Finished film surface defect detection device

Abstract

The utility model discloses a finished product film surface defect detection device which comprises two splitting machine supports and two lifting tables, a plurality of conveying rollers are rotatably installed between the two splitting machine supports, film surfaces are wound on the surfaces of the conveying rollers, supporting frames are arranged on the outer sides of the two splitting machine supports, and the lifting tables are arranged on the supporting frames. The two supporting frames are fixedly installed on the outer sides of the two splitting machine supports respectively, a lifting table is fixedly installed at the top ends of the supporting frames, telescopic rods are movably installed at the top end of the lifting table, and a positioning transverse rod is movably installed between the two telescopic rods. Through the cooperation of the driving gear and the rack, the height position of the line scanning camera can be adjusted through the height position of the film surface so as to adapt to the film surface, and a current signal can be transmitted to the servo motor through the line scanning camera, so that the servo motor drives the driving gear to rotate so as to drive the rack to descend; therefore, the line scanning camera is close to the defect position for repeated detection, and the situation of wrong detection due to high height is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of film surface defect detection, in particular to a finished product film surface defect detection device. Background Art

[0002] Photolithography is one of the most important technologies in the manufacture of integrated circuits and ultra-large-scale circuits. Photoresist dry film is a photosensitive material used in photolithography. Photoresist dry film has a three-layer structure: PE protective film, photoresist (photoresist layer), and PET base film. The BOPET film used in photoresist dry film has high quality requirements. During the production of photoresist dry film, it is necessary to detect defects on the film surface;

[0003] Regarding the existing patent number: CN201920992218.8, the patent name is: A thin film surface defect detection auxiliary device, which records the number of winding turns of the winding roller to accurately calculate the length of the film surface that has been inspected, which is more convenient for recording and analyzing the defects of re-inspection, and improves the accuracy of defect re-inspection. However, when it is used, it is difficult to detect film surfaces of different volumes, and when observed by the naked eye, some defects are small in area and difficult to see with the naked eye.

[0004] When using existing finished film surface defects, it is difficult to detect film surfaces of different volumes, and when observed by the naked eye, some defects are small in area and difficult to see with the naked eye; therefore, it does not meet existing needs. In this regard, we propose a finished film surface defect detection device. Utility Model Content

[0005] The purpose of the utility model is to provide a finished product membrane surface defect detection device to solve the problems raised in the above background technology that it is difficult to detect membrane surfaces of different volumes when using the finished product membrane surface defects, and some defects are small in area and difficult to be seen by the naked eye.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a finished product film surface defect detection device, comprising two slitting machine brackets and two lifting platforms, a plurality of transport rollers are rotatably installed between the two slitting machine brackets, the surface of the transport rollers is wrapped with film surface, the outer sides of the two slitting machine brackets are provided with support frames, the two support frames are respectively fixedly installed at the outer positions of the two slitting machine brackets, the top of the support frames is fixedly installed with a lifting platform, the top of the lifting platform is movably installed with a telescopic rod, a positioning cross bar is movably installed between the two telescopic rods, fixed tables are fixedly installed at both ends of the positioning cross bar, and a movable rod is movably installed on the outer side of the fixed table, the surface of the positioning cross bar is rigidly connected to two line scanning cameras, a light source board is fixedly installed at the lower position between the two slitting machine brackets, and a lighting lamp is provided at the top of the light source board.

[0007] Preferably, a rack is fixedly installed on the bottom end of the telescopic rod, a telescopic slot is provided inside the top end of the lifting platform, the rack is slidably inserted into the telescopic slot, a driving gear is meshedly connected to the surface of the rack, and the driving gear is rotatably connected to the inner wall surface of the telescopic slot.

[0008] Preferably, a spring groove is provided inside the fixing platform, a compression spring is movably installed between the movable rod and the spring groove, and the movable rod is connected to the telescopic rod by bolts.

[0009] Preferably, a servo motor is fixedly mounted on the rear side of the lifting platform, a motor bracket is fixedly mounted on the bottom end of the servo motor, and the output end of the servo motor is connected to the axis of the driving gear through a coupling.

