicone ring and the tapered mouth can scrape off the material dust adhering to the outside of the telescopic rod to prevent the telescopic rod from driving the dust into the cylinder. At the same time, when the scraped telescopic rod continues to retract, the outside of the telescopic rod will come into contact with the activated carbon inside the storage barrel to adsorb the plasma adhering to the outside of the telescopic rod to avoid affecting the service life of the cylinder. At the same time, the silicone ring also plays an insulating role.
[0014] 2. Furthermore, when the telescopic rod is extended downward, the outer side of the telescopic rod will also contact the tapered mouth to avoid adhesion between the outer side of the telescopic rod and the activated carbon. At the same time, the overall storage barrel can clamp the outer side of the telescopic rod to improve the stability of the vertical extension of the telescopic rod. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the installation structure and arc striking mechanism of the utility model.
[0016] Figure 2 For this utility model Figure 1 Enlarged schematic diagram at point A in the middle.
[0017] In the figure: 1. Cylinder; 2. Telescopic rod; 3. Fixed seat; 4. Insulating seat; 5. Fixing bolt; 6. Arc-starting rod; 7. Arc-starting needle; 8. Target material; 9. Storage barrel; 10. Insulating top cover; 11. Connecting block; 12. Fixing screw; 13. Conical mouth; 14. Silicone ring; 15. Installation port; 16. Activated carbon. DETAILED DESCRIPTION
[0018] The following will be combined with the drawings in the embodiments of the utility model to clarify the technical solutions in the embodiments of the utility model; it is completely described. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0019] The utility model provides Figure 1 - Figure 2 An arc striking mechanism shown in the figure includes a cylinder 1, a telescopic rod 2 is connected to the bottom end of the cylinder 1, an arc striking rod 6 is connected to the bottom end of the telescopic rod 2, an arc striking needle 7 is fixedly connected to one side of the arc striking rod 6, a material storage barrel 9 is arranged on the outside of the arc striking rod 6, a conical mouth 13 is connected to the bottom end of the material storage barrel 9, the bottom end of the conical mouth 13 is for the telescopic rod 2 to pass through, the radius of the bottom end of the conical mouth 13 is smaller than the radius of the top end, and the inner circle of the bottom end of the conical mouth 13 fits the outside of the arc striking rod 6, an insulating top cover 10 is fixed to the top end of the material storage barrel 9, a through hole is provided on the top end of the insulating top cover 10 for the arc striking rod 6 to pass through, and the interior of the material storage barrel 9 is filled with activated carbon 16.
[0020] The bottom end of the conical mouth 13 is fixedly connected with a silicone ring 14, which is sleeved on the outside of the telescopic rod 2. The top of the arc-starting rod 6 is provided with a threaded opening, and the bottom end thread of the telescopic rod 2 is matched with the inside of the threaded opening. One end of the arc-starting needle 7 is attached to the target material 8.
[0021] The method of generating arc discharge is usually to separate the two electrodes after contacting them, and the short circuit generates heat, which causes the cathode surface temperature to increase sharply, generating thermal electron emission. The arc is ignited at the moment when the arc starting needle 7 contacts the cathode target 8.
[0022] Because the contact area is very small and the contact resistance is very large, under the action of a relatively large current density and a strong electric field, thermal electrons and field-induced emission electrons are emitted outward, and a large amount of current is generated at the concentrated electron emission point to form an arc spot. The high current and high temperature cause a large number of cathode target material 8 material particles to be evaporated, forming cathode material particle gas. These particles quickly collide with the electrons accelerated by the electric field to ionize and form plasma. Part of the plasma is attracted to the surface of the target material 8, forming a space charge layer, generating a strong electric field, and repeating the electron emission process. The bottom end of the target material 8 will gradually be consumed. By controlling the extension and contraction of the telescopic rod 2, the arc-starting needle 7 can be driven to always fit on the target material 8 until the utilization of the target material 8 reaches the maximum.
[0023] At the same time, when the telescopic rod 2 retracts, the outer side of the telescopic rod 2 will contact the silicone ring 14 and the tapered mouth 13. The silicone ring 14 and the tapered mouth 13 can scrape off the material dust adhered to the outer side of the telescopic rod 2 to prevent the telescopic rod 2 from driving the dust into the interior of the cylinder 1. At the same time, when the scraped telescopic rod 2 continues to retract, the outer side of the telescopic rod 2 will contact the activated carbon 16 inside the material storage barrel 9 to adsorb the plasma adhered to the outer side of the telescopic rod 2 to avoid affecting the service life of the cylinder 1. At the same time, the silicone ring 14 also plays an insulating role. Furthermore, when the telescopic rod 2 is extended downward, the outer side of the telescopic rod 2 will also contact the tapered mouth 13 to prevent the outer side of the telescopic rod 2 from contacting the activated carbon 16 and causing adhesion.
