Rapid taking-out tool for single crystal furnace heater

Abstract

The utility model relates to the technical field of auxiliary equipment for single crystal furnace production, in particular to a tool for quickly taking out a single crystal furnace heater, which comprises a heater and a fixed rod, uniformly distributed slots are arranged on the periphery of the heater, a sliding rod is connected onto the fixed rod in a sliding manner, a fixed frame is fixedly arranged at the lower end of the fixed rod, and a sliding frame is arranged on the periphery of the sliding rod. The fixing frame and the sliding frame are provided with a guide sliding groove and a sliding groove respectively, each sliding groove is slidably connected with a sliding rod, the periphery of each sliding rod is rotatably connected with two connecting rods which are arranged in a staggered mode, the upper ends of the connecting rods are provided with guide sliding rods which are in sliding fit with the guide sliding grooves, and the lower ends of the connecting rods are connected with connecting blocks. A clamping plate is fixedly arranged on each connecting block, the clamping plates can be attached to the heater, a user does not need to adjust the heater, the heater can be rapidly taken out by holding the user on the fixing rod and the sliding rod through the fixing rod and the sliding rod which extend upwards, the risk that an operator is scalded is avoided, and the heater taking-out efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace production auxiliary equipment, in particular to a single crystal furnace heater quick-removal tool. Background Art

[0002] The direct pulling method is one of the main methods for pulling single crystal silicon rods. This method is to put the raw polysilicon into the quartz crucible of the single crystal furnace, use a graphite heater to heat and melt the polysilicon raw material, and then complete the pulling of the single crystal silicon rod through processes such as temperature adjustment, crystal induction, shoulder release, shoulder rotation, equal diameter, finishing, and furnace shutdown. With the increase in market demand for N-type silicon wafers, oxygen control has become a major problem in the industry, and the corresponding thermal field has also been rectified and optimized, such as adding insulation rings, reducing crucible rotation, etc. In addition, the industry has increasingly strict control over working hours, and shortening the furnace dismantling time is a trend.

[0003] At present, manual operation is adopted to take out the heater when dismantling the furnace. Due to the high temperature in the furnace, the time for taking out the heater is prolonged, which increases invalid working hours and has low efficiency. At the same time, the high temperature environment is easy to scald the operator. Utility Model Content

[0004] The purpose of the utility model is to provide a single crystal furnace heater quick removal tool, which is used to overcome the above-mentioned defects in the prior art.

[0005] The cam is provided with a plurality of connecting rods, each of which is provided with a plurality of connecting rods, each of which is provided with a plurality of connecting rods, and the connecting rods are connected with the plurality of connecting rods respectively.

[0006] The beneficial effects of the utility model are:

[0007] During the clamping process, it can adapt to heaters of different specifications and sizes, and the clamping work is automatically controlled without the need for user adjustment. Through the upwardly extending fixed rod and sliding rod, the user holds the fixed rod and the sliding rod to quickly take out the heater, avoiding the risk of scalding the operator and improving the efficiency of removing the heater. The two magnets are attracted to each other and the insulation sleeve at the outer end of the magnet abuts against the slotted side wall, which can increase the stability during the process of removing the heater and ensure the safety of the heater during the removal process. At the same time, the structure can protect the heater well and reduce the chance of damage to the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a schematic diagram of the appearance of the utility model;

[0009] Figure 2 This utility model Figure 1 A schematic diagram of a top view structure;

[0010] Figure 3 This utility model Figure 1 A schematic diagram of the front view structure of

[0011] Figure 4 This utility model Figure 2 Schematic cross-sectional view of AA in the figure;

[0012] Figure 5 This utility model Figure 2 A schematic cross-sectional view of the middle BB;

[0013] Figure 6 This utility model Figure 1 A partial enlarged schematic diagram of the middle sliding groove;

[0014] In the figure:

[0015] 10. Heater; 11. Slot; 12. Fixed rod; 13. Sliding rod; 14. Fixed frame; 15. Sliding frame; 16. Guide groove; 17. Sliding groove; 18. Connecting rod; 19. Sliding rod; 20. Connecting block; 21. Clamp; 22. Magnet; 23. Abutment plate. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] It should be noted that when an element is said to be "fixed to" another element, it can be directly on the other element or there can be an intermediate element. When an element is said to be "connected to" another element, it can be directly connected to the other element or there can be an intermediate element at the same time: Example