[0010] Preferably, the line scan camera is electrically connected to the servo motor.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The utility model cooperates with the line scan camera and the light source board. When the film surface is transported on the surface of the transport roller, the light source board can illuminate upward so that the light can pass through the surface of the film surface to the position of the line scan camera. When a protruding defect appears on the film surface, a brighter light source will appear. When a concave defect appears on the film surface, a darker light source will appear. At this time, the line scan of the line scan camera can capture the change of the light signal and convert it into a current signal, so as to record each time a defect occurs, thereby realizing defect detection on the film surface;

[0013] 2. The utility model cooperates with the active gear and the rack, so that when the device is in use, the height position of the line scan camera can be adjusted according to the height position of the film surface to adapt to the use of the film surface, and when the line scan camera detects the defect position of the film surface, the line scan camera can transmit a current signal to the servo motor, so that the servo motor drives the active gear to rotate and drives the rack to descend, so that the line scan camera is close to the defect position for repeated detection, avoiding the situation of wrong detection due to high height;

[0014] 3. The utility model cooperates with the fixed platform and the movable rod so that when the device is in use, the elastic potential energy of the compression spring can drive the movable rod to pop out, so that the device can adjust the distance between the two support frames according to the width of the slitting machine bracket, thereby adapting to different models of slitting machine brackets for use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a front view of the utility model as a whole;

[0016] Figure 2 It is a sectional side view of the utility model as a whole;

[0017] Figure 3 It is a sectional front view of the utility model as a whole.

[0018] In the figure: 1. Slitting machine bracket; 2. Transport roller; 3. Film surface; 4. Support frame; 5. Lifting platform; 6. Telescopic rod; 7. Positioning cross bar; 8. Fixed platform; 9. Movable rod; 10. Line scan camera; 11. Driving gear; 12. Motor bracket; 13. Light source board; 14. Servo motor; 15. Telescopic slot; 16. Rack; 17. Spring groove; 18. Compression spring. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] The line scan camera (model E2V) mentioned in the present invention can be purchased from the market or customized.

[0021] See also Figures 1 to 3 The utility model provides an embodiment: a finished film surface defect detection device, comprising two slitting machine brackets 1 and two lifting platforms 5, a plurality of transport rollers 2 are rotatably installed between the two slitting machine brackets 1, and a film surface 3 is wound on the surface of the transport rollers 2, a support frame 4 is provided on the outside of the two slitting machine brackets 1, the two support frames 4 are respectively fixedly installed on the outside positions of the two slitting machine brackets 1, a lifting platform 5 is fixedly installed on the top of the support frame 4, a telescopic rod 6 is movably installed on the top of the lifting platform 5, a positioning cross bar 7 is movably installed between the two telescopic rods 6, a fixed table 8 is fixedly installed on both ends of the positioning cross bar 7, and a movable rod 9 is movably installed on the outside of the fixed table 8, and two line scanning cameras 10 are rigidly connected to the surface of the positioning cross bar 7, a light source board 13 is fixedly installed at the lower position between the two slitting machine brackets 1, and a lighting lamp is provided on the top of the light source board 13. Through the cooperation of the line scan camera 10 and the light source board 13, when the film surface 3 is transported on the surface of the transport roller 2, the light source board 13 can illuminate upward so that light can pass through the surface of the film surface 3 to the position of the line scan camera 10. When a protruding defect appears on the film surface 3, a brighter light source will appear. When a concave defect appears on the film surface 3, a darker light source will appear. At this time, the line scan of the line scan camera 10 can capture the change of the light signal and convert it into a current signal, thereby recording each time a defect occurs, thereby realizing defect detection on the film surface 3.

[0022] A rack 16 is fixedly installed at the bottom end of the telescopic rod 6, and a telescopic slot 15 is provided inside the top of the lifting platform 5. The rack 16 is slidably inserted into the telescopic slot 15, and the surface of the rack 16 is meshedly connected with a driving gear 11, and the driving gear 11 is rotatably connected to the inner wall surface of the telescopic slot 15. Through the cooperation of the driving gear 11 and the rack 16, when the device is in use, the height position of the line scan camera 10 can be adjusted according to the height position of the membrane surface 3 to adapt to the use of the membrane surface 3, and when the line scan camera 10 detects the defect position of the membrane surface 3, the line scan camera 10 can transmit a current signal to the servo motor 14, so that the servo motor 14 drives the driving gear 11 to rotate and drive the rack 16 to descend, so that the line scan camera 10 is close to the defect position for repeated detection, thereby avoiding the situation of wrong detection due to high height.