[0024] At the same time, the integral material storage barrel 9 can clamp the outer side of the telescopic rod 2 to improve the stability of the vertical extension of the telescopic rod 2.
[0025] (Plasma is an ionized gaseous substance composed of positive and negative ions generated by the ionization of atoms and atomic groups that have been deprived of some of their electrons. The gaseous substance is easily adsorbed by activated carbon 16)
[0026] The utility model also discloses an installation structure, including a fixing seat 3 and an insulating seat 4, the bottom end of the cylinder 1 is fixed on the fixing seat 3, the insulating seat 4 is fixed to the bottom end of the fixing seat 3, and the four corners of the top end of the fixing seat 3 and the insulating seat 4 are connected by fixing bolts 5, and a mounting opening 15 is opened in the middle of the insulating seat 4, and the outer side of the storage barrel 9 is engaged with the inside of the mounting opening 15.
[0027] Connecting blocks 11 are fixed on both sides of the storage barrel 9, and the two connecting blocks 11 and the bottom end of the insulating seat 4 are connected by fixing screws 12. The two connecting blocks 11 and the insulating seat 4 are provided with fixing holes for the fixing screws 12 to connect. A protruding end is fixed in the middle of the bottom end of the fixing seat 3, and the protruding end is engaged with the top end inside the installation port 15. In addition, the bottom end of the fixing seat 3 is connected to the insulating seat 4, which can play an insulating role, avoid the influence of electric charge on the cylinder 1, and improve the safety of use.
[0028] In the actual operation of the present invention, the storage barrel 9 can be installed at the bottom end of the insulating seat 4 by means of fixing screws 12, so that personnel can conveniently disassemble and install. After disassembly, the activated carbon 16 inside the storage barrel 9 can be replaced in time.
Claims
1. An arc striking mechanism, comprising a cylinder (1), characterized in that: The bottom end of the cylinder (1) is connected to a telescopic rod (2), the bottom end of the telescopic rod (2) is connected to an arc-starting rod (6), one side of the arc-starting rod (6) is fixedly connected to an arc-starting needle (7), a material storage barrel (9) is arranged on the outside of the arc-starting rod (6), the bottom end of the material storage barrel (9) is connected to a conical mouth (13), the bottom end of the conical mouth (13) is for the telescopic rod (2) to pass through, the radius of the bottom end of the conical mouth (13) is smaller than the radius of the top end, and the inner circle of the bottom end of the conical mouth (13) is in contact with the outside of the arc-starting rod (6), the top end of the material storage barrel (9) is fixed to an insulating top cover (10), the top end of the insulating top cover (10) is provided with a through hole for the arc-starting rod (6) to pass through, and the inside of the material storage barrel (9) is filled with activated carbon (16).
2. An arc striking mechanism according to claim 1, characterized in that: The bottom end of the conical opening (13) is fixedly connected with a silicone ring (14), and the silicone ring (14) is sleeved on the outside of the telescopic rod (2). The top end of the arc-starting rod (6) is provided with a threaded opening, and the bottom end of the telescopic rod (2) is threadedly matched with the inside of the threaded opening.
3. The arc striking mechanism according to claim 1, characterized in that: One end of the arc-starting needle (7) is attached to a target material (8).
4. A mounting structure, characterized in that: It comprises an arc striking mechanism as described in any one of claims 1 to 2, and also comprises a fixed seat (3) and an insulating seat (4), the bottom end of the cylinder (1) is fixed on the fixed seat (3), the insulating seat (4) is fixed to the bottom end of the fixed seat (3), and the four corners of the top end of the fixed seat (3) and the insulating seat (4) are connected by fixing bolts (5), a mounting opening (15) is provided in the middle of the insulating seat (4), and the outer side of the storage barrel (9) is engaged with the inside of the mounting opening (15).
5. A mounting structure according to claim 4, characterized in that: Connecting blocks (11) are fixed on both sides of the material storage barrel (9); the two connecting blocks (11) and the bottom end of the insulating seat (4) are connected by fixing screws (12); and fixing holes for connecting the fixing screws (12) are provided on the two connecting blocks (11) and the insulating seat (4).
6. A mounting structure according to claim 4, characterized in that: A protruding end is fixed in the middle of the bottom end of the fixing seat (3), and the protruding end is engaged with the top end inside the installation opening (15).