[0018] Reference Figure 1-Figure 6 According to an embodiment of the utility model, a single crystal furnace heater quick removal tool comprises a heater 10 and a fixed rod 12. The outer periphery of the heater 10 is provided with evenly distributed slots 11. The fixed rod 12 is slidably connected with a sliding rod 13. A fixed frame 14 is fixed at the lower end of the fixed rod 12. A detachable abutment plate 23 is fixed at the lower end of the sliding rod 13. The upper end of the abutment plate 23 abuts against a sliding frame 15. The fixed frame 14 and the sliding frame 15 are distributed up and down and are both arranged in a cross shape. A guide slot 16 and a sliding slot 17 are respectively provided, each sliding slot 17 is slidably connected to a sliding rod 19, and the outer periphery of each sliding rod 19 is rotatably connected to two staggered connecting rods 18, the upper end of the connecting rod 18 is provided with a guide slide rod that slides with the guide slot 16, and the lower end of the connecting rod 18 is connected to a connecting block 20, each connecting block 20 is fixed with a clamping plate 21, and the clamping plate 21 can fit with the heater 10, and two adjacent clamping plates 21 are fixed with magnets 22 at the ends close to each other, and the outer ends of the magnets 22 are provided with a heat insulation sleeve;

[0019] Heater 10 such as Figure 1 As shown, it is horizontally arranged in the furnace body. The user holds the fixed rod 12 and the sliding rod 13 to insert the connecting rod 18 connected to the fixed frame 14 and the sliding frame 15 downward into the furnace body. The clamping plate 21 connected to the lower end of the connecting rod 18 moves to the heater 10. The user holds the fixed rod 12 with one hand to keep the fixed rod 12 relatively still, and pushes the sliding rod 13 downward with the other hand. The sliding rod 13 drives the abutment plate 23 to slide downward along the fixed rod 12. Under the action of gravity, the sliding frame 15 synchronously follows the abutment plate 23 to slide downward, thereby increasing the distance between the fixed frame 14 and the sliding frame 15, as shown in FIG. Figure 1 and Figure 3 As shown, the angle between the two cross-arranged connecting rods 18 becomes smaller, the guide slide rods at the upper ends of the connecting rods 18 are located in the guide slide grooves 16 and approach each other, and the lower ends of the connecting rods 18 drive the two adjacent clamping plates 21 to approach each other and fit with the heater 10, and the two magnets 22 at the clamping plates 21 are attracted to each other by magnetic force, and abut against the slots 11 at the heater 10 through the heat insulation sleeve at the outer ends, or by rotating the fixed rod 12 and the sliding rod 13, the clamping plates 21 are moved circumferentially, so that the two magnets 22 can be attracted to each other, and then the user extracts the fixed rod 12 and the sliding rod 13 upwards, and the clamping plates 21 and the magnets 22 clamp the heater 10 and follow the synchronous upward movement to take out the furnace body;

[0020] According to the different size radius of the heater 10, the user adjusts the position of the slide bar 19, for example Figure 1 Take the slider 19 in the figure as an example, Figure 1 The slide bar 19 in the slide groove 17 moves to the left, so that the guide slide bar at the upper end of the connecting rod 18 abuts against the left side wall of the guide slide groove 16, and the slide bar 19 moves to the leftmost end under the set position. At this time, the clamping plate 21 at the left end is located at the leftmost end under the set position. When the heater 10 is clamped by the clamping plate 21, the slide bar 19 is gradually moved to the right through the rice reasoning provided at the heater 10, such as Figure 1 As shown, the two clamping plates 21 are brought into contact with the peripheral surface of the heater 10 .

[0021] It is clear to those skilled in the art that various modifications to the above embodiments can be made without departing from the overall spirit and concept of the present invention. All of them fall within the protection scope of the present invention. The protection scheme of the present invention shall be subject to the claims attached to the present invention.

Claims

1. A single crystal furnace heater quick removal tool, comprising a heater (10) and a fixing rod (12), wherein the outer circumference of the heater (10) is provided with evenly distributed grooves (11), characterized in that: The fixed rod (12) is slidably connected to a sliding rod (13); a fixed frame (14) is fixedly provided at the lower end of the fixed rod (12); a sliding frame (15) is provided on the outer periphery of the sliding rod (13); a guide groove (16) and a sliding groove (17) are respectively provided on the fixed frame (14) and the sliding frame (15); each of the sliding grooves (17) is slidably connected to a sliding rod (19); the outer periphery of each of the sliding rods (19) is rotatably connected to two staggered connecting rods (18); a guide rod is provided at the upper end of the connecting rod (18) to slidably cooperate with the guide groove (16); a connecting block (20) is connected to the lower end of the connecting rod (18); each of the connecting blocks (20) is fixedly provided with a clamping plate (21); the clamping plate (21) can fit the heater (10).

2. The single crystal furnace heater quick removal tool according to claim 1, characterized in that: A detachable abutment plate (23) is fixedly provided at the lower end of the sliding rod (13), and the sliding frame (15) abuts against the upper end of the abutment plate (23).

3. The single crystal furnace heater quick removal tool according to claim 2, characterized in that: Two adjacent clamping plates (21) are each provided with a magnet (22) at their ends close to each other, and a heat insulating sleeve is provided at the outer end of the magnet (22).

4. The single crystal furnace heater quick removal tool according to claim 3, characterized in that: The fixed frame (14) and the sliding frame (15) are distributed up and down and are both arranged in a cross shape.

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