[0023] A spring groove 17 is provided inside the fixed platform 8, and a compression spring 18 is movably installed between the movable rod 9 and the spring groove 17, and the movable rod 9 is connected to the telescopic rod 6 by bolts. Through the cooperation between the fixed platform 8 and the movable rod 9, when the device is in use, the elastic potential energy of the compression spring 18 can drive the movable rod 9 to pop out, so that the device can adjust the distance between the two support frames 4 according to the width of the slitting machine bracket 1, so as to adapt to different models of slitting machine brackets 1 for use

[0024] A servo motor 14 is fixedly mounted on the rear side of the lifting platform 5 , a motor bracket 12 is fixedly mounted on the bottom end of the servo motor 14 , and an output end of the servo motor 14 is connected to the axis of the driving gear 11 through a coupling.

[0025] The line scan camera 10 is electrically connected to the servo motor 14 .

[0026] When the finished film surface defect detection device is in use, through the cooperation of the line scan camera 10 and the light source board 13, when the film surface 3 is transported on the surface of the transport roller 2, the light source board 13 can illuminate upward so that light can pass through the surface of the film surface 3 to the position of the line scan camera 10. When a protruding defect appears on the film surface 3, a brighter light source will appear, and when a concave defect appears on the film surface 3, a darker light source will appear. At this time, the line scan of the line scan camera 10 can be used to capture the change of the light signal and convert it into a current signal, so as to record each time a defect occurs. , to realize defect detection on the membrane surface 3. Through the cooperation of the active gear 11 and the rack 16, when the device is in use, the height position of the line scan camera 10 can be adjusted according to the height position of the membrane surface 3 to adapt to the use of the membrane surface 3. When the line scan camera 10 detects the defect position of the membrane surface 3, the line scan camera 10 can transmit a current signal to the servo motor 14, so that the servo motor 14 drives the active gear 11 to rotate and drives the rack 16 to descend, so that the line scan camera 10 is close to the defect position for repeated detection, avoiding the situation of wrong detection due to high height.

[0027] Through the cooperation of the fixed platform 8 and the movable rod 9, when the device is in use, the elastic potential energy of the compression spring 18 can be used to drive the movable rod 9 to pop out, so that the device can adjust the distance between the two support frames 4 according to the width of the slitting machine bracket 1, thereby adapting to different models of slitting machine brackets 1 for use.

[0028] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A finished film surface defect detection device, comprising two slitting machine brackets (1) and two lifting platforms (5), a plurality of transport rollers (2) are rotatably mounted between the two slitting machine brackets (1), a film surface (3) is wound around the surface of the transport rollers (2), and a support frame (4) is disposed on the outer side of the two slitting machine brackets (1), characterized in that: The two support frames (4) are respectively fixedly mounted on the outer sides of the two slitting machine supports (1); a lifting platform (5) is fixedly mounted on the top of the support frame (4); a telescopic rod (6) is movably mounted on the top of the lifting platform (5); a positioning cross bar (7) is movably mounted between the two telescopic rods (6); fixed platforms (8) are fixedly mounted on both ends of the positioning cross bar (7); a movable rod (9) is movably mounted on the outer side of the fixed platform (8); two line scan cameras (10) are rigidly connected to the surface of the positioning cross bar (7); a light source board (13) is fixedly mounted at a lower position between the two slitting machine supports (1); and a lighting lamp is provided on the top of the light source board (13).

2. A finished product film surface defect detection device according to claim 1, characterized in that: A rack (16) is fixedly mounted on the bottom end of the telescopic rod (6), a telescopic slot (15) is provided inside the top end of the lifting platform (5), the rack (16) is slidably inserted into the interior of the telescopic slot (15), a driving gear (11) is meshedly connected to the surface of the rack (16), and the driving gear (11) is rotatably connected to the inner wall surface of the telescopic slot (15).

3. A finished product film surface defect detection device according to claim 1, characterized in that: A spring groove (17) is provided inside the fixed platform (8), a compression spring (18) is movably installed between the movable rod (9) and the spring groove (17), and the movable rod (9) and the telescopic rod (6) are connected by bolts.

4. A finished product film surface defect detection device according to claim 2, characterized in that: A servo motor (14) is fixedly mounted on the rear side of the lifting platform (5), a motor bracket (12) is fixedly mounted on the bottom end of the servo motor (14), and an output end of the servo motor (14) is connected to the axis of the driving gear (11) via a coupling.

5. A finished product film surface defect detection device according to claim 4, characterized in that: The line scan camera (10) is electrically connected to the servo motor (14).

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